Cooling system

Abstract

The utility model discloses a cooling system which comprises a water inlet pipeline and a water outlet pipeline, an ionization platform is provided with a water flow channel, the water inlet pipeline is connected with the input end of the water flow channel, the water outlet pipeline is connected with the output end of the water flow channel, and the parts of the water inlet pipeline and the water outlet pipeline in a vacuum cavity are steel pipes. A hose is arranged at the part in the normal-pressure cavity, and the steel pipe is communicated with the hose. In the utility model, in the working process of the extreme ultraviolet generator, the temperature of the ionization platform in the vacuum cavity is increased, cooling water is introduced into the hose in the water inlet pipeline through an external water source, and the cooling water is introduced into the steel pipe from the hose and then flows through the ionization platform to take out heat in the ionization platform; and finally, the cooling water flows out through a steel pipe and a hose in the water outlet pipeline, the cooling water takes away heat in the process of flowing through the ionization platform, the ionization platform is cooled, and transmission of the extreme ultraviolet light can be ensured not to be easily influenced by temperature.

Description

Technical Field

[0001] This utility model relates to the field of extreme ultraviolet light generator cooling technology, specifically to a cooling system. Background Technology

[0002] An extreme ultraviolet (EUV) light generator is a device used to produce extreme ultraviolet (EUV) light. EUV light generally refers to ultraviolet light with wavelengths between 10 and 121 nanometers, which has a shorter wavelength and higher energy than deep ultraviolet (DUV) light.

[0003] In an extreme ultraviolet (EUV) light generator, EUV light is generated by ionizing an inert gas with an 800nm ​​laser beam. During the ionization process, the ionization stage dissipates heat, causing the temperature to rise and affecting the transmission of EUV light. Utility Model Content

[0004] The purpose of this invention is to solve the problems mentioned above in the background art and to propose a cooling system.

[0005] The objective of this utility model can be achieved through the following technical solutions:

[0006] A cooling system is provided for an extreme ultraviolet (EUV) light generator. The EUV light generator includes a protective cover, within which a housing is disposed. The housing contains an atmospheric pressure chamber and a vacuum chamber. An ionization stage is disposed within the vacuum chamber. The system includes an inlet pipe and an outlet pipe. A water flow channel is provided within the ionization stage. The inlet pipe is connected to the input end of the water flow channel, and the outlet pipe is connected to the output end of the water flow channel. The inlet and outlet pipes are configured as steel pipes in the portion located within the vacuum chamber and as flexible hoses in the portion located within the atmospheric pressure chamber. The steel pipes and flexible hoses are connected in communication.

[0007] As a further embodiment of this utility model: the atmospheric pressure chamber and the vacuum chamber are separated by a partition, the partition having a through hole, and the steel pipe and the flexible hose are connected through the through hole.

[0008] As a further embodiment of this utility model: a first quick-connect fitting is provided at the through hole of the hose and the partition, and the first quick-connect fitting is used to assemble the hose.

[0009] As a further embodiment of this utility model: both ends of the steel pipe are provided with a second quick connector, which is used to assemble the steel pipe.

[0010] As a further embodiment of this utility model: one end of the steel pipe is connected to the partition plate at the through hole via the second quick connector.

[0011] As a further embodiment of this utility model: the other end of the steel pipe is connected to the ionization stage via the second quick-connect coupling.

[0012] As a further embodiment of this invention, a return steel pipe is also provided inside the vacuum chamber.

[0013] As a further embodiment of this utility model: the return steel pipe is connected to the water flow channel opened on the ionization platform.

[0014] As a further embodiment of this utility model: both ends of the return steel pipe are provided with the second quick connector, and the return steel pipe is connected to the ionization stage through the second quick connector.

[0015] As a further embodiment of this invention, the inlet pipe and the outlet pipe can be interchanged.

[0016] The beneficial effects of this utility model are:

[0017] In this invention, during the operation of the extreme ultraviolet generator, the temperature of the ionization stage inside the vacuum chamber rises. Cooling water is introduced into the inlet pipe through an external water source via a flexible hose. The cooling water flows from the hose into the steel pipe, then through the ionization stage, carrying away the heat from the ionization stage. Finally, it flows out through the outlet pipe and the flexible hose. The cooling water carries away the heat as it flows through the ionization stage, cooling the ionization stage and ensuring that the transmission of extreme ultraviolet light is not easily affected by temperature. Attached Figure Description

[0018] The present invention will be further described below with reference to the accompanying drawings.

[0019] Figure 1 This is a schematic diagram of the structure of the extreme ultraviolet light generator of this utility model;

[0020] Figure 2 yes Figure 1 Schematic diagram of the internal structure of the protective shield;

[0021] Figure 3 yes Figure 2 Schematic diagram of the internal structure of the middle shell;

[0022] Figure 4 This is a partial structural schematic diagram of the cooling system of this utility model;

[0023] Figure 5 This utility model cooling system and Figure 3 A schematic diagram of the connection of the ionization stage.

[0024] In the picture:

[0025] 1. Protective cover; 2. Shell; 21. Atmospheric pressure chamber; 22. Vacuum chamber; 23. Partition; 3. Ionization stage; 4. Hoses; 5. First quick connector; 6. Steel pipe; 7. Second quick connector; 8. Return steel pipe. Detailed Implementation

[0026] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0027] Please see Figures 1-3 As shown, this utility model is a cooling system applicable to extreme ultraviolet (EUV) light generators. The EUV generator includes a protective cover 1, within which a housing 2 is housed. Inside the housing 2, a normal pressure chamber 21 and a vacuum chamber 22 are disposed. The normal pressure chamber 21 and the vacuum chamber 22 are separated by a partition 23. The vacuum chamber 22 is the EUV light generating chamber, and an ionization stage 3 is also disposed within it. The generation of EUV light requires the introduction of inert gas into the optical fiber on the ionization stage 3. The inert gas causes the gas content in the vacuum chamber 22 to gradually increase. Therefore, during the EUV light generation process, the vacuum chamber 22 needs to be continuously evacuated to maintain a negative pressure.

[0028] Please see Figure 1 , Figures 4-5 As shown, the cooling system includes an inlet water pipe and an outlet water pipe. An ionization platform 3 has a water flow channel. The inlet water pipe is connected to the input end of the water flow channel, and the outlet water pipe is connected to the output end of the water flow channel. The inlet water pipe and the outlet water pipe are interchangeable.

[0029] Specifically, the inlet and outlet water pipes are configured as steel pipes 6 in the vacuum chamber 22 and as flexible hoses 4 in the atmospheric pressure chamber 21. The partition 23 has two through holes. In the inlet or outlet water pipes, the steel pipe 6 and flexible hose 4 on the same pipe are connected through the through holes, and one end of the flexible hose 4 passes through the housing 2 and extends out of the protective cover 1.

[0030] A first quick-connector 5 is provided at the through hole between the hose 4 and the partition 23, and the first quick-connector 5 is used to assemble the hose 4. A second quick-connector 7 is provided at both ends of the steel pipe 6, and the second quick-connector 7 is used to assemble the steel pipe 6.

[0031] Furthermore, one end of the steel pipe 6 is connected to the partition plate 23 at the through hole via the second quick connector 7, and the other end is connected to the ionization stage 3 via the second quick connector 7.

[0032] Please see Figure 3 , Figure 5 As shown, a return steel pipe 8 is also installed inside the vacuum chamber 22, and the return steel pipe 8 is connected to the water flow channel opened in the ionization stage 3. A second quick connector 7 is installed at both ends of the return steel pipe 8, and the return steel pipe 8 is connected to the ionization stage 3 through the second quick connector 7.

[0033] It should be noted that sealing rings are provided between the first quick connector 5 and the partition 23, between the second quick connector 7 and the partition 23, and between the second quick connector 7 and the ionization stage 3. By squeezing the sealing rings to deform them, the hose 4 and the steel pipe 6 are sealed at the connection end. The sealing rings and quick connectors (first quick connector 5 and second quick connector 7) cooperate to prevent cooling water leakage.

[0034] In this embodiment, during the operation of the extreme ultraviolet (EUV) generator, the temperature of the ionization stage 3 inside the vacuum chamber 22 rises. Cooling water is introduced into the inlet pipe via a flexible hose 4 through an external water source. The cooling water flows from the hose 4 into the steel pipe 6, then into the ionization stage 3, carrying away the heat. The water then returns to the ionization stage 3 via the return steel pipe 8, further cooling it. Finally, the water flows out through the outlet pipe 6 and the hose 4. The cooling water carries away heat as it flows through the ionization stage 3, cooling it and preventing excessive temperature from affecting the transmission of EUV light, thereby improving the reliability of the EUV generator.

[0035] The inventors discovered that the cavity (vacuum cavity 22) where the extreme ultraviolet light generating component is located is a vacuum environment. Directly connecting ordinary water pipes to the ionization stage 3 will cause cooling water leakage due to pressure difference between the connection between the water pipe and the partition 23 and between the water pipe and the ionization stage 3. The cooling water leaking into the vacuum cavity 22 will quickly vaporize and destroy the vacuum environment.

[0036] In this application, since the vacuum chamber 22 is under negative pressure, ordinary water pipes are easily deformed and damaged, while steel pipe 6 and return steel pipe 8 have higher hardness and are less susceptible to deformation due to pressure difference, making them more suitable for vacuum environments. Setting the hose 4 under normal pressure conditions makes it easier to move and facilitates the installation of other components within the normal pressure chamber 21.

[0037] Compared to using steel pipes for all pipelines, the split pipeline of flexible hose 4 and steel pipe 6 in this embodiment can reduce the weight and production cost of the entire extreme ultraviolet light generator.

[0038] It is understandable that the water flow channel in the ionization stage 3 is two through-holes, which facilitates the early processing. In some embodiments, the water flow channel can also be processed into a U-shaped non-through-hole, in which case it is not necessary to install the return steel pipe 8.

[0039] The working principle of this utility model is as follows: During the operation of the extreme ultraviolet generator, the temperature of the ionization stage 3 in the vacuum chamber 22 rises. Cooling water is introduced into the inlet water pipe through the hose 4 through the external water source. The cooling water flows from the hose 4 into the steel pipe 6, and then into the ionization stage 3, carrying away the heat in the ionization stage 3. It then enters the ionization stage 3 again through the return steel pipe 8 to cool the ionization stage 3 again. Finally, it flows out to the outside through the steel pipe 6 and the hose 4 in the outlet water pipe.

[0040] The foregoing has provided a detailed description of one embodiment of the present invention, but the description is merely a preferred embodiment and should not be construed as limiting the scope of the present invention. All equivalent variations and improvements made within the scope of the claims of the present invention should still fall within the scope of the claims of the present invention.

Claims

1. A cooling system suitable for an extreme ultraviolet light generator, the extreme ultraviolet light generator comprising a protective cover (1), a shell (2) is arranged in the protective cover (1), a normal pressure cavity (21) and a vacuum cavity (22) are arranged in the shell (2), an ionization platform (3) is arranged in the vacuum cavity (22), characterized in that, The utility model relates to a kind of water purification device, including: Water inlet pipeline and water outlet pipeline, the ionization platform (3) is opened water flow passage, the water inlet pipeline is connected with the input end of the water flow passage, the water outlet pipeline is connected with the output end of the water flow passage; The water inlet pipeline and the water outlet pipeline are arranged as steel pipe (6) in the part in the vacuum cavity (22), arranged as hose (4) in the part in the normal pressure cavity (21), the steel pipe (6) is communicated with the hose (4).

2. A cooling system according to claim 1, characterized in that The normal pressure cavity (21) and the vacuum cavity (22) are cut off by baffle (23), the baffle (23) is opened with through-hole, the steel pipe (6) is communicated with the hose (4) by the through-hole.

3. A cooling system according to claim 2, wherein The hose (4) is provided with first quick connector (5) at the through-hole of the baffle (23), and the first quick connector (5) is used to assemble the hose (4).

4. A cooling system according to claim 2, wherein The steel pipe (6) is provided with second quick connector (7) at both ends, and the second quick connector (7) is used to assemble the steel pipe (6).

5. A cooling system according to claim 4, characterised in that One end of the steel pipe (6) is connected with the baffle (23) at the through-hole by the second quick connector (7).

6. A cooling system according to claim 5, characterised in that The other end of the steel pipe (6) is connected with the ionization platform (3) by the second quick connector (7).

7. A cooling system according to claim 4, wherein The vacuum cavity (22) is further provided with return steel pipe (8).

8. A cooling system according to claim 7, characterised in that The return steel pipe (8) is communicated with the water flow passage opened by the ionization platform (3).

9. A cooling system according to claim 8, wherein, The return steel pipe (8) is provided with the second quick connector (7) at both ends, and the return steel pipe (8) is connected with the ionization platform (3) by the second quick connector (7).

10. The cooling system of claim 1, wherein, The water inlet pipeline and the water outlet pipeline can be replaced with each other.

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