Special flexible cable for photoetching machine arm

Abstract

The utility model discloses a special flexible cable for a photoetching machine arm, which belongs to the technical field of transmission components and comprises equipment joints, a connecting piece, a plug, a connecting shell, a first wire harness and second wire harnesses, one end of the connecting piece is connected with the first wire harness, the other end of the connecting piece is connected with the second wire harnesses, the second wire harnesses are arranged in pairs, and the equipment joints are arranged in pairs. The end of the second wire harness is inserted into the equipment connector, the first wire harness is inserted into one end of the connecting shell, one end of the plug is inserted into the connecting shell, and metal wires are arranged in the first wire harness and the second wire harness and extend into the plug and the equipment connector. The problem that in the prior art, due to the fact that parts of a traditional cable are inconvenient to replace, the cost is increased when the whole cable is replaced is solved. The material cost is reduced and the durability is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to transmission component technical field, concretely relates to a special flexible cable of photoetching machine arm. BACKGROUND

[0002] Photoetching machine is the core equipment in semiconductor manufacturing, and its arm is responsible for accurately moving silicon wafer on the silicon wafer table, and completes key steps such as exposure.

[0003] The motion trajectory of photoetching machine arm is complex and changeable, and the speed is extremely fast, which puts forward extremely high requirements to the cable connecting its driving system and arm. Because of the rigidity and structure limitation of traditional cable, it is difficult to meet the needs of photoetching machine arm under long-time and high-intensity motion, and problems such as wear and tear and fracture are prone to occur, thereby affecting the operation accuracy and stability of photoetching machine. Moreover, the plug of the wire is prone to deformation after long-time use, and if the plug is deformed, it needs to be replaced in time to prevent the situation of being unable to connect with the arm, and the existing cable is mostly replaced with a whole cable instead of a single component, which increases the cost.

[0004] Therefore, how to provide a special flexible cable of photoetching machine arm to solve the defects of the above-mentioned traditional cable is an urgent technical problem for technicians in the field. CONTENT OF THE UTILITY MODEL

[0005] Therefore, the utility model provides a special flexible cable of photoetching machine arm to solve the problem of cost increase caused by replacing the whole cable due to the inconvenience of replacing the components of traditional cable in the prior art.

[0006] In order to achieve the above-mentioned purpose, the utility model provides the following technical scheme:

[0007] The utility model discloses a special flexible cable of photoetching machine arm, which comprises:

[0008] A connecting piece is connected with a first wire harness at one end, and a second wire harness is connected with the other end of the connecting piece, and the second wire harness is arranged in pairs;

[0009] A device connector is arranged in pairs, and the end of the second wire harness is inserted into the device connector;

[0010] A connecting shell is inserted with the first wire harness at one end;

[0011] A plug is inserted into the connecting shell at one end;

[0012] Among them, the first wire harness and the second wire harness are provided with metal wires, and the metal wires extend into the plug and the device connector.

[0013] In a possible implementation manner, the plug comprises:

[0014] a mounting column with a plurality of insertion holes, and a connecting disc mounted on one end surface of the mounting column;

[0015] a plurality of spring sheets mounted on the surface of the connecting disc, and the spring sheets arranged outside the mounting column;

[0016] a cylindrical block mounted on the other end surface of the connecting disc, and the insertion holes passing through the connecting disc and the cylindrical block in sequence and extending to the surface of the cylindrical block;

[0017] a crescent groove formed on the side surface of the cylindrical block;

[0018] a female port mounted in the insertion hole, and the end of the metal wire inserted into the female port.

[0019] In a possible implementation, the female port comprises:

[0020] a sleeve with a limiting ring sleeved on the side wall, the sleeve inserted into the insertion hole, the metal wire inserted into the sleeve, and the limiting ring abutting against the outer surface of the mounting column;

[0021] a side hole formed on the side wall of the sleeve, and an arc-shaped plate mounted on one surface of the side hole;

[0022] an inclined groove formed on one end of the sleeve.

[0023] In a possible implementation, the connecting shell comprises:

[0024] a bend with an installation hole formed in the interior, and the metal wire inserted into the plug through the installation hole;

[0025] a sleeve shell sleeved on the outside of one end of the bend, a plurality of limiting blocks mounted on the end inner surface of the sleeve shell, and the plug inserted into the sleeve shell;

[0026] an insulating shell sleeved on the outside of the other end of the bend;

[0027] a clamp inserted into the sleeve shell.

[0028] In a possible implementation, the clamp comprises:

[0029] a mounting member with a plurality of placement holes formed on the side wall, and the end of the plug placed in the placement hole, and the mounting member inserted into the sleeve shell;

[0030] a plurality of protrusions arranged on the outer surface of the side wall of the mounting member, and the protrusions abutting against the outer surface of the sleeve shell.

[0031] In a possible implementation, the insulating shell comprises:

[0032] The shell is provided with a ring-shaped protrusion on one end surface;

[0033] A circular groove is arranged on the ring-shaped protrusion, and the limiting block extends along the sidewall of the circular groove to the elbow direction.

[0034] In a possible implementation, the device joint comprises:

[0035] A sleeve is internally provided with a connecting disc, and the connecting discs are arranged in pairs and are provided with a plurality of circular holes;

[0036] A convergence shell is arranged in the circular hole, and one end of the metal wire is arranged in the convergence shell.

[0037] The plug and the connecting shell are designed in a plug-in and plug-out mode, convenient installation and replacement of the plug are realized, for the plug used for a long time, even if deformation occurs, only the plug needs to be replaced, and the entire cable does not need to be replaced, through the design of the connecting piece, not only can the current and the signal be shunted, and then transmitted to each part of the photolithography machine arm through the device joint, but also the wire harness is divided into multiple sections, each section of the wire harness can be independently bent, flexibility is increased, cable breakage can be effectively prevented, the flexibility of the cable is improved, and the practicability of the cable can be greatly improved. BRIEF DESCRIPTION OF DRAWINGS

[0038] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings in the following description are only exemplary, and for those skilled in the art, other implementation drawings can be obtained according to the provided drawings without creative labor.

[0039] The structures, proportions, sizes and the like shown in the specification are only used to cooperate with the content disclosed in the specification, for understanding and reading by those skilled in the art, and are not used to limit the limiting conditions that can be implemented by the utility model, so they do not have the technical essence, any modification of structure, change of proportion relationship or adjustment of size, as long as it does not affect the effect and purpose that can be generated by the utility model, should still fall within the scope of the technical content disclosed by the utility model.

[0040] Figure 1 A three-dimensional view of the special flexible cable of the photolithography machine arm is provided for the utility model;

[0041] Figure 2 A three-dimensional view of the plug is provided for the utility model;

[0042] Figure 3The utility model provides a female port solid drawing;

[0043] Figure 4 The utility model provides a connecting shell solid drawing;

[0044] Figure 5 The utility model provides a clamp solid drawing;

[0045] Figure 6 The utility model provides an insulating shell solid drawing;

[0046] Figure 7 The utility model provides a device joint solid drawing;

[0047] In the drawing: 1 device joint;11 sleeve;12 convergence shell;13 connecting disc;2 connecting piece;3 plug;31 crescent groove;32 female port;321 inclined groove;322 limiting ring;323 sleeve;324 side hole;325 arc plate;33 cylindrical block;34 connecting disc;35 spring piece;36 mounting column;4 connecting shell;41 insulating shell;411 shell;412 annular protrusion;413 round groove;42 clamp;421 mounting piece;422 placing hole;423 protrusion;43 limiting block;44 sleeve;45 elbow;5 first wire harness;6 second wire harness. DETAILED DESCRIPTION

[0048] The following specific embodiments illustrate the embodiments of the utility model, and those skilled in the art can easily understand other advantages and effects of the utility model from the disclosed content of the specification, obviously, the described embodiments are a part of the embodiments of the utility model, instead of all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor belong to the protection scope of the utility model.

[0049] Please refer to Figures 1-7 , now a kind of photolithography machine arm special flexible cable disclosed by the utility model will be described, the utility model has six parts, such as Figure 1 , including device joint 1, connecting piece 2, plug 3, connecting shell 4, first wire harness 5 and second wire harness 6, connecting piece 2 one end is connected with first wire harness 5, connecting piece 2 other end is connected with second wire harness 6, second wire harness 6 is set in pairs, device joint 1 is set in pairs, second wire harness 6 end is inserted in device joint 1, connecting shell 4 one end is inserted with first wire harness 5, plug 3 one end is inserted in connecting shell 4, first wire harness 5 and second wire harness 6 are provided with metal wire, and the metal wire extends to plug 3 and device joint 1.

[0050] The utility model discloses a first wire harness 5 and second wire harness 6 are connected together with connecting piece 2 in use, in the connecting process, will respectively two metal wires in second wire harness 6 and the metal wire of first wire harness 5 are wound together, then the outer layer insulating layer of another end of first wire harness 5 and second wire harness 6 is not connected with connecting piece 2 is cut off, and the metal wire is exposed, and the metal wire of second wire harness 6 is inserted into the collection shell 12 and is collected, and the collection shell 12 will be tightly clamped to the wire harness, and the part without cutting off the insulating layer is also inserted into the sleeve 11, and for the conventional operation, the wire harness of metal wire will be slightly larger than the inside diameter of collection shell 12, in order to the wire harness can be fixed, most of the wire harness and collection shell 12 connection place are clamped and are deformed, and then installation is completed, and the metal wire of first wire harness 5 is exposed, and it will along the installation hole, and the metal wire will form several wire harnesses, and the wire harness is inserted in the sleeve 323, in the process of inserting the wire harness, the wire harness will push the arc plate 325 outward partially, and the width of the part in the female port 32 will be slightly larger than the insertion hole, when the female port 32 carries the metal wire and is inserted into the insertion hole, the slightly wide part will clamp the female port 32 in the insertion hole, and then the female port 32 can be effectively prevented from sliding out, after installing the female port 32, the clamp 42 is sleeved on the installation column 36, and the spring sheet 35 is completely inserted in the placement hole 422 at this time, then the plug 3 carrying the clamp 42 is inserted along the circular groove 413, and in the process of inserting, the outer surface of spring sheet 35 will be against the side wall of circular groove 413, when the plug 3 is completely inserted, the spring sheet 35 will be hooked on the limiting block 43, and the convex 423 is against the outer wall of annular convex 412 at this time, and the one end of plug 3 is aligned with the cylindrical end face of elbow 45, and the limiting of plug 3 is realized through spring sheet 35. After assembling the cable, connect with the photoetching machine arm. The plurality of metal wires are wound together to form the wire harness, and the wire harness is wrapped with fluoroplastic insulating layer and TPU outer sheath of high strength, wear resistance and oil resistance to form first wire harness 5 and second wire harness 6.

[0051] In one specific embodiment, as Figure 2The plug 3 comprises a crescent groove 31, a female port 32, a cylindrical block 33, a connecting disc 34, spring sheets 35 and a mounting column 36. The mounting column 36 is internally provided with a plurality of insertion holes. The connecting disc 34 is mounted on one end surface of the mounting column 36. The spring sheets 35 are mounted on the surface of the connecting disc 34. The spring sheets 35 are arranged outside the mounting column 36. The cylindrical block 33 is mounted on the other end surface of the connecting disc 34. The insertion holes are sequentially connected with the connecting disc 34 and the cylindrical block 33 and are arranged to extend to the surface of the cylindrical block 33. The crescent groove 31 is arranged on the side surface of the cylindrical block 33. The female port 32 is mounted in the insertion hole. The wire end is inserted into the female port 32. The crescent groove 31 is arranged to facilitate the insertion into the connecting insertion hole, facilitate the positioning, reduce the stress and the tight connection when the plug 3 is connected with the connecting insertion hole. The cylindrical block 33 abuts against the cylindrical end surface of the elbow 45 after entering the circular groove 413. The connecting disc 34 is arranged to limit the displacement of the clamp 42. The displacement of the clamp 42 can prevent the cylindrical block 33 from being inserted too deep. The outer surface of the spring sheet 35 slides out of the circular groove 413 and is outwardly elastically deformed. The spring sheet 35 is hooked on the limiting block 43 during the outward elastic deformation. The limiting is completed. The plug 3 cannot be removed from the connecting shell 4 without the excessive external force. The plug can be easily replaced. The cost can be effectively reduced.

[0052] In a specific embodiment, as shown in Figure 3 The female port 32 comprises an inclined groove 321, a limiting ring 322, a sleeve 323, a side hole 324 and an arc-shaped plate 325. The limiting ring 322 is sleeved on the side wall of the sleeve 323. The sleeve 323 is inserted into the insertion hole. The wire is inserted into the sleeve 323. The limiting ring 322 abuts against the outer surface of the mounting column 36. The side hole 324 is arranged on the side wall of the sleeve 323. One of the surfaces of the side hole 324 is provided with the arc-shaped plate 325. The inclined groove 321 is arranged at one end of the sleeve 323. The inclined groove 321 can make the wire bending angle more smooth. If the inclined groove 321 is not arranged, the wire 90° bending is easy to be broken, which affects the transmission. The limiting ring 322 is arranged to limit the insertion depth of the sleeve 323 in the insertion hole. The side hole 324 is arranged to mount an arc-shaped plate 325 with elasticity. The arc-shaped plate 325 is arranged to change the width of a part of the female port 32 through the wire insertion, so that the female port 32 can be limited in the insertion hole. When the arc-shaped plate 325 is arranged in the insertion hole, the arc-shaped plate 325 is outwardly elastically deformed. The arc-shaped plate 325 abuts against the inner wall of the insertion hole, thereby limiting the female port 32. There is a gap between the arc-shaped plate 325 and the side hole 324. The gap can be used to adjust the wire harness by the worker.

[0053] In a specific embodiment, as shown in Figure 4The connecting shell 4 comprises an insulating shell 41, a clamp 42, a limiting block 43, a sleeve 44 and an elbow 45. The elbow 45 is internally provided with an installation hole through which the metal wire is inserted into the plug 3. The sleeve 44 is sleeved on the outer side of one end of the elbow 45. The sleeve 44 is internally provided with a plurality of limiting blocks 43. The plug 3 is inserted into the sleeve 44. The insulating shell 41 is sleeved on the outer side of the other end of the elbow 45. The clamp 42 is inserted into the sleeve 44. The insulating shell 41 is arranged to prevent electric leakage. The clamp 42 is arranged to limit the installation depth of the plug 3. The limiting blocks 43 are used to hang the spring sheet 35 to limit the installation of the plug 3. The installation hole in the elbow 45 is used to guide the metal wire.

[0054] In one specific embodiment, as shown in Figure 5 The clamp 42 comprises a mounting piece 421, a placing hole 422 and a protrusion 423. The mounting piece 421 is internally provided with a plurality of placing holes 422. The plug 3 is placed in the placing hole 422. The mounting piece 421 is inserted into the sleeve 44. A plurality of protrusions 423 are arranged on the outer surface of the side wall of the mounting piece 421. The protrusions 423 are arranged on the outer surface of the sleeve 44. The placing hole 422 is arranged to allow the spring sheet 35 to be inserted. In this way, the spring sheet 35 can be introduced into the connecting shell 4. The protrusions 423 are arranged to limit the installation depth of the plug 3.

[0055] In one specific embodiment, as shown in Figure 6 The insulating shell 41 comprises a shell body 411, an annular protrusion 412 and a circular groove 413. The shell body 411 is internally provided with the annular protrusion 412. The circular groove 413 is arranged on the annular protrusion 412. The limiting block 43 extends along the side wall of the circular groove 413 to the elbow 45. The circular groove 413 is used to insert the clamp 42 and the plug 3.

[0056] In one specific embodiment, as shown in Figure 7 The device connector 1 comprises a sleeve 11, a converging shell 12 and a connecting disc 13. The connecting disc 13 is arranged in pairs. The connecting disc 13 is internally provided with a plurality of circular holes. The converging shell 12 is arranged in the circular hole. One end of the metal wire is arranged in the converging shell 12. The converging shell 12 is arranged between the two connecting discs 13. The connecting disc 13 can support the converging shell 12. The converging shell 12 has the same function as the female port 32.

[0057] Although the utility model has been described in detail above with general description and specific embodiments, some modifications or improvements can be made on the basis of the utility model, which is obvious to those skilled in the art. Therefore, these modifications or improvements made on the basis of not deviating from the spirit of the utility model all belong to the scope of protection required by the utility model.

Claims

1. A special flexible cable for a lithography machine arm, characterized in that, include: A connector (2) is connected to a first wire harness (5) at one end and to a second wire harness (6) at the other end, wherein the second wire harness (6) is arranged in pairs; Equipment connectors (1) are provided in pairs, and the end of the second wire harness (6) is inserted into the equipment connector (1); Connect the outer casing (4), with the first wire harness (5) inserted at one end; The plug (3) is inserted into the connecting housing (4) at one end; The first wire harness (5) and the second wire harness (6) are provided with metal wires, which extend into the plug (3) and the device connector (1).

2. The special flexible cable for the lithography machine arm as described in claim 1, characterized in that, The plug (3) includes: The mounting post (36) has several insertion holes inside, and a connecting disc (34) is mounted on one end surface of the mounting post (36); A plurality of spring plates (35) are mounted on the surface of the connecting disc (34), and the spring plates (35) are disposed on the outside of the mounting post (36); A cylindrical block (33) is mounted on the other end surface of the connecting disk (34), and the insertion hole passes through the connecting disk (34) and the cylindrical block (33) in sequence, and extends to the surface of the cylindrical block (33); A crescent groove (31) is formed on the side surface of the cylindrical block (33); The female connector (32) is installed in the socket, and the end of the metal wire is installed and inserted in the female connector (32).

3. The special flexible cable for the lithography machine arm as described in claim 2, characterized in that, The mother port (32) includes: A sleeve (323) with a limiting ring (322) fitted on its side wall is inserted into the insertion hole. The metal wire is inserted into the sleeve (323) and the limiting ring (322) abuts against the outer surface of the mounting post (36). A side hole (324) is formed on the side wall of the sleeve (323), and an arc plate (325) is installed on one surface of the side hole (324); An inclined groove (321) is formed at one end of the sleeve (323).

4. The special flexible cable for the lithography machine arm as described in claim 1, characterized in that, The connecting housing (4) includes: The elbow (45) has an internal mounting hole, through which the metal wire is inserted into the plug (3); A housing (44) is fitted on the outside of one end of the elbow (45). Several limiting blocks (43) are installed on the inner surface of the end of the housing (44). The plug (3) is inserted into the housing (44). An insulating shell (41) is fitted onto the outside of the other end of the elbow (45); The clamp (42) is inserted into the casing (44).

5. The special flexible cable for the lithography machine arm as described in claim 4, characterized in that, The clamp (42) includes: The mounting part (421) has several placement holes (422) on its side wall. The end of the plug (3) is placed in the placement hole (422), and the mounting part (421) is inserted into the housing (44). Several protrusions (423) are provided on the outer surface of the side wall of the mounting member (421), and the protrusions (423) abut against the outer surface of the housing (44).

6. The special flexible cable for the lithography machine arm as described in claim 4, characterized in that, The insulating shell (41) includes: The housing (411) has an annular protrusion (412) on one end surface; A circular groove (413) is provided on the annular protrusion (412), and the limiting block (43) extends along the side wall of the circular groove (413) toward the bend (45).

7. The special flexible cable for the lithography machine arm as described in claim 1, characterized in that, The equipment connector (1) includes: A sleeve (11) has a connecting plate (13) installed inside. The connecting plates (13) are arranged in pairs and have several round holes. A gathering shell (12) is installed in the circular hole, and one end of the metal wire is installed in the gathering shell (12).

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