Automatic detection equipment for six surfaces of chip

Abstract

The utility model discloses automatic detection equipment for six surfaces of a chip, which is applied to the field of chip detection and comprises a scanning table, a supporting gear is arranged at the top of the scanning table, a supporting frame is fixedly connected to the top of the supporting gear, four first detection lenses are mounted in the supporting frame, and a second detection lens is mounted in the supporting frame. A second detection lens is further installed in the supporting frame. The top of the scanning table is provided with a motor through a support. The output end of the motor is fixedly sleeved with a driving gear engaged with the supporting gear. Through the arrangement of the first detection lens, the second detection lens and the scanning table, detection of six surfaces and the interior of the chip can be met at a time, and the detection efficiency and the working efficiency of the chip can be improved. Meanwhile, a motor is arranged to drive a driving gear to rotate, the driving gear drives a supporting gear to drive a supporting frame to rotate, the supporting frame rotates to drive four first detection lenses to change positions, and four 90-degree right angles of the chip can be detected.

Description

Technical Field

[0001] This utility model relates to the field of chip testing, and in particular to an automatic chip six-sided testing device. Background Technology

[0002] Wafers are ground and thinned, then cut into individual chips. The appearance of each chip is inspected to detect defects such as contamination on the back of the chip after grinding, chipping on the front, and cracks on the sides.

[0003] The existing inspection process has the following shortcomings: 1. Currently, the appearance inspection of chips after wafer dicing does not involve simultaneous inspection of all six sides; single-side (front-side inspection) is inefficient. 2. Chips only undergo light source inspection and external examination, without internal inspection.

[0004] To address the aforementioned problems, we propose an automated six-sided chip inspection device. Utility Model Content

[0005] The purpose of this invention is to provide an automatic six-sided chip inspection device, which has the advantages of being able to perform multi-sided chip inspection in a single operation and to inspect the internal structure of the chip.

[0006] The above-mentioned technical objective of this utility model is achieved through the following technical solution: a chip six-sided automatic inspection device, including a scanning stage, a support gear on the top of the scanning stage, a support frame fixedly connected to the top of the support gear, four inspection lenses I installed inside the support frame, and inspection lenses II also installed inside the support frame; a motor is mounted on the top of the scanning stage via a bracket, and a drive gear meshing with the support gear is fixedly sleeved at the output end of the motor.

[0007] By adopting the above technical solution, and by setting up detection lens one, detection lens two, and a scanning stage, the chip can be inspected on all six sides and inside the chip in a single operation, thus improving the chip inspection efficiency. Simultaneously, a motor drives a drive gear to rotate, which in turn drives a support gear to rotate the support frame. This rotation of the support frame causes the four detection lenses to change position, allowing the inspection of the chip's four 90° right angles, thereby expanding the inspection range.

[0008] The present invention is further configured such that: a vacuum suction cup is fixedly sleeved inside the scanning stage, and a chip is adsorbed on the top of the vacuum suction cup.

[0009] Using the above technical solution, the vacuum suction cup is used to connect with the vacuum adsorption device and is mainly used to adsorb the chip, thus fixing the chip.

[0010] The present invention is further configured such that: the four detection lenses are located at the front, back, left and right sides of the chip respectively, and the detection lens is located at the top of the chip.

[0011] Using the above technical solution, four detection lenses are used to detect the front, back, left, and right of the chip; detection lens 2 is used to detect the top of the chip; both detection lenses 1 and 2 need to be used with an appearance inspection device. Detection lenses 1 and 2 are used to check the appearance of the chip, and the appearance of the chip is judged by comparing the results with the built-in algorithm of the detection device; taking pictures through the lenses and analyzing the pictures is existing technology, and its working principle will not be elaborated here.

[0012] The present invention is further configured such that: a circular annular groove is provided on the top of the scanning stage, and two sliders fixedly connected to the supporting gear are slidably connected inside the circular annular groove.

[0013] The above technical solution uses an annular groove and a slider to support the support gear, while also allowing the support gear to rotate within the defined positions of the annular groove and the slider.

[0014] The present invention is further configured such that all four detection lenses, including detection lens one and detection lens two, are appearance inspection lenses.

[0015] By adopting the above technical solution and setting up detection lens one and detection lens two, the appearance inspection of the front, back, left, right and top of the chip can be realized at one time. At the same time, the scanning stage of the X-Ray inspection scanning equipment can scan the bottom and internal condition of the chip, thereby satisfying the six-sided inspection of the chip.

[0016] The present invention is further configured such that the scanning stage is the scanning stage of an X-ray detection scanning device.

[0017] Using the above technical solution, the X-Ray inspection and scanning equipment is used to detect abnormalities such as chip cracks; the scanning stage needs to be installed inside the X-Ray inspection and scanning equipment for use. The X-Ray inspection and scanning equipment working with the scanning stage to inspect the chip is existing technology and will not be described in detail here.

[0018] In summary, this utility model has the following beneficial effects:

[0019] This invention, by setting up detection lens one, detection lens two, and a scanning stage, can perform detection on all six sides of a chip and its internal structure in a single operation, thereby improving chip detection efficiency. Simultaneously, a motor drives a drive gear to rotate, which in turn drives a support gear to rotate a support frame. This rotation of the support frame causes the four detection lenses to change position, enabling the detection of the chip's four 90° right angles, thus expanding the detection range. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the structure of this utility model;

[0021] Figure 2 This is a schematic diagram of the chip installation of this utility model;

[0022] Figure 3 This is a schematic diagram of the connection between the annular groove and the slider of this utility model.

[0023] Reference numerals in the attached diagram: 1. Scanning stage; 2. Support gear; 3. Support frame; 4. Detection lens one; 5. Detection lens two; 6. Motor; 7. Drive gear; 8. Vacuum suction cup; 9. Circular groove; 10. Slider. Detailed Implementation

[0024] The present invention will be further described in detail below with reference to the accompanying drawings.

[0025] Example 1:

[0026] refer to Figure 1 , Figure 2 and Figure 3 An automatic six-sided chip inspection device includes a scanning stage 1, a support gear 2 on the top of the scanning stage 1, a support frame 3 fixedly connected to the top of the support gear 2, four inspection lenses 4 and two inspection lenses 5 installed inside the support frame 3, and a motor 6 mounted on the top of the scanning stage 1 via a bracket. A drive gear 7, meshing with the support gear 2, is fixedly connected to the output end of the motor 6. By setting up the inspection lenses 4 and 5 and the scanning stage 1, the device can inspect all six sides of the chip and its internal structure in a single operation, improving chip inspection efficiency. Simultaneously, the motor 6 drives the drive gear 7 to rotate, which in turn drives the support gear 2 to rotate the support frame 3. The rotation of the support frame 3 causes the four inspection lenses 4 to change position, enabling the inspection of the four 90° right angles of the chip, thus expanding the inspection range.

[0027] Furthermore, the device includes a scanning stage 1, a support gear 2 on the top of the scanning stage 1, a support frame 3 fixedly connected to the top of the support gear 2, four detection lenses 4 installed inside the support frame 3, and another detection lens 5 installed inside the support frame 3; a motor 6 is mounted on the top of the scanning stage 1 via a bracket, and a drive gear 7 that meshes with the support gear 2 is fixedly sleeved at the output end of the motor 6; a vacuum suction cup 8 is provided, which is used to connect with a vacuum adsorption device and is mainly used to adsorb chips and fix the chips.

[0028] Furthermore, four detection lenses 4 are located at the front, rear, left, and right sides of the chip, respectively, and one detection lens 5 is located at the top of the chip. The four detection lenses 4 are used to detect the front, rear, left, and right sides of the chip; the two detection lenses 5 are used to detect the top of the chip. Both detection lenses 4 and 5 need to be used with an appearance inspection device. The detection lenses 4 and 5 are used to check the appearance of the chip. The appearance of the chip is judged by comparing the images with the built-in algorithm of the inspection device. Taking pictures through the lenses and analyzing the pictures is existing technology, and its working principle will not be elaborated here.

[0029] Furthermore, the top of the scanning stage 1 is provided with an annular groove 9. Inside the annular groove 9, there are two sliders 10 that are fixedly connected to the support gear 2. The annular groove 9 and the sliders 10 are used to support the support gear 2, and at the same time, the support gear 2 can rotate within the limited position of the annular groove 9 and the sliders 10.

[0030] Furthermore, all four inspection lenses, 4 and 5, are appearance inspection lenses. By setting up inspection lenses 4 and 5, the appearance inspection of the front, back, left, right and top of the chip can be realized at one time. At the same time, the scanning stage 1 of the X-Ray inspection scanning device can scan the bottom and internal condition of the chip, thereby satisfying the six-sided inspection of the chip.

[0031] Furthermore, the scanning stage 1 is the scanning stage of the X-Ray inspection scanning device, which is used to detect abnormalities such as chip cracks. The scanning stage 1 needs to be installed inside the X-Ray inspection scanning device for use. The X-Ray inspection scanning device and the scanning stage 1 work together to inspect the chip, which is existing technology and will not be described in detail here.

[0032] Brief description of usage: When using, the scanning stage 1 needs to be installed inside the X-Ray detection scanning device and needs to be used in conjunction with the X-Ray detection scanning device;

[0033] First, connect the vacuum suction cup 8 to the vacuum adsorption device; place the chip on the top of the vacuum suction cup 8, and the vacuum adsorption device will be activated to adsorb and fix the chip. Then, the detection lens 1 4 and the detection lens 2 5 will be activated to take pictures of the chip. By comparing and analyzing the appearance of the chip with the appearance inspection device, the X-ray inspection scanning device, together with the scanning stage 1, will scan and inspect the bottom and the inside of the chip.

[0034] The output of the motor 6 can drive the drive gear 7 to rotate. When the drive gear 7 rotates, it will drive the support gear 2 to rotate. The rotation of the support gear 2 will drive the support frame 3 and the four detection lenses 4 to change position. The four detection lenses 4 correspond to the four right angles of the chip. By taking pictures with the detection lenses 4 in conjunction with the appearance inspection device, the four right angles of the chip can be detected.

[0035] This specific embodiment is merely an explanation of the present utility model and is not intended to limit the present utility model. After reading this specification, those skilled in the art can make modifications to this embodiment without contributing any inventive step, but as long as they are within the scope of the claims of the present utility model, they are protected by patent law.

Claims

1. A chip six-face automatic detection apparatus comprising a scanning table (1), characterized in that: The top of the scanning table (1) is provided with a support gear (2), the top of the support gear (2) is fixedly connected with a support frame (3), the inside of the support frame (3) is mounted with four detection lenses (4), and the inside of the support frame (3) is also mounted with a detection lens (5); The top of the scanning table (1) is mounted with a motor (6) through a support, the output end of the motor (6) is fixedly sleeved with a driving gear (7) engaged with the support gear (2).

2. The chip six-face automatic detection device according to claim 1, characterized in that: The inside of the scanning table (1) is fixedly sleeved with a vacuum chuck (8), and the top of the vacuum chuck (8) is adsorbed with a chip.

3. The apparatus according to claim 1, wherein: Four detection lenses (4) are respectively located on the front, rear, left and right sides of the chip, and the detection lens (5) is located on the top of the chip.

4. The apparatus according to claim 1, wherein: The top of the scanning table (1) is provided with a circular ring-shaped sliding groove (9), and the inside of the circular ring-shaped sliding groove (9) is slidably connected with two sliding blocks (10) fixedly connected with the support gear (2).

5. The apparatus according to claim 1, wherein: Four detection lenses (4) and the detection lens (5) are all appearance detection lenses.

6. The chip six-face automatic inspection apparatus according to claim 1, wherein: The scanning table (1) is a scanning table of an X-ray detection scanning device.

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