Copper foil surface treatment machine

Abstract

The utility model relates to a copper foil surface treatment machine. The copper foil surface treatment machine at least comprises an unreeling unit, a treatment tank assembly, an oven assembly and a reeling machine assembly. A rack is arranged below any one of the treatment tanks in the treatment tank total group to support the treatment tank total group, and a plurality of transmission rollers are respectively arranged in the unreeling unit, the treatment tank total group, the oven total group and the reeling machine total group; wherein any one of the plurality of transmission rollers is provided with a transmission mechanism, and by means of the transmission mechanism, the plurality of transmission rollers can perform transmission independently or jointly, so that when the copper foil is conveyed, the copper foil is almost free from wrinkles, scratches, slipping, belt breakage and the like.

Description

Technical Field

[0001] This application provides a copper foil surface treatment machine, specifically a copper foil surface treatment machine capable of performing roll-to-roll copper foil surface treatment. Background Technology

[0002] In recent years, with the development of high frequency (5G) The growth of markets such as 6G printed circuit boards, AI servers, AIPCs, and AI mobile phones has led to an increasing demand for high-end (high-performance) copper foil. However, the surface treatment process also faces challenges due to factors such as the need for ultra-thin copper foil, smaller copper nodules, higher adhesion to the substrate (peel strength), and oxidation resistance. Therefore, roll-to-roll copper foil surface treatment machines must at least possess the following characteristics: 1. As copper foil thickness decreases, the equipment must prevent defects during transport, such as wrinkles, scratches, tape breaks, and slippage. Wrinkles, in particular, are irreversible and cause material loss. 2. The surface treatment tank and its surrounding equipment must have a structure that is resistant to acids and alkalis, has high electrical insulation resistance, high mechanical strength, and heat resistance. 3. After surface treatment, the copper foil should have a low impurity content, high plating density, low defects (such as pinholes), uniform plating thickness, and prevent discoloration at room temperature or high temperature. 4. High stability, energy saving, and high efficiency during long-term surface treatment operations.

[0003] Existing copper foil surface treatment equipment suffers from defects during the conveying process due to its long conveying path. These defects are particularly prevalent with thinner copper foil. The causes of these defects include: 1. Large tension variations, such as changes in the roll diameter of the unwinding and rewinding machines or roll changes; 2. Asynchrony of the drive devices in the conveying process, such as acceleration and deceleration control; and 3. Failure of components in the conveying device, such as wear and fit errors.

[0004] Note that in the prior art, there is a surface-treated copper foil for low-dielectric substrates, as disclosed in Taiwan Patent Publication No. 200404920, entitled "Surface-treated copper foil for low-dielectric substrates, and copper multilayer board and printed circuit board using the copper foil" (see the announcement data on December 1, 2006). This case discloses a surface-treated copper foil that can improve the bonding strength between low-dielectric substrates used in printed circuit boards and can greatly suppress transmission loss.

[0005] The patent provides the following: 1. The result of forming a roughening treatment layer on the surface of copper foil; 2. A rust-resistant treatment layer comprising at least one of zinc and nickel in the roughening treatment layer; and 3. A surface-treated copper foil for a low-dielectric substrate, formed by copper electrolysis to deposit copper at the cathode, and surface-treated on the surface of the copper foil facing the cathode when the copper foil is peeled off from the cathode. As can be seen from the above patent, this patent only provides some operating parameters, treatment formulas, and results for copper foil surface treatment operations. However, the patent does not provide a complete and detailed description of the apparatus and method for producing the copper foil surface treatment machine.

[0006] In addition, there is a prior art electrolytic cell operation for copper foil post-processing, which is disclosed in Chinese Patent Publication No. CN101634045B, entitled "An Electrolytic Cell for Copper Foil Post-processing" (see the announcement information on May 23, 2012). This case discloses an electrolytic cell for copper foil post-processing, which includes: an anode plate, a tank body, inlet and outlet pipes, and conductive copper busbars, etc.

[0007] Furthermore, this application references the previous Taiwan Patent Publication No. M641098, entitled "Bearing Housing Assembly" (see the announcement data dated May 11, 2023), which uses a separate drive of a servo motor to achieve stable control of machine speed and tension during conveying operations and a mechanism for long-term stable conveying. It also makes it virtually free from wrinkles, scratches, slippage, and belt breakage during copper foil conveying operations, and improves the time-consuming and labor-intensive problems of replacing rollers or bearings.

[0008] In summary, this application provides a copper foil surface treatment machine, which enables automatic continuous production and / or semi-automatic continuous production of copper foil surface treatment operations on the same machine. Utility Model Content

[0009] Based on the above, the purpose of this invention is to provide a copper foil surface treatment machine to solve the problems existing in the prior art.

[0010] The purpose of this application is to provide a copper foil surface treatment machine capable of performing roll-to-roll copper foil surface treatment. The copper foil surface treatment machine includes at least an unwinding unit, a processing tank assembly, an oven assembly, and a winding unit. The processing tank assembly is located after the unwinding unit, and a frame is provided below the processing tank assembly to support each processing tank. The oven assembly is located after the processing tank assembly, and the winding unit is located after the oven assembly. The unwinding unit includes an unwinding machine, the oven assembly includes an oven assembly, and the winding unit includes a winding unit and a foil pulling roller mechanism.

[0011] Each of the unwinding unit, the processing tank assembly, the oven assembly, and the winding machine assembly is individually equipped with multiple drive rollers, and each of the multiple drive rollers is equipped with a drive mechanism; in addition, the substrate is disposed across the unwinding unit, the processing tank assembly, the oven assembly, and the winding machine assembly.

[0012] The plurality of drive rollers, each of which is made of stainless steel (SUS304) according to its function, and depending on its function, the surface of the drive roller may be covered with a metal layer, a ceramic layer or a non-metal layer, or a composite layer composed of any two or more of the metal layer, ceramic layer or non-metal layer, or two or more different metal layers and two or more non-metal layers.

[0013] The metal layer may be a chromium plating layer, a titanium plating layer, a copper plating layer, or a silver plating layer, and the non-metallic layer may be a non-metallic material containing fluorine, carbon, or silicon.

[0014] Preferably, the metal layer, ceramic layer, non-metal layer, or composite layer covering the surface of the transmission roller can be fully covered, strip-shaped covered, or spiral-shaped covered.

[0015] Preferably, at least one surface detection device and at least one plasma treatment device may be further provided between the unwinding unit and the winding unit. The surface detection device and the plasma treatment device may be individually or simultaneously provided between the unwinding unit and the treatment tank unit, between the treatment tank unit and the oven unit, and / or between the oven unit and the winding unit. When the surface detection device and the plasma treatment device are simultaneously provided between the unwinding unit and the treatment tank unit, between the treatment tank unit and the oven unit, and / or between the oven unit and the winding unit, the placement order of the surface detection device and the plasma treatment device can be arbitrarily adjusted.

[0016] Preferably, the unwinding unit includes at least: a double-shaft rotary arm type unwinding shaft, guide rollers, foil suction rollers, unwinding tension adjustment device, residual roll detection device, foil cutting and splicing device, and automatic edge alignment device.

[0017] Preferably, in the assembly of processing tanks, each processing tank includes at least: a copper foil conveying device, a tank body, an electrode device, an electrical insulation device, a transmission roller and its transmission mechanism, an acid and alkali resistant device, a sealing device, and a frame.

[0018] In the treatment tank group, any one of the treatment tanks can be classified into a water washing tank and a surface treatment tank according to its function. The surface treatment tank can be further subdivided according to its function into pickling tank, roughening treatment tank, curing and coating treatment tank, barrier layer treatment tank, anti-rust treatment tank, etc. At least one of the surface treatment tanks with different functions can be arranged together with the water washing tank according to actual needs, either arbitrarily or periodically, to form a first surface treatment tank group, a second surface treatment tank group, or a third surface treatment tank group.

[0019] Furthermore, in the processing tank assembly, some of the multiple transmission rollers are located outside the processing tank, some are located above the inner side of the processing tank, and some are located below the inner side of the processing tank.

[0020] On the other hand, in the implementation of the electrochemical treatment operation of the surface treatment tank, a current collector wheel assembly is used in combination with an electrode plate device, so that the copper foil becomes charged when it passes through the current collector wheel assembly, while the electrode plate device has the opposite electrical properties to the copper foil, thereby performing an electrochemical treatment operation on the surface of the copper foil.

[0021] When performing electrochemical surface treatment on copper foil using the copper foil surface treatment machine of this application, since each of the plurality of transmission rollers is equipped with a transmission mechanism, the plurality of transmission rollers can be driven individually or together, thereby controlling the tension of the aluminum foil and stabilizing the conveying operation of the aluminum foil. As a result, the copper foil has better surface treatment quality after the surface treatment operation, such as low surface roughness, high coating density, and uniform thickness.

[0022] In summary, the copper foil surface treatment machine of this application is used for electrochemical treatment of copper foil surfaces. The surface treatment process includes at least: surface cleaning, pretreatment, powder treatment, capsule treatment, barrier layer treatment, anti-tarnishing, decolorization, electroplating, and surface coating, such as silane coupling. It provides smooth, long-term stable conveying of the copper foil through unwinding, surface treatment, drying, and winding operations, reducing or avoiding wrinkles, scratches, and tape breakage. When the copper foil is immersed in the treatment tank for surface treatment, the surface treatment results achieve the desired effects, such as low surface roughness, uniform film thickness, high film density, high flatness, and high adhesion to the substrate (high peel strength), as well as energy saving and high process stability. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of a copper foil surface treatment machine according to an embodiment of this application.

[0024] Figure 2This is a schematic diagram of the overall assembly of the processing tanks according to an embodiment of this application.

[0025] Figure 3 This is a schematic diagram of the pickling tank assembly according to an embodiment of this application.

[0026] Figure 4A This is a schematic diagram of the first surface treatment tank group according to an embodiment of this application.

[0027] Figure 4B This is a schematic diagram of a first surface treatment trench group according to another embodiment of this application.

[0028] Figure 5 This is a schematic diagram of the second surface treatment groove group according to an embodiment of this application.

[0029] Figure 6 This is a schematic diagram of the third surface treatment tank group in an embodiment of this application.

[0030] Figure 7 This is a schematic diagram of a copper foil surface treatment machine according to another embodiment of the present application, which is equipped with at least one surface inspection device and at least one plasma treatment device.

[0031] Figures 8A to 8D This is a schematic diagram of the transmission mechanism according to an embodiment of this application.

[0032] Brief explanation of the reference numerals in the attached figures:

[0033] D1, D2, Copper Foil Surface Treatment Machine;

[0034] 1. Substrate; 2. Unwinding unit; 20. Unwinding machine; 3. Treatment tank assembly; 30. Pickling tank assembly; 301. First pickling tank; 3010. Treatment tank body; 3011. Bottom guide roller assembly; 3012. Top foil pulling roller assembly; 302. Second pickling tank; 3021. Current collector assembly; 3022. Electrode plate device; 303. Washing tank assembly; 3030. Washing tank body; 3031. Bottom guide roller assembly; 31. First surface treatment tank assembly; 311. Roughening treatment tank; 312. Curing and coating treatment tank; 32. Second surface treatment tank assembly; 321. Barrier layer treatment tank; 33. Third surface treatment tank assembly; 331. First Rust-resistant treatment tank; 3312, top drive wheel assembly; 332, second rust-resistant treatment tank; 333, first water washing tank assembly; 3330, water washing tank; 334, second water washing tank assembly; 335, water washing tank device; 4, oven assembly; 40, oven assembly; 5, coiler assembly; 50, coiler assembly; 51, foil pulling roller mechanism; 6, frame; 7, surface inspection device; 8, plasma treatment device; 9A, 9B, 9C, 9D, transmission mechanism; 90, rotating body; 91, bearing; 92, motor; 93, reducer; 94, coupling; 95, gear set; 96, pulley assembly; 97, chain and sprocket assembly; 10, drive roller. Detailed Implementation

[0035] To enable the examiner to understand the technical features, content, advantages, and effects of this application, this application is hereby described in detail with reference to the accompanying drawings and in the form of embodiments. The drawings used are for illustrative purposes only and to assist in the description. They may not represent the actual proportions and precise configurations of this application after implementation. Therefore, the proportions and configurations of the accompanying drawings should not be used to interpret or limit the scope of the application in actual implementation.

[0036] It should be understood that although the terms "first," "second," "third," etc., may be used in this application to describe various elements, components, regions, layers, and / or portions, these elements, components, regions, layers, and / or portions should not be limited by these terms. These terms are used only to distinguish one element, component, region, layer, and / or portion from another element, component, region, layer, and / or portion. Therefore, the "first surface treatment tank" discussed below may be referred to as the "second surface treatment tank" and / or the "third surface treatment tank" without departing from the spirit and teachings of this application.

[0037] Additionally, the terms "comprising" and / or "including" refer to the presence of the stated features, areas, wholes, steps, operations, elements, and / or components, but do not exclude the presence or addition of one or more other features, areas, wholes, steps, operations, elements, components, and / or combinations thereof.

[0038] Unless otherwise defined, all terms used in this application (including technical and scientific terms) shall have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains. It is understood that terms such as those defined in commonly used dictionaries shall be interpreted as having a meaning consistent with their meaning in the context of the relevant art and this application, and shall not be interpreted as having an idealized or overly formal meaning unless expressly defined herein.

[0039] The present application will be further described in detail below with reference to the accompanying drawings. These drawings are simplified schematic diagrams, intended only to illustrate the basic structure of the present application, and are therefore not intended to limit the scope of the application.

[0040] Please see Figure 1A copper foil surface treatment machine D1 includes at least: an unwinding unit 2, a processing tank assembly 3, an oven assembly 4, and a winding machine assembly 5. The processing tank assembly 3 is located after the unwinding unit 2, and a frame 6 is provided below the processing tank assembly 3 to support each processing tank of the processing tank assembly 3. The oven assembly 4 is located after the processing tank assembly 3, and the winding machine assembly 5 is located after the oven assembly 4. The unwinding unit 2 includes an unwinder 20, the oven assembly 4 includes an oven assembly 40, and the winding machine assembly 5 includes a winding machine assembly 50 and a foil pulling roller mechanism 51.

[0041] Each of the unwinding unit 2, the processing tank assembly 3, the oven assembly 4, and the winding unit 5 is individually equipped with multiple drive rollers 10, and each of the multiple drive rollers 10 is equipped with one or more different types of transmission mechanisms 9A~9D (please refer to all documents). Figures 8A-8D Not displayed in Figure 1 The transmission mechanism 9A-9D will be described in detail later; in addition, the substrate 1 is disposed across the unwinding unit 2, the processing tank assembly 3, the oven assembly 4 and the winding machine assembly 5, and the substrate 1 is preferably copper foil.

[0042] The substrate 1 is unwound by the unwinding unit 2, and then undergoes continuous surface treatment by the processing tank assembly 3. This continuous surface treatment includes at least one or more of the following: surface cleaning (including degreasing and oxide removal), pretreatment (pickling, roughening), roughening liquid washing, roughening (powder treatment), roughening liquid washing, capping or curing (capsule treatment), roughening liquid washing, barrier layer treatment, water washing, decolorization or electroplating, anti-tarnishing, electroplating and coating; for example, silane coupling, etc. The substrate 1 is then dried or cured by the oven assembly 4, and finally wound up by the winding unit 5. After these treatments, the substrate 1 can be continuously wound into semi-finished rolls in the same machine, namely the copper foil surface treatment machine 01.

[0043] The surface treatment process of the treatment tank assembly 3 is arranged in a series of single or multiple periodic or non-periodic steps. The purpose of the treatment tank assembly 3 is to achieve the surface treatment effect. Each treatment tank can be equipped with relevant auxiliary devices according to actual needs, such as cleaning fluid nozzles, air blowing nozzles and detection devices. The detection devices can be optical microscopes (OM), thickness gauges, mechanical strength testers, etc., but are not limited to these.

[0044] The substrate 1 may be referred to by the terms "sheet," "cloth," "material," "web," etc., which are used here as a superordinate concept to describe any flexible sheet material whose material includes metal, non-metal, or one or more of the above materials, and whose construction form includes at least carbon material, metal plate (foil), a composite material containing one or more of the above materials, and the "substrate 1" also refers to "copper foil or copper layer."

[0045] The unwinding unit 2 is preferably a dual-shaft rotary arm automatic receiving device, which provides the unwinding operation of the substrate 1, and includes at least: a guide roller, a foil suction roller, a vacuum suction device, a foil receiving device, a tension adjustment device, a clamping shaft edge adjustment device, an edge alignment device, a residual roll detection device, and any one or more of the transmission mechanisms 9A to 9D; each of the transmission mechanisms 9A to 9D includes at least a motor 92 and a reducer 93 (please refer to the following for further details). Figures 8A-8D The reducer 93 may be, for example, a planetary reducer, a gear reducer, or a worm gear reducer. The motor 92, depending on its construction, includes at least: a DC motor, an AC motor, such as an induction motor, a servo motor, a speed-regulating motor, a geared motor, a high-efficiency motor, a geared motor, a torque motor, or a synchronous motor; preferably, the motor 92 is a servo motor.

[0046] Please see Figure 2 The processing tank group 3 preferably includes an acid pickling tank group 30, a first surface treatment tank group 31, a second surface treatment tank group 32, and a third surface treatment tank group 33.

[0047] Please refer to the following: Figure 3 The pickling tank group 30 includes at least a first pickling tank 301, a second pickling tank 302, and a water washing tank group 303; wherein the water washing tank group 303 may be arranged before, after, or between the first pickling tank 301 and the second pickling tank 302; preferably, the pickling tank group 30 includes at least one group.

[0048] The first pickling tank 301 has at least a bottom guide roller group 3011 and a top foil pulling roller group 3012, and provides surface cleaning for the substrate 1. The surface cleaning includes at least: surface washing, surface degreasing (staining), oxide layer (film) removal, pretreatment, ensuring uniform electrodeposition or surface treatment and roughening treatment in the next operation.

[0049] The bottom guide roller assembly 3011 of the trough is composed of at least one of the transmission rollers 10, a leak-proof shaft seal, and any one of the transmission mechanisms 9A to 9D, and is used to provide surface cleaning operation for the substrate 1. The surface of the transmission rollers 10 is chrome-plated and has a surface roughness of about 3S or more.

[0050] The top foil-pulling roller assembly 3012 is composed of a foil-pulling roller, a first pressure roller, a tension-sensing roller, a tension controller, and any one of the transmission mechanisms 9A to 9D, and is used to perform long-term and stable conveying operations on the substrate 1. The foil-pulling roller and the tension-sensing roller are both composed of the transmission roller 10, and their surfaces are chrome-plated with a surface roughness of about 0.1 to 1S. In addition, the first pressure roller is also composed of the transmission roller 10, and its surface is covered with ethylene propylene diene monomer (EPDM) rubber with a rough plating of about 3S or more.

[0051] The processing tank 3010 is made of stainless steel plate, and its inner layer is provided with heat-resistant PVC plate, and inlet and outlet pipe flanges and exhaust flanges are provided on its tank body; preferably, the outer layer of the processing tank 3010 may be further provided with glass fiber reinforced plastic (FRP) to reinforce its tank body.

[0052] The second pickling tank 302 has a processing tank body 3010 that is at least provided with a bottom guide roller group 3011, a top foil pulling roller group 3012 and a current collector wheel group 3021.

[0053] The current collector assembly 3021 includes at least a current collector wheel, a second pressure wheel, a guide roller, any one of the transmission mechanisms 9A to 9D, and an electrode plate device 3022, for performing electrochemical treatment on the substrate 1; wherein, the guide roller may be disposed before or after the current collector wheel, or the guide roller may not be present, and the current collector assembly 3021 may enable the current collector wheel, the second pressure wheel, and the guide roller to be driven individually or jointly by any one of the transmission mechanisms 9A to 9D.

[0054] The current collector wheel and the guide roller are formed by the transmission roller 10, and their surfaces include at least a first metal layer and a second metal layer. The first metal layer is preferably a copper-plated layer, and the second metal layer is preferably a silver-plated layer. In addition, the second pressure roller is also formed by the transmission roller 10, and its surface is covered with ethylene propylene rubber (EPDM) with a rough coating of about 3S or more.

[0055] The water washing tank assembly 303, whose water washing tank body 3030 is provided with at least one of the bottom guide roller assembly 3031 and the transmission mechanism 9A~9D, is used to remove dirt, impurity particles, residual copper particles, electrolyte, organic solvents, etc. attached to the surface of the substrate 1 before or after the surface treatment tank operation, and to prevent copper deposition on the conductive rollers and the generation of surface defects such as dents, copper nodules, and cleaning solutions such as pure water, deionized water, alkaline solutions and acidic solutions such as roughening solutions.

[0056] The bottom guide roller assembly 3031 of the water tank is composed of the transmission roller 10, and its surface is chrome-plated with a surface roughness of about 3S or more. It can be used alone with any of the transmission mechanisms 9A to 9D, or it can be used together with any one or more of the multiple transmission rollers 10 for joint transmission.

[0057] Preferably, the washing tank 3030 is made of heat-resistant PVC.

[0058] The first surface treatment tank group 31 includes at least a roughening (Powder) treatment tank 311, a curing and coating (Capsule) treatment tank 312, and the water washing tank group 303.

[0059] Please see Figure 4A The first surface treatment tank group 31 can perform roughening, curing, and capping treatments on the substrate 1. The substrate 1 is first energized by the current collector roller group 3021, forming a uniformly charged carrier on its surface, and is stably conveyed to the roughening treatment tank 311 for surface treatment. Then, the substrate 1 is conveyed by the bottom guide roller group 3011 to the top foil-pulling roller group 3012, pulling the substrate 1 out of the treatment tank 3010. Next, the surface is cleaned by the water washing tank group 303, and then further surface treated by the curing and capping treatment tank 312. The bottom guide roller group 3011, the top foil-pulling roller group 3012, and the current collector roller group 3021 are all composed of the drive rollers 10.

[0060] Please refer to the following: Figure 4B Preferably, the first surface treatment tank group 31 may be further provided with one or more of the water washing tank groups 303 before the roughening treatment tank 311; in addition, the configuration of the first surface treatment tank group 31 is not limited to the configuration shown in Figure 4A or Figure 4B. The roughening treatment tank 311, the curing and coating treatment tank 312 and the water washing tank group 303 can be configured in one or more according to actual needs, and their positions can be arranged arbitrarily, periodically and / or non-periodically, and used in series.

[0061] Please see Figure 5 The second surface treatment tank group 32 includes at least a barrier treatment tank 321 and a water washing tank group 303.

[0062] The second surface treatment tank group 32 can pull the substrate 1 through the top foil pulling roller group 3012 to the water washing tank group 303 for surface cleaning, and then pull it out of the water washing tank group 303 by the current collector wheel group 3021. Electricity is applied to the surface of the substrate 1 to form a uniformly charged carrier on its surface, and then it is pulled into the barrier layer treatment tank 321 for surface treatment. Finally, the substrate 1 is pulled out of the treatment tank 3010 by the top foil pulling roller group 3012.

[0063] Furthermore, the configuration of the second surface treatment groove group 32 is not limited to, for example... Figure 5 As shown in the configuration, in the second surface treatment tank group 32, the barrier layer treatment tank 321 and the water washing tank group 303 can be configured in one or more according to actual needs, and their positions can be arranged arbitrarily, periodically and / or non-periodically, and used in series.

[0064] Please see Figure 6 The third surface treatment tank group 33 includes at least a first anti-rust treatment tank 331, a second anti-rust treatment tank 332, the water washing tank group 303, a first water washing tank group 333, a second water washing tank group 334, and a water washing tank device 335.

[0065] The third surface treatment tank group 33 can guide the substrate 1 into the water washing tank group 303 for surface cleaning via the top drive wheel group 3312. The bottom guide roller group 3031 then transfers the substrate 1 to the current collector wheel group 3021, which in turn guides it into the first anti-rust treatment tank 331 for anti-rust coating deposition. The top drive wheel group 3312 then pulls the substrate 1 out of the treatment tank 3010 and into the first water washing tank group 333 for surface cleaning. Finally, the bottom guide roller group 3031... The substrate 1 is conveyed to the washing tank device 335, which pulls the substrate 1 out of the washing tank 3330 for surface cleaning. After applying electricity to its surface to form a uniformly charged carrier, it is pulled into the second anti-rust treatment tank 332 for surface coating, such as silane coupling treatment. Then, the top foil-pulling roller group 3012 pulls the substrate 1 out of the washing tank 3330 and into the second washing tank group 334, and then pulls it out of the washing tank 3330 again via the washing tank device 335, thus completing the surface coating operation. The top transmission wheel group 3312 is preferably constructed in the same way as the top foil-pulling roller group 3012.

[0066] The first anti-rust treatment tank 331 includes at least the treatment tank body 3010, the bottom guide roller group 3011, the electrode plate device 3022, the current collecting wheel group 3021, and the top transmission wheel group 3312.

[0067] The first water washing tank assembly 333 includes at least the bottom guide roller assembly 3031 of the water tank and the water washing tank 3330.

[0068] The water washing tank device 335 includes at least the current collector wheel assembly 3021 and the guide roller, the guide roller being composed of the transmission roller 10; in another embodiment, the water washing tank device 335 includes at least a foil pulling roller assembly and the guide roller, the foil pulling roller assembly including at least a transmission wheel and a pressure wheel.

[0069] Furthermore, the configuration of the third surface treatment tank group 33 is not limited to the configuration shown in Figure 6. In the third surface treatment tank group 33, the first anti-rust treatment tank 331, the second anti-rust treatment tank 332, the water washing tank group 303, the first water washing tank group 333, and the second water washing tank group 334 can be configured in one or more according to actual needs, and their positions can be arranged arbitrarily, periodically, and / or non-periodically in a series arrangement and combination.

[0070] See also Figure 1 The oven assembly 4 includes at least the oven group 40 and the plurality of drive rollers 10. The oven group 40 includes at least a frame, oven, nozzles, blower, guide rollers, heat exchanger, air duct, filter, and tension controller. The oven group 40 can perform drying or curing treatment on the surface of the substrate 1, for example, removing surface moisture to prevent residual moisture from affecting the antioxidant properties and organosilane coupling agent performance of the substrate 1. Furthermore, the oven group 40 can also remove by-products from the surface of the substrate 1, such as removing residual organic matter and recirculating hot air for reuse, thereby achieving energy saving. The plurality of drive rollers 10 can be used to convey the substrate 1 from the processing tank assembly 3 to the oven group 40 for processing, and then to the winding machine assembly 5 for winding.

[0071] The winding machine assembly 5 includes at least a winding machine unit 50 and a foil-pulling roller mechanism assembly 51; wherein, the winding machine unit 50 includes at least a dual-shaft rotary arm winding machine, a fabric splicing device, rubber wheels, a foil-splitting guide roller, a tension controller, a side-pressing winding wheel assembly, and a serrated cutter device (not shown in the figure) for automatically changing and splicing copper foil. The foil-splitting guide roller is composed of the drive roller 10.

[0072] The foil pulling roller mechanism 51 includes at least a foil pulling drive wheel, a pressure wheel, a tension controller, a guide roller, an edge trimming and cutting mechanism, an edge take-up and winding mechanism, a cleaning unit, and a CCD detection unit (not shown in the figure); wherein the foil pulling drive wheel, the pressure wheel, and the guide roller are all composed of the drive roller 10.

[0073] Preferably, at least one surface inspection device 7 and at least one plasma treatment device 8 may be further provided between the unwinding unit 2 and the winding unit 5. The surface inspection device 7 and the plasma treatment device 8 may be individually or simultaneously provided between the unwinding unit 2 and the treatment tank unit 3, between the treatment tank unit 3 and the oven unit 4, and / or between the oven unit 4 and the winding unit 5. When the surface inspection device 7 and the plasma treatment device 8 are simultaneously provided between the unwinding unit 2 and the treatment tank unit 3, between the treatment tank unit 3 and the oven unit 4, and / or between the oven unit 4 and the winding unit 5, the placement order of the surface inspection device 7 and the plasma treatment device 8 can be arbitrarily adjusted.

[0074] Please see Figure 7Figure 7 is a schematic diagram of a copper foil surface treatment machine according to another embodiment of this application, which is provided with at least one surface inspection device and at least one plasma treatment device. Based on the copper foil surface treatment machine D1, the copper foil surface treatment machine D2 further provides a surface inspection device 7 and a plasma treatment device 8 between the oven assembly 4 and the winding machine assembly 5. The surface inspection device 7 is located after the oven assembly 4, and the plasma treatment device 8 is located after the surface inspection device 7. The winding machine assembly 5 is located after the surface inspection device 8. Figure 7 is only an illustrative illustration of one way in which at least one surface inspection device 7 and at least one plasma treatment device 8 are provided on the copper foil surface treatment machine D2 of this application, but it is not limited thereto.

[0075] The surface inspection device 7 is a surface morphology inspection device, such as an optical microscope (OM), surface roughness meter, surface analyzer, film thickness monitoring device, or analysis device for mechanical strength, physical and chemical properties, etc., but not limited to these; while the plasma treatment device 8 is used to perform plasma or so-called plasma surface treatment on the surface of the substrate 1, such as surface deposition or surface etching, and its implementation can be, for example, physical method, chemical method or physical and chemical hybrid method.

[0076] Finally, please see Figures 8A to 8D The above are schematic diagrams of different types of transmission mechanisms in the embodiments of this application. The transmission mechanisms have different forms, such as transmission mechanisms 9A to 9D. Each of the transmission mechanisms 9A to 9D includes at least a rotating body 90 (i.e., the main body of the transmission roller 10), a bearing 91, a motor 92, a reducer 93, and any one of a coupling 94, a gear set 95, a pulley set 96, and a chain and sprocket set 97.

[0077] The rotating body 90 refers to a shaft that is driven by a drive device to rotate around an axis through direct or indirect transmission. The bearing 91 is a mechanical element that supports the shaft of the rotating body 90. For example, when other machine parts move relative to each other on the shaft, the bearing 91 can be used to maintain the center position of the shaft, support the rotating body 90, and can roll relative to the shaft.

[0078] Among them, any one of the transmission mechanisms 9A to 9D can be a direct transmission or an indirect transmission; for example, as shown in Figure 8A, it is the output shaft of the motor 92 to the input shaft of the reducer 93, and the input shaft of the rotating body 90 is transmitted through the coupling 94, so that the substrate 1 can be conveyed.

[0079] Each of the transmission mechanisms 9A to 9D is equipped with electromechanical control to achieve a mechanism for smooth conveying of the substrate 1. Tension control is one of the key aspects of smooth conveying of the substrate 1, and it achieves its effect through open-loop tension control and closed-loop tension control. The closed-loop tension control method includes at least: detecting minute changes in force caused by changes in the frictional characteristics of the surface of the substrate 1 due to roller or external disturbance using a tension sensing device, and providing a precise speed adjustment value to the motor speed controller so that the substrate 1 obtains the required tension; the closed-loop tension control method may include speed control, torque control, and / or position control.

[0080] The above description is merely illustrative of preferred embodiments of this application and is not intended to limit the scope of implementation. Any simple substitutions and equivalent changes made in accordance with the claims and contents of this application shall fall within the scope of the claims of this application.

Claims

1. A copper foil surface treatment machine characterized by comprising: At least comprising: an unwinding machine set; a processing tank set; an oven set; and a winding machine set, wherein the processing tank set is arranged behind the unwinding machine set, and a frame is arranged below the processing tank set to support each processing tank of the processing tank set; the oven set is arranged behind the processing tank set; the winding machine set is arranged behind the oven set; and each of the unwinding machine set, the processing tank set, the oven set and the winding machine set is respectively arranged with a plurality of transmission rollers, and each of the plurality of transmission rollers is arranged with a transmission mechanism.

2. The copper foil surface treatment machine according to claim 1, wherein A substrate to be surface treated is arranged across the unwinding machine set, the processing tank set, the oven set and the winding machine set.

3. The copper foil surface treatment machine according to claim 1, wherein Each of the plurality of transmission rollers is made of stainless steel, and the surface of each of the plurality of transmission rollers is coated with a metal layer, a ceramic layer and / or a non-metal layer.

4. The copper foil surface treatment machine according to claim 3, wherein The metal layer is a chromium plating layer, a titanium plating layer, a copper plating layer or a silver plating layer.

5. The copper foil surface treatment machine according to claim 3, wherein The non-metal layer is a non-metal material containing fluorine, carbon or silicon.

6. The copper foil surface treatment machine according to claim 3, wherein The metal layer, the ceramic layer or the non-metal layer can be fully coated, strip-coated or spiral-coated on the surface of each of the plurality of transmission rollers.

7. The copper foil surface treatment machine according to claim 1, wherein Each processing tank of the processing tank set is classified according to function as a water washing tank or a surface treatment tank.

8. The copper foil surface treatment machine according to claim 7, wherein The surface treatment tank is classified according to function as an acid washing tank, a roughening treatment tank, a solidification coating treatment tank, a barrier layer treatment tank or a rust resistance treatment tank.

9. The copper foil surface treatment machine according to claim 2, wherein Each of the plurality of transmission rollers can be driven individually or collectively to control the tension of the substrate.

10. The copper foil surface treatment machine according to claim 1, wherein The copper foil surface treatment machine further comprises: at least one surface detection device arranged between the unwinding machine set and the winding machine set; and at least one plasma treatment device arranged between the unwinding machine set and the winding machine set.

Images