Semiconductor vacuum cavity air leakage monitoring device

Abstract

The utility model discloses a semiconductor vacuum cavity air leakage monitoring device, which relates to the technical field of semiconductors and comprises a vacuum cavity and a process cavity, the vacuum cavity is positioned on one side of the process cavity, and a vacuum pump is mounted at the bottom of the vacuum cavity. The first conveying pipe is installed on the side, close to the process cavity, of the vacuum cavity, a second conveying pipe is arranged on the side, close to the vacuum cavity, of the process cavity, the two connecting flanges are connected and fixed through a fixing sleeve plate, and meanwhile an ultrasonic module is arranged on the inner wall of the fixing sleeve plate; an ultrasonic signal generated by gas flow is used for monitoring, a gas leakage signal can be accurately captured, an indicator light is arranged on the outer side of a fixed sleeve plate, when leakage occurs at a certain position, an ultrasonic module enables the indicator light at the corresponding position to flicker, and leakage is detected. And a worker can quickly find a gas leakage point for maintenance during maintenance and inspection.

Description

TECHNICAL FIELD

[0001] The utility model relates to a semiconductor technology field, concretely is a kind of semiconductor vacuum cavity gas leakage monitoring device. BACKGROUND

[0002] Semiconductor vacuum cavity refers to the space structure with certain size and shape in semiconductor material, the gas in which is extracted into vacuum state, and semiconductor vacuum cavity is mainly composed of cathode and anode two parts.Cathode is responsible for generating electrons, while anode is used to collect electrons and carry out electron amplification, and when semiconductor vacuum cavity works, the voltage on cathode will cause the surface of cathode to generate electrons, and these electrons pass through vacuum cavity and enter anode.In order to maintain the stability of the surrounding environment, the interior of semiconductor vacuum cavity needs to be kept in vacuum state.

[0003] The existing semiconductor vacuum cavity and process cavity need to be connected by connecting pipeline, and the connection may cause gas leakage.The existing gas leakage monitoring device cannot monitor the accurate point of gas leakage, which makes it difficult to accurately find the leakage position when troubleshooting gas leakage in the future.Therefore, a semiconductor vacuum cavity gas leakage monitoring device is proposed to solve the above problems. UTILITY MODEL CONTENT

[0004] The utility model aims at providing a semiconductor vacuum cavity gas leakage monitoring device to solve the problem that the existing gas leakage monitoring device cannot monitor the accurate point of gas leakage, which makes it difficult to accurately find the leakage position when troubleshooting gas leakage in the future.

[0005] To achieve the above purpose, the utility model provides the following technical scheme: a semiconductor vacuum cavity gas leakage monitoring device, comprising a vacuum cavity and a process cavity, the vacuum cavity is located on one side of the process cavity, and a vacuum pump is installed at the bottom of the vacuum cavity;

[0006] It also includes:

[0007] A first conveying pipe is installed on one side of the vacuum cavity close to the process cavity, the side of the process cavity close to the vacuum cavity is provided with a second conveying pipe, the connection end of the first conveying pipe and the second conveying pipe is provided with a connecting flange, and the first conveying pipe and the second conveying pipe are connected through the connecting flange, the outside of the connecting flange is sleeved with a fixed sleeve plate, the inside of the fixed sleeve plate is integrally formed with an inner cavity, and the fixed sleeve plate is clamped on the outside of the connecting flange through the inner cavity, a plurality of ultrasonic modules are evenly distributed on the inner wall of the inner cavity, an ultrasonic emission head is arranged on one side of the bottom of the ultrasonic module, and an ultrasonic receiving head is arranged on the other side of the bottom of the ultrasonic module.

[0008] Preferably, an electromagnetic valve is arranged between the first conveying pipe and the second conveying pipe, and the electromagnetic valve is connected with the first conveying pipe and the second conveying pipe through the connecting flanges.

[0009] Preferably, the fixed sleeve plate is arranged in a semicircular arc shape, and two groups of fixed sleeve plates are symmetrically arranged and movably sleeved on the outer sides of the connecting flanges.

[0010] Preferably, the bottom of the first conveying pipe and the second conveying pipe is provided with a fixed seat, a connecting rod is arranged between the two fixed seats, the connecting rod is located at the bottom of the electromagnetic valve, a connecting seat is arranged at the bottom end of the fixed sleeve plate, the connecting seat is movably clamped on the outside of the connecting rod, and the fixed sleeve plate is opened and closed on the outside of the connecting rod through the connecting seat.

[0011] Preferably, a plurality of indicator lights are arranged on the outside of the fixed sleeve plate, the positions of the indicator lights are aligned with the positions of the corresponding ultrasonic wave modules, and the output end of the ultrasonic wave module is electrically connected with the input end of the indicator light.

[0012] Preferably, a magnetic piece is arranged at the abutting position of the other end of the fixed sleeve plate, and the two fixed sleeve plates are connected through the magnetic pieces.

[0013] Compared with the prior art, the utility model has the advantages that:

[0014] (1) The fixed sleeve plate is arranged between the two connecting flanges, the fixed sleeve plate is connected and fixed to the two connecting flanges, the ultrasonic wave module is arranged on the inner wall of the fixed sleeve plate, the ultrasonic wave signal generated by gas flow is monitored, the gas leakage signal can be accurately captured, the indicator light at the corresponding position flashes when leakage occurs, the worker can quickly find the gas leakage point for repair when performing maintenance and inspection, and the fixed sleeve plate can be opened and closed, so that the connecting flange can be conveniently repaired.

[0015] (2) The electromagnetic valve is arranged between the first conveying pipe and the second conveying pipe, the first conveying pipe and the second conveying pipe are connected through the connecting flanges, the conveying between the vacuum cavity and the process cavity is disconnected through the electromagnetic valve when gas leakage occurs, and subsequent maintenance is facilitated. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 It is a whole structure schematic view of the utility model;

[0017] Figure 2 It is a fixed sleeve plate closed structure schematic view of the utility model;

[0018] Figure 3 The fixed sleeve plate opening schematic view of the utility model;

[0019] Figure 4 The fixed sleeve plate side view of the utility model;

[0020] In the figure: 1, vacuum cavity; 2, vacuum pump; 3, process cavity; 4, first conveying pipe; 5, second conveying pipe; 6, electromagnetic valve; 7, fixed sleeve plate; 8, connecting flange; 9, indicator light; 10, connecting rod; 11, connecting seat; 12, fixed seat; 13, ultrasonic module; 14, ultrasonic transmitting head; 15, ultrasonic receiving head; 16, inner cavity; 17, magnetic attraction piece. DETAILED DESCRIPTION

[0021] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all the embodiments.

[0022] The utility model provides a kind of semiconductor vacuum cavity gas leakage monitoring device, and the device includes vacuum cavity 1 and process cavity 3, vacuum cavity 1 is located in the side of process cavity 3, and vacuum pump 2 is installed in the bottom of vacuum cavity 1.The utility model mainly solves the problem that the existing gas leakage monitoring device cannot monitor the accurate point of gas leakage, which leads to the problem that the subsequent leakage cannot be accurately found when troubleshooting.

[0023] For the device provided by the utility model, please refer to Figures 1-4 , specific introduction is made as follows.

[0024] The first conveying pipe 4 is installed on one side of the vacuum cavity 1 close to the process cavity 3, the process cavity 3 close to one side of the vacuum cavity 1 is provided with the second conveying pipe 5, the connecting end of the first conveying pipe 4 and the second conveying pipe 5 is provided with the connecting flange 8, and the first conveying pipe 4 and the second conveying pipe 5 are connected through the connecting flange 8, the outside of the connecting flange 8 is sleeved with the fixed sleeve plate 7, the inside of the fixed sleeve plate 7 is integrally formed with the inner cavity 16, and the fixed sleeve plate 7 is clamped on the outside of the connecting flange 8 through the inner cavity 16, a plurality of ultrasonic modules 13 are evenly distributed on the inner wall of the upper end of the inner cavity 16, an ultrasonic emission head 14 is arranged on one side of the bottom of the ultrasonic module 13, and an ultrasonic receiving head 15 is arranged on the other side of the bottom of the ultrasonic module 13, a plurality of indicator lights 9 are evenly distributed on the outside of the fixed sleeve plate 7, the positions of the indicator lights 9 are aligned with the positions of the corresponding ultrasonic modules 13, and the output end of the ultrasonic module 13 is electrically connected with the input end of the indicator light 9, so that the staff can quickly find the air leakage place during maintenance, the electromagnetic valve 6 is arranged between the first conveying pipe 4 and the second conveying pipe 5, and the electromagnetic valve 6 is connected with the first conveying pipe 4 and the second conveying pipe 5 through the connecting flange 8, so that the conveying between the vacuum cavity 1 and the process cavity 3 can be disconnected through the electromagnetic valve 6, thereby facilitating subsequent maintenance, the fixed sleeve plate 7 is arranged between the two connecting flanges 8, the fixed sleeve plate 7 connects and fixes the two connecting flanges 8, and the ultrasonic module 13 is arranged on the inner wall of the fixed sleeve plate 7, so that the ultrasonic module 13 can accurately capture the air leakage signal by monitoring the ultrasonic signal generated by gas flow.

[0025] Further, the fixed sleeve plate 7 is arranged in a semicircular arc shape, and the fixed sleeve plate 7 is symmetrically provided with two groups and is movably sleeved on the outside of the connecting flange 8, the fixed sleeve plate 7 is provided with a magnetic sheet 17 at the abutting position of the other end, and the two fixed sleeve plates 7 are connected through the magnetic sheet 17, so that the two fixed sleeve plates 7 can be fixed when closed, the bottom of the first conveying pipe 4 and the second conveying pipe 5 is provided with a fixed seat 12, a connecting rod 10 is installed between the two fixed seats 12, the connecting rod 10 is located at the bottom of the electromagnetic valve 6, a connecting seat 11 is installed at the bottom end of the fixed sleeve plate 7, the connecting seat 11 is movably clamped on the outside of the connecting rod 10, and the fixed sleeve plate 7 is opened and closed on the outside of the connecting rod 10 through the connecting seat 11, and the connecting rod 10 can facilitate the opening and closing of the two fixed sleeve plates 7.

[0026] It is apparent for a person skilled in the art that the present application is not restricted to the details of the above exemplary embodiments, but that it can be implemented in other concrete forms without departing from the spirit or the essential characteristics of the present application. Therefore, the embodiments should be considered as exemplary only, and not limiting, the scope of the present application being defined by the appended claims rather than the above description, and all changes coming within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference signs in the claims should not be construed as limiting the claims concerned.

Claims

1. A semiconductor vacuum cavity leakage monitoring device, comprising a vacuum cavity (1) and a process cavity (3), the vacuum cavity (1) is located on one side of the process cavity (3), and a vacuum pump (2) is installed at the bottom of the vacuum cavity (1); characterized in that Further comprising: A first conveying pipe (4) is installed on one side of the vacuum cavity (1) close to the process cavity (3), a second conveying pipe (5) is arranged on the side of the process cavity (3) close to the vacuum cavity (1), the connecting ends of the first conveying pipe (4) and the second conveying pipe (5) are provided with connecting flanges (8), the first conveying pipe (4) and the second conveying pipe (5) are connected through the connecting flanges (8), the outside of the connecting flange (8) is sleeved with a fixed sleeve plate (7), the inside of the fixed sleeve plate (7) is integrally formed with an inner cavity (16), and the fixed sleeve plate (7) is clamped on the outside of the connecting flange (8) through the inner cavity (16), a plurality of ultrasonic modules (13) are arranged on the inner wall of the upper end of the inner cavity (16), an ultrasonic emission head (14) is arranged on one side of the bottom of the ultrasonic module (13), and an ultrasonic receiving head (15) is arranged on the other side of the bottom of the ultrasonic module (13).

2. A semiconductor vacuum chamber leak monitoring device as claimed in claim 1, characterized in that: An electromagnetic valve (6) is arranged between the first conveying pipe (4) and the second conveying pipe (5), and the electromagnetic valve (6) is connected with the first conveying pipe (4) and the second conveying pipe (5) through the connecting flange (8).

3. A semiconductor vacuum chamber leak monitoring device as claimed in claim 1, wherein: The fixed sleeve plate (7) is arranged in a semicircular arc shape, and the fixed sleeve plate (7) is symmetrically provided with two groups and is movably sleeved on the two sides of the outside of the connecting flange (8).

4. A semiconductor vacuum chamber leak monitoring device as claimed in claim 1, wherein: The bottom of the first conveying pipe (4) and the second conveying pipe (5) is provided with a fixed seat (12), a connecting rod (10) is arranged between the two fixed seats (12), and the connecting rod (10) is located at the bottom of the electromagnetic valve (6). The bottom end of the fixed sleeve plate (7) is provided with a connecting seat (11), the connecting seat (11) is movably clamped on the outside of the connecting rod (10), and the fixed sleeve plate (7) is opened and closed on the outside of the connecting rod (10) through the connecting seat (11).

5. A semiconductor vacuum chamber leak monitoring device as claimed in claim 1, wherein: A plurality of evenly distributed indicator lights (9) are arranged on the outside of the fixed sleeve plate (7), the positions of the indicator lights (9) are aligned with the positions of the corresponding ultrasonic modules (13), and the output end of the ultrasonic module (13) is electrically connected with the input end of the indicator light (9).

6. A semiconductor vacuum chamber leak monitoring device as claimed in claim 1, wherein: A magnetic piece (17) is arranged at the abutting position of the other end of the fixed sleeve plate (7), and the two fixed sleeve plates (7) are connected through the magnetic piece (17).

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