Visual cover plate of atmosphere plasma processing equipment

Abstract

A visual cover plate of atmosphere plasma processing equipment comprises a cover plate body; the cover plate body comprises a panel and four side plates; a rectangular observation hole is hollowed in the center of the panel, and a plurality of first screw holes are formed around the rectangular observation hole; a rectangular transparent part is arranged on the face, surrounded by the four side plates, of the panel, a plurality of second screw holes matched with the first screw holes are formed in the edge of the rectangular transparent part, and the first screw holes and the second screw holes are used for allowing screws to penetrate through and are matched with anti-skid nuts to fix the rectangular transparent part and the panel. According to the utility model, the condition of glass tape-out in the atmosphere plasma processing equipment can be directly observed through the rectangular observation hole and the rectangular transparent part, the conditions of glass scratch, glass breaking or equipment failure and the like can be found in time, and meanwhile, the height of the cover plate is increased, so that the risk that the glass tape-out floats to impact the cover plate is avoided.

Description

Technical Field

[0001] This utility model belongs to the field of plasma processing technology, specifically referring to a visual cover plate for atmospheric plasma processing equipment. Background Technology

[0002] Plasma is the fourth state of matter, composed of free electrons, ions, and neutral particles (including atoms, molecules, and free radicals). Under appropriate conditions, gas can be ionized to form plasma by applying an electric or magnetic field. Atmospheric plasma treatment equipment utilizes this principle to generate plasma at atmospheric pressure and uses it for surface cleaning, activation, etching, coating, and other treatments.

[0003] Existing atmospheric plasma treatment equipment used for glass screen processing has the following drawbacks:

[0004] 1. The cavity of the atmospheric plasma treatment equipment is made of SUS material, which is fully enclosed and opaque. Operators cannot see the condition of the glass slides on the conveying device during daily inspections. If the glass is scratched or broken, it cannot be detected in time. 2. The cover plate of the cavity is relatively low. Therefore, the glass slides are close to the upper cover plate, usually about 10mm. When the exhaust gas pipe is pumping air, there is a chance that the glass slides will float and collide with the cover plate, resulting in scratches or even breakage of the glass surface. Summary of the Invention

[0005] The technical problem to be solved by this utility model is to design a visualization cover for an atmospheric plasma processing equipment, which can observe the glass flow inside the equipment, while preventing the glass flow from floating and hitting the cover due to air extraction.

[0006] This utility model is implemented as follows:

[0007] A visualization cover for an atmospheric plasma processing device includes: a cover body; the cover body includes: a front panel and four side panels;

[0008] The panel has a rectangular observation hole in the center, and several first screw holes are provided around the rectangular observation hole; a rectangular transparent piece is provided on one side of the panel surrounded by four side plates, and several second screw holes matching the first screw holes are provided on the edge of the rectangular transparent piece. The first screw holes and the second screw holes are used to insert screws and use anti-slip nuts to fix the rectangular transparent piece to the panel.

[0009] Furthermore, there are multiple rectangular observation holes, and a certain gap is left between the rectangular observation holes to form reinforcing ribs.

[0010] Furthermore, the cover plate height is ≥34mm.

[0011] Furthermore, the rectangular transparent component is made of PMMA.

[0012] Furthermore, the rectangular transparent component is brown in color.

[0013] Furthermore, the thickness of the rectangular transparent component is ≥5mm.

[0014] The advantages of this invention are: the condition of the glass sheet inside the atmospheric plasma processing equipment can be directly observed through the rectangular observation hole and the rectangular transparent part, so as to detect glass scratches, broken pieces or equipment failures in a timely manner. At the same time, because the height of the cover plate has been increased, the risk of the glass sheet floating and hitting the cover plate is avoided. Attached Figure Description

[0015] The present invention will now be further described with reference to the accompanying drawings and embodiments.

[0016] Figure 1 This is a top view of an existing atmospheric plasma processing device.

[0017] Figure 2 This is an exploded structural diagram of the first embodiment of this utility model.

[0018] Figure 3 This is an exploded structural diagram of the second embodiment of the present invention.

[0019] Figure 4 This is a top view of the atmospheric plasma treatment equipment that utilizes this invention.

[0020] Figure label:

[0021] 1-Atmospheric plasma treatment equipment, 11-Plasma processor, 12-First cavity, 13-Second cavity, 121-First cover plate, 131-Second cover plate, 14-Exhaust gas pipe, 15-Cover plate handle, 2-Visual cover plate for atmospheric plasma treatment equipment, 21-Cover plate body, 211-Panel, 2111-Rectangular observation hole, 2112-First screw hole, 22-Rectangular transparent part, 221-Second screw hole. Detailed Implementation

[0022] The following is combined Figures 1 to 4 The embodiments of this utility model will be described in detail below.

[0023] like Figure 1As shown, the prior art atmospheric plasma processing device 1 includes: a plasma processor 11, a first cavity 12 connected to both sides of the plasma processor 11, and a second cavity 13 connected to both sides of the first cavity 12. The plasma processor 11, the first cavity 12 and the second cavity 13 are interconnected. All three are equipped with a transmission device (not shown in the figure). The glass slide passes through the second cavity 13, the first cavity 12, the plasma processor 11, the first cavity 12 and the second cavity 13 in sequence above the transmission device.

[0024] The plasma processor 11 ionizes the gas to generate plasma. The plasma fills the plasma processor 11, the first cavity 12 and the second cavity 13, immersing the glass slide in them for surface treatment. The top of the plasma processor 11 is connected to an exhaust gas pipe 14 to remove the exhaust gas generated during the ionization process.

[0025] The first cavity 12 is provided with a first cover plate 121 at the top, and the second cavity 13 is provided with a second cover plate 131 at the top. Both the first cover plate 121 and the second cover plate 131 are provided with two cover plate handles 15.

[0026] The cover plate of existing atmospheric plasma treatment equipment is made of SUS material, which is opaque and therefore cannot be used to observe the internal conditions of the equipment. Furthermore, the cover plate is relatively low, currently only 20mm high, and there is a possibility that the glass slide may float and collide with the cover plate during exhaust gas extraction. The difference between the first cover plate 121 and the second cover plate 131 lies in their size. The improvement made in this invention is to add an observation window to the cover plate and increase its height.

[0027] Example 1

[0028] like Figure 2 As shown, the present invention provides a visualization cover plate 2 for an atmospheric plasma processing device, comprising: a cover plate body 21;

[0029] The cover body 21 includes: a front panel 211 and four side panels. The thickness of the front panel 211 is 2mm. Each end of the front panel 211 is provided with a cover handle 15. The center of the front panel 211 has two rectangular observation holes 2111. A certain gap is left between the rectangular observation holes 2111 to form a reinforcing rib. A first screw hole 2112 is provided near each of the four corners of the rectangular observation holes 2111.

[0030] A rectangular transparent element 22 is provided on the side of panel 211 surrounded by four side plates. Each rectangular observation hole 2111 has a rectangular transparent element 22. The area of ​​the rectangular transparent element 22 is larger than that of the rectangular observation hole 2111. At each of the four corners of the transparent element 22, there is a second screw hole 221 that matches the first screw hole 2112. An M4*10 screw passes through the first screw hole 2112 and the second screw hole 221, and is used with an anti-slip nut to fix the rectangular transparent element 22 to the side of panel 211 surrounded by the four side plates. The rectangular transparent element 33 is preferably made of PMMA, preferably in a brown color, and is 5mm thick. The brown color is chosen because the plasma inside the equipment emits strong light, and the brown color can filter and reduce the light intensity to a certain extent, making it easier for the operator to observe.

[0031] Meanwhile, the height of the cover plate was increased from 20mm to 34mm, which increased the distance between the glass flow sheet and the upper cover plate, thus avoiding the risk of the glass flow sheet floating and hitting the cover plate.

[0032] Example 2

[0033] like Figure 3 As shown, when the area of ​​the visualization cover 2 of the atmospheric plasma processing equipment is further increased, it is necessary to increase the number of rectangular observation holes 2111. If the area of ​​the rectangular observation holes 2111 and the rectangular transparent parts 22 is simply increased, the structural strength of the panel 211 will be reduced accordingly, which may cause the panel 21 to collapse. Therefore, reinforcing ribs need to be retained between the rectangular observation holes 2111. In this embodiment, a rectangular transparent part 22 is installed for every two rectangular observation holes 2111. Each rectangular transparent part 22 has three second screw holes 221 on each side. The arrangement of the first screw holes 2111 corresponds to the second screw holes 221. The rest is the same as in Embodiment 1, and will not be described again here. Figure 4 This is a top view of the atmospheric plasma treatment device that uses both Embodiment 1 and Embodiment 2.

[0034] This utility model provides a visualization cover for an atmospheric plasma processing equipment. The condition of the glass flow inside the atmospheric plasma processing equipment can be directly observed through a rectangular observation hole and a rectangular transparent part, so as to detect glass scratches, broken pieces or equipment failures in a timely manner. At the same time, because the height of the cover has been increased, the risk of glass flow floating and hitting the cover is avoided.

[0035] The above embodiments and figures are not intended to limit the product form and style of this utility model. Any appropriate changes or modifications made by those skilled in the art should be considered as not departing from the patent scope of this utility model.

Claims

1. An atmospheric plasma processing apparatus visualization cover plate, characterized by: Comprise: A cover plate body; The cover plate body comprises a panel and four side plates; The center of the panel is hollowed out with a rectangular viewing hole, and the periphery of the rectangular viewing hole is provided with a plurality of first screw holes; One side of the panel surrounded by the four side plates is provided with a rectangular transparent piece, the edge of the rectangular transparent piece is provided with a plurality of second screw holes matched with the first screw holes, and the first screw holes and the second screw holes are used to pass through the screws and match the non-slip nuts to fix the rectangular transparent piece and the panel.

2. An atmospheric plasma processing apparatus viewing cover plate as defined in claim 1, wherein: The rectangular viewing holes are multiple, and a certain gap is left between the rectangular viewing holes to form a reinforcing rib.

3. The atmospheric plasma processing device visualization cover plate of claim 1, wherein the cover plate height is greater than or equal to 34 mm.

4. An atmospheric plasma treatment apparatus viewing cover plate as defined in claim 1, wherein: The material of the rectangular transparent piece is PMMA.

5. An atmospheric plasma treatment apparatus viewing cover plate as defined in claim 3, wherein: The color of the rectangular transparent piece is tea color.

6. An atmospheric plasma treatment apparatus viewing cover plate as defined in claim 3, wherein: The thickness of the rectangular transparent piece is greater than or equal to 5 mm.

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