Ultrahigh vacuum anti-dazzling observation window baffle

Abstract

The utility model discloses an ultrahigh vacuum anti-dazzling observation window baffle plate, and particularly relates to the technical field of vacuum observation windows, the observation window baffle plate comprises an optical filter shield, a magnetic coupling and a rotary baffle plate; the magnetic coupling comprises an isolation flange, an inner magnetic yoke rotating shaft and an outer magnetic yoke cylinder; the inner magnet yoke rotating shaft is connected with the outer magnet yoke cylinder through a magnetic pole; the external magnet yoke cylinder is connected to the isolation flange in a sleeving mode. The rotating baffle comprises an ultrahigh vacuum flange, a driven pin shaft and viewport glass. Viewport glass is fixed on the driven pin shaft; the isolation flange is fixed on the side surface of the ultrahigh vacuum flange; the optical filter shield is installed on the ultrahigh vacuum flange through the vacuum viewport. According to the utility model, the material state or the real state of a high-brightness object during film deposition can be observed through quick opening and closing, and the component interface and the transmission mode all adopt an ultrahigh vacuum sealing mode to be matched with the structure of an external adjustable optical filter, so that the requirements of a vacuum system on low leakage rate and convenient operation of an observation window baffle are met.

Description

Technical Field

[0001] This utility model relates to the field of vacuum observation window technology, and more specifically, to an ultra-high vacuum anti-glare observation window baffle. Background Technology

[0002] Existing observation baffles, to facilitate observation, employ a rotating opening and closing mechanism. The baffle rotates 0-90 degrees around an axis, opening and closing in this manner to obtain a larger observation area, as illustrated in Chinese Patent Application No. 201920545823.0, which discloses an ultra-high vacuum window baffle. However, this device has some problems in practical use:

[0003] 1. Since there is no light filtering structure on the outside of the vacuum window baffle, it is impossible to observe ultra-bright objects for a long time. If observed for a long time, it will not only easily cause glare to the human eye, but in severe cases, it will also cause eye damage, which will also affect the judgment of the thin film deposition state or the state of the internal components of the vacuum chamber.

[0004] 2. Because the baffle is a rotating opening and closing structure, the positioning and fixing method of the rotating parts is mostly to tighten the structure by hand-tightening the nut; during thin film deposition, the cavity is filled with a large number of material particles, and the larger viewing port is more likely to contaminate the connected vacuum viewing window during observation; moreover, the viewing window baffle is not installed vertically, causing the baffle to automatically open under gravity to shield the material; if the tightening structure ages, it will cause the baffle to not close tightly, resulting in material contamination; if the baffle is not closed due to improper operation during thin film deposition, it will also contaminate the vacuum viewing port; considering that the cost of replacing a contaminated vacuum viewing port is relatively large.

[0005] Therefore, an ultra-high vacuum anti-glare observation window baffle is proposed as a further improvement to solve the problem that the current vacuum observation window cannot directly observe the high brightness state of the material melting in the crucible when the electron beam evaporation gun is working, and to solve the need for the observation window to be installed at any angle, so as to avoid affecting the material deposition rate control and material evaporation stability during thin film deposition. Utility Model Content

[0006] In order to overcome the above-mentioned defects of the prior art, the embodiments of this utility model provide an ultra-high vacuum anti-glare observation window baffle to solve the problems mentioned in the background art.

[0007] To achieve the above objectives, this utility model provides the following technical solution: an ultra-high vacuum anti-glare observation window baffle, the observation window baffle comprising: a vacuum cavity, an observation port flange and a vacuum viewing port, the observation port flange being fixedly installed on one side of the vacuum cavity, and the vacuum viewing port being disposed at the other end of the observation port flange;

[0008] The observation window baffle also includes: a filter cover, a magnetic coupling, and a rotating baffle;

[0009] The filter cover is installed on one side of the vacuum viewport; the other side of the vacuum viewport is fixedly connected to the observation port flange via a rotating baffle.

[0010] Furthermore, the filter cover includes: a polarizer, a lower housing, and an upper housing.

[0011] The lower surface of the upper housing is fixedly mounted on the upper surface of the lower housing. The polarizer is placed in the recessed groove at the center of the lower housing. The polarizer is located between the lower housing and the upper housing. The lower surface of the lower housing is fixedly mounted on one side of the vacuum viewport.

[0012] Furthermore, the magnetic coupling includes: an isolation flange, an inner magnetic yoke shaft, and an outer magnetic yoke cylinder;

[0013] A first limiting mechanism is provided between the inner magnetic yoke shaft, which passes through the center hole of the isolation flange, and the isolation flange; the end of the inner magnetic yoke shaft is fixedly connected to the outer magnetic yoke cylinder through multiple pairs of evenly distributed magnetic poles; the outer magnetic yoke cylinder is movably sleeved on the outer surface of the isolation flange, a limiting groove block is fixedly installed on the outer surface of the isolation flange, a limiting post is fixedly installed on the outer surface of the outer magnetic yoke cylinder, the limiting post passes through the inside of the limiting groove block, a second limiting mechanism is provided between the outer magnetic yoke cylinder and the isolation flange; a locking mechanism for fixing the outer magnetic yoke cylinder is provided at the end of the isolation flange.

[0014] Furthermore, the rotating baffle includes: an ultra-high vacuum flange, a driven pin, and a viewing glass;

[0015] The sight glass located inside the ultra-high vacuum flange is detachably mounted on the outer surface of the driven pin. Both the sight glass and the driven pin rotate inside the ultra-high vacuum flange. An anti-contamination mechanism is provided between the ultra-high vacuum flange and the sight glass.

[0016] The end of the isolation flange away from the external magnetic yoke cylinder is fixedly connected to the side of the ultra-high vacuum flange. A transmission mechanism is provided between the driven pin shaft and the inner magnetic yoke shaft. The filter cover is installed on one side of the vacuum viewport. The other side of the vacuum viewport is fixedly connected to the observation port flange through the ultra-high vacuum flange.

[0017] Furthermore, the first limiting mechanism includes: a first bearing located at the central step hole of the isolation flange, a rotating shaft retaining ring, and a mounting hole retaining ring;

[0018] The first bearing is fixedly sleeved on the outer surface of the inner magnetic yoke shaft. The rotating shaft retaining ring and the mounting hole retaining ring are both fixedly installed on the inner wall of the isolation flange, and the rotating shaft retaining ring and the mounting hole retaining ring clamp the first bearing.

[0019] Furthermore, the magnetic poles uniformly distributed at the end of the inner yoke shaft are designated as magnetic pole A, and the magnetic poles uniformly distributed in the outer yoke cylinder are designated as magnetic pole B. Thus, the polarities of magnetic pole A and magnetic pole B are different.

[0020] Furthermore, the second limiting mechanism includes: a slewing bearing and a limiting snap ring;

[0021] The rotary bearing, which is fixedly installed on the isolation flange, contacts the inner wall of one end of the outer magnetic yoke, and the limiting snap ring, which is fixedly installed on the isolation flange, contacts the end face of the other end of the outer magnetic yoke.

[0022] Furthermore, the locking mechanism includes: a bottom end cap and a hand-tightened knurled bolt;

[0023] The bottom end cap is fixedly installed on the end face of the isolation flange, and the hand-tightened knurled bolt is threaded on the bottom end cap, with one end of the hand-tightened knurled bolt passing through the bottom end cap and contacting the external magnetic yoke.

[0024] Furthermore, the anti-pollution mechanism includes: a first metal shield and a second metal shield;

[0025] The first metal shield is fixedly installed on the port of the ultra-high vacuum flange near the vacuum viewing port, and the second metal shield is detachably installed on the port of the ultra-high vacuum flange near the observation port flange. The two ends of the driven pin shaft are rotatably connected to the first metal shield and the second metal shield, respectively. Both the first metal shield and the second metal shield are provided with through and overlapping triangular observation ports. The viewing port glass is divided into a light-transmitting area and a light-blocking area corresponding to the triangular observation port.

[0026] The port of the ultra-high vacuum flange near the observation port flange is fixedly equipped with a fixing key that restricts the radial movement of the second metal shield.

[0027] Furthermore, the transmission mechanism includes: a driving bevel gear and a driven bevel gear;

[0028] The end face of the inner magnetic yoke shaft is threadedly connected to an extension shaft, and the outer surface of the extension shaft is threadedly fitted with an adjusting nut that contacts the inner magnetic yoke shaft. The driving bevel gear is fixedly fitted to the other end of the extension shaft, and the driven bevel gear is fixedly fitted to the outer surface of the driven pin shaft. The driving bevel gear and the driven bevel gear are meshed together.

[0029] The technical effects and advantages of this utility model are as follows:

[0030] 1. Compared with existing technologies, by setting up a viewing glass and utilizing a transmission mechanism, the opening and closing of the light can be achieved while meeting observation needs, thus solving the problem of the baffle opening automatically under gravity; by setting up a locking mechanism, the problem of aging and failure of the tightening structure is solved; by setting up an anti-contamination mechanism and adopting a detachable structure for the viewing glass, if the viewing glass is contaminated by materials due to human error in not closing it, only the viewing glass needs to be disassembled and replaced, greatly reducing the cost of parts repair caused by operational errors; and thus solving the problem of vacuum window material contamination caused by the baffle being left unturned or loosened.

[0031] 2. Compared with existing technologies, by setting up a magnetic coupling drive structure between the inner magnetic yoke shaft and the outer magnetic yoke cylinder, ultra-high vacuum sealing of the drive structure is achieved, reducing its vacuum leakage rate and greatly improving the ultimate vacuum capability of the equipment. By setting up a filter cover, the ability to observe ultra-bright objects and light sources is realized, improving the observability of the thin film deposition process and reducing damage to the human eye when observing ultra-bright objects. Attached Figure Description

[0032] Figure 1 This is a three-dimensional structural schematic diagram of a partial cross-section of the vacuum cavity of this utility model.

[0033] Figure 2 This is a schematic diagram of the planar structure of a partial cross-section of the vacuum cavity of this utility model.

[0034] Figure 3 This is a schematic diagram of the upper shell of this utility model.

[0035] Figure 4 This is a cross-sectional structural diagram of the filter cover of this utility model.

[0036] Figure 5 This is a schematic diagram of the external structure of the magnetic coupling of this utility model.

[0037] Figure 6 This is a cross-sectional structural diagram of the magnetic coupling of this utility model.

[0038] Figure 7 This is a schematic diagram of the structure of the magnetic pole of this utility model.

[0039] Figure 8 This is a schematic diagram of the connection between the rotating baffle and the isolation flange of this utility model. Figure 1 .

[0040] Figure 9 This is a schematic diagram of the connection between the rotating baffle and the isolation flange of this utility model. Figure 2 .

[0041] Figure 10 This is a cross-sectional structural diagram of the rotating baffle of this utility model.

[0042] Figure 11 This is an exploded view of the rotating baffle of this utility model.

[0043] The attached figures are labeled as follows:

[0044] 1. Vacuum chamber; 2. Observation flange; 3. Vacuum sight glass;

[0045] 4. Filter cover; 41. Polarizer; 42. Lower housing; 43. Upper housing;

[0046] 5. Magnetic coupling;

[0047] 51. Isolation flange; 511. Limiting groove block;

[0048] 52. Inner magnetic yoke shaft;

[0049] 53. External magnetic yoke cylinder; 531. Limiting post;

[0050] 54. Magnetic pole; 541. A magnetic pole; 542. B magnetic pole;

[0051] 6. Rotating baffle;

[0052] 61. Ultra-high vacuum flange; 611. Fixed key; 62. Driven pin;

[0053] 63. Viewing glass; 631. Light-transmitting area; 632. Opaque area;

[0054] 64. Rotary bearing; 65. Snap ring;

[0055] 7. First limiting mechanism; 71. First bearing; 72. Rotary shaft retaining ring; 73. Mounting hole retaining ring; 8. Second limiting mechanism; 81. Rotary bearing; 82. Limiting retaining ring;

[0056] 9. Locking mechanism; 91. Bottom end cap; 92. Hand-tightened knurled bolts;

[0057] 10. Pollution prevention agency;

[0058] 101. First metal shield; 102. Second metal shield; 103. Triangular observation port; 11. Transmission mechanism;

[0059] 111. Driving bevel gear; 112. Driven bevel gear; 113. Extension shaft; 114. Adjusting nut; 12. Electron beam gun; 13. Crucible; Detailed Implementation

[0060] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0061] As attached Figure 1-11 The diagram shows an ultra-high vacuum anti-glare observation window baffle, which includes: a vacuum chamber 1, an observation port flange 2, and a vacuum viewing port 3. The observation port flange 2 is fixedly installed on one side of the vacuum chamber 1, and the vacuum viewing port 3 is located at the other end of the observation port flange 2.

[0062] Among them, the vacuum viewing port 4 is a standard component, as described in patent CN109926748A; its main function is to provide ultra-high vacuum sealing while the central glass has high light transmittance to facilitate observation of the internal state of the vacuum chamber 1.

[0063] The observation window baffle also includes: a filter cover 4, a magnetic coupling 5, and a rotating baffle 6;

[0064] Among them, the filter cover 4 is used to reduce and shield the brightness of the light spot that reaches the human eye through the vacuum viewing port 3;

[0065] The filter cover 4 is installed on one side of the vacuum viewport 3; the other side of the vacuum viewport 3 is fixedly connected to the observation port flange 2 via a rotating baffle 6.

[0066] In a preferred embodiment, as shown in the appendix Figure 1-11 As shown, the filter housing 4 includes: a polarizer 41, a lower housing 42, and an upper housing 43.

[0067] The lower surface of the upper housing 43 is fixedly mounted on the upper surface of the lower housing 42. The polarizer 41 is placed in the recessed groove in the center of the lower housing 42. The polarizer 41 is located between the lower housing 42 and the upper housing 43. The lower surface of the lower housing 42 is fixedly mounted on one side of the vacuum viewing port 3.

[0068] The polarizer 41 is made of left-handed CPL circular polarizer material and consists of two parts, upper and lower. The lower housing 42 and upper housing 43 are made of plastic. The diameter of the polarizer 41 is smaller than the aperture of the groove in the lower housing 42 so that it can rotate in the groove. The upper housing 43 presses against the upper surface of the lower housing 42 so that the polarizer 41 is confined between the lower housing 42 and the upper housing 43. By adjusting the relative angle between the upper and lower parts of the polarizer 41, high-brightness light can be filtered.

[0069] In a preferred embodiment, as shown in the appendix Figure 1-11 As shown, the magnetic coupling 5 includes: an isolation flange 51, an inner magnetic yoke shaft 52, and an outer magnetic yoke cylinder 53;

[0070] A first limiting mechanism 7 is provided between the inner magnetic yoke shaft 52, which passes through the center hole of the isolation flange 51, and the isolation flange 51; the end of the inner magnetic yoke shaft 52 is fixedly connected to the outer magnetic yoke cylinder 53 through multiple pairs of evenly distributed magnetic poles 54.

[0071] Among them, the magnetically coupled rotating structure facilitates ultra-high vacuum sealing of the observation window baffle;

[0072] The external magnetic yoke 53 is movably fitted onto the outer surface of the isolation flange 51.

[0073] A limiting groove block 511 is fixedly installed on the outer surface of the isolation flange 51, wherein the isolation flange 51 is fixed to the limiting groove block 511 by bolts;

[0074] A limiting post 531 is fixedly installed on the outer surface of the outer magnetic yoke cylinder 53. The limiting post 531 is connected to the outer magnetic yoke cylinder 53 by a thread. The limiting post 531 is located in the waist groove of the limiting slot block 511 to limit the rotation of the outer magnetic yoke cylinder 53 by 90 degrees.

[0075] The limiting post 531 is inserted into the limiting groove 511, and a second limiting mechanism 8 is provided between the outer magnetic yoke 53 and the isolation flange 51; a locking mechanism 9 for fixing the outer magnetic yoke 53 is provided at the end of the isolation flange 51.

[0076] In a preferred embodiment, as shown in the appendix Figure 1-11 As shown, the rotating baffle 6 includes: an ultra-high vacuum flange 61, a driven pin 62, and a viewing glass 63;

[0077] The sight glass 63 located inside the ultra-high vacuum flange 61 is detachably mounted on the outer surface of the driven pin 62. Both the sight glass 63 and the driven pin 62 rotate inside the ultra-high vacuum flange 61. An anti-contamination mechanism 10 is provided between the ultra-high vacuum flange 61 and the sight glass 63.

[0078] The end of the isolation flange 51 away from the external magnetic yoke cylinder 53 is fixedly connected to the side of the ultra-high vacuum flange 61. A transmission mechanism 11 is provided between the driven pin shaft 62 and the inner magnetic yoke shaft 52. The filter cover 4 is installed on one side of the vacuum viewport 3. The other side of the vacuum viewport 3 is fixedly connected to the observation port flange 2 through the ultra-high vacuum flange 61.

[0079] Among them, the rotating baffle 6 can be installed at any angle of the observation port flange 2, which is safe, stable and reliable, and reduces irreversible material pollution.

[0080] In a preferred embodiment, as shown in the appendix Figure 1-11 As shown, the first limiting mechanism 7 includes: a first bearing 71 located at the center step hole of the isolation flange 51, a rotating shaft retaining ring 72, and a mounting hole retaining ring 73;

[0081] The first bearing 71 is fixedly sleeved on the outer surface of the inner magnetic yoke shaft 52. The rotating shaft retaining ring 72 and the mounting hole retaining ring 73 are both fixedly installed on the inner wall of the isolation flange 51, and the rotating shaft retaining ring 72 and the mounting hole retaining ring 73 clamp the first bearing 71.

[0082] Among them, the rotating shaft retaining ring 72 and the mounting hole retaining ring 73 limit the first bearing 71, thereby limiting the axial movement of the inner magnetic yoke rotating shaft 52.

[0083] In a preferred embodiment, as shown in the appendix Figure 1-11 As shown, the magnetic poles 54 uniformly distributed at the end of the inner magnetic yoke shaft 52 are designated as magnetic pole A 541, and the magnetic poles 54 uniformly distributed on the outer magnetic yoke cylinder 53 are designated as magnetic pole B 542. Thus, the polarity of magnetic pole A 541 is different from that of magnetic pole B 542.

[0084] Among them, the principle of attraction between opposite magnetic poles is used to make the inner magnetic yoke shaft 52 and the outer magnetic yoke cylinder 53 cooperate with the A magnetic pole 541 and the B magnetic pole 542 respectively and rotate synchronously.

[0085] Example: Six pairs of magnetic poles are evenly distributed on the inner magnetic yoke shaft 52 and the outer magnetic yoke cylinder 53, and sufficient torque is generated when the six A magnetic poles 541 and the six B magnetic poles 542 rotate.

[0086] In a preferred embodiment, as shown in the appendix Figure 1-11 As shown, the second limiting mechanism 8 includes: a rotary bearing 81 and a limiting snap ring 82;

[0087] The rotary bearing 81, which is fixedly installed on the isolation flange 51, contacts the inner wall of one end of the external magnetic yoke 53, and the limiting snap ring 82, which is fixedly installed on the isolation flange 51, contacts the end face of the other end of the external magnetic yoke 53.

[0088] Among them, the axial limit of the external magnetic yoke cylinder 53 is achieved by using the rotary bearing 81 and the limiting snap ring 82;

[0089] In a preferred embodiment, as shown in the appendix Figure 1-11 As shown, the locking mechanism 9 includes: a bottom end cap 91 and a hand-tightened knurled bolt 92;

[0090] The bottom end cap 91 is fixedly installed on the end face of the isolation flange 51. The hand-tightened knurled bolt 92 is threaded onto the bottom end cap 91, and the end of the hand-tightened knurled bolt 92 passes through the bottom end cap 91 and contacts the external magnetic yoke 53.

[0091] The bottom end cap 91 is tightened by a set screw through a cylindrical threaded hole and a 90-degree V-groove at the bottom of its isolation flange 51 to achieve axial and radial positioning. The end face threaded hole of the bottom end cap 91 is fitted with a hand-tightened knurled bolt 92 for manual tightening to tighten the tail of the outer magnetic yoke cylinder 53, thereby limiting the radial movement of the outer magnetic yoke cylinder 53 and ensuring that the inner magnetic yoke shaft 52 cannot rotate.

[0092] In a preferred embodiment, as shown in the appendix Figure 1-11 As shown, the anti-pollution mechanism 10 includes: a first metal shield 101 and a second metal shield 102;

[0093] The first metal shield 101 is fixedly installed on the port of the ultra-high vacuum flange 61 near the vacuum viewing port 3, and the second metal shield 102 is detachably installed on the port of the ultra-high vacuum flange 61 near the observation port flange 2.

[0094] The second metal shield 102 is designed to be detachable so that if a misoperation occurs during observation and material splashes cause contamination, it can be dealt with quickly to ensure the observation effect.

[0095] The steps for replacing the second metal cover 102 are as follows: remove the second metal cover 102 located on the driven pin 62 and the fixing key 611, then disassemble the connection between the viewing glass 63 and the driven bevel gear 112, remove the viewing glass 63 for replacement, and pay attention to the installation position of the opaque area 632 of the viewing glass 63 when removing it.

[0096] The two ends of the moving pin 62 are rotatably connected to the first metal cover 101 and the second metal cover 102, respectively;

[0097] One end of the driven pin 62 is connected to the first metal cover 101 via a rotary bearing 64, thereby limiting its axial movement using the rotary bearing 64; while the other end of the driven pin 62 is placed in the stepped limiting shaft hole of the second metal cover 102 with clearance fit, and is axially limited by a snap ring 65.

[0098] Both the first metal shield 101 and the second metal shield 102 have through and overlapping triangular observation ports 103; the viewing port glass 63 is divided into: a light-transmitting area 631 and a light-blocking area 632 corresponding to the triangular observation port 103.

[0099] The viewing glass 63 is transparent and visible, but after special coating treatment, the opaque area 632 is formed into a glass triangle area that is not visible and is set to the closed state. The triangular observation port 103 of the first metal shield 101 and the triangular observation port 103 on the second metal shield 102 overlap in this opaque area 632. At this time, the second metal shield 102 and the opaque area 632 will be contaminated by the material in the coating process, but it will not affect the transparent area 631. Therefore, when it is opened, the transparent area 631 overlaps with the triangular observation port 103 of the first metal shield 101 and the triangular observation port 103 on the second metal shield 102, so that observation can be performed.

[0100] A fixing key 611 is fixedly installed on the port of the ultra-high vacuum flange 61 near the observation port flange 2 to restrict the radial movement of the second metal shield 102; so as to restrict the radial movement of the second metal shield 102 by means of the fixing key 611.

[0101] In a preferred embodiment, as shown in the appendix Figure 1-11 As shown, the transmission mechanism 11 includes: a driving bevel gear 111 and a driven bevel gear 112;

[0102] An extension shaft 113 is threaded to the end face of the inner magnetic yoke shaft 52, and an adjusting nut 114 that contacts the inner magnetic yoke shaft 52 is threaded onto the outer surface of the extension shaft 113. The driving bevel gear 111 is fixedly sleeved on the other end of the extension shaft 113.

[0103] The extension shaft 113 has a threaded connection that serves to fix it to the inner magnetic yoke shaft 52 and extend the transmission distance. The extension shaft 113 is fitted with a drive bevel gear 111, which is fixed by a set screw to limit its axial and radial displacement.

[0104] Driven bevel gear 112 is fixedly sleeved on the outer surface of driven pin 62. Driven pin 62 is fixed with set screws to limit its axial position. The stepped shaft on driven bevel gear 112 is aligned with the hole in viewing glass 63 and assembled with bolts so that driven pin 62 can drive viewing glass 63 to rotate. Driven bevel gear 111 meshes with driven bevel gear 112.

[0105] The spatial relationship between the extension shaft 113 and the driven pin shaft 62 enables the driving bevel gear 111 and the driven bevel gear 112 to mesh with a 90-degree transmission relationship. As the driving bevel gear 111 transmits torque, it drives the driven bevel gear 112 to rotate and drives the connected viewing glass 63 to rotate.

[0106] If the external magnetic yoke cylinder 53 is rotated counterclockwise to reach the limit position, the external magnetic yoke cylinder 53 drives the inner magnetic yoke shaft 54 ​​to rotate, which in turn drives the driven bevel gear 112 through the active bevel gear 111, and the driven pin shaft 62 drives the viewing glass 63. At this time, the light in the vacuum chamber 1 can penetrate the vacuum viewing port 3. If the light intensity is bright, the intensity of the light passing through the filter cover 4 can be changed by rotating the upper and lower layers of the left-hand CPL circular polarizer 41. If the observed object is dark, the filter cover 4 can be removed, and a flashlight or other lighting tool can be used to shine into the triangular observation port 103 to observe the internal object and its state through light reflection. After observation, the filter cover 4 is placed on the vacuum viewing port 3, and the external magnetic yoke cylinder 53 is rotated clockwise to reach the limit position. At this time, the viewing glass 63 is closed, and light and materials cannot pass through. At this time, the thin film material growth can proceed normally.

[0107] In this application, the transmission mechanism 11 uses a bevel gear rotation structure to drive the viewport glass 63 to rotate, thereby utilizing the characteristics of the viewport glass 63 to close and open the light transmission.

[0108] Working principle of this utility model:

[0109] When using the ultra-high vacuum anti-glare observation window baffle, the observation port flange 2 on the vacuum chamber 1 is installed at a 40-degree angle, which can more accurately focus the observation port on the electron beam gun 12. The bright position on the electron beam gun 12 is located at the position of the crucible 13. The ultra-high vacuum flange 61 is connected to the observation port flange 2, and the vacuum viewport 3 is installed on the other side of the ultra-high vacuum flange 61 to achieve ultra-high vacuum sealing. A filter cover 4 is placed on the vacuum viewport 3.

[0110] If it is necessary to observe the high-brightness light spot generated inside the crucible 13, the operator first unlocks the external magnetic yoke cylinder 53 by hand-tightening the knurled bolt 92, and then controls the limiting post 531 to slide in the limiting groove block 511. Then, the external magnetic yoke cylinder 53 drives the inner magnetic yoke shaft 54 ​​to rotate through several pairs of evenly distributed magnetic poles 54. The inner magnetic yoke shaft 54 ​​drives the extension shaft 113, the driving bevel gear 111, the driven bevel gear 112, the driven pin 62 and the viewing glass 63 to rotate in sequence. The light-transmitting area 631 is aligned with the triangular observation port 103 on the first metal shield 101 and the triangular observation port 103 on the second metal shield 102.

[0111] Thus, the high-brightness light spot generated inside the crucible 13 will pass sequentially through: the observation port flange 2, the triangular observation port 103 on the second metal shield 102, the light-transmitting area 631 of the viewing glass 63, the triangular observation port 103 of the first metal shield 101, the vacuum viewing port 3, and the filter cover 4.

[0112] If no further observation is required, the limiting post 531 is used to sequentially rotate the outer magnetic yoke cylinder 53, the inner magnetic yoke shaft 54, the extension shaft 113, the driving bevel gear 111, the driven bevel gear 112, the driven pin 62, and the viewing glass 63. This causes the opaque area 632 to coincide with the triangular observation port 103 on the first metal shield 101 and the triangular observation port 103 on the second metal shield 102. As a result, the second metal shield 102 and the opaque area 632 will be contaminated by the materials used in the coating process, but this will not affect other areas of the viewing glass 63, namely the translucent area 631. Finally, the outer magnetic yoke cylinder 53 is locked by hand-tightening the knurled bolt 92.

[0113] It should be noted that, in this document, the driving method can be replaced; magnetic coupling drive can be replaced by magnetohydrodynamic drive, rotary bellows drive, etc.; the driving structure can be changed to spur gear meshing, and gear rack structures can also achieve the same function; and relational terms such as "first" and "second" are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus.

[0114] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. An ultra-high vacuum anti-glare observation window shield, comprising: a vacuum cavity (1), an observation port flange (2) and a vacuum viewport (3), the observation port flange (2) being fixedly installed on one side of the vacuum cavity (1), and the vacuum viewport (3) being arranged at the other end of the observation port flange (2); characterized in that the observation window shield further comprising: a filter cover (4), a magnetic coupling (5) and a rotating shield (6); the filter cover (4) being installed on one side of the vacuum viewport (3); the other side of the vacuum viewport (3) being fixedly connected with the observation port flange (2) through the rotating shield (6).

2. An ultra-high vacuum anti-glare viewing window shutter according to claim 1, wherein: the filter cover (4) comprising: a polarizer (41), a lower shell (42) and an upper shell (43), the lower surface of the upper shell (43) being fixedly installed on the upper surface of the lower shell (42), the polarizer (41) being placed in a sink in the center of the lower shell (42), the polarizer (41) being located between the lower shell (42) and the upper shell (43), and the lower surface of the lower shell (42) being fixedly installed on one side of the vacuum viewport (3).

3. An ultra-high vacuum anti-glare viewing window shield according to claim 1, wherein: the magnetic coupling (5) comprising: an isolation flange (51), an inner magnetic yoke rotating shaft (52) and an outer magnetic yoke cylinder (53); the inner magnetic yoke rotating shaft (52) passing through the center hole of the isolation flange (51) being provided with a first limiting mechanism (7) between the isolation flange (51); the end of the inner magnetic yoke rotating shaft (52) being fixedly connected with the outer magnetic yoke cylinder (53) through a plurality of pairs of uniformly distributed magnetic poles (54); the outer magnetic yoke cylinder (53) being movably sleeved on the outer surface of the isolation flange (51), the outer surface of the isolation flange (51) being fixedly installed with a limiting groove block (511), the outer surface of the outer magnetic yoke cylinder (53) being fixedly installed with a limiting column (531), the limiting column (531) passing through the inside of the limiting groove block (511), the outer magnetic yoke cylinder (53) and the isolation flange (51) being provided with a second limiting mechanism (8) therebetween; the end of the isolation flange (51) being provided with a locking mechanism (9) for fixing the outer magnetic yoke cylinder (53).

4. An ultra-high vacuum anti-glare viewing window shutter according to claim 3, wherein: the rotating shield (6) comprising: an ultra-high vacuum flange (61), a driven pin shaft (62) and a viewport glass (63); the viewport glass (63) inside the ultra-high vacuum flange (61) being detachably installed on the outer surface of the driven pin shaft (62), the viewport glass (63) and the driven pin shaft (62) both rotating inside the ultra-high vacuum flange (61), the ultra-high vacuum flange (61) and the viewport glass (63) being provided with an anti-pollution mechanism (10) therebetween; the end of the isolation flange (51) away from the outer magnetic yoke cylinder (53) being fixedly connected with the side surface of the ultra-high vacuum flange (61), the driven pin shaft (62) and the inner magnetic yoke rotating shaft (52) being provided with a transmission mechanism (11) therebetween; the vacuum viewport (3) being fixedly connected with the observation port flange (2) through the ultra-high vacuum flange (61).

5. An ultra-high vacuum anti-glare viewing window shutter according to claim 3, wherein: The first limiting mechanism (7) comprises a first bearing (71) located at a center step hole of the isolation flange (51), a rotating shaft snap spring (72), and a mounting hole snap spring (73); The first bearing (71) is fixedly sleeved on the outer surface of the inner magnetic yoke rotating shaft (52), the rotating shaft snap spring (72) and the mounting hole snap spring (73) are both fixedly installed on the inner wall of the isolation flange (51), and the rotating shaft snap spring (72) and the mounting hole snap spring (73) clamp the first bearing (71).

6. An ultra-high vacuum anti-glare viewing port shutter according to claim 3, wherein: The magnetic poles (54) uniformly distributed at the end of the inner magnetic yoke rotating shaft (52) are A magnetic poles (541), the magnetic poles (54) uniformly distributed at the outer magnetic yoke cylinder (53) are B magnetic poles (542), and the polarities of the A magnetic poles (541) and the B magnetic poles (542) are different.

7. An ultra-high vacuum anti-glare viewing port shutter according to claim 3, wherein: The second limiting mechanism (8) comprises a rotary bearing (81) and a limiting snap spring (82); The rotary bearing (81) is fixedly installed on the isolation flange (51) and in contact with the inner wall of one end of the outer magnetic yoke cylinder (53), and the limiting snap spring (82) is fixedly installed on the isolation flange (51) and in contact with the end face of the other end of the outer magnetic yoke cylinder (53).

8. An ultra-high vacuum anti-glare viewing window shutter according to claim 3, wherein: The locking mechanism (9) comprises a bottom end cover (91) and a hand-tight knurled bolt (92); The bottom end cover (91) is fixedly installed on the end face of the isolation flange (51), the hand-tight knurled bolt (92) is threadedly installed on the bottom end cover (91), and one end of the hand-tight knurled bolt (92) penetrating through the bottom end cover (91) is in contact with the outer magnetic yoke cylinder (53).

9. An ultra-high vacuum anti-glare viewing window shutter according to claim 4, wherein: The anti-pollution mechanism (10) comprises a first metal shade (101) and a second metal shade (102); The first metal shade (101) is fixedly installed on the ultra-high vacuum flange (61) close to the port of the vacuum viewport (3), the second metal shade (102) is detachably installed on the ultra-high vacuum flange (61) close to the port of the observation port flange (2), both ends of the driven pin shaft (62) are rotatably connected with the first metal shade (101) and the second metal shade (102), respectively, and a triangular observation port (103) penetrating through and overlapping with each other is formed in each of the first metal shade (101) and the second metal shade (102); the viewport glass (63) is divided into a light-transmitting region (631) and a non-light-transmitting region (632) corresponding to the triangular observation port (103); The port of the ultra-high vacuum flange (61) close to the observation port flange (2) is fixedly installed with a fixed key (611) for limiting the radial movement of the second metal shade (102).

10. An ultra-high vacuum anti-glare viewing window shutter according to claim 4, wherein: The transmission mechanism (11) comprises a driving bevel gear (111) and a driven bevel gear (112); The end surface of the inner magnetic yoke rotating shaft (52) is threadedly connected with an extension shaft (113), and the outer surface of the extension shaft (113) is threadedly sleeved with an adjusting nut (114) in contact with the inner magnetic yoke rotating shaft (52), the driving bevel gear (111) is fixedly sleeved at the other end of the extension shaft (113), the driven bevel gear (112) is fixedly sleeved at the outer surface of the driven pin shaft (62), and the driving bevel gear (111) is meshingly connected with the driven bevel gear (112).

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