Microscope sample tray

Abstract

The utility model discloses a microscope sample tray which comprises a sample tray bottom plate component, a lower fixing piece, a sliding fixing seat and a pressing reset spring, the lower fixing piece is installed on the sample tray bottom plate component, the sliding fixing seat is installed on the lower fixing piece and used for fixing an observation sample, a positioning fixing hole is formed in the sample tray bottom plate component, and the pressing reset spring is arranged in the positioning fixing hole. The device can be placed on and matched with a microscope sample table. According to the utility model, the sample disc bottom plate component, the lower fixing piece, the sliding fixing seat and the pressing reset spring are arranged to form a honeycomb-shaped two-section telescopic structure, so that the problem of placing samples with different sizes and shapes is solved.

Description

Technical Field

[0001] This invention relates to the field of scanning electron microscopy, and in particular to a sample tray for use in scanning electron microscopy. Background Technology

[0002] A scanning electron microscope (SEM) is an instrument that uses electron beams and electron lenses instead of optical lenses, based on the principles of electron optics, to image the fine structure of matter at very high magnification. It plays a crucial role in many fields, including semiconductors, materials science, and biology, providing researchers with high-resolution microscopic images and driving scientific research and technological advancement. A sample tray is a device used to support, protect, and position samples. When conducting experiments using an electron microscope, the sample is typically placed on the sample tray before being inserted into the vacuum chamber of the microscope.

[0003] In these research fields, the different samples require different sample trays, so changing the sample requires changing the corresponding tray, which is very cumbersome. If there are too many types and quantities of samples, the cost will increase accordingly.

[0004] For the reasons mentioned above, under the existing conditions, we directly use the same sample tray to be compatible with different samples, which greatly improves the efficiency of detection while reducing the cost of changing observation samples.

[0005] Therefore, how to save manpower and time and reduce costs is a technical problem that urgently needs to be solved by those skilled in the art. Summary of the Invention

[0006] The purpose of this invention is to provide a multifunctional sample tray to solve the problem of the need to prepare a wide variety of trays in different situations in the prior art.

[0007] The present invention is implemented as follows: the sample tray base plate component is the main body of the sample tray, the top of which has multiple threaded fixing holes for installing the lower fixing component, and the bottom surface has positioning fixing holes for placing the sample tray in the microscope.

[0008] Furthermore, the lower fixing member has an axial thread on its outer wall and two nested grooves along its inner wall, the cross-section of which is arc-shaped.

[0009] Furthermore, the outer wall of the sliding fixing seat has a circumferential protrusion.

[0010] Furthermore, the cross-sections of the lower fixing member nesting groove and the sliding fixing seat annular protrusion are both arc-shaped.

[0011] Furthermore, the pressing and resetting spring causes the lower fixing member and the sliding fixing seat to move vertically relative to each other through pressing and deformation.

[0012] Compared with existing technologies, the present invention has the following innovations: its sample placement surface presents a honeycomb structure formed by multiple hexagonal components, each of which can move independently, and different planes are formed for placement according to different samples when observing the samples. Attached Figure Description

[0013] The accompanying drawings, which form part of this invention, are used to provide a further understanding of the invention. The illustrative embodiments of the invention and their descriptions are used to explain the invention, but do not constitute an undue limitation of the invention.

[0014] Figure 1 This is a three-dimensional structural schematic diagram of a microscope sample tray provided in an embodiment of the present invention;

[0015] Figure 2 yes Figure 1 A cross-sectional schematic diagram of the microscope sample tray shown.

[0016] Figure 3 yes Figure 1 An exploded schematic diagram of the microscope sample tray shown.

[0017] Figure 4 This is a three-dimensional structural diagram of the lower fixing member provided in an embodiment of the present invention;

[0018] Figure 5 This is a three-dimensional structural diagram of the sliding fixing seat provided in an embodiment of the present invention;

[0019] Figure 6 This is a schematic diagram of the lower surface structure of the sample tray base plate component provided in an embodiment of the present invention.

[0020] Among them, the appendix Figure 3 Appendix Figure 6 The annotations in the attached figures are explained as follows:

[0021] 1-Sliding fixed seat, 2-Pressing return spring, 3-Lower fixing component, 4-Sample tray bottom plate component, 401-First positioning fixing hole, 402-Second positioning fixing hole, 403-Third positioning fixing hole.

[0022] It should be noted that these accompanying drawings and textual descriptions are not intended to limit the scope of the invention in any way, but rather to illustrate the concept of the invention to those skilled in the art by referring to specific embodiments. Detailed Implementation

[0023] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the invention.

[0024] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, unless otherwise explicitly specified and limited, the terms "installation" and "connection" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal communication between two elements. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0025] This embodiment provides a microscope sample tray, such as Figure 3 The sample tray includes a base plate, a lower fixing component, a sliding fixing seat, and a press-and-reset spring.

[0026] Figure 3 , Figure 6 The following are schematic diagrams of the sample tray base plate components according to some embodiments of the present invention. Figure 3 It can be seen that there are multiple threaded holes on the upper surface. Figure 6 In the middle, you can see that there are 3 positioning and fixing holes on the lower surface that are used to fix the sample stage. The first and second positioning and fixing holes are oval, and the third positioning and fixing hole is circular. The center of the three holes is placed in an equilateral triangle, and the center of the triangle coincides with the center of the sample plate.

[0027] See Figure 4 , Figure 5 The schematic diagram of the lower fixing component shows that its inner wall has two nested grooves, and its outer wall has threads. The lower fixing component connects to the base plate component via these threads to achieve a fixing effect. The sliding fixing component has an annular protrusion on its outer wall, and the sliding fixing seat can engage with the lower fixing component through nesting and mating with the annular protrusion. Figure 2 The installation method of each component can be seen. The sliding fixed seat is hollow inside and can be equipped with a press-and-reset spring. When the sliding fixed seat is pressed, the annular protrusion of the sliding fixed seat slides from the first nested groove to the second nested groove, and the reset spring is compressed. When the sliding fixed seat is pressed again, the reset spring releases its spring force and lifts the sliding fixed seat upward until the annular protrusion slides into the first nested groove.

[0028] Based on the above description, the two-stage press-reset fixing structure of this embodiment has each hexagonal component that is independent of each other. When facing different samples, it can be fixed according to the shape of the sample, which effectively reduces the number of sample trays that need to be replaced and reduces costs.

[0029] The specific embodiments described herein further illustrate the purpose, technical solution, and beneficial effects of the present invention. It should be understood that the above descriptions are merely specific embodiments of the present invention and are not intended to limit the scope of protection of the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A microscope sample tray, characterized in that, include: The sample tray base plate component includes multiple lower fixing parts, a sliding fixing seat, and a pressing return spring. The lower fixing parts are fixed to the sample tray base plate component by their outer wall threads. The sliding fixing seat is fitted into the lower fixing parts and is fixed by the annular protrusion on its outer wall cooperating with the nesting groove. The pressing return spring is placed in the hollow part inside the sliding fixing seat.

2. The microscope sample tray according to claim 1, characterized in that, The sample tray base plate component is the main body of the sample tray. Its top has multiple threaded fixing holes for installing the lower fixing component, and its bottom surface has positioning fixing holes for placing the sample tray on the microscope sample stage.

3. The microscope sample tray according to claim 1, characterized in that, Each of the lower fixing members has an axial thread on its outer wall and two nested grooves along its inner wall, with an arc-shaped cross-section.

4. The microscope sample tray according to claim 1, characterized in that, The outer wall of the sliding fixing seat has a ring-shaped protrusion, and the inside is hollow.

5. The microscope sample tray according to claim 3 or 4, characterized in that, The lower fixing member nesting groove and the sliding fixing seat annular protrusion both have arc-shaped cross-sections.

6. The microscope sample tray according to claim 1, characterized in that, The pressing and resetting spring causes the lower fixing member and the sliding fixing seat to move vertically relative to each other by pressing and deforming.

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