Coating equipment
By integrating coating and drying functions, the problems of coating liquid film damage and substrate breakage have been solved, improving the quality and production efficiency of solar cells and reducing costs.
Patent Information
- Application Number
- CN202520001926.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-02
- Publication Date
- 2026-01-09
- Estimated Expiration
- 2035-01-02
AI Technical Summary
In existing technologies, coating equipment and vacuum drying equipment are used separately, which makes the coating liquid film easy to be damaged and the substrate easy to break, affecting the quality and production efficiency of solar cells, and increasing equipment costs and space occupation.
Design a coating equipment that integrates coating and drying functions. Through rotating components and multi-station design, it can achieve continuous processing of substrates, avoid transfer, and ensure uniform distribution of coating liquid and integrity of substrates.
It improves the quality and yield of solar cells, shortens the production cycle, reduces production costs, and reduces equipment space requirements.
Smart Images
Figure CN223775278U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to coating equipment technical field especially relates to a coating equipment. BACKGROUND
[0002] In the production process of solar cells, the coating equipment needs to coat the substrate first, and then the vacuum drying equipment is used to dry the coated substrate. In the prior art, the coating equipment and the vacuum drying equipment are separate, that is, the coating liquid is coated on the substrate by the coating equipment first, and then the coated substrate is transported to the vacuum drying equipment by the transfer device. In the process of transporting the coated substrate to the vacuum drying equipment, not only is the coating liquid film easily damaged, causing uneven distribution of the coating liquid on the substrate, but also thinner substrates may be damaged, resulting in a decrease in the quality and yield of solar cells, and the production cycle of solar cells is also prolonged, thereby reducing the production efficiency of solar cells. At the same time, the transfer device needs to be increased, which increases the equipment cost and occupied space, thereby increasing the production cost of solar cells.
[0003] Therefore, how to improve the quality and production efficiency of solar cells is a difficult problem that needs to be solved urgently. SUMMARY
[0004] The utility model discloses a kind of coating equipment, not only avoid the coated substrate is transported to vacuum drying equipment, to avoid the damage of coating liquid film, ensure that the coating liquid on substrate is evenly distributed, also avoid substrate breakage, and then improve the quality and yield of solar cells, and also shorten the production cycle of solar cells, thereby improve the production efficiency of solar cells, simultaneously also do not need to increase transfer device, reduce equipment cost and occupied space, thereby reduce the production cost of solar cells.
[0005] The utility model discloses the following technical scheme is adopted to realize the purpose:
[0006] A kind of coating equipment, comprising: rotating component and sequentially arranged in the rotating component around feeding assembly, coating assembly, drying assembly and discharging assembly;
[0007] The rotating component includes rotating table and multiple stations, multiple stations are evenly spaced in the rotating direction of rotating table, at least one coating platform is provided in each station, the coating platform is used to carry substrate, the rotating table can be intermittently rotated and drive the coating platform and the substrate synchronous rotation;
[0008] The feeding assembly is used to transfer the uncoated substrate to the coating platform, the coating assembly comprises a coating head used to coat the substrate on the coating platform with coating liquid, the drying assembly is used to dry the coating liquid coated on the substrate by the coating head, and the discharging assembly is used to move the substrate dried by the drying assembly out of the coating platform.
[0009] Preferably, the drying assembly comprises a cavity and a vacuum pump connected with the cavity through a pipeline, the cavity is arranged above the rotating table, one side of the cavity towards the rotating table is provided with an opening, and the opening of the cavity can be connected with the rotating table to form a closed space so that the coating platform and the substrate are located in the closed space.
[0010] Preferably, the number of the stations is four, and the four stations are uniformly distributed in the rotating direction of the rotating table, and the rotating table is intermittently rotated every 90°.
[0011] Preferably, the rotating assembly further comprises a support shaft, a base and a first driving device, one end of the support shaft is connected with the rotating table, the other end of the support shaft is rotatably arranged on the base, and the first driving device is used to drive the support shaft to rotate and drive the rotating table to rotate; or,
[0012] One end of the support shaft is rotatably connected with the rotating table, the other end of the support shaft is connected with the base, and the first driving device is used to drive the rotating table to rotate around the support shaft.
[0013] Preferably, the coating assembly further comprises a measuring module, and the measuring module is used to measure the surface height of the substrate to be coated located on the coating platform.
[0014] Preferably, the coating platform comprises a bearing table and a support part, and a second driving device arranged between the bearing table and the support part, and the second driving device drives the bearing table to ascend and descend according to the measurement data of the measuring module.
[0015] Preferably, the coating assembly further comprises a bracket, the bracket is arranged above the rotating table, the coating head is connected with the bracket, and the bracket can drive the coating head to move back and forth in the coating direction.
[0016] Preferably, a position sensor is arranged on the side of the coating assembly close to the rotating table, the position sensor is used to detect the position of the substrate located on the coating platform, and the bracket drives the starting position of the coating head in the coating direction according to the detection data of the position sensor.
[0017] Preferably, the support comprises a crossbeam and a first column and a second column respectively arranged at two ends of the crossbeam, and the coating head is arranged on the crossbeam.
[0018] Preferably, the number of the feeding assemblies is one or more; and / or,
[0019] The number of the coating assemblies is one or more; and / or,
[0020] The number of the drying assemblies is one or more; and / or,
[0021] The number of the discharging assemblies is one or more.
[0022] Compared with the prior art, the coating equipment has at least the following beneficial effects:
[0023] The coating equipment integrates the coating assembly and the drying assembly into the same device, and sets multiple workstations through the rotating assembly, so that multiple substrates can be placed in the multiple workstations, the rotating table can rotate intermittently and drive the coating platform and the substrates to rotate synchronously, the feeding assembly, the coating assembly, the drying assembly and the discharging assembly can process the same substrate in sequence, while the coating head coats one substrate, the drying assembly can dry another substrate, or the coated substrate can be quickly transferred to the drying assembly, so that the coated substrate does not need to be transported, which not only avoids transporting the coated substrate to the vacuum drying device, thereby avoiding damage to the coating liquid film and ensuring uniform distribution of the coating liquid on the substrate, but also avoids damage to the substrate, thereby improving the quality and yield of the solar cell, shortening the production cycle of the solar cell, improving the production efficiency of the solar cell, and reducing the equipment cost and occupied space, thereby reducing the production cost of the solar cell. BRIEF DESCRIPTION OF DRAWINGS
[0024] Figure 1 is a perspective structural schematic view of the coating equipment from one view angle of an embodiment of the present application.
[0025] Figure 2 is a perspective structural schematic view of the coating equipment from another view angle of an embodiment of the present application.
[0026] Figure 3 is a planar structural schematic view of the coating equipment of an embodiment of the present application.
[0027] In the figure: 100, coating equipment; 1, rotating assembly; 11, rotating table; 12, work station; 13, support shaft; 14, base; 2, feeding assembly; 21, first support seat; 22, first mechanical arm; 23, first pick-and-place unit; 24, first image acquisition device; 3, coating assembly; 31, coating head; 32, support; 321, cross beam; 322, first vertical column; 323, second vertical column; 33, measurement module; 34, position sensor; 4, drying assembly; 41, cavity; 42, pipeline; 5, discharging assembly; 51, second support seat; 52, second mechanical arm; 53, second pick-and-place unit; 54, second image acquisition device; 200, substrate. DETAILED DESCRIPTION
[0028] Example implementations will now be described more fully with reference to the accompanying drawings. Example implementations may, however, be implemented in many different forms and should not be construed as limited to the implementations set forth herein; rather, these implementations are provided so that this disclosure will be thorough and complete, and fully convey the inventive aspects of the example implementations to those skilled in the art. Like reference numerals refer to like elements throughout the figures, and descriptions of the same elements will not be repeated.
[0029] The words expressing position and direction described in the present application are explained by taking the drawings as an example, but changes can also be made as needed, and the changes made are included in the protection scope of the present application.
[0030] Reference Figures 1 to 3 The present application provides a kind of coating equipment 100, comprising: rotating assembly 1 and sequentially arranged in rotating assembly 1 around feeding assembly 2, coating assembly 3, drying assembly 4 and discharging assembly 5.More preferably, feeding assembly 2, coating assembly 3, drying assembly 4 and discharging assembly 5 are sequentially arranged around rotating assembly 1 along the rotation direction of rotating assembly 1.When rotating assembly 1 rotates clockwise, feeding assembly 2, coating assembly 3, drying assembly 4 and discharging assembly 5 are sequentially arranged around rotating assembly 1 along clockwise direction, when rotating assembly 1 rotates counterclockwise, feeding assembly 2, coating assembly 3, drying assembly 4 and discharging assembly 5 are sequentially arranged around rotating assembly 1 along counterclockwise direction.
[0031] Specifically, reference Figure 1 , Figure 2, the rotating assembly 1 can include a rotating table 11 and a plurality of stations 12, the plurality of stations 12 are uniformly distributed in the rotating direction of the rotating table 11, and each station 12 can be provided with at least one coating platform (not shown), that is, each station 12 can be provided with one or more coating platforms, the coating platform is used to carry the substrate 200, and the rotating table 11 can intermittently rotate and drive the coating platform and the substrate 200 to rotate synchronously. The installation positions of the feeding assembly 2, the coating assembly 3, the drying assembly 4 and the discharging assembly 5 are unchanged, and the same station 12 is rotated to the feeding assembly 2, the coating assembly 3, the drying assembly 4 and the discharging assembly 5 in turn through the rotation of the rotating table 11, so that the same substrate 200 is rotated to the feeding assembly 2, the coating assembly 3, the drying assembly 4 and the discharging assembly 5 in turn.
[0032] The substrate 200 can be a crystalline silicon substrate, a glass substrate, etc., for example, when the substrate 200 adopts a crystalline silicon substrate, a crystalline silicon solar cell is formed by coating a perovskite solution on the crystalline silicon substrate. The rotating table 11 can be in the form of a flat plate as a whole, and the rotating table 11 can be in the form of a circle, a direction, etc., and the rotating table 11 can also be provided in the form of a cross, a rice character, etc. In the embodiment, the rotating table 11 is in the form of a circle as a whole, and the plurality of stations 12 are uniformly distributed along the circumference of the rotating table 11.
[0033] The feeding assembly 2 is used to transfer the uncoated substrate 200 to the coating platform, the coating assembly 3 can include a coating head 31, the coating head 31 is used to coat the coating liquid on the substrate 200 on the coating platform, the drying assembly 4 is used to dry the coating liquid coated on the substrate 200 by the coating head 31, so that the coating liquid forms a dry film, and the discharging assembly 5 is used to move the substrate 200 dried by the drying assembly 4 out of the coating platform. When the rotating table 11 is stationary, the feeding assembly 2, the coating assembly 3, the drying assembly 4 and the discharging assembly 5 can all operate in cooperation with the rotating table 11, when the rotating table 11 rotates, the feeding assembly 2 transfers the uncoated substrate 200 to the coating platform, the coating head 31 coats the coating liquid on the substrate 200 on the coating platform, the drying assembly 4 dries the coating liquid coated on the substrate 200 by the coating head 31, so that the coating liquid forms a dry film, and the discharging assembly 5 moves the substrate 200 dried by the drying assembly 4 out of the coating platform.
[0034] The number of feeding assemblies 2 can be one or more, the number of coating assemblies 3 can also be one or more, the number of drying assemblies 4 can also be one or more, and the number of discharging assemblies 5 can also be one or more.
[0035] As an example, reference is made to Figure 1 , Figure 2When the number of stations 12 is four, the four stations 12 are evenly spaced in the rotation direction of the rotating table 11, i.e. adjacent stations 12 are spaced 90° apart, and the rotating table 11 can rotate intermittently by 90°. The feeding assembly 2, the coating assembly 3, the drying assembly 4 and the discharging assembly 5 can be arranged with a spacing of 90° between adjacent ones along the rotating assembly 1, and the four stations 12 can be arranged one-to-one with the feeding assembly 2, the coating assembly 3, the drying assembly 4 and the discharging assembly 5. The rotating table 11 can rotate by 90° each time, thereby driving each station 12 to rotate by 90° simultaneously, so that the feeding assembly 2, the coating assembly 3, the drying assembly 4 and the discharging assembly 5 can process the same substrate 200 in turn.
[0036] When the number of stations 12 is eight, adjacent stations 12 are spaced 45° apart, the feeding assembly 2, the coating assembly 3, the drying assembly 4 and the discharging assembly 5 can be arranged with a spacing of 90° between adjacent ones along the rotating assembly 1, and the rotating table 11 can rotate by 45° each time. When the number of feeding assemblies 2, coating assemblies 3, drying assemblies 4 and discharging assemblies 5 is two, the two feeding assemblies 2, the two coating assemblies 3, the two drying assemblies 4 and the two discharging assemblies 5 can be arranged with a spacing of 45° between adjacent ones along the rotating assembly 1, i.e. the eight stations 12 are arranged one-to-one with the two feeding assemblies 2, the two coating assemblies 3, the two drying assemblies 4 and the two discharging assemblies 5, and the rotating table 11 can rotate by 90° each time, so that the two feeding assemblies 2, the two coating assemblies 3, the two drying assemblies 4 and the two discharging assemblies 5 can process the substrate 200 simultaneously, thereby greatly improving the production efficiency of the solar cell.
[0037] In some embodiments, the number of feeding assemblies 2 and discharging assemblies 5 can be one, one feeding assembly 2 can feed two stations 12, and one discharging assembly 5 can discharge two stations 12, and the number of coating assemblies 3 and drying assemblies 4 is two, the two coating assemblies 3 can coat the substrates 200 of two stations 12 simultaneously, and the two drying assemblies 4 can dry the substrates 200 of two stations 12 simultaneously, thereby ensuring that the production efficiency of the solar cell is improved while the equipment cost is saved.
[0038] Of course, the number of stations 12 and the number of feeding assemblies 2, coating assemblies 3, drying assemblies 4 and discharging assemblies 5 can also be set according to actual needs. The installation order of the feeding assembly 2, the coating assembly 3, the drying assembly 4 and the discharging assembly 5 can also be adjusted, for example, the feeding assembly 2, the first coating assembly 3, the first drying assembly 4, the second coating assembly 3, the second drying assembly 4 and the discharging assembly 5 can be arranged in turn.
[0039] The coating head 31 is provided with a discharge slit (not shown) on the side facing the substrate 200, and the coating liquid is coated on the substrate 200 through the discharge slit. When each station 12 is provided with one coating platform, each coating platform can carry one substrate 200, and each coating head 31 is provided with one discharge slit on the side facing the substrate 200. When each station 12 is provided with multiple coating platforms, each coating platform can carry one substrate 200, and each station 12 can place multiple substrates 200, each coating head 31 is provided with multiple discharge slits on the side facing the substrate 200, and the multiple discharge slits are arranged one-to-one with the multiple coating platforms, and one coating head 31 can simultaneously coat multiple substrates 200.
[0040] In the utility model, the coating assembly 3 and the drying assembly 4 are integrated into the same equipment, and multiple stations 12 are arranged through the rotating assembly 1, multiple substrates 200 can be placed in multiple stations 12 respectively, the rotating table 11 can intermittently rotate and drive the coating platform and the substrate 200 to rotate synchronously, the feeding assembly 2, the coating assembly 3, the drying assembly 4 and the discharging assembly 5 can process the same substrate 200 in turn, while the coating head 31 coats one substrate 200, the drying assembly 4 can dry another substrate 200, or the coated substrate 200 can be quickly transferred to the drying assembly 4, and the coated substrate 200 does not need to be transferred, not only avoiding the coated substrate 200 to be transferred to the vacuum drying equipment, thereby avoiding the damage of the coating liquid film, ensuring the uniform distribution of the coating liquid on the substrate 200, avoiding the damage of the substrate 200, and improving the quality and yield of the solar cell, and shortening the production cycle of the solar cell, thereby improving the production efficiency of the solar cell, and without the need of increasing the transfer device, reducing the equipment cost and occupied space, thereby reducing the production cost of the solar cell.
[0041] In a specific embodiment, reference is made to Figure 1 、 Figure 2The drying assembly 4 comprises a cavity 41 and a vacuum pump (not shown) connected to the cavity 41 through a pipeline 42. The cavity 41 can be arranged above the rotating table 11. The cavity 41 can be lifted or lowered in the vertical direction so that the cavity 41 and the rotating table 11 can be in contact or separated from each other. The cavity 41 has an opening on the side facing the rotating table 11. The opening of the cavity 41 can be connected to the rotating table 11 to form a sealed space, so that the coating platform and the substrate 200 are located in the sealed space. For example, when the rotating table 11 is stationary, the cavity 41 can be lowered and closely fitted with the rotating table 11. The cavity 41 can cover the coating platform and the substrate 200 in the sealed space. The vacuum pump can perform vacuumization on the sealed space so that the liquid film on the substrate 200 is dried to form a dry film. After the liquid film on the substrate 200 is dried to form a dry film, the cavity 41 can be lifted and separated from the rotating table 11. The rotating table 11 can be rotated to move the dried substrate 200 to the direction of the unloading assembly 5.
[0042] As a preferred mode, refer to Figure 3 The rotating assembly 1 can further comprise a support shaft 13, a base 14 and a first driving device (not shown). The first driving device is, for example, a motor. One end of the support shaft 13 can be connected to the rotating table 11. The other end of the support shaft 13 is rotatably arranged on the base 14. That is, the rotating table 11 is connected to the base 14 through the support shaft 13. The first driving device is used to drive the support shaft 13 to rotate and drive the rotating table 11 to rotate. When the first driving device works, the first driving device can drive the support shaft 13 to rotate, which means rotating around the axis of the support shaft 13. The support shaft 13 can drive the rotating table 11 to rotate, and the rotating table 11 can drive the substrate 200 to rotate. In another embodiment, one end of the support shaft 13 is rotatably connected to the rotating table 11. The other end of the support shaft 13 is connected to the base 14. The first driving device is used to drive the rotating table 11 to rotate around the support shaft 13. When the first driving device works, the first driving device can drive the rotating table 11 to rotate. The rotating table 11 can drive the substrate 200 to rotate.
[0043] The bottom of the base can further be provided with support legs (not shown). The number of the first support legs is multiple and uniformly distributed on the bottom of the base to maintain the balance of the base. The height of each support leg can be adjusted, that is, the support leg can adjust the height of the base, and further adjust the height of the rotating table 11. The support leg can also ensure that the base remains horizontal, that is, it can ensure that the rotating table 11 is horizontal, so that the rotating table 11 and the coating head 31 remain horizontal.
[0044] As a preferred mode, refer to Figure 1 , Figure 3The coating assembly 3 can further comprise a measuring module 33 for measuring the surface height of the substrate 200 to be coated on the coating platform. The measuring module 33 is, for example, a laser sensor, and three measuring modules 33 can be distributed in a triangular manner and measure three positions on the surface of the substrate 200 to be coated respectively.
[0045] The coating platform can comprise a supporting base and a support portion, and a second driving device arranged between the supporting base and the support portion. The second driving device can drive the supporting base to ascend or descend according to the measurement data of the measuring module 33, so as to drive the substrate 200 to ascend or descend, so that the distance from the upper surface of the substrate 200 on different coating platforms to the coating head 31 is equal. Not only can the thickness of the coating liquid coated on the substrate 200 be adjusted, but also the coating liquid can be uniformly coated on the substrate 200, thereby improving the photoelectric conversion efficiency of the solar cell.
[0046] The number of the second driving devices is two or three, and the number of the second driving devices can also be one or more than three. Preferably, the number of the second driving devices is three. The three second driving devices are arranged in a triangular manner and correspond to the three measuring modules 33. Preferably, the three second driving devices are independent of each other. Three points can determine a plane, and the three second driving devices can adjust the position of the supporting base from three different positions, so that the distance from each point on the upper surface of the substrate 200 to the coating head 31 is equal. Not only can the thickness of the coating liquid coated on the substrate 200 be adjusted, but also the coating liquid can be uniformly coated on the substrate 200, thereby improving the photoelectric conversion efficiency of the solar cell. On the one hand, the three second driving devices can ensure that the supporting base remains balanced, so that the supporting base ascends and descends more stably. On the other hand, the three second driving devices can ensure that each second driving device is subjected to uniform force, that is, each second driving device is subjected to uniform load, so that each second driving device operates more stably and smoothly. In addition, the three second driving devices can prevent the positioning accuracy from being affected or the second driving devices from being damaged due to excessive load.
[0047] As a preferred mode, with reference to Figure 1 、 Figure 2 、 Figure 3The coating assembly 3 can further include a bracket 32, which can be a gantry, and the coating head 31 can be connected to the bracket 32. The bracket 32 can drive the coating head 31 to move back and forth along the coating direction. The bracket 32 can adopt an inverted structure, that is, the bracket 32 can be arranged above the rotary table 11, and the coating head 31 can be arranged at one end of the bracket 32 close to the upper surface of the rotary table 11. The other end of the bracket 32 away from the upper surface of the rotary table 11 extends away from the ground. After the coating head 31 completes coating, the rotary table 11 rotates to avoid interference between the coating head 31, the bracket 32 and the rotary table 11, and facilitates the bracket 32 to return to the initial position after coating is completed. The bracket 32 can include a cross beam 321 and first and second vertical columns 322 and 323 arranged at both ends of the cross beam 321, respectively. The coating head 31 can be arranged on the cross beam 321. The first and second vertical columns 322 and 323 not only support the cross beam 321, but also can move back and forth along the coating direction, thereby driving the coating head 31 to move back and forth along the coating direction.
[0048] The coating assembly 3 can further include a third driving device (not shown) for driving the bracket 32 and driving the coating head 31 to move back and forth along the coating direction. The third driving device is used to drive the bracket 32 and drive the coating head 31 to move back and forth along the coating direction. The third driving device can be a linear motor. Under the driving of the third driving device, the bracket 32 can move back and forth along the coating direction, and the coating head 31 can coat the substrate 200 during movement.
[0049] The coating assembly 3 can further include a fourth driving device (not shown) for driving the coating head 31 to ascend and descend along the height direction of the bracket 32. The fourth driving device can be arranged on the bracket 32, and the fourth driving device can drive the coating head 31 to ascend and descend according to the measurement data of the measurement module 33. The number of the fourth driving device can be one or more. In this embodiment, the number of the fourth driving device is two, and the two fourth driving devices are arranged on the first and second vertical columns 322 and 323, respectively. The two fourth driving devices can drive the two ends of the cross beam 321 to ascend and descend, and the cross beam 321 drives the coating head 31 to ascend and descend. The two fourth driving devices are also preferably independent of each other. The fourth driving device can be a servo module, and of course can also be other types of driving components. As an example, the fourth driving device includes a motor and a guide rail, and the driving end of the motor ascends and descends or telescopes along the guide rail, and the cross beam 321 is connected to the driving end of the motor.
[0050] In the width direction of the substrate 200, the two fourth driving devices can eliminate the problems of one high and one low of the two ends of the bearing table or one high and one low of the two ends of the substrate 200 caused by part machining errors, assembly errors, etc. When the surface of the substrate 200 is not parallel to the coating head 31 in the width direction of the substrate 200, the two fourth driving devices can respectively drive the two ends of the coating head 31 to move in different directions, or one of the fourth driving devices is stationary and the other fourth driving device drives one end of the coating head 31 to move up and down, so that the surface of the substrate 200 is parallel to the coating head 31 in the width direction of the substrate 200, ensuring that the distance from the upper surface of the substrate 200 located on different coating platforms to the coating head 31 is equal. Not only can the thickness of the coating liquid coated on the substrate 200 be adjusted, but also the coating liquid can be uniformly coated on the substrate 200, improving the photoelectric conversion efficiency of the solar cell.
[0051] In the length direction of the substrate 200, the two fourth driving devices can also eliminate the problems of one high and one low of the two ends of the bearing table or one high and one low of the two ends of the substrate 200 caused by part machining errors, assembly errors, etc. When the surface of the substrate 200 is not parallel to the coating head 31 in the length direction of the substrate 200, the length direction of the substrate 200 is the coating direction, and the two fourth driving devices can simultaneously drive the coating head 31 to move in the same direction, so that the distance between the surface of the substrate 200 and the coating head 31 in the length direction of the substrate 200 remains equal. Ensuring that the distance from the upper surface of the substrate 200 located on different coating platforms to the coating head 31 is equal. Not only can the thickness of the coating liquid coated on the substrate 200 be adjusted, but also the coating liquid can be uniformly coated on the substrate 200, improving the photoelectric conversion efficiency of the solar cell.
[0052] The coating assembly 3 can further include a fifth driving device (not shown) for applying a back gravity force to the coating head 31 after the coating head 31 is installed on the support 32 to reduce the load of the fourth driving device. The fifth driving device can be provided on the support 32, and the number of the fifth driving device can be one or more. In the embodiment, the number of the fifth driving device is two, and the two fifth driving devices are respectively provided on the first column 322 and the second column 323, and the two fifth driving devices are also preferably independent of each other. The fifth driving device can be a cylinder module, and of course can also be other types of balancing components. As an example, the fifth driving device includes a cylinder and a push rod, the cylinder drives the push rod to lift or retract, and the cylinder can also keep the push rod stationary and maintain a certain pulling force or pushing force. The two fifth driving devices can be connected to the two ends of the beam 321, that is, the fifth driving device can apply a certain pulling force or pushing force to the beam 321. The fifth driving device can at least share part of the load of the fourth driving device, so as to reduce the load of the fourth driving device, thereby improving the repeat positioning accuracy of the fourth driving device or keeping the repeat positioning accuracy of the fourth driving device always high, improving the product quality, prolonging the service life of the fourth driving device, reducing the replacement frequency of the fourth driving device, improving the equipment use efficiency, and reducing the equipment use cost and maintenance cost. The load mainly refers to the gravity of the beam 321 or the gravity of the coating head 31, and can also refer to the gravity of the beam 321 and the gravity of the coating head 31.
[0053] Reference Figure 1 , Figure 3 The side of the coating assembly 3 close to the rotating table 11 can be provided with a position sensor 34 for detecting the position of the substrate 200 on the coating platform, and the support 32 drives the starting position of the coating head 31 in the coating direction according to the detection data of the position sensor 34. In this way, the partial position of the substrate 200 can be avoided from being missed due to the position deviation of the substrate 200, and the substrate 200 can be completely coated, thereby improving the quality and yield of the coating of the substrate 200.
[0054] Reference Figure 1 , Figure 2The feeding assembly 2 can comprise a first support base 21, a first mechanical arm 22, a first taking and placing part 23 and a first image acquisition device 24. One end of the first mechanical arm 22 can be arranged on the first support base 21, and the other end of the first mechanical arm 22 can be provided with the first taking and placing part 23 and the first image acquisition device 24. The first mechanical arm 22 is used to drive the first taking and placing part 23 and the first image acquisition device 24 to move. The first image acquisition device 24 is used to acquire the position of the substrate 200 to be grabbed. The first taking and placing part 23 is used to take and place the substrate 200. The first taking and placing part 23 preferably adopts a non-contact suction disc, so as to avoid the substrate 200 from being polluted and damaged in the process of taking and placing. The first image acquisition device 24 can acquire the accurate position of the substrate 200, so that the first mechanical arm 22 can more accurately control the first taking and placing part 23 to acquire the substrate 200, and prevent the substrate 200 from being pressed. In addition, the substrate 200 can be more accurately placed on the coating platform according to the position of the substrate 200 when the substrate 200 is acquired. The first image acquisition device 24 can also acquire image information of the coating platform, so that the substrate 200 can be more accurately placed on the coating platform.
[0055] Reference Figure 1 、 Figure 2 The discharging assembly 5 can comprise a second support base 51, a second mechanical arm 52, a second taking and placing part 53 and a second image acquisition device 54. One end of the second mechanical arm 52 can be arranged on the second support base 51, and the other end of the second mechanical arm 52 can be provided with the second taking and placing part 53 and the second image acquisition device 54. The second mechanical arm 52 is used to drive the second taking and placing part 53 and the second image acquisition device 54 to move. The second image acquisition device 54 is used to acquire the position of the substrate 200 which has been dried and located on the coating platform. The second taking and placing part 53 is used to take and place the substrate 200. The second taking and placing part 53 preferably adopts a non-contact suction disc, so as to avoid the substrate 200 from being polluted and damaged in the process of taking and placing. The second image acquisition device 54 can acquire the accurate position of the substrate 200, so that the second mechanical arm 52 can more accurately control the second taking and placing part 53 to acquire the substrate 200, and prevent the substrate 200 from being pressed.
[0056] As an example, the working process of the coating equipment 100 of the utility model is as follows:
[0057] When the rotating table 11 is stationary, the feeding assembly 2 transfers the uncoated substrate 200 to the coating platform. The coating head 31 coats the substrate 200 located on the coating platform. The drying assembly 4 dries the coating liquid coated on the substrate 200 by the coating head 31. The discharging assembly 5 removes the substrate 200 dried by the drying assembly 4 from the coating platform.
[0058] After the feeding assembly 2 transfers the uncoated substrate 200 to the coating platform, the coating head 31 completes coating on the substrate 200 located on the coating platform, the drying assembly 4 completes drying of the coating liquid coated on the substrate 200 by the coating head 31, and the discharging assembly 5 removes the substrate 200 dried by the drying assembly 4 from the coating platform, the rotating table 11 starts to rotate. After the rotating table 11 rotates by a predetermined angle, it stops, and the feeding assembly 2, the coating assembly 3, the drying assembly 4 and the discharging assembly 5 start to operate, to form a cycle.
[0059] The coating equipment is not limited to coating the perovskite solution on the crystalline silicon substrate to prepare the crystalline silicon perovskite laminated solar cell, but also can coat the perovskite solution on the conductive glass substrate to prepare the solar cell, and can be applied to any solution coating, such as display screen preparation, semiconductor packaging and other coating processes.
[0060] Although the embodiments of the utility model have been shown and described above, it can be understood that the above-mentioned embodiments are exemplary and cannot be understood as limiting the utility model, and the ordinary skilled in the art can change, modify, replace and transform the above-mentioned embodiments without departing from the principles and purposes of the utility model, and all these changes should belong to the protection scope of the utility model claim.
Claims
1. A coating device, characterized in that, The application relates to a rotary coating device. The rotary coating device comprises a rotary assembly, an upper feeding assembly, a coating assembly, a drying assembly and a lower discharging assembly which are sequentially arranged around the rotary assembly. The rotary assembly comprises a rotary table and a plurality of work stations which are uniformly distributed in the rotation direction of the rotary table, each of the work stations is provided with at least one coating platform for carrying a substrate, and the rotary table can intermittently rotate and drive the coating platform and the substrate to synchronously rotate. The upper feeding assembly is used for transferring an uncoated substrate to the coating platform, the coating assembly comprises a coating head which is used for coating a coating liquid on the substrate on the coating platform, the drying assembly is used for drying the coating liquid coated on the substrate by the coating head, and the lower discharging assembly is used for discharging the substrate dried by the drying assembly from the coating platform.
2. The coating apparatus according to claim 1, characterized by The drying assembly comprises a cavity and a vacuum pump connected with the cavity through a pipeline, the cavity is arranged above the rotary table, one side of the cavity towards the rotary table is provided with an opening, the opening of the cavity can be connected with the rotary table and form a sealed space so that the coating platform and the substrate are located in the sealed space.
3. The coating apparatus according to claim 1, wherein The number of the work stations is four, the four work stations are uniformly distributed in the rotation direction of the rotary table, and the rotary table intermittently rotates every 90 degrees.
4. The coating apparatus according to claim 1, characterized by The rotary assembly further comprises a support shaft, a base and a first driving device, one end of the support shaft is connected with the rotary table, the other end of the support shaft is rotatably arranged on the base, and the first driving device is used for driving the support shaft to rotate and drive the rotary table to rotate. Alternatively, one end of the support shaft is rotatably connected with the rotary table, the other end of the support shaft is connected with the base, and the first driving device is used for driving the rotary table to rotate around the support shaft.
5. The coating apparatus according to claim 1, wherein The coating assembly further comprises a measuring module which is used for measuring the surface height of the substrate to be coated on the coating platform.
6. The coating apparatus according to claim 5, wherein The coating platform comprises a carrying table, a supporting part and a second driving device arranged between the carrying table and the supporting part, the second driving device drives the carrying table to ascend and descend according to the measurement data of the measuring module.
7. The coating apparatus according to claim 1, wherein The coating assembly further comprises a bracket which is arranged above the rotary table, the coating head is connected with the bracket, and the bracket can drive the coating head to move back and forth in a coating direction.
8. The coating apparatus according to claim 7, characterized in that The coating assembly is provided with a position sensor on the side close to the rotary table, the position sensor is used for detecting the position of the substrate on the coating platform, and the bracket drives the coating head to the starting position in the coating direction according to the detection data of the position sensor.
9. The coating apparatus according to claim 7, wherein The bracket comprises a cross beam, a first vertical column and a second vertical column which are respectively arranged at two ends of the cross beam, and the coating head is arranged on the cross beam.
10. The coating apparatus according to claim 1, wherein The number of the upper feeding assembly is one or more; and / or The number of the coating assembly is one or more; and / or The number of the drying assembly is one or more; and / or The number of the lower discharging assembly is one or more.