Brush rotating mechanism

Abstract

The utility model relates to a brush rotating mechanism which comprises a rotating platform, a swing arm rotationally arranged on the rotating platform through a swing arm rotating shaft, and a second transmission shaft rotationally arranged at the free end of the swing arm. A first transmission shaft is rotationally arranged in the hollow structure in the swing arm rotating shaft; a brush motor and a swing arm motor are arranged on the rotating platform and respectively drive the first transmission shaft and the swing arm rotating shaft to rotate; the swing arm rotating shaft drives the swing arm to swing; the first transmission shaft drives the second transmission shaft to rotate through a transmission assembly arranged in the swing arm. The cleaning device is good in cleaning effect, good in swing arm rotation stability, high in equipment reliability, high in safety and capable of effectively protecting maintenance personnel.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing equipment technology, and in particular to a wafer cleaning brush rotation mechanism. Background Technology

[0002] In semiconductor cleaning equipment, brushes are used to clean the surfaces of wafers, photomasks, and other objects to achieve good cleaning results. Currently, most manufacturers use brush cleaning structures with the motor positioned above the swing arm. During cleaning, the increased weight of the swing arm exacerbates its vibration, significantly impacting cleaning effectiveness and affecting the structural strength of the swing arm. Furthermore, the motor mounted on the swing arm is easily exposed to flammable, explosive, and corrosive liquids that may be used during the cleaning process, posing a significant safety risk and potentially affecting the health of maintenance personnel.

[0003] Therefore, there is an urgent need for a brush rotation mechanism that has good cleaning effect, good swing arm rotation stability, high equipment reliability, high safety, and can effectively protect maintenance personnel. Summary of the Invention

[0004] The purpose of this utility model is to overcome the above-mentioned shortcomings and provide a brush rotation mechanism with good cleaning effect, good swing arm rotation stability, high equipment reliability, high safety, and effective protection for maintenance personnel.

[0005] The purpose of this utility model is achieved as follows:

[0006] A brush rotation mechanism includes a rotating platform, a swing arm rotatably mounted on the rotating platform via a swing arm rotation shaft, and a second transmission shaft rotatably mounted at the free end of the swing arm; a first transmission shaft is rotatably mounted in a hollow structure inside the swing arm rotation shaft; a brush motor and a swing arm motor are mounted on the rotating platform, respectively driving the first transmission shaft and the swing arm rotation shaft to rotate; the swing arm rotation shaft drives the swing arm to swing; the first transmission shaft drives the second transmission shaft to rotate through a transmission component mounted inside the swing arm.

[0007] Furthermore, the transmission components are a synchronous belt and a synchronous pulley; both the first and second transmission shafts are equipped with synchronous pulleys and are connected by a synchronous belt.

[0008] Furthermore, the transmission assembly consists of a third transmission shaft and a bevel gear; the two ends of the third transmission shaft are respectively connected to the first transmission shaft and the second transmission shaft via the bevel gear.

[0009] Furthermore, the rotating platform is mounted on the mounting base via a lifting mechanism.

[0010] Furthermore, the lifting mechanism is a slide cylinder or an electric cylinder.

[0011] Furthermore, a bellows is provided on the swing arm rotation shaft to seal and protect the lower part of the brush rotation mechanism.

[0012] Furthermore, a protective shell is provided on the swing arm.

[0013] Compared with the prior art, the beneficial effects of this utility model are:

[0014] This invention forms a nested transmission structure by placing the first transmission shaft inside the swing arm's rotating shaft. The driving force of the brush motor and swing arm motor, located at the bottom of the rotating platform, is transmitted to the brush and swing arm respectively, completing the cleaning action. Because the brush motor is located at the bottom of the rotating platform, the overall center of gravity is lowered, reducing the load on the end of the swing arm and improving its stability during rotation and lifting movements. This prevents the swing arm from shaking, improves the cleaning effect, and enhances the reliability of the equipment. Furthermore, placing the motor outside the cleaning chamber avoids the risk of fire caused by electrical sparks from electrical components. It also protects the motor from corrosion and protects maintenance personnel, resulting in high safety and good protection. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the structure of a brush rotation mechanism according to the present invention.

[0016] Figure 2 This is a cross-sectional structural diagram of a brush rotation mechanism according to the present invention.

[0017] in:

[0018] 1. Rotating platform; 2. Brush motor; 3. Swing arm motor; 4. First drive shaft; 5. Swing arm rotation shaft; 6. Transmission assembly; 7. Second drive shaft; 8. Lifting mechanism; 9. Bellows; 10. Swing arm; 11. Mounting base. Detailed Implementation

[0019] See Figures 1-2 This utility model relates to a brush rotating mechanism, comprising a rotating platform 1, a swing arm 10 rotatably mounted on the rotating platform 1 via a swing arm rotating shaft 5, and a second transmission shaft 7 rotatably mounted at the free end of the swing arm 10; the rotating platform 1 is raised and lowered on the mounting base 11 via a lifting mechanism 8. In order to ensure the stability of the swing arm 10 during the lifting process of the brush rotating mechanism in this embodiment, the lifting mechanism 8 adopts a high-rigidity, low-clearance slide cylinder. In other embodiments, the lifting mechanism 8 can also adopt a high-precision electric cylinder to achieve the lifting operation.

[0020] The swing arm rotation shaft 5 is made of SUS304 stainless steel to ensure the swing arm rotation shaft's bending resistance and corrosion resistance. It is also coated with Teflon coating to further enhance the swing arm rotation shaft's corrosion resistance. The swing arm 10 is provided with a protective shell made of PPS, PVC and other materials to ensure the rigidity of the swing arm 10 while meeting the requirements for the swing arm 10's corrosion resistance.

[0021] A first transmission shaft 4 is rotatably mounted inside the hollow structure of the swing arm rotation shaft 5, forming a nested rotation shaft structure. The two rotation shafts rotate independently without interfering with each other. A brush motor 2 and a swing arm motor 3 are mounted on the rotating platform 1, which drive the first transmission shaft 4 and the swing arm rotation shaft 5 to rotate, respectively. The swing arm rotation shaft 5 drives the swing arm 10 to swing. The first transmission shaft 4 drives the second transmission shaft 7 to rotate through the transmission component 6 set inside the swing arm 10.

[0022] In this embodiment, the transmission assembly 6 is a synchronous belt and a synchronous pulley, see [link / reference] Figure 2 That is, both the first drive shaft 4 and the second drive shaft 7 are equipped with synchronous pulleys and are connected by synchronous belt transmission to realize the rotation of the brush motor 2 to the second drive shaft 7, so as to complete the brush rotation cleaning action.

[0023] In other embodiments, the transmission component 6 may also be a third transmission shaft and a bevel gear, without provided drawings; the two ends of the third transmission shaft are respectively connected to the first transmission shaft 4 and the second transmission shaft 7 via bevel gears, the brush motor 2 drives the first transmission shaft 4 to rotate, and then drives the third transmission shaft and the second transmission shaft 7 to rotate in sequence, thereby driving the brush to rotate and completing the cleaning action;

[0024] A retractable bellows 9 is installed on the swing arm rotation shaft 5. When the swing arm 10 performs lifting, rotating and other actions, it seals and protects the lower equipment of the brush rotation mechanism, such as the brush motor 2, swing arm motor 3, and lifting mechanism 8, to prevent corrosive liquids and atmospheres in the cleaning chamber from entering the lower part of the mechanism and corroding the equipment and parts below. The material of the bellows 9 can be changed to different materials depending on the chemical solution used, including PFA and other materials.

[0025] This invention forms a nested transmission structure by placing the first transmission shaft 4 inside the swing arm rotation shaft 5. The driving force of the brush motor 2 and the swing arm motor 3, located at the bottom of the rotating platform 1, is transmitted to the brush and swing arm 10 respectively, completing the cleaning action. Because the brush motor 2 is located at the bottom of the rotating platform 1, the overall center of gravity is lowered, and the center of gravity of the swing arm 10 is placed near the axis of the swing arm rotation shaft 5. This reduces the load weight at the end of the swing arm 10, reduces the inertia of the swing arm 10 during operation, and improves the stability of the swing arm 10 during rotation, lifting, and other actions, preventing shaking and jerking. This allows for more stable brush operation during the cleaning process, improving the cleaning effect and the reliability of the equipment. Furthermore, placing the motor outside the cleaning chamber, away from the process chamber, avoids the risk of fire caused by electrical sparks from electrical components. It also protects the motor from chemical corrosion, improving equipment reliability. Since the motor is located below the swing arm 10, maintenance is more convenient, avoiding contamination from opening the process chamber and protecting the safety of maintenance personnel. The design offers high safety and good protection.

[0026] Additionally, it should be noted that the above-described specific implementation is merely an optimized solution of this patent, and any modifications or improvements made by those skilled in the art based on the above concept are within the scope of protection of this patent.

Claims

1. A brush rotating mechanism, comprising a rotating platform (1), a swing arm (10) rotatably mounted on the rotating platform (1) via a swing arm rotating shaft (5), and a second transmission shaft (7) rotatably mounted at the free end of the swing arm (10), characterized in that: A first transmission shaft (4) is rotatably installed in the hollow structure inside the swing arm rotating shaft (5); a brush motor (2) and a swing arm motor (3) are installed on the rotating platform (1) to drive the first transmission shaft (4) and the swing arm rotating shaft (5) to rotate respectively; the swing arm rotating shaft (5) drives the swing arm (10) to swing; the first transmission shaft (4) drives the second transmission shaft (7) to rotate through the transmission component (6) installed inside the swing arm (10).

2. The brush rotation mechanism according to claim 1, characterized in that: The transmission assembly (6) consists of a synchronous belt and a synchronous pulley; both the first transmission shaft (4) and the second transmission shaft (7) are equipped with synchronous pulleys and are connected by a synchronous belt.

3. The brush rotating mechanism according to claim 1, characterized in that: The transmission assembly (6) consists of a third transmission shaft and a bevel gear; the two ends of the third transmission shaft are respectively connected to the first transmission shaft (4) and the second transmission shaft (7) via bevel gears.

4. The brush rotation mechanism according to claim 1, characterized in that: The rotating platform (1) is mounted on the mounting base (11) by means of a lifting mechanism (8).

5. The brush rotating mechanism according to claim 4, characterized in that: The lifting mechanism (8) is a slide cylinder or an electric cylinder.

6. The brush rotation mechanism according to claim 1, characterized in that: A bellows (9) is provided on the swing arm rotation shaft (5) to seal and protect the lower part of the brush rotation mechanism.

7. The brush rotating mechanism according to claim 1, characterized in that: A protective shell is provided on the swing arm (10).

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