Test cabinet and semiconductor test machine

Abstract

The utility model provides a test cabinet and a semiconductor test machine, and relates to the technical field of semiconductor sealing test equipment, and the test cabinet provided by the utility model comprises an electrical cabinet, a test cabin and a limiting mechanism. The test cabin is used for bearing a test plate and is provided with a butt joint port used for being in butt joint with the sorting cabinet; the electrical cabinet is movably connected with the test cabin along a first direction; the limiting mechanism is arranged between the electrical cabinet and the test cabin so as to limit the moving position of the electrical cabinet relative to the test cabin. According to the test cabinet provided by the utility model, a maintainer can have a larger operation space and a larger visual field when overhauling and maintaining the electrical cabinet, and the operation convenience of the maintainer is greatly improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to semiconductor test equipment technical field especially is related to a test machine cabinet and semiconductor test machine. BACKGROUND

[0002] The test machine cabinet is the platform of debugging and verifying resource board card and aging board in the whole machine project, can provide the electrical, structure, software environment required for "1 resource board + 1 monitoring board + 1 transfer board + 1 aging board", improve board card debugging efficiency, reduce user use threshold.

[0003] The test machine cabinet can not only be used as a research and development test verification platform, but also be sold as an independent product for basic operation learning and engineering verification.

[0004] The test machine cabinet does not support providing high and low temperature aging test environment, and is only suitable for board card function and performance test verification and application program development verification under normal temperature. UTILITY MODEL CONTENTS

[0005] The utility model discloses a test machine cabinet and semiconductor test machine can make the overhaul personnel have greater operating space and field of vision when carrying out overhauling maintenance to the electrical cabinet, greatly improve the operation convenience of the overhaul personnel.

[0006] To achieve the above object, the utility model provides the following technical scheme:

[0007] Firstly, the utility model provides a test machine cabinet, including electrical cabinet, test cabin and limiting mechanism,

[0008] The test cabin is used for bearing test board, and the test cabin has the butt joint for butt joint with the insertion of the sorting machine cabinet,

[0009] The electrical cabinet is movably connected with the test cabin along the first direction,

[0010] The limiting mechanism is arranged between the electrical cabinet and the test cabin to limit the movable position of the electrical cabinet relative to the test cabin.

[0011] Further, one of the electrical cabinet and the test cabin is provided with a guide rail, and the other is provided with a guide piece movably matched with the guide rail, and the guide rail extends along the first direction.

[0012] Further, the limiting mechanism comprises a first limiting block and a second limiting block arranged opposite to the first limiting block along the first direction, the first limiting block is connected with the test cabin, the second limiting block is connected with the electrical cabinet, and the first limiting block is used for abutting against the second limiting block to limit the movable position of the electrical cabinet.

[0013] Further, the second limiting block is configured as two, and the two second limiting blocks are respectively located on two sides of the first limiting block along the first direction, wherein one of the second limiting blocks is connected with the first limiting block through a connecting piece to lock the electrical cabinet opposite to the test cabin.

[0014] Further, the test cabin is configured as multiple, and the multiple test cabins are arranged side by side.

[0015] The electrical cabinet is configured as multiple, and the multiple electrical cabinets are arranged side by side and are movably connected with the multiple test cabins along the first direction one by one.

[0016] Further, the test cabin is provided with a first heat dissipation assembly and a second heat dissipation assembly, and the first heat dissipation assembly and the second heat dissipation assembly are arranged on two opposite side walls of the test cabin respectively, the first heat dissipation assembly is used for blowing air into the test cabin, and the second heat dissipation assembly is used for sucking air in the test cabin out.

[0017] Further, when the test cabin is configured as two, the two test cabins are arranged side by side, the first heat dissipation assembly is arranged on the surface of the two test cabins arranged opposite to each other, and the second heat dissipation assembly is arranged on the surface of the two test cabins arranged away from each other.

[0018] Further, the test cabin comprises a bottom plate, a support frame and a window plate, the support frame is connected with the bottom plate, and the window plate is mounted on the support frame and / or the bottom plate.

[0019] Further, the window plate is connected with a guide pin used for guiding when the sorting machine cabinet is plugged into the docking port, the guide pin has a limiting surface used for limiting the plugging depth of the sorting machine cabinet, and / or the test cabin further comprises a transfer plate, the transfer plate is mounted on the window plate, and the transfer plate has the docking port.

[0020] In a second aspect, the utility model provides a kind of semiconductor test machine, including the sorting machine cabinet and the test cabinet as described in any one of the preceding embodiments.

[0021] The test cabinet and the semiconductor test machine provided by the utility model can have the following beneficial effects:

[0022] In normal operation, the electrical cabinet is located in the semiconductor testing machine; when the electrical cabinet needs to be repaired, the cable is first separated, and then the electrical cabinet is pulled out in the first direction, the limiting mechanism limits the pulling distance of the electrical cabinet, and then the repair personnel can repair the electrical cabinet.

[0023] Compared with the prior art, the electrical cabinet in the test cabinet can move relative to the test cabin in the first direction, the repair personnel has greater operating space and field of view when repairing and maintaining the electrical cabinet, and the operating convenience of the repair personnel is greatly improved.

[0024] Compared with the prior art, the semiconductor testing machine provided by the utility model has a sorting cabinet and the test cabinet, the sorting cabinet can be directly connected to the docking port of the test cabinet, effectively improving the work efficiency and reducing the labor cost. BRIEF DESCRIPTION OF DRAWINGS

[0025] In order to more clearly illustrate the specific embodiments of the utility model or the technical solutions in the prior art, the drawings needed in the specific embodiments or the prior art description will be briefly introduced below, and obviously, the drawings in the following description are some embodiments of the utility model, and those skilled in the art can also obtain other drawings according to these drawings without creating creative labor.

[0026] Figure 1 The three-dimensional structure schematic diagram of the test cabinet in the working state is provided for the embodiments of the utility model.

[0027] Figure 2 The three-dimensional structure schematic diagram of the test cabinet in the first visual angle under the repair state is provided for the embodiments of the utility model.

[0028] Figure 3 The three-dimensional structure schematic diagram of the test cabinet in the second visual angle under the repair state is provided for the embodiments of the utility model.

[0029] Figure 4 The A part of the local enlarged schematic diagram is provided for Figure 3 The B part of the local enlarged schematic diagram is provided for

[0030] Figure 5 The internal structure schematic diagram of the test cabin in the first visual angle is provided for the embodiments of the utility model.

[0031] Figure 6 The internal structure schematic diagram of the test cabin in the second visual angle is provided for the embodiments of the utility model.

[0032] Figure 7 The B part of the local enlarged schematic diagram is provided for Figure 6 The B part of the local enlarged schematic diagram is provided for

[0033] Icons: 1 - Electrical cabinet; 11 - Guide component; 12 - Cable routing hole; 13 - Quick release plate; 2 - Test chamber; 21 - Guide rail; 22 - Base plate; 221 - Plate body; 222 - Mounting plate; 23 - Support frame; 231 - First column; 232 - Crossbeam; 233 - Second column; 234 - Track; 24 - Window plate; 25 - Transfer plate; 251 - Interface; 26 - Guide pin; 261 - Limiting surface; 3 - Limiting mechanism; 31 - First limiting block; 32 - Second limiting block; 4 - First heat dissipation assembly; 5 - Second heat dissipation assembly. Detailed Implementation

[0034] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0035] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0036] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0037] The specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are for illustration and explanation only and are not intended to limit the scope of this utility model.

[0038] The first aspect of this utility model provides a test cabinet, such as... Figure 1 and Figure 2 As shown, it includes an electrical cabinet 1, a test chamber 2, and a limiting mechanism 3;

[0039] The test cabin 2 is used to carry the test board, and the test cabin 2 has a docking interface 251 for plugging with the sorting cabinet;

[0040] The electrical cabinet 1 is movably connected with the test cabin 2 along a first direction;

[0041] The limiting mechanism 3 is arranged between the electrical cabinet 1 and the test cabin 2 to limit the movable position of the electrical cabinet 1 relative to the test cabin 2.

[0042] As shown in Figure 1 , in normal operation, the electrical cabinet 1 faces the test cabin 2, and at this time the test cabinet can be completely accommodated into the semiconductor test machine; when the electrical cabinet 1 needs to be repaired, the cable is first separated, and then as shown in Figure 2 , the electrical cabinet 1 is pulled out along the first direction, and the electrical cabinet 1 protrudes out of the semiconductor test machine, and the limiting mechanism 3 limits the pulling-out distance of the electrical cabinet 1, and then the repair personnel can repair the electrical cabinet 1, because at this time the repair personnel have a larger operation space and a field of view, which greatly improves the operation convenience of the repair personnel.

[0043] In an optional embodiment, the electrical cabinet 1 can be movably connected to the top surface, side surface or bottom surface of the test cabin 2 along the first direction, and the first direction is parallel to the top surface or side surface of the test cabin 2. Preferably, the first direction is parallel to the top surface of the test cabin 2, so as to facilitate the horizontal pulling-out of the electrical cabinet 1 from the semiconductor test machine. The horizontal pulling-out of the electrical cabinet 1 from the semiconductor test machine is relative to the vertical pulling-out of the test cabin 2 from the semiconductor test machine, and after pulling-out, the height of the test cabin 2 does not need to be supported by other supports, which is more convenient for the operation of the repair personnel.

[0044] In a preferred embodiment, as shown in Figure 1 and Figure 2 , the electrical cabinet 1 is movably connected to the top surface of the test cabin 2 along the first direction, and the first direction is parallel to the opening direction of the docking interface 251. The advantage of the above-mentioned mode is that the test cabin 2 can provide support for the electrical cabinet 1, and compared with the case that the electrical cabinet 1 is arranged at the side of the test cabin 2, the two can be more firmly connected, and compared with the case that the electrical cabinet 1 is arranged at the bottom of the test cabin 2, after the electrical cabinet 1 is pulled out, the top plate of the electrical cabinet 1 can be directly exposed to the field of view of the repair personnel, which is convenient for the repair personnel to disassemble the top plate of the electrical cabinet 1 for maintenance.

[0045] As shown in Figure 3 , the top surface and side surface of the electrical cabinet 1 are provided with quick-release plates 13, and the quick-release plates 13 can all realize quick release, which is convenient for internal electrical system repair, and the quick release can be realized by clamping, screw connection, etc.

[0046] There are several ways in which the electrical cabinet 1 can be movably connected to the test chamber 2 along the first direction. For example, the electrical cabinet 1 can move freely relative to the test chamber 2 along the first direction through the cooperation of guide rails and sliders, or the electrical cabinet 1 can move freely relative to the test chamber 2 along the first direction through the cooperation of rollers and rails, or the electrical cabinet 1 can move freely relative to the test chamber 2 along the first direction through a screw and nut structure, and so on.

[0047] In an optional embodiment, one of the electrical cabinet 1 and the test chamber 2 is provided with a guide rail 21, and the other is provided with a guide member 11 that is movably engaged with the guide rail 21, the guide rail 21 extending along a first direction.

[0048] Compared to using a lead screw and nut structure to achieve the movable connection between the two, the above-described implementation method is simpler in structure and more efficient in adjusting the position of electrical cabinet 1.

[0049] by Figure 3 For example, the top surface of the test chamber 2 is equipped with a guide rail 21, and the electrical cabinet 1 is equipped with a guide component 11 that movably cooperates with the guide rail 21. The guide component 11 can be a slider or a roller, etc. Figure 4 As shown, the guide 11 uses a roller, which enters the groove inside the guide rail 21 from the side and can roll in the groove.

[0050] Compared to using a slider, the roller in the guide component 11 has less friction with the guide rail 21, making it easier for maintenance personnel to push and pull the electrical cabinet 1.

[0051] Specifically, to ensure the stability of the electrical cabinet 1's movement, the electrical cabinet 1 can be configured with multiple rollers.

[0052] It should be noted that any structure capable of limiting the movement of the electrical cabinet 1 relative to the test chamber 2 can be the limiting mechanism 3 mentioned in the above embodiments. For example, the limiting mechanism 3 includes a positioning block and a positioning pin, with the positioning block and positioning pin respectively set on the electrical cabinet 1 and the test chamber 2, and the position of the electrical cabinet 1 is limited by their cooperation; or the limiting mechanism 3 includes a baffle and a stop, with a baffle set on the test chamber 2 and a stop set on the electrical cabinet 1, and the cooperation of the baffle and the stop can physically block the further movement of the electrical cabinet 1 when it moves to the predetermined position, thereby achieving the limiting; or the limiting mechanism 3 includes a magnetic suction component set on the electrical cabinet 1 and the test chamber 2, and the electrical cabinet 1 and the test chamber 2 are limited by the attraction of the magnetic suction component.

[0053] In alternative implementations, such as Figure 1 and Figure 2As shown, the limiting mechanism 3 includes a first limiting block 31 and a second limiting block 32 disposed opposite to the first limiting block 31 along a first direction. The first limiting block 31 is connected to the test chamber 2, and the second limiting block 32 is connected to the electrical cabinet 1. The first limiting block 31 is used to abut against the second limiting block 32 to limit the movement position of the electrical cabinet 1.

[0054] In the above embodiments, the method of using the first limiting block 31 and the second limiting block 32 to limit the movement position of the electrical cabinet 1 has the advantages of reducing the cost of the limiting mechanism 3, facilitating the installation of the limiting mechanism 3, and providing good limiting stability.

[0055] To ensure that electrical cabinet 1 can be limited by the limiting mechanism 3 Figure 1 The work location shown and Figure 2 The maintenance position shown can be configured as two of the first limiting block 31 and the second limiting block 32, and the other can move between the two limiting blocks.

[0056] In alternative implementations, such as Figure 1 and Figure 2 As shown, there are two second limiting blocks 32, which are located on both sides of the first limiting block 31 along the first direction. One of the second limiting blocks 32 is connected to the first limiting block 31 through a connector.

[0057] When the test cabinet is working normally, such as Figure 1 As shown, the first limiting block 31 is connected to one of the second limiting blocks 32 via a connector, at which point the electrical cabinet 1 is locked directly above the test chamber 2; when the electrical cabinet needs maintenance, the cables are first disconnected, and then the connector is disassembled, as shown... Figure 2 As shown, the electrical cabinet 1 is pulled out along the first direction, and the electrical cabinet 1 extends out of the semiconductor tester until another second limiting block 32 abuts against the first limiting block 31, and the first limiting block 31 restricts the electrical cabinet 1 from continuing to extend.

[0058] The connecting parts can be screws, pins, etc.

[0059] like Figure 1 and Figure 2 As shown, when the top surface of the test chamber 2 is provided with a guide rail 21, the first limiting block 31 can be set on the top of the guide rail 21, and the second limiting block 32 is set on the side of the electrical cabinet 1.

[0060] Specifically, in order to avoid excessive noise when the second limiting block 32 collides with the first limiting block 31, the surface of the first limiting block 31 facing the second limiting blocks 32 on both sides is provided with a buffer pad. The buffer pad can buffer the impact between the second limiting block 32 and the first limiting block 31, reduce the noise, and at the same time protect the second limiting block 32 and the first limiting block 31.

[0061] In an optional embodiment, the test cabin 2 is configured in a plurality, and the plurality of test cabins 2 are arranged side by side; the electrical cabinet 1 is configured in a plurality, and the plurality of electrical cabinets 1 are arranged side by side and are movably connected with the plurality of test cabins 2 along the first direction in a one-to-one correspondence.

[0062] In the above embodiment, the plurality of test cabins 2 and the plurality of electrical cabinets 1 adopt a planar layout, which can reduce the height of the test cabinet, and can simultaneously perform independent test verification of multiple boards, thereby improving the detection efficiency.

[0063] Specifically, the test cabin 2 is configured in two, three or four. In a preferred embodiment, the test cabin 2 is configured in two.

[0064] In an optional embodiment, as shown in Figure 5 , the test cabin 2 is provided with a first heat dissipation assembly 4 and a second heat dissipation assembly 5, and the first heat dissipation assembly 4 and the second heat dissipation assembly 5 are arranged on the two opposite side walls of the test cabin 2, respectively. The first heat dissipation assembly 4 is used for blowing air into the test cabin 2, and the second heat dissipation assembly 5 is used for sucking the air in the test cabin 2 out.

[0065] In the above embodiment, the first heat dissipation assembly 4 can blow the air outside into the test cabin 2, and the air entering the test cabin 2 can cool the components in the test cabin 2. At the same time, the second heat dissipation assembly 5 can suck the hot air in the test cabin 2 out and blow it to the outside, so as to form a circulating air flow in the test cabin 2 and fully dissipate heat from the resource cavity 2.

[0066] In an optional embodiment, when the test cabin 2 is configured in two, the two test cabins 2 are arranged side by side, each test cabin 2 is provided with a guide rail 21, the two electrical cabinets 1 are connected and are in rolling fit with the two guide rails 21 through the guide member 11, the first heat dissipation assembly 4 is arranged on the surface of the two test cabins 2 arranged opposite to each other, the second heat dissipation assembly 5 is arranged on the surface of the two test cabins 2 facing away from each other, and the two test cabins 2 are arranged at intervals so as to facilitate air suction of the first heat dissipation assembly 4.

[0067] The above-mentioned manner can make the air outside enter the two test cabins 2 from the middle of the two test cabins 2, and then blow out from the two sides of the two test cabins 2 facing away from each other, respectively, which can effectively avoid that the hot air blown out of the test cabin 2 is circulated into the test cabin 2, and the cooling effect of the test cabin 2 is better.

[0068] The first heat dissipation assembly 4 and the second heat dissipation assembly 5 can each include at least one fan, as shown in Figure 5 , the first heat dissipation assembly 4 and the second heat dissipation assembly 5 each include three fans, and the plurality of fans in the first heat dissipation assembly 4 and the plurality of fans in the second heat dissipation assembly 5 are arranged opposite to each other.

[0069] As shown in Figure 3As shown, the electrical cabinet 1 is provided with a wiring hole 12, and the fan wire and each data line are connected with external electrical components through the wiring hole 12. In addition, the cable can be disconnected from the white plug and stored in the electrical cabinet 1.

[0070] In an optional embodiment, as shown in Figure 5 and Figure 6 The test cabin 2 includes a bottom plate 22, a support frame 23 connected with the bottom plate 22, and a window plate 24 installed on the support frame 23 and / or the bottom plate 22.

[0071] In the above embodiment, the bottom plate 22 can serve as a design and installation reference, and the support frame 23 is installed on the bottom plate 22 and can support the guide rail 21 above and the window plate 24 and other plates on the side.

[0072] The window plate 24 can be separately installed on the support frame 23 or the bottom plate 22.

[0073] In a preferred embodiment, the window plate 24 is installed on the support frame 23 and the bottom plate 22, as shown in Figure 5 The bottom plate 22 includes a plate body 221 and a mounting plate 222, the mounting plate 222 is positioned and fixed on the plate body 221, and the window plate 24 is positioned and fixed on the mounting plate 222 and connected with the support frame 23 to enhance the structural strength.

[0074] The support frame 23 includes four first columns 231, a crossbeam 232, and two second columns 233. The four first columns 231 are positioned on the plate body 221 by positioning pins and then installed on the plate body 221 to ensure the relative position accuracy of the four first columns 231. The crossbeam 232 is connected between the top portions of the four first columns 231 to increase the firmness of the support frame 23. The two second columns 233 are connected to the mounting plate 222, and the window plate 24 is connected with the two second columns 233.

[0075] The first column 231 can provide a positioning reference for the guide rail 21 to ensure the installation position of the guide rail 21.

[0076] In addition, the support frame 23 further includes two tracks 234, the extension directions of the two tracks 234 are parallel to the opening direction of the docking interface 251, and the two tracks 234 are oppositely arranged along the direction perpendicular to the opening direction of the docking interface 251. The four first columns 231 can provide installation positions for the two tracks 234, and the two second columns 233 can provide positioning references for the tracks 234, specifically, the end faces of the tracks 234 are in contact with the second columns 233 and are positioned by positioning pins.

[0077] In an optional embodiment, the test chamber further comprises a transfer plate 25, which is installed on the window plate 24 and has the mating interface 251.

[0078] The window plate 24 can provide an installation position for the transfer plate 25 and ensure the accuracy thereof, the inner side of the transfer plate 25 is located in the test chamber and is mated with the test plate, and the outer side of the transfer plate 25 has a gold finger connector penetrating to the outer side of the window plate 24, and the mating interface 251 thereon serves as a reserved interface for mating connection with the handler cabinet.

[0079] In an optional embodiment, as shown in Figure 7 The window plate 24 is connected with a guide pin 26 for guiding when the handler cabinet is mated with the mating interface 251, and the guide pin 26 has a limiting surface 261 for limiting the mating depth of the handler cabinet.

[0080] The guide pin 26 can provide guidance when the handler cabinet is automatically mated, and the limiting surface 261 limits the handler cabinet when the handler cabinet is mated in place, preventing damage to the gold finger connector during mating.

[0081] The second aspect of the embodiment of the utility model provides a kind of semiconductor test machine, and the second aspect of the embodiment of the utility model provides the semiconductor test machine comprising handler cabinet and above-mentioned test cabinet.

[0082] In use, the handler cabinet is first contacted with the guide pin 26 on the window plate 24 when mating with the mating interface 251, the guide pin 26 assists in guiding and positioning, and then the gold finger connector is mated.

[0083] The mechanism for realizing the mating action can be a linear motion mechanism such as a pneumatic cylinder, a hydraulic cylinder or a linear motor, or a combination of a rotary motor and a transmission assembly for rotary motion, the transmission assembly can convert rotary motion into linear motion, and the transmission assembly can be a screw nut structure or a gear and rack structure.

[0084] The semiconductor test machine provided by the above embodiment can automatically mate the handler cabinet to the mating interface 251 of the test cabinet, which can effectively improve work efficiency and reduce labor costs.

[0085] Finally, it should be noted that: the above embodiments are used to illustrate the technical solutions of the present application, but not limited to them; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: it can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement to part or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A test cabinet, characterized in that, The electrical cabinet (1), the test cabin (2) and the limiting mechanism (3) are included. The test cabin (2) is used for carrying test boards, and the test cabin (2) has a docking interface (251) for plugging with a sorting machine cabinet. The electrical cabinet (1) is movably connected with the test cabin (2) along a first direction. The limiting mechanism (3) is arranged between the electrical cabinet (1) and the test cabin (2) to limit the movable position of the electrical cabinet (1) relative to the test cabin (2).

2. The test cabinet of claim 1, wherein, One of the electrical cabinet (1) and the test cabin (2) is provided with a guide rail (21), and the other is provided with a guide (11) movably matched with the guide rail (21), and the guide rail (21) extends along the first direction.

3. The test cabinet of claim 1, wherein, The limiting mechanism (3) includes a first limiting block (31) and a second limiting block (32) arranged opposite to the first limiting block (31) along the first direction, the first limiting block (31) is connected with the test cabin (2), the second limiting block (32) is connected with the electrical cabinet (1), and the first limiting block (31) is used for abutting against the second limiting block (32) to limit the movable position of the electrical cabinet (1).

4. The test cabinet of claim 3, wherein, The second limiting block (32) is configured as two, and the two second limiting blocks (32) are respectively located on the two sides of the first limiting block (31) along the first direction, and one of the second limiting blocks (32) is connected with the first limiting block (31) through a connecting piece to lock the electrical cabinet (1) opposite to the test cabin (2).

5. The test cabinet of claim 1, wherein, The test cabin (2) is configured as multiple, and multiple test cabins (2) are arranged side by side. The electrical cabinet (1) is configured as multiple, and multiple electrical cabinets (1) are arranged side by side, and multiple electrical cabinets (1) are movably connected with multiple test cabins (2) along the first direction one by one.

6. The test cabinet of claim 1, wherein, The test cabin (2) is provided with a first heat dissipation assembly (4) and a second heat dissipation assembly (5), the first heat dissipation assembly (4) and the second heat dissipation assembly (5) are arranged on the two opposite side walls of the test cabin (2) respectively, the first heat dissipation assembly (4) is used for blowing air into the test cabin (2), and the second heat dissipation assembly (5) is used for sucking air in the test cabin (2) out.

7. The test cabinet of claim 6, wherein, When the test cabin (2) is configured as two, the two test cabins (2) are arranged side by side, the first heat dissipation assembly (4) is arranged on the surface opposite to the two test cabins (2), and the second heat dissipation assembly (5) is arranged on the surface away from the two test cabins (2).

8. The test cabinet of claim 1, wherein, The test cabin (2) includes a bottom plate (22), a support frame (23) and a window plate (24), the support frame (23) is connected with the bottom plate (22), and the window plate (24) is mounted on the support frame (23) and / or the bottom plate (22).

9. The test cabinet of claim 8, wherein, The window plate (24) is connected with a guide pin (26) for guiding when the sorting cabinet is connected with the docking interface (251), the guide pin (26) has a limiting surface (261) for limiting the depth of the sorting cabinet; and / or, the test cabin (2) further comprises a transfer plate (25), the transfer plate (25) is installed on the window plate (24) and the transfer plate (25) has the docking interface (251).

10. A semiconductor test machine, characterized by, The test cabinet as claimed in any one of claims 1-9, wherein the test cabinet comprises the sorting cabinet.

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