Workpiece conveying system of coating equipment and vacuum coating equipment applying workpiece conveying system

Abstract

The utility model provides a workpiece transmission system of coating equipment and vacuum coating equipment applying the same, and the workpiece transmission system of the coating equipment comprises a transmission device which is used for driving a bracket to move close to or far away from a coating station; the bottom of the workpiece frame is rotatably mounted on the bracket, and a plurality of workpiece hanging structures are arranged on the peripheral side of the workpiece frame at intervals; the alignment structure is arranged at the top or the bottom of the workpiece frame; the lifting device is arranged above or below the film coating station and is used for driving the butt-joint piece to do lifting motion, so that the butt-joint piece is in butt joint with or separated from the alignment structure; and the rotating device is used for driving the butt-joint piece to rotate so as to drive the workpiece frame to rotate relative to the bracket when the butt-joint piece is in butt joint with the alignment structure. The bracket and the workpiece frame are always connected into a whole in the whole conveying and coating process without lifting the workpiece frame, so that the workpiece frame and the bracket are always kept in accurate positioning; the bottom of the workpiece frame is connected with the bracket through the bearing, the workpiece frame and the bracket are driven by the butt joint piece to synchronously and stably rotate around a fixed axis, and the coating uniformity is improved.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating equipment technology, and in particular to a workpiece transfer system for coating equipment and a vacuum coating equipment using the same. Background Technology

[0002] Existing vacuum optical coating equipment requires a lifting mechanism to first lift the workpiece holder from the transport mechanism at the bottom. The lifting mechanism then drives the workpiece holder to rotate, causing each target workpiece on the outer periphery of the holder to pass through the evaporation source and be coated one by one. After all target workpieces are coated, the lifting mechanism drives the workpiece holder back down onto the transport mechanism, and finally, the workpiece is output to the equipment for the next process.

[0003] When the workpiece rack is lifted by the lifting mechanism, the bottom of the workpiece rack detaches from the support surface of the bracket supported on the rollers of the transfer mechanism, while the bracket remains on the rollers. If the bracket shifts relative to the transfer mechanism or the workpiece rack shifts relative to the bracket during the lifting or lowering of the workpiece rack and the bracket's waiting period for coating operations, it may result in inaccurate positioning between the workpiece rack and the bracket after the workpiece rack descends, causing the workpiece rack's return-to-position failure and thus affecting production efficiency.

[0004] Furthermore, in traditional vacuum optical coating equipment, the workpiece holder is separated from the bottom support by a lifting and rotating mechanism within the vacuum chamber, and then moves up, rotates, and descends. During lifting and rotating, the workpiece is prone to wobbling, which affects the coating process. In addition, the connection between the lifting and rotating mechanism and the workpiece holder requires a high degree of concentricity in the machining and installation of both. If the lifting and rotating mechanism and the workpiece holder are not installed concentrically, it may damage the suspended target workpiece when the rotating mechanism drives the workpiece holder to rotate. Utility Model Content

[0005] This utility model proposes a workpiece transport system for coating equipment and a vacuum coating equipment using the same, in order to solve the technical problem that the workpiece holder may fail to return to its original position due to displacement of the workpiece holder or the support during the process of lifting the workpiece holder from the support to perform the coating operation in existing vacuum optical coating equipment.

[0006] To solve the above problems, the technical solution adopted by this utility model is as follows:

[0007] This utility model provides a workpiece conveying system for a coating equipment, including a conveying device for driving a support to move closer to or away from the coating station, and further comprising:

[0008] The workpiece holder has its bottom rotatably mounted on a bracket, and several workpiece suspension structures for suspending target workpieces are spaced apart around its perimeter; an alignment structure is located at the top or bottom of the workpiece holder.

[0009] A lifting device is located above or below the coating station to drive the lifting movement of the docking parts so that the docking parts can dock with or detach from the alignment structure.

[0010] A rotating device is used to drive the docking parts to rotate when they are docked with the alignment structure, thereby causing the workpiece holder to rotate relative to the bracket.

[0011] Preferably, the lifting device includes:

[0012] The frame is located above or below the coating station;

[0013] The first lifting drive mechanism is mounted on the frame and is used to drive the lifting assembly to move up and down.

[0014] A first rotating shaft, one end of which is rotatably mounted on a lifting assembly, and the other end of which extends out of the frame toward the alignment structure, with a docking piece mounted on the other end of the first rotating shaft;

[0015] The rotating device is used to drive the first rotating shaft to rotate.

[0016] Preferably, the first lifting drive mechanism includes:

[0017] The lifting module is mounted on the frame and is used to drive the lifting motion of the lifting components. The lifting assembly is installed on the lifting motion components.

[0018] The guide structure, located on the frame, is used to guide the lifting and lowering movement of the lifting components.

[0019] Preferably, the guide structure includes a plurality of guide columns vertically mounted on the frame;

[0020] The lifting assembly includes:

[0021] The first lifting frame is connected to the lifting moving parts and is movably mounted on the guide column;

[0022] The first bearing is mounted on the first lifting frame, and one end of the first rotating shaft is rotatably mounted on the first bearing;

[0023] A sealing hose is sleeved on the outside of the first rotating shaft, and one end of the sealing hose is mounted on the first bearing;

[0024] The mounting bracket is installed at the other end of the sealing hose, and the first rotating shaft passes through the mounting bracket.

[0025] Preferably, the rotating device includes:

[0026] The second rotating shaft is mounted on the mounting bracket;

[0027] The driving gear is located on the second rotating shaft, and the driven gear meshing with the driving gear is located on the first rotating shaft;

[0028] A rotary drive mechanism, mounted on the frame, is used to drive the second rotary shaft to rotate.

[0029] Furthermore, the workpiece transfer system of the coating equipment also includes:

[0030] A limiting device is used to restrict the bracket to the coating station when it arrives at the coating station.

[0031] Preferably, the transmission device includes:

[0032] The first roller mechanism includes: a first roller mounting frame; a plurality of first rollers, which are sequentially and spaced apart on the first roller mounting frame along a first direction; and a first transmission assembly connected between adjacent first rollers.

[0033] The second roller mechanism includes: a second roller mounting frame and a first roller mounting frame arranged parallel to each other at intervals; a coating station located between the second roller mounting frame and the first roller mounting frame; a plurality of second rollers, which are sequentially and at intervals on the second roller mounting frame along a first direction; a second transmission assembly connected between adjacent second rollers; and at least one second roller connected to a corresponding first roller via a connecting shaft.

[0034] The roller drive mechanism is used to drive any one of the first rollers to rotate, so as to drive the first transmission component and the second transmission component to drive each of the first rollers and the second rollers to rotate synchronously, thereby driving the bracket supported on a plurality of first rollers and the second rollers to move closer to or away from the coating station.

[0035] Preferably, the limiting device includes:

[0036] The second lifting drive mechanism is located between the first roller mechanism and the second roller mechanism, and at one end of the coating station in the first direction, for driving the second lifting frame to move up and down; the first limiting mechanism is located on the second lifting frame, for limiting one end of the bracket in the first direction when the bracket arrives at the coating station.

[0037] The third lifting drive mechanism is located between the first roller mechanism and the second roller mechanism, and at the opposite end of the coating station in the first direction, for driving the lifting motion of the third lifting frame; the second limiting mechanism is located on the third lifting frame, for limiting the opposite end of the bracket in the first direction when the bracket arrives at the coating station.

[0038] Preferably, the workpiece holder is cylindrical, and several workpiece suspension structures are evenly spaced along the circumference of the workpiece holder on the outer circumference side of the workpiece holder.

[0039] Preferably, the lifting device is located above the coating station;

[0040] The mating part is a mating gland, the outer periphery of which is tapered. The alignment structure is an alignment flange located on the top of the workpiece holder, and the alignment flange has a tapered groove that matches the shape of the mating gland.

[0041] The bracket is equipped with a second bearing, and the bottom of the workpiece holder is equipped with a mounting shaft that matches the second bearing;

[0042] When the mating parts mate with the alignment structure through their tapered surfaces and tapered grooves, the rotating device can drive the workpiece holder to rotate relative to the bracket through the mounting shaft and the second bearing.

[0043] This utility model also provides a vacuum coating equipment, including a vacuum coating chamber and a coating device disposed in the vacuum coating chamber, and also includes the above-mentioned coating equipment workpiece transfer system, which is disposed in the vacuum coating chamber and the coating device is disposed on one side of the coating station.

[0044] Preferably, the vacuum coating equipment is a vacuum optical coating equipment, the target workpiece is an optical substrate, and the coating apparatus includes an evaporation source for performing optical coating operations on the surface of the optical substrate.

[0045] Compared with the prior art, the present invention has the following beneficial effects:

[0046] The workpiece conveying system of the coating equipment provided by this utility model integrates a lifting device and a rotating device at the top or bottom of the vacuum coating chamber. It drives a rotatable docking component to be raised and lowered so that it can be concentrically docked or disengaged from the alignment structure at the top or bottom of the workpiece holder. The bottom of the workpiece holder is rotatably mounted on a bracket transferred by the conveying device. When the docking component docks with the alignment structure, the rotating device drives the docking component to rotate, thereby causing the workpiece holder to rotate relative to the bracket. Then, through the evaporation source on one side of the conveying device, the coating operation is performed sequentially on each target workpiece suspended around the workpiece holder. Throughout the entire conveying and coating process, the bracket and the workpiece holder are always connected as one unit without the need to raise or lower the workpiece holder, ensuring that the workpiece holder and the bracket always maintain precise positioning. The bottom of the workpiece holder is connected to the bracket through a bearing, thereby achieving synchronous and stable fixed-axis rotation of the workpiece holder and the bracket under the drive of the docking component, which improves the coating uniformity. Attached Figure Description

[0047] To more clearly illustrate the technical solution proposed by this utility model, the present utility model will be described in detail below with reference to the embodiments and accompanying drawings. It should be understood that the embodiments and accompanying drawings described in the following detailed description are merely some embodiments of this utility model, and those skilled in the art can make changes to these drawings under the concept of this utility model.

[0048] Figure 1 A three-dimensional schematic diagram of the assembly structure of an embodiment of the workpiece transfer structure of the coating equipment provided by this utility model;

[0049] Figure 2 A schematic front view of the assembly structure of an embodiment of the workpiece transfer structure of the coating equipment provided by this utility model;

[0050] Figure 3 A three-dimensional schematic diagram of the assembly structure of the conveying device and the limiting device of the workpiece conveying structure of the coating equipment provided by this utility model;

[0051] Figure 4 A three-dimensional schematic diagram of the assembly structure of the bracket for the workpiece transfer structure of the coating equipment provided by this utility model;

[0052] Figure 5 for Figure 2 A schematic diagram of the assembly structure of the workpiece holder and bracket;

[0053] Figure 6 A three-dimensional schematic diagram of the assembly structure of the lifting device and the rotating device provided in this utility model;

[0054] Figure 7 A front view schematic diagram of the assembly structure of the lifting device and the rotating device provided by this utility model;

[0055] Figure 8 for Figure 3 A three-dimensional schematic diagram of the assembly structure of the third lifting drive mechanism, the third lifting frame, and the second limiting mechanism.

[0056] Figure 9 A three-dimensional structural schematic diagram of the bracket provided by this utility model with an added bearing assembly;

[0057] Figure 10 A top view of the structure of the bracket provided by this utility model with an added bearing assembly;

[0058] Figure 11 A front view schematic diagram of the assembly structure of another embodiment of the workpiece transfer structure of the coating equipment provided by this utility model, wherein the lifting device is located below the coating station.

[0059] The main markings in the attached figures are as follows:

[0060] 1. Transmission device; 11. First roller mechanism; 111. First roller mounting frame; 112. First roller; 113. First transmission assembly; 12. Second roller mechanism; 121. Second roller mounting frame; 122. Second roller; 123. Second transmission assembly; 13. Connecting shaft; 131. Shaft support assembly; 14. Roller drive mechanism; 2. Bracket; 21. Second bearing; 22. Rolling bearing; 3. Workpiece rack; 31. Workpiece suspension structure; 32. Alignment structure; 321. Tapered groove; 33. Mounting shaft; 4. Lifting device; 41. Frame; 42. First lifting drive mechanism; 421. Lifting module; 422. Lifting moving part; 423. Guide structure; 4231. Guide column; 43. Lifting assembly; 43 1. First lifting frame; 432. First bearing; 433. Sealing hose; 434. Mounting bracket; 44. First rotating shaft; 441. Driven gear; 45. Connecting part; 451. Conical surface; 46. Magnetofluid; 5. Rotating device; 51. Second rotating shaft; 511. Driving gear; 52. Rotation drive mechanism; 6. Limiting device; 61. Second lifting drive mechanism; 62. Second lifting frame; 63. First limiting mechanism; 631. First support assembly; 632. First clamping part; 633. First position sensor; 64. Third lifting drive mechanism; 65. Third lifting frame; 66. Second limiting mechanism; 661. Second support assembly; 662. Second clamping part; 663. Second position sensor; 7. Target workpiece.

[0061] The other markings in the diagram are as follows:

[0062] X, first direction; Y, second direction; Z, third direction; A, coating station. Detailed Implementation

[0063] To make the technical problem to be solved, the technical solution and the beneficial effects of this utility model clearer, the following description is provided in conjunction with the appendix. Figure 1-11 The present invention will be further described in detail with reference to the embodiments.

[0064] Please refer to the following: Figure 1-11 The workpiece conveying system for coating equipment provided by this utility model includes a conveying device 1 for driving the bracket 2 to move closer to or away from the coating station A, and also includes:

[0065] The workpiece rack 3 is rotatably mounted on the bracket 2 at its bottom. Several workpiece suspension structures 31 for suspending target workpieces 7 are arranged at intervals around the workpiece rack 3. An alignment structure 32 is located at the top or bottom of the workpiece rack 3. A lifting device 4 is located above or below the coating station A and is matched to the position of the alignment structure 32 when the bracket 2 arrives at the coating station A. It is used to drive the docking part 45 to move closer to or away from the alignment structure 32, so that the docking part 45 is coaxially docked or disengaged from the alignment structure 32. A rotating device 5 is used to drive the docking part 45 to rotate when it docks with the alignment structure 32. The rotation of the docking part 45 drives the workpiece rack 3 and the docking part 45 to rotate synchronously and stably relative to the bracket 2, so that each target workpiece 7 suspended around the workpiece rack 3 rotates sequentially between the transmission device 1 and the coating device on one side of the coating station A, so that the coating device can sequentially perform the corresponding coating operation on each target workpiece 7 that rotates smoothly in sequence.

[0066] Please refer to the following: Figure 1-2 6-7, In this embodiment, the lifting device 4 includes:

[0067] A frame 41 is positioned above or below the coating station A and is matched to the position of the alignment structure 32 when the bracket 2 arrives at the coating station A. A first lifting drive mechanism 42 is mounted on the frame 41 and is used to drive the lifting assembly 43 to move up and down above or below the coating station A. A first rotating shaft 44 has one end rotatably mounted on the lifting assembly 43, and the other end of the first rotating shaft 44 extends out of the frame 41 towards the alignment structure 32. The aforementioned docking piece 45 is mounted on the other end of the first rotating shaft 44. A rotating device 5 is used to drive the first rotating shaft 44 to rotate, thereby causing the docking piece 45 to rotate synchronously.

[0068] Please refer to the following: Figure 1-2 6-7, In a preferred embodiment of this example, the first lifting drive mechanism 42 includes:

[0069] The lifting module 421 is mounted on the frame 41 and is used to drive the lifting motion component 422 to move up and down. The lifting assembly 43 is mounted on the lifting motion component 422. The guide structure 423 is mounted on the frame 41 and is used to guide the lifting assembly 43 to move up and down.

[0070] Please refer to the following: Figure 1-2 In a more preferred embodiment of this example, the lifting module 421 is a lifting cylinder module, used to drive the cylinder extension rod, which is the lifting moving part 422, to move up and down. The lifting component 43 is installed on the cylinder extension rod of the lifting cylinder module.

[0071] In other embodiments, the lifting module 421 may also be a linear lifting module driven by a motor, such as a lead screw nut, a synchronous pulley, a gear rack, etc.

[0072] Please refer to the following: Figure 1-2 In a more preferred embodiment of this example, the guide structure 423 includes a plurality of guide columns 4231 vertically mounted on the frame 41. The lifting assembly 43 includes: a first lifting frame 431, connected to the lifting motion component 422, and movably mounted on each guide column 4231 via a lifting sleeve provided on its periphery; a first bearing 432, mounted on the first lifting frame 431, with one end of the first rotating shaft 44 rotatably mounted on the first bearing 432; a sealing hose 433, preferably a corrugated pipe, but also a retractable elastic pipe; the sealing hose 433 is sleeved on the outside of the first rotating shaft 44, and one end of the sealing hose 433 is mounted on the first bearing 432, so that the corrugated pipe plays a sealing role; and a mounting frame 434, mounted on the other end of the sealing hose 433, with the first rotating shaft 44 passing through the mounting frame 434.

[0073] Please refer to the following: Figure 1-2 6-7, In this embodiment, the rotating device 5 includes:

[0074] The second rotating shaft 51 is mounted on the mounting bracket 434; the driving gear 511 is mounted on the second rotating shaft 51, and the first rotating shaft 44 is provided with a driven gear 441 that meshes with the driving gear 511; the rotating drive mechanism 52 is mounted on the frame 41 and is used to drive the second rotating shaft 51 to rotate.

[0075] Please refer to the following: Figure 1-2 In a preferred embodiment of this example, the rotary drive mechanism 52 is a motor drive mechanism, and the second rotary shaft 51 is connected to the output shaft of the motor drive mechanism via a coupling.

[0076] In other embodiments of this example, the rotary drive mechanism 52 may also be a rotary cylinder or a motor driving a pulley drive mechanism.

[0077] Please refer to the following: Figure 1-2 In a preferred embodiment of this example, the first rotating shaft 44 passes through the frame 41 and a magnetic fluid 46 is provided to achieve a seal.

[0078] In a more preferred embodiment of this example, the driving gear 511 and the driven gear 441 are connected by at least one intermediate gear (not shown in the figure), and the driving gear 511, the driven gear 441 and the intermediate gear constitute a gear set.

[0079] Please refer to the following: Figure 1-38. In this embodiment, the workpiece transfer system of the coating equipment further includes:

[0080] The limiting device 6 is used to restrict the bracket 2 to the coating station A when the bracket 2 arrives at the coating station A.

[0081] Please refer to the following: Figure 1-3 In this embodiment, the transmission device 1 includes:

[0082] The first roller mechanism 11 includes: a first roller mounting frame 111; a plurality of first rollers 112, which are sequentially and spaced apart on the first roller mounting frame 111 along a first direction X; and a first transmission assembly 113 connected between adjacent first rollers 112. The second roller mechanism 12 includes: a second roller mounting frame 121 arranged parallel to and spaced apart from the first roller mounting frame 111; and a coating station A located between the second roller mounting frame 121 and the first roller mounting frame 111; and a plurality of second rollers 122, which are sequentially and spaced apart on the first roller mounting frame 111 along a first direction X. On the roller mounting bracket 121; a second transmission assembly 123 is connected between adjacent second rollers 122; at least one second roller 122 is connected to a corresponding first roller 112 via a connecting shaft 13; a roller drive mechanism 14 is used to drive any first roller 112 to rotate, so as to drive the first transmission assembly 113 and the second transmission assembly 123 to drive each first roller 112 and the second roller 122 to rotate synchronously, thereby driving the bracket 2 supported on a plurality of first rollers 112 and the second roller 122 to move closer to or away from the coating station A.

[0083] Please refer to the following: Figure 1-3 In a preferred embodiment of this example, a plurality of first rotating shafts are sequentially and spaced apart on a first roller mounting bracket 111 along a first direction X, and each first roller 112 is respectively mounted on a corresponding first rotating shaft. A pair of first sprockets are spaced apart at the same end of each first rotating shaft, and the corresponding first sprockets between adjacent first rotating shafts are sequentially and alternately connected along the first direction X by a first transmission chain, so that each first sprocket and the first sprocket constitute the aforementioned first transmission component 113.

[0084] Several second rotating shafts are sequentially and spaced apart on the second roller mounting bracket 121 along the first direction X, and the number and position of the second rotating shafts are coaxially matched with each first rotating shaft. Each second roller 122 is respectively mounted on the corresponding second rotating shaft. A pair of first sprockets are spaced apart at the same end of each second rotating shaft. The corresponding second sprockets between adjacent second rotating shafts are sequentially and alternately connected along the first direction X by a second transmission chain, so that each second sprocket and the second sprocket constitute the aforementioned second transmission component 123.

[0085] In other embodiments of this example, the first transmission component 113 and the second transmission component 123 may also use a synchronous belt pulley assembly instead of a sprocket or transmission chain assembly.

[0086] Please refer to the following: Figure 1-3 In a preferred embodiment of this invention, the transmission device 1 further includes:

[0087] A shaft support assembly 131 is disposed between the first roller mechanism 11 and the second roller mechanism 12, and is used to support the connecting shaft 13.

[0088] Please refer to the following: Figure 1-3 In a more preferred embodiment of this example, the shaft support assembly 131 includes a pair of support bearings, which are spaced apart between the first roller mechanism 11 and the second roller mechanism 12 along a second direction Y perpendicular to the first direction X. The connecting shaft 13 passes through the bearing holes of the pair of support bearings along the second direction Y, so that the connecting shaft 13 can drive each of the first rollers 112, the first transmission assembly 113, the second rollers 122, and the second transmission assembly 123 to rotate synchronously relative to the pair of support bearings.

[0089] Please refer to the following: Figure 1-3 8. In this embodiment, the limiting device 6 includes:

[0090] The second lifting drive mechanism 61 is located between the first roller mechanism 11 and the second roller mechanism 12, and at one end of the coating station A in the first direction X, for driving the second lifting frame 62 to move up and down; the first limiting mechanism 63 is located on the second lifting frame 62, for limiting one end of the bracket 2 in the first direction X when the bracket 2 arrives at the coating station A; the third lifting drive mechanism 64 is located between the first roller mechanism 11 and the second roller mechanism 12, and at the opposite end of the coating station A in the first direction X, for driving the third lifting frame 65 to move up and down; the second limiting mechanism 66 is located on the third lifting frame 65, for limiting the opposite end of the bracket 2 in the first direction X when the bracket 2 arrives at the coating station A.

[0091] Please refer to the following: Figure 1-3 8. In a preferred embodiment of this example, the second lifting frame 62 is a second lifting plate extending along the second direction Y. The third lifting frame 65 is a third lifting plate extending along the second direction Y.

[0092] The first limiting mechanism 63 includes at least two first support components 631, which are spaced apart at both ends of the second lifting plate (second lifting frame 62) in the second direction Y, and are respectively used to support a pair of first clamping members 632.

[0093] The second limiting mechanism 66 includes at least two second support components 661, which are spaced apart at both ends of the third lifting plate (third lifting frame 65) in the second direction Y. They are respectively used to support a pair of second clamping members 662 to cooperate with a pair of first clamping members 632 to clamp the bracket 2 at both ends in the first direction X. This achieves the goal of limiting the bracket 2 to the coating station A, preventing the bracket 2 and the workpiece frame 3 from shifting relative to the transmission device 1 during the process of the lifting device 4 driving the docking member 45 to move up and down so that the docking member 45 docks with the alignment structure 32. This would cause the workpiece frame 3 to fail to be accurately positioned with the bracket 2 after it descends, resulting in the failure of the workpiece frame 3 to return to its original position and thus affecting production efficiency.

[0094] In a preferred embodiment of this example, the limiting device 6 further includes:

[0095] The third limiting mechanism (not shown in the figure) is located on the second lifting plate (second lifting frame 62) or the third lifting plate (third lifting frame 65) and is used to drive the third clamping member to move closer to or away from the bracket 2 to cooperate with the first limiting mechanism 63 and the second limiting mechanism 66 to limit the bracket 2. The third limiting mechanism can drive the movement of the third clamping member through a linear drive module such as a cylinder or motor-driven lead screw nut, synchronous pulley, gear rack, etc.

[0096] In other embodiments of this example, the first support component 631 and the second support component 661 may also be directly driven by the second lifting drive mechanism 61 and the third lifting drive mechanism 64 respectively to achieve lifting movement, without having to be respectively provided on the second lifting plate (second lifting frame 62) and the third lifting plate (third lifting frame 65).

[0097] Please refer to the following: Figure 1-3 8. In a more preferred embodiment of this example, the bracket 2 is generally rectangular (i.e., the bracket 2 is generally cuboid in shape), and the end faces of the opposite ends of the bracket 2 in the first direction X are mutually symmetrical inverted conical surfaces 451. The first clamping member 632 and the second clamping member 662 are respectively inclined clamping plates whose posture matches the end faces of the opposite ends of the bracket 2 in the first direction X.

[0098] In other embodiments of this example, the bracket 2 can also be constructed using square tubing, profiles, or other forms.

[0099] Please refer to the following: Figure 1-3 8. In this embodiment, the first limiting mechanism 63 further includes: a first position sensor 633, which is disposed on the first support component 631 and is used to sense whether the first clamping member 632 clamps the bracket 2 in place.

[0100] The second limiting mechanism 66 also includes a second position sensor 663, which is disposed on the second support assembly 661 and is used to sense whether the second clamping member 662 clamps the bracket 2 in place.

[0101] Please refer to the following: Figure 1-3 8. In a more preferred embodiment of this embodiment, the first support component 631 includes: at least one first support base, disposed on the second lifting plate (second lifting frame 62), or directly driven by the second lifting drive mechanism 61 to achieve lifting movement independently; a first support cantilever, disposed on the first support base, and a first clamping member 632 and a first position sensor 633 mounted on the first support cantilever.

[0102] The second support assembly 661 includes: at least one second support base, disposed on the third lifting plate (third lifting frame 65), or directly driven by the third lifting drive mechanism 64 to achieve lifting movement independently; a second support cantilever, disposed on the second support base; and a second clamping member 662 and a second position sensor 663 mounted on the first support cantilever.

[0103] Please refer to the following: Figure 1-3 5. In this embodiment, the workpiece holder 3 is cylindrical, and a number of workpiece suspension structures 31 are evenly distributed at intervals along the circumference of the workpiece holder 3 on the outer circumference of the workpiece holder 3.

[0104] Please refer to the following: Figure 1-3 5. In a preferred embodiment of this invention, the workpiece suspension structure 31 consists of a plurality of suspension members spaced apart on the outer circumference of the workpiece holder 3, and the target workpiece 7 is provided with suspension holes that match the suspension members. The target workpiece 7 is suspended on the outer circumference of the workpiece holder 3 through its suspension holes and correspondingly engaged with the suspension members.

[0105] Please refer to the following: Figure 1-2 In a preferred embodiment of this example, the lifting device 4 is positioned above the coating station A. The docking component 45 is a docking cap, the outer periphery of which is tapered 451. The alignment structure 32 is an alignment flange located on the top of the workpiece holder 3, and the alignment flange has a tapered groove 321 that matches the shape of the docking cap. The bracket 2 is equipped with a second bearing 21, and the bottom of the workpiece holder 3 is equipped with a mounting shaft 33 that matches the second bearing 21.

[0106] When the docking part 45 is engaged with the tapered groove 321 through its tapered surface 451 and is aligned with the alignment structure 32, the rotating device 5 can drive the workpiece holder 3 to rotate relative to the bracket 2 through the mounting shaft 33 and the second bearing 21.

[0107] Please refer to the following: Figure 1-2 In a more preferred embodiment of this example, the second bearing 21 is a ball bearing.

[0108] Please see Figure 11 In another embodiment of this invention, the lifting device 4 is located below the coating station A. The docking part 45 is a docking pressure cap ( Figure 11 (Not shown in the image), the outer periphery of the mating gland is conical 451, and the alignment structure 32 ( Figure 11 (Not shown in the image) is a positioning flange located at the bottom of the workpiece holder 3. The positioning flange has a tapered groove 321 that matches the shape of the mating gland. The bracket 2 is equipped with a second bearing 21 ( Figure 11 (Not shown in the image), the bottom of the workpiece holder 3 is provided with a mounting shaft 33 that matches the second bearing 21. Figure 11 (not shown in the image), and the bracket 2 is provided with a relief structure for the mating cover (matting part 45) to pass upward to mate with the tapered groove 321 of the alignment flange (alignment structure 32) at the bottom of the workpiece holder 3.

[0109] When the docking part 45 is engaged with the tapered groove 321 through its tapered surface 451 and is aligned with the alignment structure 32, the rotating device 5 can drive the workpiece holder 3 to rotate relative to the bracket 2 through the mounting shaft 33 and the second bearing 21.

[0110] Please refer to the following: Figure 9-10 In a preferred embodiment of this invention, the bracket 2 is provided with a bearing assembly consisting of multiple rolling bearings 22 around the second bearing 21, and the multiple rolling bearings 22 are evenly spaced and arranged radially in a circular pattern around the second bearing 21. The workpiece holder 3 engages with the second bearing 21 via the mounting shaft 33, and its bottom surface also engages with the multiple rolling bearings 22, thereby improving the load-bearing capacity of the bracket 2 on the workpiece holder 3 and the stability of the workpiece holder 3 when rotating relative to the bracket 2.

[0111] This utility model also provides a vacuum coating equipment, including a vacuum coating chamber (not shown in the figure) and a coating device (not shown in the figure) disposed in the vacuum coating chamber, and also includes the above-mentioned coating equipment workpiece transfer system, which is disposed in the vacuum coating chamber, and the coating device is disposed on one side of the coating station A (i.e., the coating device is disposed at one end of the coating station A in the second direction Y).

[0112] In this embodiment, the vacuum coating equipment is a vacuum optical coating equipment, the target workpiece 7 is an optical substrate, and the coating apparatus includes an evaporation source for performing optical coating operations on the surface of the optical substrate.

[0113] Please refer to the following: Figure 1-3 The working process of the workpiece transfer system for the coating equipment provided by this utility model is as follows:

[0114] S1: The transmission device 1 drives the bracket 2 to move the workpiece rack 3 from the loading station along the first direction X towards the coating station A.

[0115] S2: When the bracket 2 arrives at the loading station, the limiting device 6 drives the first limiting mechanism 63 and the second limiting mechanism 66 to lift the bracket 2 at both ends (front end and rear end) in the first direction X, so as to limit the bracket 2 to the coating station A.

[0116] S3: The lifting device 4 drives the docking part 45 to move down or up from above or below the coating station A, close to the alignment structure 32 at the top or bottom of the workpiece rack 3, so that the docking part 45 docks with the alignment structure 32.

[0117] S4: The rotating device 5 drives the docking part 45 to rotate, thereby driving the workpiece frame 3 to rotate synchronously relative to the bracket 2, so that each target workpiece 7 suspended around the workpiece frame 3 rotates sequentially between the transfer device 1 and the coating device on one side of the coating station A, so that the evaporation source of the coating device can sequentially perform corresponding optical coating operations on each target workpiece 7.

[0118] S5: After all target workpieces 7 have been coated, the lifting device 4 drives the docking part 45 to move up or down away from the alignment structure 32 so that the docking part 45 is separated from the alignment structure 32.

[0119] S6: The limiting device 6 drives the first limiting mechanism 63 and the second limiting mechanism 66 to descend at both ends (front end and rear end) of the bracket 2 in the first direction X, so as to release the bracket 2 from the limiting position at the coating station A.

[0120] S7: The transmission device 1 drives the bracket 2 to move the workpiece rack 3 from the coating station A along the first direction X towards the unloading station. Finally, the workpiece rack 3 and each of the target workpieces 7 that have been coated are removed from the bracket 2 to perform the next process.

[0121] The above are merely preferred embodiments of the present utility model and are not intended to limit the present utility model. Those skilled in the art should understand that any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A workpiece transport system for a coating installation, comprising a transport device (1) for driving a carrier (2) in a direction of approach or removal from a coating station (A), characterized in that Also include: Workpiece rack (3), the bottom of the workpiece rack (3) is rotatably mounted on the bracket (2), a plurality of workpiece suspension structures (31) for suspending target workpieces (7) are arranged at intervals on the side of the workpiece rack (3); alignment structure (32), provided on the top or bottom of the workpiece rack (3); Lifting device (4), provided above or below the film coating station (A), used to drive the lifting movement of the docking piece (45), so that the docking piece (45) is docked with the alignment structure (32) or separated; Rotary device (5), used to drive the rotation of the docking piece (45) when the docking piece (45) is docked with the alignment structure (32), so as to drive the workpiece rack (3) to rotate relative to the bracket (2).

2. The coating apparatus workpiece transport system of claim 1, wherein, The lifting device (4) comprises: Rack (41), provided above or below the film coating station (A); First lifting drive mechanism (42), provided on the rack (41), used to drive the lifting movement of the lifting assembly (43); First rotary shaft (44), one end of the first rotary shaft (44) is rotatably mounted on the lifting assembly (43), the other end of the first rotary shaft (44) extends out of the rack (41) towards the alignment structure (32), and the docking piece (45) is mounted on the other end of the first rotary shaft (44); The rotary device (5) is used to drive the rotation of the first rotary shaft (44).

3. The coating apparatus workpiece transport system of claim 2, wherein, The first lifting drive mechanism (42) comprises: Lifting module (421), provided on the rack (41), used to drive the lifting movement of the lifting moving part (422), and the lifting assembly (43) is mounted on the lifting moving part (422); Guide structure (423), provided on the rack (41), used to guide the lifting movement of the lifting assembly (43).

4. The coating apparatus workpiece transport system of claim 3, wherein, The guide structure (423) comprises a plurality of guide columns (4231) vertically mounted on the rack (41); The lifting assembly (43) comprises: First lifting frame (431), connected to the lifting moving part (422) and movably mounted on the guide column (4231); First bearing (432), mounted on the first lifting frame (431), one end of the first rotary shaft (44) is rotatably mounted on the first bearing (432); Sealing hose (433), the sealing hose (433) is sleeved on the outside of the first rotary shaft (44), and one end of the sealing hose (433) is mounted on the first bearing (432); Mounting bracket (434), mounted on the other end of the sealing hose (433), and the first rotary shaft (44) penetrates the mounting bracket (434).

5. The coating apparatus workpiece transport system of claim 4, wherein, The rotary device (5) comprises: Second rotary shaft (51), penetrating the mounting bracket (434); Driving gear (511), provided on the second rotary shaft (51), and a driven gear (441) provided on the first rotary shaft (44) is engaged with the driving gear (511); Rotary drive mechanism (52), provided on the rack (41), used to drive the rotation of the second rotary shaft (51).

6. A coating apparatus workpiece transport system as claimed in any one of claims 1 to 5, wherein, Also include: A limiting device (6) is arranged on the film coating station (A) for limiting the carrier (2) on the film coating station (A) when the carrier (2) reaches the film coating station (A).

7. The coating apparatus workpiece transport system of claim 6, wherein, The transmission device (1) comprises: A first roller mechanism (11) comprising: a first roller mounting frame (111); a plurality of first rollers (112) sequentially and spacedly mounted on the first roller mounting frame (111) along a first direction (X); and a first transmission assembly (113) connected between adjacent first rollers (112); A second roller mechanism (12) comprising: a second roller mounting frame (121) spacedly arranged in parallel with the first roller mounting frame (111), and the film coating station (A) is located between the second roller mounting frame (121) and the first roller mounting frame (111); a plurality of second rollers (122) sequentially and spacedly mounted on the second roller mounting frame (121) along the first direction (X); a second transmission assembly (123) connected between adjacent second rollers (122); and at least one second roller (122) connected to a corresponding first roller (112) through a connecting shaft (13); A roller driving mechanism (14) is arranged for driving any first roller (112) to rotate, so as to drive the first transmission assembly (113) and the second transmission assembly (123) to drive each first roller (112) and second roller (122) to rotate synchronously, thereby driving the carrier (2) supported on the plurality of first rollers (112) and second rollers (122) to move close to or away from the film coating station (A).

8. The coating apparatus workpiece transport system of claim 7, wherein, The limiting device (6) comprises: A second lifting driving mechanism (61) arranged between the first roller mechanism (11) and the second roller mechanism (12) and located at one end of the film coating station (A) in the first direction (X), for driving the second lifting frame (62) to move up and down; a first limiting mechanism (63) arranged on the second lifting frame (62), for limiting one end of the carrier (2) in the first direction (X) when the carrier (2) reaches the film coating station (A); A third lifting driving mechanism (64) arranged between the first roller mechanism (11) and the second roller mechanism (12) and located at the opposite end of the film coating station (A) in the first direction (X), for driving the third lifting frame (65) to move up and down; and a second limiting mechanism (66) arranged on the third lifting frame (65), for limiting the opposite end of the carrier (2) in the first direction (X) when the carrier (2) reaches the film coating station (A).

9. The coating apparatus workpiece transport system of any of claims 1-5, wherein, The workpiece frame (3) is in a cylindrical shape, and a plurality of workpiece hanging structures (31) are uniformly and spacedly distributed on the outer circumferential side of the workpiece frame (3) along the circumferential direction of the workpiece frame (3).

10. The coating apparatus workpiece transport system of claim 9, wherein, The lifting device (4) is arranged above the film coating station (A); The abutting piece (45) is an abutting gland, the outer circumferential side of the abutting gland is a conical surface (451), the alignment structure (32) is an alignment flange arranged on the top of the workpiece frame (3), and the alignment flange is provided with a tapered groove (321) matched with the shape of the abutting gland; The bracket (2) is provided with a second bearing (21), and the workpiece frame (3) is provided at the bottom with a mounting shaft (33) matched with the second bearing (21); When the abutting part (45) is matched with the taper groove (321) through the taper surface (451) and is matched with the alignment structure (32), the rotating device (5) can drive the workpiece frame (3) to rotate relative to the bracket (2) through the mounting shaft (33) matched with the second bearing (21).

11. A vacuum film deposition apparatus comprising a vacuum film deposition chamber and a film deposition device provided in the vacuum film deposition chamber, characterized by, The film coating equipment workpiece transmission system according to any one of claims 1-10 is arranged in the vacuum film coating chamber, and the film coating device is arranged on one side of the film coating station (A).

12. The vacuum coating apparatus of claim 11, wherein, The vacuum film coating equipment is a vacuum optical film coating equipment, the target workpiece (7) is an optical substrate, and the film coating device comprises an evaporation source used for performing an optical film coating operation on the surface of the optical substrate.

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