Gate valve for vacuum equipment

Abstract

The utility model discloses a gate valve for vacuum equipment, which comprises a fixed frame, a gate valve, a gate valve and a gate valve, the fixed frame is mounted at an opening of a process cavity in a matching manner, a gate plate matched with the opening in a covering manner is arranged in the fixed frame, and the gate plate moves in the fixed frame; when the door plate is completely moved into the fixed frame, the door plate covers the opening relative to the opening; and when the door plate is moved out of the fixed frame, the door plate is opened relative to the opening. According to the vacuum equipment, the door plate moves along one side of the horizontal direction of the fixed frame, so that the door plate is closed or opened relative to the opening of the process cavity, the overall height of the vacuum equipment is reduced, and the requirement for the vertical height of a plant is lowered.

Description

Technical Field

[0001] This utility model relates to the field of engineering components technology, and in particular to a door valve for vacuum equipment. Background Technology

[0002] During the coating process, the substrate needs to be moved between the various coating chambers and the transport chamber. In order to prevent the gases in the different coating chambers from contaminating each other, gate valves (also called slide gate valves) need to be installed between the coating chambers and between the coating chamber and the transport chamber.

[0003] In this way, opening the valve allows the substrate in the transport chamber to be transported to the coating chamber for coating, or the substrate to be moved from the current coating chamber to the next coating chamber; closing the valve creates a vacuum-sealed space within the vacuum coating chamber, where the substrate is coated.

[0004] Existing valves typically employ a vertical lifting mechanism, which requires a high overall height for the equipment and a high vertical height for the factory building. Furthermore, the valves have poor sealing performance after being closed, affecting the coating quality of the coated products. Utility Model Content

[0005] This invention provides a gate valve for vacuum equipment, which solves the problem of the high overall height of vacuum equipment in the prior art.

[0006] The technical solution of this utility model is a door valve for vacuum equipment, comprising: a fixed frame, the fixed frame being matched and installed in the opening of the process chamber, the fixed frame having a door panel that matches and covers the opening, and the door panel being movable within the fixed frame;

[0007] When the door panel is completely moved into the fixed frame, the door panel closes relative to the opening; when the door panel is moved out of the fixed frame, the door panel opens relative to the opening.

[0008] Furthermore, the door panel includes an inner panel and an outer panel;

[0009] The outer layer plate is connected to the inner layer plate via multiple clamping shafts, and the outer layer plate can move relative to the inner layer plate via the clamping shafts;

[0010] The outer layer plate and the inner layer plate can form a sealing structure through the clamping shaft, and are used by the inner layer plate to cover and seal the opening.

[0011] Furthermore, the pressing shaft rotates relative to the inner layer plate and the outer layer plate, and the rotation of the pressing shaft can increase the distance between the inner layer plate and the outer layer plate, so that the outer layer plate presses against the inner layer plate.

[0012] Furthermore, a transmission assembly is provided at the top and / or bottom of the outer layer plate, the transmission assembly being used to drive the door panel to move within the fixed frame and the sealed chamber.

[0013] Furthermore, the transmission assembly includes a rack, a gear, and a drive mechanism;

[0014] The outer layer plate has a rack at its top and / or bottom and along its direction of movement, and the rack passes through the top and / or bottom of the outer layer plate;

[0015] A drive device is installed on the base of the vacuum equipment, and a gear is connected to the output end of the drive device. The gear meshes with the rack.

[0016] Furthermore, the inner layer plate is provided with a plurality of limiting blocks at its top and / or bottom, the limiting blocks being used to restrict the movement of the inner layer plate.

[0017] Furthermore, the inner layer plate is provided with multiple reinforcing ribs.

[0018] Furthermore, a sealing element is provided around the opposite side of both the door panel and the fixed frame.

[0019] Furthermore, a sealing chamber is provided on the horizontal side of the fixed frame; the door panel moves back and forth between the fixed frame and the sealing chamber;

[0020] Specifically, when the door panel is fully moved into the fixed frame, the door panel closes relative to the opening; when the door panel is fully moved into the sealed chamber, the door panel opens relative to the opening.

[0021] Furthermore, at least one observation window is provided on the side of the fixed frame and the sealed chamber that is away from each other.

[0022] Compared with the prior art, the present invention has at least the following beneficial effects:

[0023] 1. This utility model allows the door panel to move along one side of the fixed frame in the horizontal direction, thereby enabling the door panel to close or open relative to the process cavity, thus reducing the overall height of the vacuum equipment and consequently reducing the vertical height requirements of the factory building.

[0024] 2. When the door panel of this utility model is moved into the fixed frame and closes with the opening of the process cavity, the inner layer plate reaches the designated position first, and the outer layer plate can continue to move along the moving direction of the door panel, thereby driving the pressing shaft to rotate, so as to squeeze the inner layer plate to form a sealing structure, thereby realizing the sealing of the inner layer plate relative to the opening of the process cavity, thereby improving the sealing performance of the door valve and improving the coating quality of the coated product. Attached Figure Description

[0025] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains; the terminology used herein in the specification is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention; the terms "comprising" and "having," and any variations thereof, in the specification, claims, and accompanying drawings of this invention are intended to cover non-exclusive inclusion. The terms "first," "second," etc., in the specification, claims, or accompanying drawings of this invention are used to distinguish different objects and not to describe a particular order.

[0026] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0027] Figure 1 This is a schematic diagram of the structure of the valve proposed in this utility model;

[0028] Figure 2 This is a cross-sectional view of the door panel proposed in this utility model;

[0029] Figure 3 for Figure 2 Enlarged schematic diagram of reference numeral A in the attached figure;

[0030] Figure 4 This is a schematic diagram of the structure of the door panel proposed in this utility model;

[0031] Figure 5 This is a schematic diagram of the transmission component proposed in this utility model.

[0032] Figure label:

[0033] 10. Fixed frame;

[0034] 20. Sealed chamber; 201. Sealing reinforcement rib;

[0035] 30. Door panel;

[0036] 301. Inner layer plate; 302. Outer layer plate; 303. Pressure shaft; 304. Limiting block; 305. Reinforcing rib;

[0037] 40. Transmission components;

[0038] 401. Rack; 402. Gear; 403. Drive unit;

[0039] 50. Observation window. Detailed Implementation

[0040] To make the technical problem to be solved, the technical solution, and the beneficial effects of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model. Therefore, a feature pointed out in this specification is used to describe one feature of one embodiment of the present utility model, and does not imply that every embodiment of the present utility model must have the described feature. Furthermore, it should be noted that this specification describes many features. Although certain features may be combined to illustrate possible system designs, these features may also be used in other combinations not explicitly stated. Therefore, unless otherwise stated, the described combinations are not intended to be limiting.

[0041] The principle and structure of this utility model will be described in detail below with reference to the accompanying drawings and embodiments.

[0042] In one embodiment, refer to Appendix Figure 1 This utility model proposes a door valve for a vacuum equipment, comprising: a fixed frame 10, wherein the fixed frame 10 is matched and installed in the opening of a process chamber (not shown, the same throughout), and a door plate 30 is provided inside the fixed frame 10 to match and cover the opening of the process chamber, and the door plate 30 is movable within the fixed frame 10.

[0043] Specifically, when the door panel 30 is completely moved into the fixed frame 10, the door panel 30 closes the opening of the process cavity; when the door panel 30 is moved out of the fixed frame 10, the door panel 30 opens the opening of the process cavity.

[0044] It should be noted that the door panel 30 proposed in this embodiment is rectangular in shape. The fixing frame 10 has a second opening corresponding to the opening of the process cavity, so that the door panel 30 can be sealed by closing with the opening cover of the process cavity through this second opening. The opening of the process cavity is used for inputting or outputting materials, and is not limited here.

[0045] Compared to existing technologies where valves typically use a vertical lifting method, which places higher demands on the overall height of the vacuum equipment and the vertical height of the factory, this embodiment allows the door panel 30 to move along one side of the fixed frame 10 in the horizontal direction. This enables the door panel 30 to close or open relative to the process cavity, thereby reducing the overall height of the vacuum equipment and the vertical height requirement of the factory.

[0046] In one embodiment, refer to Appendix Figure 2 and 4The door panel 30 includes a rectangular inner layer 301 and a rectangular outer layer 302; that is, the door panel 30 is a double-layer structure composed of the inner layer 301 and the outer layer 302.

[0047] The outer layer plate 302 is connected to the inner layer plate 301 through multiple clamping shafts 303, and the outer layer plate 302 can move relative to the inner layer plate 301 through the clamping shafts 303;

[0048] The outer layer plate 302 and the inner layer plate 301 can form a sealing structure through the clamping shaft 303, and are used by the inner layer plate 301 to cover and seal the opening of the process cavity.

[0049] It should be noted that the inner layer plate 301 has an opening facing the process cavity and is used to seal the process cavity. Furthermore, the outer layer plate 302 has multiple vertically arranged clamping shafts 303 spaced apart along its moving direction on the side facing the inner layer plate 301.

[0050] In this way, when the door panel 30 moves into the fixed frame 10 and closes relative to the opening of the process cavity, after the inner layer plate 301 reaches the designated position, the outer layer plate 302 can still continue to move along the moving direction of the door panel 30, thereby driving the pressing shaft 303 to rotate, so as to squeeze the inner layer plate 301 to form a sealing structure, thereby realizing the sealing of the inner layer plate 301 relative to the opening of the process cavity, thereby improving the sealing performance of the valve and improving the coating quality of the coated product.

[0051] It should be noted that the middle and both ends of each side of the outer layer plate 302 are connected to the inner layer plate 301 by at least one clamping shaft 303. Of course, the number of clamping shafts 303 is determined according to actual needs and is not limited here.

[0052] In order to further improve the sealing effect of the inner layer plate 301 relative to the opening of the process cavity, thereby improving the sealing performance of the valve and the coating quality of the coated product, the clamping shaft 303 can rotate relative to the inner layer plate 301 and the outer layer plate 302, and the rotation of the clamping shaft 303 can increase the distance between the inner layer plate 301 and the outer layer plate 302, so that the outer layer plate 302 presses the inner layer plate 301.

[0053] See attached document Figure 3 When the inner layer plate 301 leaves the opening of the process cavity, the outer layer plate 302 is driven by the transmission component 40 to move first, and the distance between the inner layer plate 301 and the outer layer plate 302 gradually decreases. Then, the inner layer plate 301 moves together with the outer layer plate 302 under the drive of the clamping shaft 303 until the entire inner layer plate 301 completely leaves the opening of the process cavity.

[0054] When the inner layer plate 301 seals the opening of the process cavity, after the inner layer plate 301 moves to the designated position, the limiting block 304 will restrict the inner layer plate 301 from continuing to move, while the outer layer plate 302 can still continue to move along its moving direction, so that the distance between the inner layer plate 301 and the outer layer plate 302 gradually increases, and the outer layer plate 302 tightly squeezes the inner layer plate 301 through the pressing shaft 303.

[0055] It should be understood that when the inner layer plate 301 is in the state of sealing the opening of the process cavity, the distance between the inner layer plate 301 and the outer layer plate 302 is the largest when the included angle θ between the clamping shaft 303 and the outer layer plate 302 is 90°, and the clamping effect of the inner layer plate 301 is the best. When the inner layer plate 301 leaves the opening of the process cavity, the outer layer plate 302 moves first, and then moves the inner layer plate 301 with it. The included angle θ between the clamping shaft 303 and the outer layer plate 302 is less than 90°.

[0056] To further improve the sealing effect of the opening of the inner layer plate 301 relative to the process cavity, thereby improving the sealing performance of the valve, all the pressing shafts 303 along the opposite sides of the outer layer plate 302 are arranged in parallel, and all the pressing shafts 303 do not intersect.

[0057] In one embodiment, to ensure that the door panel 30 can move stably along one side of the fixed frame 10 in the horizontal direction, refer to the attached... Figure 4-5 The top and / or bottom of the outer layer plate 302 are provided with a transmission assembly 40, which is used to drive the door plate 30 to move within the fixed frame 10 and the sealing chamber 20.

[0058] It should be noted that, in this embodiment, transmission components 40 are provided at both the top and bottom of the outer layer plate 302 for illustrative purposes.

[0059] In one embodiment, to ensure that the vacuum state within the vacuum device is maintained during the valve opening process, refer to the attached... Figure 1 A sealing chamber 20 is provided on the horizontal side of the fixed frame 10; the door panel 30 moves back and forth within the fixed frame 10 and the sealing chamber 20;

[0060] Specifically, when the door panel 30 is completely moved into the fixed frame 10, the door panel 30 closes the opening of the process cavity; when the door panel 30 is completely moved into the sealing chamber 20, the door panel 30 opens the opening of the process cavity.

[0061] It should be noted that the sealing chamber 20 proposed in this embodiment is rectangular in shape, and the surface of the sealing chamber 20 is provided with crisscrossing sealing reinforcing ribs 201, forming a regular square grid. These sealing reinforcing ribs 201 are evenly distributed at predetermined intervals to ensure that the sealing chamber 20 is subjected to balanced forces in all directions.

[0062] Specifically, refer to the appendix Figure 4-5 This embodiment provides a transmission component 40: the transmission component 40 includes a rack 401, a gear 402 and a drive device 403; the drive device 403 proposed in this embodiment is preferably a drive motor.

[0063] The top and bottom of the outer layer plate 302 are provided with racks 401 along its moving direction, and the racks 401 penetrate the top and bottom of the outer layer plate 302.

[0064] A drive device 403 is installed on the base of the vacuum equipment. The output end of the drive device 403 is connected to a gear 402, which meshes with the rack 401.

[0065] In this way, when the door panel 30 needs to move back and forth within the fixed frame 10 and the sealing chamber 20, the control unit in the vacuum equipment will activate the drive device 403. The drive device 403 will drive the gear 402 to rotate in the forward or reverse direction, thereby driving the rack 401 to move horizontally relative to the gear 402. At the same time, the rack 401 will drive the entire door panel 30 to move through the outer plate 302.

[0066] When the drive device 403 drives the gear 402 to rotate in the reverse direction, the rack 401 will move the entire door panel 30 into the sealing chamber 20 via the outer layer plate 302, and open the inner layer plate 301 relative to the process cavity, so that the substrate containing the product to be coated can be moved from the transport chamber to the process cavity (the process cavity proposed in this embodiment is equivalent to the coating chamber, the same throughout the text) for coating, or the substrate can be moved from the current process cavity to the next process cavity; while when the drive device 403 drives the gear 402 to rotate in the forward direction, the rack 401 will move the entire door panel 30 into the sealing chamber 20 via the outer layer plate 302, and open the inner layer plate 301 relative to the process cavity, so that the substrate containing the product to be coated can be moved from the transport chamber to the process cavity (the process cavity proposed in this embodiment is equivalent to the coating chamber, the same throughout the text) for coating, or the substrate can be moved from the current process cavity to the next process cavity; and when the drive device 403 drives the gear 402 to rotate in the forward direction, the rack 401 will move the entire door panel 30 into the sealing chamber 20 via the outer layer plate 302, and open the inner layer plate 301 relative to the process cavity 20, so that the inner layer plate 301 can be moved from the current process cavity to the next process cavity. The outer layer plate 302 will move the entire door panel 30 into the fixed frame 10, and the inner layer plate 301 will close the opening of the process cavity after reaching the designated position. Then the outer layer plate 302 can continue to move along the moving direction of the door panel 30, thereby driving the pressing shaft 303 to squeeze the inner layer plate 301 and form a sealing structure, thereby achieving the sealing of the inner layer plate 301 relative to the opening of the process cavity, thus forming a vacuum sealed space in the process cavity, and coating the product to be coated on the substrate in the vacuum sealed space.

[0067] To ensure that the outer layer plate 302 can better compress the inner layer plate 301 through the clamping shaft 303, thereby ensuring the positional accuracy of the inner layer plate 301 and improving the sealing performance between the inner layer plate 301 and the opening of the process cavity, thus improving the sealing performance of the valve, please refer to the attached document. Figure 4 The inner layer plate 301 is provided with a plurality of limiting blocks 304 at its top and / or bottom, and the limiting blocks 304 are used to restrict the movement of the inner layer plate 301.

[0068] It should be noted that this embodiment uses the example of multiple limiting blocks 304 provided at the top and bottom of the inner layer plate 301.

[0069] Therefore, when the door panel 30 moves into the fixed frame 10 and closes and seals the opening of the process cavity, after the inner layer plate 301 reaches the designated position, the limiting block 304 will restrict the inner layer plate 301 from continuing to move, while the outer layer plate 302 can still continue to move along the moving direction of the door panel 30, thereby driving the pressing shaft 303 to squeeze the inner layer plate 301 and form a sealing structure, thereby realizing the closing and sealing of the inner layer plate 301 relative to the opening of the process cavity.

[0070] In one embodiment, refer to Appendix Figure 1 and 4 The inner layer plate 301 is provided with a plurality of reinforcing ribs 305.

[0071] It should be noted that this embodiment uses the example of an inner layer plate 301 having crisscrossing reinforcing ribs 305 forming a regular square grid. These reinforcing ribs 305 are evenly distributed at predetermined intervals to enhance the strength of the inner layer plate 301, keeping it flat and preventing the inner layer plate 301 from warping during sealing, thus reducing the sealing effect.

[0072] In order to improve the sealing effect of the door panel 30 and thus improve the sealing performance of the door valve, the inner layer plate 301 and the fixed frame 10 are both surrounded by sealing elements (not shown, the same throughout the text).

[0073] It should be noted that the sealing element proposed in this embodiment is preferably a silicone sealing ring that is resistant to high temperature and high pressure.

[0074] In one embodiment, refer to Appendix Figure 1 At least one observation window 50 is provided on the side of the fixed frame 10 and the sealed chamber 20 that are far apart from each other.

[0075] This allows users to easily observe the movement of the door panel 30 through the observation window 50, and to carry out targeted repairs if any abnormalities are found, ensuring the production efficiency and coating quality of the vacuum equipment.

[0076] Obviously, the embodiments described above are only some embodiments of this utility model, not all embodiments. The accompanying drawings show preferred embodiments of this utility model, but do not limit the patent scope of this utility model. This utility model can be implemented in many different forms; rather, the purpose of providing these embodiments is to provide a more thorough and comprehensive understanding of the disclosure of this utility model. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing specific embodiments, or make equivalent substitutions for some of the technical features. Any equivalent structures made using the content of this utility model specification and drawings, directly or indirectly applied to other related technical fields, are similarly within the patent protection scope of this utility model.

Claims

1. A gate valve for a vacuum apparatus, characterized by, The utility model relates to a sealing structure of vacuum equipment, including: Fixed frame (10) is matched to install in the opening of process cavity, be equipped with door plate (30) with the opening matched lid in the fixed frame (10), and the door plate (30) moves in the fixed frame (10), Wherein, when the door plate (30) is completely moved into the fixed frame (10), the door plate (30) is closed relative to the opening, when the door plate (30) is moved out of the fixed frame (10), the door plate (30) is opened relative to the opening.

2. Gate valve for a vacuum apparatus according to claim 1, characterized in that The door plate (30) includes inner layer plate (301) and outer layer plate (302), The outer layer plate (302) is connected with the inner layer plate (301) through a plurality of compression shafts (303), and the outer layer plate (302) moves relative to the inner layer plate (301) through the compression shaft (303), Wherein, the outer layer plate (302) and the inner layer plate (301) can form a sealing structure through the compression shaft (303), and are used for closing and sealing the opening.

3. Gate valve for a vacuum apparatus according to claim 2, characterized in that The compression shaft (303) rotates relative to the inner layer plate (301) and the outer layer plate (302), and the rotation of the compression shaft (303) can increase the distance between the inner layer plate (301) and the outer layer plate (302), so that the outer layer plate (302) compresses the inner layer plate (301).

4. The gate valve for a vacuum apparatus according to claim 2, characterized by, The top and / or bottom of the outer layer plate (302) is provided with a transmission assembly (40), which is used to drive the door plate (30) to move in the fixed frame (10) and the sealing chamber (20).

5. Gate valve for a vacuum apparatus according to claim 4, characterized in that The transmission assembly (40) includes a rack (401), a gear (402) and a driving device (403), The top and / or bottom of the outer layer plate (302) is provided with a rack (401) along the moving direction thereof, and the rack (401) penetrates the top and / or bottom of the outer layer plate (302); The base of the vacuum equipment is provided with a driving device (403), the output end of the driving device (403) is connected with a gear (402), and the gear (402) is engaged with the rack (401).

6. The gate valve for a vacuum apparatus according to claim 2, characterized by, The top and / or bottom of the inner layer plate (301) is provided with a plurality of limiting blocks (304), which are used to limit the movement of the inner layer plate (301).

7. The gate valve for a vacuum apparatus according to claim 2, characterized by, The inner layer plate (301) is provided with a plurality of reinforcing ribs (305).

8. The gate valve for a vacuum apparatus according to claim 1, characterized by, The opposite sides of the door plate (30) and the fixed frame (10) are both surrounded by sealing members.

9. The gate valve for a vacuum apparatus according to claim 1, characterized by, The horizontal side of the fixed frame (10) is provided with a sealing chamber (20), and the door plate (30) moves back and forth in the fixed frame (10) and the sealing chamber (20), Wherein, when the door plate (30) is completely moved into the fixed frame (10), the door plate (30) is closed relative to the opening, when the door plate (30) is completely moved into the sealing chamber (20), the door plate (30) is opened relative to the opening.

10. Gate valve for a vacuum apparatus according to claim 9, characterized in that The fixed frame (10) and the sealing chamber (20) are provided with at least one observation window (50) on the side away from each other.

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