Carrying table structure of wafer detection machine

Abstract

The utility model relates to the technical field of wafer detection machines, in particular to a platform deck structure of a wafer detection machine, which comprises a platform deck arranged on a machine body, and a wafer box is arranged on the platform deck. Wherein a mounting groove is further formed in the end face of the carrying table, an RFID reader is mounted in the mounting groove, and a label matched with the RFID reader is arranged at the bottom of the wafer box; according to the utility model, the RFID reader is arranged on the carrying platform of the detection machine, and the bottom of each wafer box is connected with one label, so that when the wafer boxes are placed on the carrying platform, the information of the labels can be read through the RFID reader, and then the wafer boxes can be placed on the carrying platform. According to the invention, the RFID reader can be connected and communicated with the system, so that the online operation of the detection machine can be realized, and the convenience and accuracy of wafer detection are greatly improved.

Description

Technical Field

[0001] This utility model relates to the field of wafer inspection machine technology, and in particular to a stage structure for a wafer inspection machine. Background Technology

[0002] A wafer is a substrate (also called a substrate) used to manufacture semiconductor transistors or integrated circuits. Because it is a crystalline material, it is round in shape, hence the name wafer. Wafers are susceptible to static electricity and are easily scratched, resulting in a certain defect rate. Therefore, it is necessary to use inspection machines to detect defective products.

[0003] A wafer inspection machine typically includes a stage for holding wafer cassettes, a robotic arm for picking up and picking up wafers, and a microscope for inspecting wafers. For a specific structure, please refer to a wafer inspection machine disclosed in the prior art Chinese Patent Publication No. CN220289440U.

[0004] However, most current inspection machines do not have online inspection capabilities for wafer cells. During the inspection process, manual judgment of the information of the current wafer cell is the only option, which can easily lead to information errors in actual operation.

[0005] Based on this, in order to achieve online inspection of wafer cells and optimize the accuracy of wafer handling, we propose a stage structure for a wafer inspection machine. Utility Model Content

[0006] The purpose of this invention is to address the shortcomings of existing inspection machines, such as the fact that most of them do not have online inspection capabilities for wafer cells and that the inspection process relies on manual judgment of the information of the current wafer cell. Therefore, this invention proposes a stage structure for a wafer inspection machine.

[0007] To achieve the above objectives, the present invention adopts the following technical solution:

[0008] Design a stage structure for a wafer inspection machine, including a stage mounted on the machine body, on which a wafer cassette is mounted;

[0009] An installation slot is provided on the end face of the platform, and an RFID reader is installed in the installation slot. A tag compatible with the RFID reader is provided on the bottom of the wafer box.

[0010] The mounting slot is also provided with a locking component for fixing the RFID reader. The side of the platform is provided with a wiring groove that connects to the mounting slot, and a wire fixing structure is provided in the wiring groove.

[0011] Furthermore, the locking assembly includes a clamping portion fixed to the side of the mounting slot and a snap-fit ​​connector connected to the end of the RFID reader;

[0012] A snap-fit ​​part is fixedly installed at the end of the snap-fit ​​base, and the snap-fit ​​part is connected and adapted to the clamping part.

[0013] Furthermore, the clamping part includes a fixed base, and two clamping arms are rotatably connected to the end face of the fixed base, wherein a spring is fixedly connected between the clamping arms and the fixed base;

[0014] The two clamping arms are held on the outside of the snap-fit ​​portion.

[0015] Furthermore, at least one stop is provided on the top edge of the mounting groove, the stop being used to stop the RFID reader from above when the clamping part and the snap-fit ​​part are connected.

[0016] Furthermore, the cable fixing structure includes a main body fixedly installed in the cable routing groove, and at least one cable routing hole is formed through the end face of the main body, wherein the top of the main body has an inlet port communicating with the cable routing hole.

[0017] Furthermore, a deformation opening is provided through the end face of the main body, and the upper side of the deformation opening extends through and to the top of the main body.

[0018] Furthermore, the front end of the platform is provided with a heat dissipation port that connects to the mounting slot.

[0019] The present invention proposes a platform structure for a wafer inspection machine, which has the following advantages: By setting an RFID reader on the platform of the inspection machine and attaching a tag to the bottom of each wafer cassette, the information on the tag can be read by the RFID reader when the wafer cassette is placed on the platform during the inspection process, thereby obtaining information about the wafer inside the wafer cassette. The RFID reader can also be connected to the system for communication, thus enabling online operation of the inspection machine and greatly improving the convenience and accuracy of wafer inspection. Attached Figure Description

[0020] Figure 1 This is a perspective view of the present utility model;

[0021] Figure 2 This is a schematic diagram of the platform structure of this utility model;

[0022] Figure 3 This is a schematic diagram of the locking component structure of this utility model;

[0023] Figure 4 This is a schematic diagram of the fixed wire structure of this utility model.

[0024] In the diagram: 1. Stage; 11. Mounting slot; 12. Cable routing slot; 13. Stop; 14. Heat dissipation vent; 2. Wafer box; 21. Tag; 3. RFID reader; 4. Locking assembly; 41. Clamping part; 411. Fixing base; 412. Clamping arm; 413. Spring; 42. Snap-in base; 43. Snap-in part; 5. Cable fixing structure; 51. Main body; 52. Cable routing hole; 53. Cable inlet; 54. Deformation port. Detailed Implementation

[0025] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0026] Reference Figure 1-4 As an embodiment of the present utility model, a stage structure for a wafer inspection machine is disclosed. Specifically, the stage structure includes a stage 1 mounted on the machine body, and a wafer cassette 2 is mounted on the stage 1.

[0027] An installation slot 11 is provided on the end face of the stage 1, and an RFID reader 3 is installed in the installation slot 11. A tag 21 adapted to the RFID reader 3 is provided on the bottom of the wafer box 2. Of course, the tag 21 is set as an RFID tag loaded with information, which may include the number or size of wafers in the current wafer box.

[0028] The mounting slot 11 is also provided with a locking component 4 for fixing the RFID reader 3. The side of the platform 1 is provided with a wiring groove 12 that connects to the mounting slot 11, and a wire fixing structure 5 is provided in the wiring groove 12.

[0029] In some embodiments, the locking component 4 of the present invention includes a clamping portion 41 fixed to the side of the mounting groove 11 and a snap-fit ​​seat 42 connected to the end of the RFID reader 3;

[0030] A snap-fit ​​part 43 is fixedly installed at the end of the snap-fit ​​base 42. The snap-fit ​​part 43 is connected and adapted to the clamping part 41. Preferably, the snap-fit ​​part 43 in this embodiment is set as a cylindrical structure.

[0031] Specifically, in this embodiment, the clamping part 41 includes a fixed base 411, and two clamping arms 412 are rotatably connected to the end face of the fixed base 411, wherein a spring 413 is fixedly connected between the clamping arms 412 and the fixed base 411.

[0032] The two clamping arms 412 are clamped on the outside of the snap-fit ​​portion 43. That is, in this embodiment, two rotating clamping arms 412 are used to snap-fit ​​and limit the snap-fit ​​portion 43, so as to fix the RFID reader 3 in the mounting slot 11.

[0033] During connection, first place the RFID reader 3 in the mounting slot 11, then slide the RFID reader 3 so that the snap-fit ​​part 43 at its end aligns with the two clamping arms 412 and inserts it until the two clamping arms 412 complete the clamping of the snap-fit ​​part 43 after being reset under the control of the spring 413, thus completing the connection and locking of the RFID reader 3.

[0034] Similarly, when it is necessary to disassemble the RFID reader 3, simply pull it backward. At this time, the two clamping arms 412 will compress the spring 413, and the spring will automatically reset after the locking part 43 is separated.

[0035] Of course, in order to prevent the RFID reader 3 from shifting upward, at least one stop 13 is provided on the top edge of the mounting groove 11 in this embodiment. The stop 13 is used to stop the RFID reader 3 on the upper side when the clamping part 41 and the snap-fit ​​part 43 are connected.

[0036] Specifically, in this embodiment, two stop portions 13 are provided. The two stop portions 13 are respectively used to stop on the top sides of the RFID reader 3. When the RFID reader 3 is initially placed inside the mounting slot 11, the top of the stop portion 13 is misaligned with the upper side of the RFID reader 3. When the RFID reader 3 moves forward to connect with the clamping part 41, the RFID reader 3 is located below the stop portion 13, thus achieving upper and lower limit of the RFID reader 3.

[0037] In some embodiments, the wire fixing structure 5 of the present invention includes a main body 51 fixedly installed in the wiring groove 12, and at least one wiring hole 52 is provided through the end face of the main body 51, wherein the top of the main body 51 is provided with an inlet 53 communicating with the wiring hole 52.

[0038] To ensure that the inlet 53 has a certain deformation capacity, so that the connecting wire can slide smoothly along the inlet 53 and be snapped into the wiring hole 52, a deformation port 54 is also provided through the end face of the main body 51 in this embodiment. The upper side of the deformation port 54 extends through and to the top of the main body 51. That is, the opening of the deformation port 54 in this embodiment can ensure that the connecting wire can be snapped in smoothly. Of course, the connecting wire in this embodiment may include the power line and signal line of the RFID reader 3. The RFID reader 3 is connected to the controller through the signal line to complete the signal acquisition of the wafer cell 2 on the current stage 1. In this way, the online connection operation of the entire inspection machine can be realized. The connection of the RFID reader 3 to the controller is a conventional technical means for those skilled in the art, and will not be described in detail here.

[0039] Of course, in order to ensure the heat dissipation stability of the RFID reader 3, the front end of the platform 1 in this embodiment is provided with a heat dissipation port 14 that connects to the mounting groove 11. By opening the heat dissipation port 14 on the front side of the platform 1, it can be ensured that when the wafer box 2 is placed on the platform 1 and blocks the RFID reader 3, it can still dissipate heat well through the heat dissipation port 14, so as to ensure the working stability of the entire RFID reader 3.

[0040] In summary, by setting an RFID reader 3 on the platform 1 of the inspection machine and attaching a tag 21 to the bottom of each wafer box 2, the information of the tag 21 can be read by the RFID reader 3 when the wafer box 2 is placed on the platform 1 during the inspection process, so as to obtain the information of the wafer inside the wafer box 2. The RFID reader 3 can also be connected to the system for communication, thus realizing online operation of the inspection machine and greatly improving the convenience and accuracy of wafer inspection.

[0041] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A stage structure for a wafer inspection machine, comprising a stage (1) mounted on the machine body, characterized in that: A wafer cassette (2) is mounted on the stage (1); An installation groove (11) is provided on the end face of the platform (1), and an RFID reader (3) is installed in the installation groove (11). A tag (21) adapted to the RFID reader (3) is provided at the bottom of the wafer box (2). A locking component (4) for fixing the RFID reader (3) is also provided in the mounting slot (11). A wiring groove (12) is provided on the side of the platform (1) and connected to the mounting slot (11). A wire fixing structure (5) is provided in the wiring groove (12).

2. The stage structure of a wafer inspection machine according to claim 1, characterized in that: The locking assembly (4) includes a clamping part (41) fixed to the side of the mounting groove (11) and a snap-fit ​​seat (42) connected to the end of the RFID reader (3). A snap-fit ​​part (43) is fixedly installed at the end of the snap-fit ​​base (42), and the snap-fit ​​part (43) is connected and adapted to the clamping part (41).

3. The stage structure of a wafer inspection machine according to claim 2, characterized in that: The clamping part (41) includes a fixed base (411), and two clamping arms (412) are rotatably connected to the end face of the fixed base (411), wherein a spring (413) is fixedly connected between the clamping arms (412) and the fixed base (411). The two clamping arms (412) are held on the outside of the snap-fit ​​portion (43).

4. The stage structure of a wafer inspection machine according to claim 2, characterized in that: The top edge of the mounting groove (11) is also provided with at least one stop (13), which is used to stop the RFID reader (3) on the upper side when the clamping part (41) and the snap-fit ​​part (43) are connected.

5. The stage structure of a wafer inspection machine according to claim 1, characterized in that: The fixed wire structure (5) includes a main body (51) fixedly installed in the wiring groove (12), and at least one wiring hole (52) is provided through the end face of the main body (51), wherein the top of the main body (51) is provided with an inlet (53) communicating with the wiring hole (52).

6. The stage structure of a wafer inspection machine according to claim 5, characterized in that: A deformation opening (54) is also provided through the end face of the main body (51), and the upper side of the deformation opening (54) extends through and to the top of the main body (51).

7. The stage structure of a wafer inspection machine according to any one of claims 1-6, characterized in that: The front end of the platform (1) is provided with a heat dissipation port (14) that connects to the mounting slot (11).

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