Charging basket liquid supply system

Abstract

The utility model discloses a material barrel liquid supply system which comprises a connector assembly and a pipeline assembly, and a material barrel is communicated with a pneumatic pump through the connector assembly and the pipeline assembly. The connector assembly comprises a first connector and a second connector, the first connector comprises a first flaring part, a first threaded part and a nut part, and the second connector comprises a second flaring part and a second threaded part; the pipeline assembly comprises a bottom insertion pipe, a feeding pipe, a backflow pipe and an air supply pipe. Nitrogen is introduced into the material barrel before the pneumatic pump is started, so that material liquid in the material barrel is prevented from being polluted by air, and pressure balance inside and outside the material barrel is maintained; during the feeding period, no material liquid exists in the backflow pipe, and the backflow pipe is still, so that the safety is effectively improved; when liquid supply needs to be stopped, the valve at the production end can be closed, the valve of the backflow pipe can be opened, stable operation of the pneumatic pump is kept, and the pneumatic pump is prevented from being damaged under the action of a water hammer; the joint assembly is made of polytetrafluoroethylene materials, so that metal ions in the feed liquid are separated out less, and the semiconductor process requirements can be met.

Description

Technical Field

[0001] This utility model relates to the field of chemical production equipment technology, specifically to a liquid supply system for a material tank. Background Technology

[0002] During the production process, when unloading the liquid material from the tank, a bottom-inserting pipe is usually inserted into the tank, and then nitrogen gas is introduced through the pipeline to protect the liquid material inside the tank. During the gas introduction process, it is necessary to maintain the balance between the pressure inside the tank and the external pressure, and then pump the liquid out of the tank using an air pump.

[0003] When the demand side reaches the specified liquid level, the air pump needs to be shut off. At this time, water hammer will occur in the pipeline, which will lead to damage to the air pump. After the air pump stops, some liquid will remain in the pipeline. When changing to a tank containing different liquids, different liquids will react, posing a significant safety hazard. In addition, the connected nozzle is made of polyethylene, which has a high metal ion release rate and cannot meet the requirements of semiconductor processes. Utility Model Content

[0004] The purpose of this utility model is to provide a liquid supply system for a material tank in order to solve the above problems.

[0005] To achieve the above objectives, this utility model specifically adopts the following technical solution, including:

[0006] The connector assembly and the pipe assembly are connected to the pneumatic pump through the connector assembly and the pipe assembly;

[0007] The connector assembly includes a first connector and a second connector. The first connector includes a first flared portion, a first threaded portion, and a nut portion. The second connector includes a second flared portion and a second threaded portion.

[0008] The piping assembly includes a bottom insertion pipe, a feed pipe, a return pipe, and an air supply pipe, which are connected to the pneumatic pump to form a liquid circuit.

[0009] As a further description of the above technical solution, the top of the first flared portion is connected to the feed pipe, and the top of the first threaded portion and the bottom of the first flared portion are detachably connected.

[0010] As a further description of the above technical solution, the bottom of the first threaded portion and the nut portion are detachably connected, and the bottom of the nut portion is in communication with the bottom insertion tube.

[0011] As a further description of the above technical solution, the nut and the material bucket are detachably connected, and the bottom insertion tube extends into the bottom of the material bucket.

[0012] As a further description of the above technical solution, the second flared portion top is communicated with the return pipe and the gas supply pipe, and the second flared portion bottom and the second threaded portion are detachably connected.

[0013] As a further description of the above technical solution, the second flared portion comprises a return flared portion and a nitrogen flared portion, and the inner cavity diameter of the return flared portion is greater than that of the nitrogen flared portion.

[0014] As a further description of the above technical solution, the second threaded portion bottom and the bucket are detachably connected, and the return pipe and the gas supply pipe are communicated with the bottom insertion pipe in the bucket top.

[0015] As a further description of the above technical solution, the pneumatic pump is communicated with the return pipe and the bottom insertion pipe in the bucket through the feeding pipe to form a liquid circuit.

[0016] As a further description of the above technical solution, the first joint and the second joint are symmetrically installed on both sides of the bucket top, and the materials of the first joint and the second joint are polytetrafluoroethylene.

[0017] As a further description of the above technical solution, the return pipe is provided with a first valve, and the gas supply pipe is provided with a second valve.

[0018] The beneficial effects of the present application are as follows:

[0019] 1. In the present application, nitrogen is introduced into the bucket before starting the pneumatic pump to prevent the material liquid in the bucket from being polluted by air and maintain the pressure balance between the inside and outside of the bucket; there is no material liquid in the return pipe and it is static during feeding, which effectively improves the safety; when it is necessary to stop supplying liquid, the valve at the production end can be closed and the valve of the return pipe can be opened to maintain the stable operation of the pneumatic pump and prevent the pneumatic pump from being damaged under the action of water hammer; when the bucket is replaced, the material liquid in the pipeline can be completely discharged by the pneumatic pump to avoid the harm to the operator and the residual material liquid in the bucket can be collected to avoid waste.

[0020] 2. In the present application, the joint assembly is made of polytetrafluoroethylene material, so that the metal ions in the material liquid are less precipitated, which can meet the requirements of semiconductor process.

[0021] In order to more clearly illustrate the structural features and effects of the present application, the present application will be described in detail below in combination with the drawings and specific embodiments. BRIEF DESCRIPTION OF DRAWINGS

[0022] Figure 1 is a structural schematic view of the bucket liquid supply system of the present application;

[0023] Figure 2 is Figure 1Structure diagram of the first joint;

[0024] Figure 3 is Figure 1 Structure diagram of the second joint.

[0025] Reference signs:

[0026] 1, joint assembly; 11, first joint; 111, first flared portion; 112, first threaded portion; 113, nut portion; 12, second joint; 121, second flared portion; 1211, backflow flared portion; 1212, nitrogen flared portion; 122, second threaded portion; 2, pipeline assembly; 21, bottom insertion pipe; 22, feed pipe; 23, backflow pipe; 24, gas supply pipe; 3, material bucket; 4, pneumatic pump; 5, first valve; 6, second valve. DETAILED DESCRIPTION

[0027] In order to make the purpose, technical scheme and advantages of the embodiments of the present application more clear, the technical scheme in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application.

[0028] As Figures 1-3 shown, in one embodiment, a material bucket liquid supply system, comprising: a joint assembly 1 and a pipeline assembly 2, the material bucket 3 is communicated with the pneumatic pump 4 through the joint assembly 1 and the pipeline assembly 2.

[0029] Among them, the pipeline assembly 2 includes a bottom insertion pipe 21, a feed pipe 22, a backflow pipe 23 and a gas supply pipe 24, and the bottom insertion pipe 21, the feed pipe 22 and the backflow pipe 23 are communicated with the pneumatic pump 4 to form a liquid circuit.

[0030] Specifically, the backflow pipe 23 is provided with a first valve 5 for controlling whether the liquid is sent from the material bucket 3 to the production end (demand end), and the gas supply pipe 24 is provided with a second valve 6 for controlling whether the nitrogen is introduced into the material bucket 3.

[0031] Please continue to refer to Figures 1-3 In the embodiment, the joint assembly 1 includes a first joint 11 and a second joint 12, and the first joint 11 and the second joint 12 are symmetrically installed on both sides of the top of the material bucket 3. Specifically, the material of the first joint 11 and the second joint 12 is polytetrafluoroethylene, so that the metal ion precipitation of the material liquid is less (less than 0.1 ppt), which can meet the requirement of the semiconductor process for ultra-high purity of the material, thereby ensuring the stability of the entire semiconductor production process and the reliability of the product quality, and greatly reducing the risk of performance degradation or defect of the semiconductor product caused by metal ion pollution.

[0032] Further, the first joint 11 comprises a first flared portion 111, a first threaded portion 112 and a nut portion 113. Specifically, the top of the first flared portion 111 is in communication with the feed pipe 22 to achieve a sealed connection; the top of the first threaded portion 112 is detachably connected with the bottom of the first flared portion 111 to ensure convenient disassembly and sealing performance; in addition, the bottom of the first threaded portion 112 is detachably connected with the nut portion 113, the bottom of the nut portion 113 is in communication with the bottom insertion pipe 21, and the nut portion 113 is detachably connected with the bucket 3, so that the first joint 11 can be firmly installed on the bucket 3, and the bottom insertion pipe 21 penetrates into the bottom of the bucket 3, so that the liquid in the bottom of the bucket 3 can be transported from the bucket 3 to the production end (demand end) when the air pump 4 works.

[0033] Further, the second joint 12 comprises a second flared portion 121 and a second threaded portion 122. Specifically, the top of the second flared portion 121 is in communication with the return pipe 23 and the gas supply pipe 24, the bottom of the second flared portion 121 is detachably connected with the second threaded portion 122 to achieve a sealed connection; and the second flared portion 121 comprises a return flared portion 1211 and a nitrogen flared portion 1212, the inner diameter of the return flared portion 1211 is larger than that of the nitrogen flared portion 1212, the return flared portion 1211 is used for flowing the liquid flowing from the return pipe 23, and the nitrogen flared portion 1212 is used for flowing the nitrogen flowing from the gas supply pipe 24 in communication with the external gas source; in addition, the bottom of the second threaded portion 122 is detachably connected with the bucket 3, and the return pipe 23 and the gas supply pipe 24 penetrate into the top of the bucket 3, when it is necessary to stop supplying liquid, the liquid can be returned through the return pipe 23 by the air pump 4, preventing the air pump 4 from being damaged under the action of water hammer.

[0034] Working principle: open the second valve 6 before starting the air pump 4, and introduce nitrogen into the bucket 3 from the gas supply pipe 24 through the external gas source, which can prevent the liquid in the bucket 3 from being contaminated by air while maintaining the pressure balance between the inside and outside of the bucket 3, preventing the bucket 3 from being damaged; after the inflation is completed, the second valve 6 is closed, then the valve leading to the production end (demand end) is opened, and the air pump 4 is started, and there is no liquid in the return pipe 23 during the feeding of the bucket 3 and it is static, effectively improving the safety; when it is necessary to stop supplying liquid, the valve of the production end (demand end) can be closed, the first valve 5 of the return pipe 23 is opened, the stable operation of the air pump 4 is maintained, and the air pump 4 is prevented from being damaged under the action of water hammer; when replacing the bucket 3, the liquid in the pipeline can be completely discharged by the air pump 4, avoiding the harm to the operator, and the residual liquid in the bucket can be collected to avoid waste.

[0035] The above description of disclosed embodiments enables one of ordinary skill in the art to make or use the application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein can be applied to other embodiments without departing from the spirit or scope of the application. Thus, the present application is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A liquid supply system for a material tank, characterized in that, The utility model relates to a kind of liquid conveying device, including: Joint assembly (1) and pipeline assembly (2), bucket (3) is communicated by the joint assembly (1) and the pipeline assembly (2) and pneumatic pump (4); The joint assembly (1) includes first joint (11) and second joint (12), the first joint (11) includes first flared portion (111), first threaded portion (112) and nut portion (113), the second joint (12) includes second flared portion (121) and second threaded portion (122); The pipeline assembly (2) includes bottom insertion pipe (21), feed pipe (22), backflow pipe (23) and gas supply pipe (24), the bottom insertion pipe (21), feed pipe (22), backflow pipe (23) and the pneumatic pump (4) are communicated to form liquid circuit.

2. The hopper liquid supply system according to claim 1, characterized in that, The top of the first flared portion (111) is communicated with the feed pipe (22), and the top of the first threaded portion (112) and the bottom of the first flared portion (111) are detachably connected.

3. The hopper liquid supply system according to claim 2, characterized in that, The bottom of the first threaded portion (112) and the nut portion (113) are detachably connected, and the bottom of the nut portion (113) is communicated with the bottom insertion pipe (21).

4. The hopper liquid supply system according to claim 3, characterized in that, The nut portion (113) and the bucket (3) are detachably connected, and the bottom insertion pipe (21) penetrates into the bottom of the bucket (3).

5. The hopper liquid supply system of claim 1, wherein The top of the second flared portion (121) is communicated with the backflow pipe (23) and the gas supply pipe (24), and the bottom of the second flared portion (121) and the second threaded portion (122) are detachably connected.

6. The hopper liquid supply system of claim 5, wherein, The second flared portion (121) includes backflow flared portion (1211) and nitrogen flared portion (1212), and the inner cavity diameter of the backflow flared portion (1211) is greater than that of the nitrogen flared portion (1212).

7. The hopper liquid supply system of claim 5, wherein The bottom of the second threaded portion (122) and the bucket (3) are detachably connected, and the backflow pipe (23) and the gas supply pipe (24) penetrate into the top of the bucket (3).

8. The hopper liquid supply system of claim 1, wherein, The pneumatic pump (4) is communicated with the backflow pipe (23) and the bottom insertion pipe (21) in the bucket (3) to form a liquid circuit through the feed pipe (22).

9. The hopper liquid supply system of claim 1, wherein, The first joint (11) and the second joint (12) are symmetrically installed on both sides of the top of the bucket (3), and the materials of the first joint (11) and the second joint (12) are polytetrafluoroethylene.

10. The hopper liquid supply system of claim 1, wherein, The backflow pipe (23) is provided with a first valve (5), and the gas supply pipe (24) is provided with a second valve (6).

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