Integrated circuit support plate turnover mechanism and integrated circuit support plate detection equipment

Abstract

The utility model discloses an integrated circuit carrier plate turnover mechanism and an integrated circuit carrier plate detection device. The integrated circuit carrier plate turnover mechanism comprises a supporting seat, a turnover mechanism and a detection mechanism, the rotating shaft is rotatably arranged on the supporting seat, an air flow channel is arranged in the rotating shaft, and the air flow channel is communicated with a vacuumizing device; the carrying table main body is connected with the rotating shaft, an air cavity is formed in the carrying table main body, and an adsorption hole communicated with the air cavity is formed in the carrying table main body; the driving device is arranged on the supporting seat and is in transmission connection with the rotating shaft; the air guide pipe is respectively connected with the rotating shaft and the carrying platform main body so as to be communicated with the air cavity and the air flow channel, and the rotating shaft, the air guide pipe and the carrying platform main body rotate together. According to the embodiment of the utility model, the integrated circuit carrier plate turnover mechanism has the advantages of high automation degree, strong reliability and the like.

Description

TECHNICAL FIELD

[0001] The utility model relates to integrated circuit manufacturing technical field, specifically, it relates to a kind of integrated circuit carrier plate turnover mechanism and the integrated circuit carrier plate detection equipment with the integrated circuit carrier plate turnover mechanism of described. BACKGROUND

[0002] In the production process of IC (integrated circuit) carrier plate, the scratch, depression and the like of the surface and other areas of the carrier plate need to be accurately and quickly detected and marked, and the defective products are timely screened out. As an indispensable important component of electronic products, IC carrier plate gradually develops towards miniaturization, densification and integration. Manual detection cannot meet the needs of IC carrier plate production.

[0003] The integrated circuit carrier plate detection equipment in the related art can only detect one side of the carrier plate, and the detection of the front and back sides of the carrier plate cannot be continuously performed, which affects the continuity and efficiency of detection. UTILITY MODEL CONTENT

[0004] The utility model aims at at least solving one of the technical problems existing in the prior art. To this end, the utility model provides an integrated circuit carrier plate turnover mechanism, which has the advantages of high automation degree and high reliability.

[0005] The utility model further provides an integrated circuit carrier plate detection equipment with the integrated circuit carrier plate turnover mechanism.

[0006] To achieve the above-mentioned purpose, according to the first aspect of the embodiment of the utility model, an integrated circuit carrier plate turnover mechanism is provided, which comprises: a support seat; a rotating shaft, which is rotatably arranged on the support seat, and has an airflow channel inside, and the airflow channel is communicated with a vacuumizing device; a carrier platform body, which is connected with the rotating shaft, and has an air cavity inside, and the carrier platform body is provided with a suction hole communicated with the air cavity; a driving device, which is arranged on the support seat and is in transmission connection with the rotating shaft; and a gas guide pipe, which is connected with the rotating shaft and the carrier platform body respectively to communicate the air cavity and the airflow channel, and the rotating shaft, the gas guide pipe and the carrier platform body rotate together.

[0007] The integrated circuit carrier plate turnover mechanism according to the embodiment of the utility model has the advantages of high automation degree and high reliability.

[0008] In addition, the integrated circuit carrier plate turnover mechanism according to the above-mentioned embodiment of the utility model can also have the following additional technical features:

[0009] According to one embodiment of the utility model, the support base is provided with a front position sensor and a back position sensor, the platform body is suitable for triggering the front position sensor when being in the front position and suitable for triggering the back position sensor when being in the back position, and the front position sensor and the back position sensor are electrically connected with the driving device.

[0010] According to one embodiment of the utility model, the support base is provided with a front position sensor and a back position sensor, the platform body is suitable for triggering the front position sensor when being in the front position and suitable for triggering the back position sensor when being in the back position, and the front position sensor and the back position sensor are electrically connected with the driving device.

[0011] According to one embodiment of the utility model, the support base is provided with a flexible buffer block, and the platform body abuts against the flexible buffer block when being in the back position.

[0012] According to one embodiment of the utility model, the support base comprises two support plates, and two ends of the rotating shaft are rotatably arranged on the two support plates respectively.

[0013] According to one embodiment of the utility model, a bearing is arranged between the rotating shaft and the support plate.

[0014] According to one embodiment of the utility model, the adsorption holes are multiple and arranged in an equidistant array on the platform body.

[0015] According to one embodiment of the utility model, the driving device comprises a servo motor and a speed reducer, and the servo motor is connected with the rotating shaft through the speed reducer.

[0016] According to one embodiment of the utility model, the integrated circuit carrier board turnover mechanism further comprises a downstream platform, the downstream platform is liftable between an avoiding position and a receiving position, when the downstream platform is in the avoiding position and the platform body is in the back position, the downstream platform is arranged in a spaced manner with the carrier board adsorbed on the platform body, and when the downstream platform is in the receiving position and the platform body is in the back position, the downstream platform abuts against the carrier board adsorbed on the platform body.

[0017] According to one embodiment of the utility model, the integrated circuit carrier board turnover mechanism further comprises a downstream platform, the downstream platform is liftable between an avoiding position and a receiving position, when the downstream platform is in the avoiding position and the platform body is in the back position, the downstream platform is arranged in a spaced manner with the carrier board adsorbed on the platform body, and when the downstream platform is in the receiving position and the platform body is in the back position, the downstream platform abuts against the carrier board adsorbed on the platform body.

[0018] According to the integrated circuit carrier board detection equipment provided by the embodiment of the utility model, by utilizing the integrated circuit carrier board turnover mechanism according to the embodiment of the first aspect of the utility model, the integrated circuit carrier board detection equipment has the advantages of high automation degree and strong reliability.

[0019] Additional aspects and advantages of the present application will be given in part in the following description, become apparent from the following description, or be learned by practice of the present application. BRIEF DESCRIPTION OF DRAWINGS

[0020] The above and / or additional aspects and advantages of the present application will become apparent and more readily appreciated from the following description, taken in conjunction with the following drawings, of embodiments of the present application, in which:

[0021] Figure 1 is a structural schematic view of an integrated circuit carrier board overturning mechanism according to an embodiment of the present application.

[0022] Figure 2 is a structural schematic view of an integrated circuit carrier board overturning mechanism according to an embodiment of the present application.

[0023] Figure 3 is a structural schematic view of an integrated circuit carrier board overturning mechanism according to an embodiment of the present application.

[0024] Reference signs: integrated circuit carrier board overturning mechanism 1, support seat 10, support plate 11, rotating shaft 20, air outlet 21, carrier main body 30, adsorption surface 31, adsorption hole 32, driving device 40, air guide pipe 50, front surface position sensor 61, back surface position sensor 62, flexible buffer block 70, downstream platform 80. DETAILED DESCRIPTION

[0025] The present application is made based on the discovery and understanding of the inventor on the following facts and problems:

[0026] The integrated circuit carrier board detection device in the related art can only detect a single surface of the carrier board, and it is difficult to continuously detect the front and back surfaces of the carrier board, which affects the continuity and efficiency of detection.

[0027] Therefore, part of the integrated circuit carrier board detection device in the related art is provided with an overturning mechanism to overturn the carrier board, in order to avoid damage to the carrier board, a vacuum adsorption platform is used to adsorb the carrier board, and the vacuum adsorption platform is driven to overturn together. The vacuum adsorption platform needs to be connected with a vacuum generator through a pipeline to provide vacuum, since the vacuum adsorption platform itself will participate in the overturning, only a hose connection can be used, on the one hand, the pipeline connection is relatively complex and difficult, the hose is easy to interfere with the platform overturning, on the other hand, the platform overturning will drive the hose to displace and deform, which causes the hose to be easy to fatigue and even break, affecting the service life.

[0028] The embodiments of the present application are described below in detail, examples of which are shown in the drawings, wherein the same or similar notations represent the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by reference to the drawings are exemplary only, and are used only for explaining the present application, and cannot be understood as a limitation of the present application.

[0029] In the description of the present application, it should be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation of the present application. In addition, the features limited as "first" and "second" can be explicitly or implicitly included one or more of the features. In the description of the present application, unless otherwise specified, the meaning of "a plurality of" is two or more.

[0030] In the description of the present application, it should be noted that, unless otherwise explicitly specified and limited, the terms "mounting", "connection", "connection" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium, or it can be connected inside two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0031] The integrated circuit carrier board turnover mechanism 1 according to the embodiments of the present application is described below with reference to the drawings.

[0032] As shown in Figures 1-3 The integrated circuit carrier board turnover mechanism 1 according to the embodiments of the present application includes a support seat 10, a rotating shaft 20, a carrier body 30, a driving device 40 and a gas guide pipe 50.

[0033] The rotating shaft 20 is rotatably arranged on the support seat 10, and a gas flow channel is arranged in the rotating shaft 20, which is communicated with a vacuum pumping device. The carrier body 30 is connected with the rotating shaft 20, and a gas cavity is arranged in the carrier body 30, and a suction hole 32 communicated with the gas cavity is arranged on the carrier body 30. The driving device 40 is arranged on the support seat 10 and is in transmission connection with the rotating shaft 20. The gas guide pipe 50 is connected with the rotating shaft 20 and the carrier body 30 respectively to communicate the gas cavity and the gas flow channel, and the rotating shaft 20, the gas guide pipe 50 and the carrier body 30 rotate together.

[0034] Specifically, the vacuumizing device can be a fan. The air guide pipe 50 can be a rigid pipe.

[0035] After one side of the carrier plate is detected, the detected carrier plate is grabbed by the grabbing device to the stage body 30.

[0036] The vacuumizing device generates negative pressure by air suction, through the airflow channel in the rotating shaft 20, the air guide pipe 50 and the air cavity in the stage body 30, to generate negative pressure at the adsorption hole 32, so that the stage body 30 can adsorb the carrier plate.

[0037] After the stage body 30 adsorbs the carrier plate, the driving device 40 drives the rotating shaft 20 to rotate and drives the stage body 30 to rotate together, so that the carrier plate adsorbed on the stage body 30 also rotates together, so that the carrier plate is turned over.

[0038] The vacuumizing device stops air suction, and the adsorption hole 32 stops generating vacuum, so that the carrier plate is separated from the stage body 30 for detection of the other side.

[0039] When the stage body 30 and the rotating shaft 20 rotate, the air guide pipe 50 also rotates with the rotating shaft 20 and the stage body 30, and there is no relative displacement between the air guide pipe 50, the stage body 30 and the rotating shaft 20.

[0040] According to the integrated circuit carrier plate turnover mechanism 1 of the embodiment of the utility model, by setting the airflow channel in the rotating shaft 20, the airflow channel is communicated with the vacuumizing device, the air cavity is set in the stage body 30, the adsorption hole 32 is set on the stage body 30, and the air guide pipe 50 is connected with the rotating shaft 20 and the stage body 30 respectively, so that the vacuumizing device can generate negative pressure at the adsorption hole 32 through the airflow channel in the rotating shaft 20, the air guide pipe 50 and the air cavity in the stage body 30, so that the stage body 30 can adsorb the carrier plate through the adsorption hole 32, so that the carrier plate can be adsorbed, and the carrier plate can move with the stage body 30, and the vacuum adsorption mode is not easy to cause damage to the carrier plate.

[0041] And by setting the rotating shaft 20 and the driving device 40, the rotating shaft 20 can be driven to rotate by the driving device 40, so that the stage body 30 and the carrier plate adsorbed on the stage body 30 rotate together with the rotating shaft 20, so that the carrier plate adsorbed on the stage body 30 can be turned over by the turnover of the stage body 30. Thus, after one side of the carrier plate is detected, the carrier plate can be turned over by the integrated circuit carrier plate turnover mechanism 1, and then the other side is detected. Compared with the integrated circuit carrier plate detection equipment in the related art, the detection process of both sides of the carrier plate can be continuously and automatically performed, the continuity of the carrier plate detection process is improved, the automation degree of the carrier plate detection is improved, and the carrier plate detection efficiency is improved.

[0042] Furthermore, by arranging the air flow channel in the rotating shaft 20 and connecting the air guide pipe 50 to the rotating shaft 20 and the platform body 30, the air flow can pass through the rotating shaft 20, the space in the rotating shaft 20 can be fully utilized, the rotating shaft 20 can be used not only as a rotating shaft but also as an air flow channel, the additional pipeline connection is saved, the pipeline connection structure is simplified, the pipeline occupied space is reduced, and the rotating shaft 20, the air guide pipe 50, and the platform body 30 rotate together. Compared with the way of directly connecting the platform by using a hose in the related art, on the one hand, the air guide pipe 50 does not interfere with the overturning of the platform body 30, and the problem of interference of the hose with the overturning in the hose connection mode can be avoided. On the other hand, the air guide pipe 50 does not relatively displace with the platform body 30 and the rotating shaft 20, and displacement and deformation of the air guide pipe 50 due to the overturning of the platform body 30 can be avoided. The problem of fatigue and even damage of the hose due to frequent displacement and deformation of the hose caused by the overturning of the platform in the hose connection mode can be avoided. The reliability of the air path connection is improved, the maintenance frequency is reduced, and the service life of the integrated circuit carrier plate overturning mechanism 1 is improved.

[0043] Therefore, the integrated circuit carrier plate overturning mechanism 1 has the advantages of high automation and high reliability.

[0044] Hereinafter, the integrated circuit carrier plate overturning mechanism 1 according to an embodiment of the present application will be described with reference to the accompanying drawings.

[0045] In some embodiments of the present application, as shown in Figures 1-3 The integrated circuit carrier plate overturning mechanism 1 according to the embodiment of the present application includes a support seat 10, a rotating shaft 20, a platform body 30, a driving device 40, and an air guide pipe 50.

[0046] Specifically, as shown in Figures 1-3 The platform body 30 has an adsorption surface 31, and adsorption holes 32 are formed on the adsorption surface 31. The platform body 30 is overturnable between a front surface position and a back surface position. When the platform body 30 is in the front surface position, the adsorption surface 31 faces upward (the upward and downward directions are shown by arrows in the drawings). When the platform body 30 is in the back surface position, the adsorption surface 31 faces downward. Specifically, Figures 1-3 The platform body 30 is in the front surface position. In this way, when the platform body 30 is in the front surface position, the carrier plate can be placed on the adsorption surface 31 by the grabbing device, and when the platform body 30 is in the back surface position, the carrier plate can be reliably turned over, and the different surfaces of the carrier plate can be conveniently detected.

[0047] Advantageously, as shown in Figure 2As shown, the support base 10 is provided with a front position sensor 61 and a back position sensor 62, the stage body 30 is adapted to trigger the front position sensor 61 when at the front position and trigger the back position sensor 62 when at the back position, and the front position sensor 61 and the back position sensor 62 are electrically connected to the driving device 40. In this way, the stage body 30 can be detected by the front position sensor 61 and the back position sensor 62 whether it is turned to the position, and the driving device 40 can be stopped in time after the stage body 30 is turned to the corresponding position. Thus, the turning control of the stage body 30 can be facilitated.

[0048] More advantageously, as shown in the drawings, Figure 2 As shown, the support base 10 is provided with a flexible buffer block 70, and the stage body 30 abuts against the flexible buffer block 70 when at the back position. In this way, the stage body 30 can be buffered by the flexible buffer block 70 when it is turned from the front position to the back position, so as to avoid the stage body 30 colliding with the downstream mechanism under the action of inertia and causing the carrier plate to be damaged.

[0049] More specifically, as shown in the drawings, Figures 1-3 As shown, the support base 10 includes two support plates 11, and the two ends of the rotating shaft 20 are rotatably arranged on the two support plates 11 respectively. In this way, the installation and rotation of the rotating shaft 20 can be facilitated, and the stress on the rotating shaft 20 can be more uniform, so as to improve the stability of the stage body 30 when it is turned.

[0050] Further, a bearing is arranged between the rotating shaft 20 and the support plate 11. In this way, the resistance of the rotating shaft 20 when it rotates can be reduced, the rotation of the rotating shaft 20 can be smoother, and the turning of the stage body 30 can be facilitated.

[0051] Still further, the driving device 40 includes a servo motor and a speed reducer, and the servo motor is connected to the rotating shaft 20 through the speed reducer. In this way, the rotating speed of the rotating shaft 20 can be reduced and the torque of the rotating shaft 20 can be improved, so as to facilitate the stable turning of the stage body 30 and improve the control accuracy during the turning process.

[0052] Optionally, the adsorption holes 32 are a plurality of and arranged in an equidistant array on the stage body 30. Specifically, the size of the adsorption surface 31 can be greater than or equal to the size of the largest size of the carrier plate to be adsorbed. In this way, the stress on the adsorbed carrier plate can be more uniform, and the integrated circuit carrier plate turning mechanism 1 can be applied to carrier plates of different sizes, so as to improve the applicability of the integrated circuit carrier plate turning mechanism 1.

[0053] Figure 3 The integrated circuit carrier plate turning mechanism 1 according to some examples of the utility model is shown. As shown in the drawings, Figure 3As shown, the integrated circuit carrier board turnover mechanism 1 further comprises a downstream platform 80, which is liftable between an avoiding position and a receiving position, and is spaced apart from the carrier board adsorbed on the carrier body 30 when the carrier body 30 is in the reverse position and the downstream platform 80 is in the avoiding position, and abuts against the carrier board adsorbed on the carrier body 30 when the carrier body 30 is in the reverse position and the downstream platform 80 is in the receiving position.

[0054] Specifically, after the detection of one side of the carrier board is completed, the carrier body 30 is in the front position, the downstream platform 80 is in the avoiding position, the carrier board is transferred to the carrier body 30 by the grabbing device, and the carrier body 30 adsorbs the carrier board by vacuumizing. The driving device 40 drives the rotation shaft 20 to rotate, drives the carrier body 30 and the carrier board adsorbed on the carrier body 30 to turn over to the reverse position together, the downstream platform 80 is lifted to the receiving position, so that the downstream platform 80 abuts against the carrier board adsorbed on the carrier body 30, the carrier body 30 is broken vacuum, and the downstream platform 80 is vacuumized, so that the carrier board is transferred from the carrier body 30 to the downstream platform 80, and then the carrier board is detected on the other side by the downstream platform 80.

[0055] Therefore, the downstream platform 80 can be lowered to the avoiding position before the carrier body 30 is turned over to the reverse position, so as to avoid the direct collision between the carrier board and the downstream platform 80 and cause the damage of the carrier board, the downstream platform 80 is lifted to abut against the carrier board after the carrier body 30 is completely turned over to the reverse position, so as to realize the seamless connection of the carrier board transfer, improve the continuity and reliability of the carrier board transfer, and improve the automation degree of the integrated circuit carrier board turnover mechanism 1.

[0056] The integrated circuit carrier board detection device according to the embodiments of the present application is described below. The integrated circuit carrier board detection device according to the embodiments of the present application comprises the integrated circuit carrier board turnover mechanism 1 according to the above embodiments of the present application.

[0057] The integrated circuit carrier board detection device according to the embodiments of the present application has the advantages of high automation degree and high reliability by using the integrated circuit carrier board turnover mechanism 1 according to the above embodiments of the present application.

[0058] Other configurations and operations of the integrated circuit carrier board detection device according to the embodiments of the present application are known to those skilled in the art, and will not be described in detail here.

[0059] In the description of the present specification, the description referring to the terms "one embodiment", "some embodiments", "exemplary embodiment", "example", "specific example", or "some examples" and the like means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In the present specification, the exemplary description of the above terms does not necessarily mean the same embodiment or example. Furthermore, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0060] Although the embodiments of the present application have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations can be made thereto without departing from the principles and spirit of the present application, and the scope of the present application is defined by the claims and their equivalents.

Claims

1. An integrated circuit carrier board flipping mechanism, characterized in that, The application relates to a support seat, a rotating shaft rotatably arranged on the support seat, an airflow channel arranged in the rotating shaft and communicated with a vacuumizing device, a carrier main body connected with the rotating shaft and provided with a gas cavity and an adsorption hole communicated with the gas cavity, a driving device arranged on the support seat and in transmission connection with the rotating shaft, and a gas guide pipe connected with the rotating shaft and the carrier main body to communicate the gas cavity and the airflow channel, wherein the rotating shaft, the gas guide pipe and the carrier main body rotate together. The carrier main body is provided with an adsorption surface, the adsorption hole is formed on the adsorption surface, the carrier main body can be turned between a front surface position and a back surface position, the adsorption surface faces upwards when the carrier main body is in the front surface position, and the adsorption surface faces downwards when the carrier main body is in the back surface position. The support seat is provided with a front surface position sensor and a back surface position sensor, the carrier main body is adapted to trigger the front surface position sensor when the carrier main body is in the front surface position and to trigger the back surface position sensor when the carrier main body is in the back surface position, and the front surface position sensor and the back surface position sensor are electrically connected with the driving device. The support seat is provided with a flexible buffer block, and the carrier main body abuts against the flexible buffer block when the carrier main body is in the back surface position. The support seat comprises two support plates, and two ends of the rotating shaft are rotatably arranged on the two support plates respectively. A bearing is arranged between the rotating shaft and the support plate.

2. The integrated circuit carrier panel flip mechanism of claim 1, wherein, The adsorption hole is a plurality of and arranged on the carrier main body in an equal interval array.

3. The integrated circuit carrier panel flip mechanism of claim 2, wherein, The driving device comprises a servo motor and a speed reducer, and the servo motor is connected with the rotating shaft through the speed reducer.

4. The integrated circuit board flipper mechanism of claim 2, wherein, The application further relates to a downstream platform which can be lifted between an avoiding position and a receiving position, the downstream platform is spaced apart from the carrier plate adsorbed on the carrier main body when the downstream platform is in the avoiding position and the carrier main body is in the back surface position, and the downstream platform abuts against the carrier plate adsorbed on the carrier main body when the downstream platform is in the receiving position and the carrier main body is in the back surface position.

5. The integrated circuit board flipper mechanism of claim 1, wherein, The application further relates to an integrated circuit carrier plate turnover mechanism.

6. The integrated circuit carrier panel flip mechanism of claim 5, wherein, ​ 7. The integrated circuit board flipper mechanism of claim 1, wherein, ​ 8. The integrated circuit board flipper mechanism of claim 1, wherein, ​ 9. The integrated circuit board flipper mechanism of claim 2, wherein, ​ 10. An integrated circuit carrier board inspection apparatus characterized by comprising: ​

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