Hot plate exhaust assembly

Abstract

The utility model discloses a hot plate exhaust assembly which comprises an exhaust pipeline, an air inlet baffle and a flow adjusting assembly, and the air inlet baffle is arranged on the upstream of the flow adjusting assembly. The air inlet baffle is movably arranged on the exhaust pipeline, a first air inlet structure communicated with the outside is arranged on the exhaust pipeline, a second air inlet structure is correspondingly arranged on the air inlet baffle, and when the air inlet baffle is horizontally moved, the contact area of the first air inlet structure and the outside is increased or decreased. The flow adjusting assembly extends into the exhaust pipeline, and when the flow adjusting assembly is rotated, a gas channel in the gas inlet pipeline is increased or decreased. According to the scheme, the temperature of high-temperature waste gas can be reduced by introducing external air, and the situation that workers are hurt due to too high pipeline temperature is avoided. According to the scheme, by arranging the flow adjusting assembly, on one hand, the waste gas discharge amount can be adjusted; on the other hand, the arc-shaped adsorption part can adsorb chemical substances, and the situation that the chemical substances are gathered in the pipeline, and consequently the service life of the pipeline is shortened is avoided.

Description

TECHNICAL FIELD

[0001] The utility model relates to hot plate exhaust field, more specifically, relate to a hot plate exhaust assembly. BACKGROUND

[0002] Wafer needs to be coated and developed in the processing, and needs to be sent into the hot plate for heating treatment in the coating and developing process. In the heating process, the photoresist and the developing solution on the surface of the wafer will emit chemical substances, which will fill in the cavity of the hot plate, causing pollution on the surface and back of the wafer. The hot plate in the prior art is provided with an exhaust pipeline on the upper cover of the hot plate, and the exhaust pipeline is connected with a negative pressure device to extract the chemical substances generated by the hot plate.

[0003] When exhausting, the volatilized chemical substances are discharged from the exhaust pipeline with the heated gas, and the mixed gas will gradually release heat to the exhaust pipeline during the conveying process of the exhaust pipeline, that is, the temperature of the exhaust pipeline near the hot plate is high, and the temperature of the exhaust pipeline far from the hot plate is low, and the volatilized chemical substances will condense at low temperature, that is, the chemical substances will be attached to the inner wall of the exhaust pipeline far from the hot plate, causing pipeline corrosion. The heat emitted to the exhaust pipeline will cause the temperature of the exhaust pipeline to be too high, and the operator will be scalded if he is not careful. UTILITY MODEL CONTENTS

[0004] The utility model aims at providing a hot plate exhaust assembly to solve the technical problems in the above background.

[0005] The utility model technical scheme provides a hot plate exhaust assembly, which comprises an exhaust pipeline, an air inlet baffle and a flow adjusting assembly, the air inlet baffle is arranged on the upstream of the flow adjusting assembly;

[0006] The air inlet baffle is movably arranged on the exhaust pipeline, the exhaust pipeline is provided with an air inlet structure one in communication with the outside, and the air inlet baffle is provided with an air inlet structure two, the contact area between the air inlet structure one and the outside increases or decreases when the air inlet baffle is translated;

[0007] The flow adjusting assembly extends into the exhaust pipeline, and the gas passage in the air inlet pipeline increases or decreases when the flow adjusting assembly is rotated.

[0008] In a preferred embodiment, the air inlet structure one and the air inlet structure two both comprise a plurality of air inlet holes, and the air inlet holes on the air inlet baffle correspond to the air inlet holes on the exhaust pipeline.

[0009] In a preferred embodiment, the air inlet baffle is connected with a driving mechanism for driving the air inlet baffle to translate relative to the exhaust pipeline.

[0010] In a preferred embodiment, a waist-shaped guide groove is arranged on the air inlet baffle, and a limiting structure is arranged on the exhaust pipeline and passes through the waist-shaped guide groove.

[0011] In a preferred embodiment, the limiting structure comprises a limiting rod and a limiting block fixed with the limiting rod, the limiting rod passes through the waist-shaped guide groove, and the limiting block is located above the waist-shaped guide groove and is wider than the waist-shaped guide groove.

[0012] In a preferred embodiment, an air filtering structure is arranged on the air inlet pipeline and opposite to the air inlet structure.

[0013] In a preferred embodiment, the flow regulating assembly is detachably arranged on the air inlet pipeline.

[0014] In a preferred embodiment, the flow regulating assembly comprises an adjusting knob and an adjusting valve plate detachably connected with the adjusting knob.

[0015] In a preferred embodiment, the side of the adjusting valve plate facing the high-temperature exhaust gas is arranged in an arc-shaped structure.

[0016] In a preferred embodiment, the arc-shaped structure is arranged on the surface of the arc-shaped structure and is uniformly distributed with adsorption holes.

[0017] The beneficial effects of the technical scheme of the utility model are as follows:

[0018] 1. By introducing external air, the temperature of the high-temperature exhaust gas can be reduced, and the high temperature of the pipeline can be avoided to harm the workers.

[0019] 2. By arranging the flow regulating assembly, on one hand, the exhaust gas discharge amount can be adjusted, and on the other hand, the arc-shaped adsorption part can adsorb the chemical substances to avoid the chemical substances from gathering in the exhaust pipeline, so that the service life of the exhaust pipeline is reduced. BRIEF DESCRIPTION OF DRAWINGS

[0020] Figure 1 The utility model is a whole structure schematic view,

[0021] Figure 2 The utility model is another whole structure schematic view,

[0022] Figure 3 The utility model is a flow regulating assembly whole structure schematic view.

[0023] Explanation of reference numerals in the attached drawings: 1. Exhaust pipe, 2. Flow regulation component, 3. Adjustment knob, 4. Adjustment valve plate, 5. Arc-shaped adsorption structure, 6. Intake baffle, 7. Intake hole, 8. Waist-shaped guide groove, 9. Limiting rod, 10. Limiting block, 11. Drive mechanism, 12. Air filter structure, 13. Intake end, 14. Exhaust end. Detailed Implementation

[0024] The present invention will now be described in further detail with reference to the accompanying drawings and specific embodiments. The embodiments of the present invention are given for the purpose of illustration and description, and are not intended to be exhaustive or to limit the present invention to the disclosed forms. Many modifications and variations will be apparent to those skilled in the art. The embodiments were chosen and described to better illustrate the principles and practical applications of the present invention, and to enable those skilled in the art to understand the present invention and design various embodiments with various modifications suitable for a particular purpose.

[0025] This utility model provides a hot plate exhaust assembly, which is connected to the hot plate cover and works with a negative pressure device to exhaust the waste gas containing chemical substances that evaporates from the hot plate cavity.

[0026] like Figure 1 As shown, the exhaust assembly of this solution includes an exhaust pipe 1, an inlet baffle 6, and a flow regulating component 2. The inlet baffle 6 is located upstream of the flow regulating component 2. The exhaust pipe 1 is used to transport exhaust gas to the corresponding exhaust gas treatment station. The inlet end 13 and outlet end 14 of the exhaust pipe 1 are connected to the hot plate cover and the exhaust gas treatment station, respectively. The inlet baffle 6 on the exhaust pipe 1 is movable, allowing the exhaust pipe 1 to connect with the outside environment. The flow regulating component 2 extends into the exhaust pipe 1 and can be rotated to switch positions, thereby adjusting the size of the gas passage inside the exhaust pipe 1, thus regulating the discharge volume of high-temperature exhaust gas, effectively mixing the high-temperature exhaust gas with room-temperature gas, and reducing the exhaust gas temperature inside the exhaust pipe 1.

[0027] like Figures 1-2 As shown, the exhaust pipe 1 is provided with an air intake structure one that communicates with the outside, and the air intake baffle 6 is provided with a corresponding air intake structure two. When the air intake baffle 6 is moved, the contact area between the air intake structure one and the outside increases or decreases. Both the air intake structure one and the air intake structure two include a plurality of air intake holes 7, and the air intake holes 7 on the air intake baffle 6 correspond to the air intake holes 7 on the exhaust pipe 1.

[0028] In the above scheme, the intake volume is maximized when the intake port 7 on the intake baffle 6 and the intake port 7 on the exhaust pipe 1 coincide; when they are completely misaligned, outside air does not enter the exhaust pipe. The degree of overlap between the intake ports 7 can be adjusted by moving the intake baffle 6, thereby regulating the amount of outside air entering. After outside air enters the exhaust pipe 1, the temperature of the high-temperature exhaust gas can be reduced, preventing the pipe temperature from becoming too high and causing harm to personnel.

[0029] The intake baffle 6 is connected to a drive mechanism 11 for driving the intake baffle 6 to translate the exhaust pipe 1. The above adjustment is achieved by the drive mechanism 11. The drive mechanism 11 can be a structure that can achieve translation drive, such as a drive cylinder. The position adjustment of the intake baffle 6 is automatically achieved by the drive mechanism 11 to ensure that the amount of outside air intake matches the air extraction rate.

[0030] To ensure stable translation of the intake baffle 6, a waist-shaped guide groove 8 is provided on the intake baffle 6, and a limiting structure passing through the waist-shaped guide groove 8 is provided on the exhaust pipe 1. The limiting structure cooperates with the waist-shaped guide groove 8 to limit the translation path and translation stroke of the intake baffle 6. The limiting structure includes a limiting rod 9 and a limiting block 10 fixed to the limiting rod 9. The limiting rod 9 is provided through the waist-shaped guide groove 9, and the limiting block 10 is located above the waist-shaped guide groove 8 and is wider than the waist-shaped guide groove 8.

[0031] To prevent dust in the air from entering the exhaust pipe 1, an air filter structure 12, such as an air filter membrane in the prior art, is provided on the intake pipe at a position opposite to the intake structure 1.

[0032] like Figures 2-3 As shown, the flow regulating component 2 includes an adjusting knob 3 and an adjusting valve plate 4 detachably connected to the adjusting knob 3. The size of the adjusting valve plate 4 is set to match the cross-sectional size of the exhaust pipe 1. When the adjusting knob 3 is rotated, the valve plate rotates synchronously, thereby adjusting the size of the gas passage inside the exhaust pipe 1 and thus adjusting the amount of high-temperature exhaust gas discharged. The above adjustment is manual, and the rotation position of the valve plate is generally fixed for the heat treatment of the same batch of products.

[0033] The regulating valve plate 4 has an arc-shaped structure on the side facing the high-temperature exhaust gas. An arc-shaped adsorption structure 5 is covered on the surface of this structure, and adsorption pores are evenly distributed on the arc-shaped adsorption structure 5. The arc-shaped adsorption structure 5 is made of porous metal or plastic materials that can adsorb chemical substances, as is currently available. When room temperature gas mixes with high-temperature exhaust gas, the exhaust gas temperature decreases, and chemical substances condense and precipitate. The exhaust gas blows the precipitated chemical particles, which collide with the arc-shaped adsorption structure 5 on the valve, causing the chemical particles to be adsorbed onto the arc-shaped adsorption structure 5. This prevents excessive chemical substances from adsorbing onto the exhaust pipe 1, thus significantly reducing the service life of the exhaust pipe 1. By designing the structure as an arc and having pores, the contact area is increased, thereby increasing the probability of chemical particles adsorbing onto the arc-shaped adsorption structure 5.

[0034] The flow regulating component 2 is detachably mounted on the intake pipe. When replacement is needed, simply remove the bolts to remove and replace the knob and valve plate, which is convenient and quick. After the arc-shaped adsorption structure 5 on the valve plate adsorbs a certain amount of chemical particles, the accumulation of chemical substances will hinder its function of regulating the pipe flow and weaken its ability to adsorb chemical substances. Therefore, this solution makes the flow regulating component 3 detachable to facilitate the replacement of the regulating valve plate 4 and maintain stable performance.

[0035] Obviously, the described embodiments are only a part of the embodiments of this utility model, and not all of them. All other embodiments obtained by those skilled in the art and related fields based on the embodiments of this utility model without creative effort should fall within the protection scope of this utility model. Structures, devices, and operating methods not specifically described and explained in this utility model, unless otherwise specified or limited, shall be implemented according to conventional means in the art.

Claims

1. A hot plate exhaust assembly, characterized in that: This includes the exhaust pipe, intake damper, and flow control components; The intake baffle is movably disposed on the exhaust pipe. The exhaust pipe is provided with an intake structure one that communicates with the outside. The intake baffle is correspondingly provided with an intake structure two. When the intake baffle is moved, the contact area between the intake structure one and the outside increases or decreases. The flow regulating component extends into the exhaust pipe, and the gas passage in the intake pipe increases or decreases when the flow regulating component is rotated. The air intake baffle is located upstream of the flow regulating component.

2. The hot plate exhaust assembly according to claim 1, characterized in that: Both the first and second air intake structures include a plurality of air intake holes, and the air intake holes on the air intake baffle correspond to the air intake holes on the exhaust pipe.

3. The hot plate exhaust assembly according to claim 1, characterized in that: The intake baffle is connected to a drive mechanism for driving the intake baffle to move in the same direction as the exhaust pipe.

4. The hot plate exhaust assembly according to claim 1, characterized in that: The air intake baffle is provided with a waist-shaped guide groove, and the exhaust pipe is provided with a limiting structure that passes through the waist-shaped guide groove.

5. A hot plate exhaust assembly according to claim 4, characterized in that: The limiting structure includes a limiting rod and a limiting block fixed to the limiting rod. The limiting rod passes through the waist-shaped guide groove, and the limiting block is located above the waist-shaped guide groove and is wider than the waist-shaped guide groove.

6. A hot plate exhaust assembly according to claim 1, characterized in that: An air filter structure is provided on the air intake pipe at a position opposite to the air intake structure.

7. A hot plate exhaust assembly according to claim 1, characterized in that: The flow regulation component is detachably mounted on the intake pipe.

8. A hot plate exhaust assembly according to claim 7, characterized in that: The flow regulating assembly includes an adjusting knob and an adjusting valve plate detachably connected to the adjusting knob.

9. A hot plate exhaust assembly according to claim 8, characterized in that: The side of the regulating valve plate that receives the high-temperature exhaust gas is designed with an arc shape.

10. A hot plate exhaust assembly according to claim 9, characterized in that: The surface of the arc-shaped structure is covered with an arc-shaped adsorption structure, and the arc-shaped adsorption structure is evenly distributed with adsorption pores.

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