Automatic wafer coating machine

Abstract

The utility model discloses an automatic wafer coating machine, relates to the technical field, and aims to solve the problems that automation cannot be realized, only each process can be carried out independently and automatic production cannot be realized when fluorescent powder is uniformly coated on the surface of an existing wafer and a finished wafer is prepared. An oven is arranged between the first station and the second station, each of the first station and the second station comprises a needle cylinder moving mechanism and a water tank used for pasting a fluorescent powder floating sheet, a rotating mechanism is arranged on one side of each water tank, and a magnetic stirring mechanism is arranged behind each water tank. The rotating mechanism comprises a rotating disc and a driving motor controlling the rotating disc to rotate, a first air cylinder is arranged on the outer edge of the rotating disc, a carrier is arranged at the output end of the first air cylinder, and a second air cylinder used for being externally connected with an auxiliary pressing claw is arranged on one side of the first air cylinder. A protection frame used for being fixed to the lower rack is arranged outside the driving motor.

Description

Technical Field

[0001] This utility model relates to the technical field, specifically to an automated wafer coating machine. Background Technology

[0002] A wafer is a silicon wafer used to make semiconductor circuits. It is widely used in the production and manufacturing of integrated circuits. In order to prepare for subsequent processes such as evaporation and development, wafers are first coated with solvents.

[0003] For example, the Chinese authorized patent with publication number CN212750854U (A Wafer Coating Machine) includes a placement rack for placing wafers, an electric gripper and a support frame on one side of the placement rack, a drive unit connected to the electric gripper for moving the electric gripper between the placement rack and the support frame, and the support frame for placing wafers; a picking member is provided above the support frame, and a coating member is provided on one side of the picking member, the picking member being used to pick up wafers from the support frame onto the coating member or to pick up wafers from the coating member onto the support frame. This application has the effect of saving labor costs.

[0004] However, the existing wafer coating process, which involves uniformly coating phosphors onto the wafer surface and preparing finished wafers, cannot be automated. Each step must be performed individually, and automated production is not possible. Therefore, it does not meet current needs. To address this, we propose an automated wafer coating machine. Utility Model Content

[0005] The purpose of this invention is to provide an automated wafer coating machine to solve the problem mentioned in the background art that when uniformly coating phosphors on the surface of existing wafers and preparing finished wafers, automation cannot be achieved, and each process can only be carried out separately, and automated production cannot be realized.

[0006] To achieve the above objectives, this utility model provides the following technical solution: an automated wafer coating machine, comprising: a first station, a second station, and a lower frame, wherein an oven is provided between the first station and the second station, both the first station and the second station include a syringe moving mechanism and a water tank for attaching phosphor float sheets, a rotating mechanism is provided on one side of the water tank, and a magnetic stirring mechanism is provided behind the water tank, the rotating mechanism includes a rotating disk and a drive motor for controlling the rotation of the rotating disk, a first cylinder is provided at the outer edge of the rotating disk, a carrier is provided at the output end of the first cylinder, a second cylinder for externally connecting auxiliary pressure claws is provided on one side of the first cylinder, and a protective frame for fixing to the lower frame is provided outside the drive motor.

[0007] Preferably, the syringe moving mechanism includes an X-axis mechanism, a Y-axis mechanism is provided at the moving end of the X-axis mechanism, a Z-axis mechanism is provided at the moving end of the Y-axis mechanism, and a syringe is provided at the moving end of the Z-axis mechanism.

[0008] Preferably, the magnetic stirring mechanism includes a reciprocating cylinder, a hollow magnetic stirrer is provided at the moving end of the reciprocating cylinder, a cleaning alcohol cup is provided below the hollow magnetic stirrer, a mixing measuring cup is provided on one side of the cleaning alcohol cup, and a rotating pressing cover plate mechanism is provided on one side of the mixing measuring cup.

[0009] Preferably, a product-grabbing mechanism is provided in front of the oven, and a belt conveyor for product transportation is provided below the product-grabbing mechanism.

[0010] Preferably, the material handling mechanism includes a moving module, and the moving end of the moving module is provided with a gripper with a cylinder structure, and the gripper moves laterally and vertically through the cylinder and the moving module.

[0011] Preferably, both the first and second workstations are equipped with tri-color lights for warning and reminder purposes at their upper ends.

[0012] Preferably, a touch screen is provided at the front end of both the first and second workstations, and a button is provided below the touch screen.

[0013] Compared with the prior art, the beneficial effects of this utility model are:

[0014] 1. This utility model combines a rotating mechanism, a water tank, a syringe moving mechanism, a material handling mechanism, a magnetic stirring mechanism, and an oven. The carrier containing the product is rotated into the water tank via the rotating mechanism. The syringe draws in phosphor powder, and the syringe containing the phosphor powder is moved to a hollow magnetic stirrer for uniform magnetic stirring. Then, silver powder is evenly dripped onto the surface of pure water. Once the silver powder is evenly spread on the water surface, the water is slowly released from the bottom, causing the water level to drop. Simultaneously, the carrier placed in the water is slowly lifted by the rotating mechanism, allowing the silver powder to evenly adhere to the product, completing the coating. The rotating mechanism then rotates the product to the material handling mechanism, which picks up the product and places it onto a belt conveyor. The belt conveyor then carries the product into the oven for baking. This solves the problem that existing methods for uniformly coating phosphor powder onto wafer surfaces and preparing finished wafers cannot be automated, requiring each process to be performed separately and preventing automated production. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0016] Figure 2 This is a schematic diagram of the rotating mechanism structure of this utility model;

[0017] Figure 3 This is a schematic diagram of the syringe moving mechanism of this utility model;

[0018] Figure 4 This is a schematic diagram of the magnetic stirring mechanism of this utility model;

[0019] Figure 5 This is a schematic diagram of the material handling mechanism of this utility model;

[0020] In the diagram: 1. First station; 2. Second station; 3. Lower frame; 4. Rotating mechanism; 5. Water tank; 6. Syringe moving mechanism; 7. Tri-color light; 8. Touch screen; 9. Button; 10. Material handling mechanism; 11. Drive motor; 12. Protective frame; 13. Rotary disk; 14. Carrier; 15. First cylinder; 16. Second cylinder; 17. X-axis mechanism; 18. Y-axis mechanism; 19. Z-axis mechanism; 20. Syringe; 21. Reciprocating cylinder; 22. Hollow magnetic stirrer; 23. Mixing measuring cup; 24. Rotary pressing cover plate mechanism; 25. Cleaning alcohol cup; 26. Magnetic stirring mechanism; 27. Gripper; 28. Moving module; 29. ​​Oven. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0022] Please see Figure 1-5 An embodiment of this utility model provides an automated wafer coating machine, comprising: a first station 1, a second station 2, and a lower frame 3. An oven 29 is provided between the first station 1 and the second station 2. Both the first station 1 and the second station 2 include a syringe moving mechanism 6 and a water tank 5 for attaching phosphor float sheets. A rotating mechanism 4 is provided on one side of the water tank 5, and a magnetic stirring mechanism 26 is provided behind the water tank 5. The rotating mechanism 4 includes a rotating disk 13 and a drive motor 11 for controlling the rotation of the rotating disk 13. A first cylinder 15 is provided at the outer edge of the rotating disk 13, and a carrier 14 is provided at the output end of the first cylinder 15. A second cylinder 16 for externally connecting auxiliary pressure claws is provided on one side of the first cylinder 15. A protective frame 12 for fixing to the lower frame 3 is provided outside the drive motor 11.

[0023] The carrier 14 containing the product is rotated into the water tank 5 via the rotating mechanism 4. The syringe 20 draws in fluorescent powder and moves to the hollow magnetic stirrer 22 via the syringe moving mechanism for uniform magnetic stirring. Then, the silver powder is evenly dripped onto the surface of pure water. Once the silver powder is evenly spread on the water surface, the water is slowly released from the bottom. The water tank 5 has an upper and lower water system and a water pump motor (not shown in the figure) at the bottom. As the water level drops, the carrier 14 placed in the water is slowly lifted by the rotating mechanism 4. The silver powder is evenly adhered to the product, completing the coating. The product is rotated to the picking mechanism 10 via the rotating mechanism 4. The picking mechanism 10 picks up the product and places it on the belt conveyor. The belt conveyor drives the product into the oven 29 for baking.

[0024] Please see Figure 1 , 3 The syringe moving mechanism 6 includes an X-axis mechanism 17, a Y-axis mechanism 18 at the moving end of the X-axis mechanism 17, a Z-axis mechanism 19 at the moving end of the Y-axis mechanism 18, and a syringe 20 at the moving end of the Z-axis mechanism 19, which drives the syringe 20 to move back and forth, left and right, and up and down. The syringe moving mechanism is servo driven and, in conjunction with a lead screw and flange, can realize the conversion of motor rotation into linear reciprocating motion. It is supported by high-rigidity guide rails, has high structural rigidity, strong load-bearing capacity, high motion accuracy, and is easy to use.

[0025] Please see Figure 1 , 4 The magnetic stirring mechanism 26 includes a reciprocating cylinder 21. A hollow magnetic stirrer 22 is provided at the moving end of the reciprocating cylinder 21. A cleaning alcohol cup 25 is provided below the hollow magnetic stirrer 22. A mixing measuring cup 23 is provided on one side of the cleaning alcohol cup 25. A rotating pressing cover plate mechanism 24 is provided on one side of the mixing measuring cup 23 to improve the uniformity of the fluorescent powder and also to clean the syringe 20 after the fluorescent powder has been dispensed.

[0026] Please see Figure 1 , 5 A product-grabbing mechanism 10 is provided in front of the oven 29, and a belt conveyor for product transportation is provided below the product-grabbing mechanism 10. The product-grabbing mechanism 10 includes a moving module 28. The moving end of the moving module 28 is provided with a gripper 27 with a cylinder structure. The gripper 27 moves laterally and vertically through the cylinder and the moving module 28. The product is rotated to the product-grabbing mechanism 10 by the rotating mechanism 4. The gripper 27 moves laterally and vertically through the cylinder and the moving module 28. The product is grabbed and placed on the belt conveyor by the gripper 27. The product is then driven into the oven 29 for baking by the belt conveyor.

[0027] Please see Figure 1Both the first workstation 1 and the second workstation 2 are equipped with tri-color lights 7 for warning and reminder at the top. Both the first workstation 1 and the second workstation 2 are equipped with touch screens 8 on the front side of one side. Buttons 9 are located below the touch screens 8. The dual workstations improve the efficiency of operation.

[0028] Working principle: During use, water is added to the water tank 5. The drive motor 11 drives the rotating disk 13 to rotate, rotating the carrier 14 containing the product into the water tank 5. The syringe 20 draws in the fluorescent powder. The syringe 20 containing the fluorescent powder is moved by the X-axis mechanism 17, Y-axis mechanism 18, and Z-axis mechanism 19 to the hollow magnetic stirrer 22 for uniform magnetic stirring. Then, the fluorescent powder is evenly dripped onto the surface of the pure water. The syringe 20 rises about 0.1mm by the Z-axis mechanism 19 to draw back the mixture, preventing dripping during movement. The remaining mixture in the syringe 20 is discharged into the mixing measuring cup 23, which is then controlled by the reciprocating cylinder 21. The cleaning alcohol cup 25 is moved to clean the syringe 20 again. After the silver powder is evenly spread on the water surface, the water is slowly released from the bottom. The water tank 5 has an upper and lower water system and a water pump motor (not shown in the figure) at the bottom. The water level drops, and at the same time, the carrier 14 set in the water is slowly lifted by the first cylinder 15. The silver powder is evenly attached to the product to complete the coating. The product is rotated to the picking mechanism 10 by the rotating mechanism 4. The gripper 27 moves horizontally and vertically by the cylinder and the moving module 28. The gripper 27 picks up the product and puts it on the belt conveyor. The belt conveyor drives the product into the oven 29 for baking.

[0029] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. An automated wafer coating machine, comprising a first station (1), a second station (2), and a lower rack (3), characterized in that: An oven (29) is provided between the first station (1) and the second station (2). Both the first station (1) and the second station (2) include a syringe moving mechanism (6) and a water tank (5) for attaching fluorescent powder floats. A rotating mechanism (4) is provided on one side of the water tank (5). A magnetic stirring mechanism (26) is provided behind the water tank (5). The rotating mechanism (4) includes a rotating disk (13) and a drive motor (11) for controlling the rotation of the rotating disk (13). A first cylinder (15) is provided at the outer edge of the rotating disk (13). A carrier (14) is provided at the output end of the first cylinder (15). A second cylinder (16) for externally connecting auxiliary pressure claws is provided on one side of the first cylinder (15). A protective frame (12) for fixing to the lower frame (3) is provided outside the drive motor (11).

2. The automated wafer coating machine according to claim 1, characterized in that: The syringe moving mechanism (6) includes an X-axis mechanism (17), the moving end of the X-axis mechanism (17) is provided with a Y-axis mechanism (18), the moving end of the Y-axis mechanism (18) is provided with a Z-axis mechanism (19), and the moving end of the Z-axis mechanism (19) is provided with a syringe (20).

3. The automated wafer coating machine according to claim 1, characterized in that: The magnetic stirring mechanism (26) includes a reciprocating cylinder (21), and a hollow magnetic stirrer (22) is provided at the moving end of the reciprocating cylinder (21). A cleaning alcohol cup (25) is provided below the hollow magnetic stirrer (22), and a mixing measuring cup (23) is provided on one side of the cleaning alcohol cup (25). A rotating pressing cover plate mechanism (24) is provided on one side of the mixing measuring cup (23).

4. An automated wafer coating machine according to claim 1, characterized in that: The oven (29) is provided with a material handling mechanism (10) for grabbing products in front of it, and a belt conveyor for transporting products is provided below the material handling mechanism (10).

5. An automated wafer coating machine according to claim 4, characterized in that: The material handling mechanism (10) includes a moving module (28), the moving end of which is provided with a gripper (27) having a cylinder structure, and the gripper (27) moves laterally and vertically through the cylinder and the moving module (28).

6. An automated wafer coating machine according to claim 1, characterized in that: Both the first workstation (1) and the second workstation (2) are equipped with tri-color lights (7) for warning and reminder.

7. An automated wafer coating machine according to claim 1, characterized in that: The first workstation (1) and the second workstation (2) are each provided with a touch screen (8) at the front end of one side, and a button (9) is provided below the touch screen (8).

Images