System for treating ammonia-containing waste gas of PEVCD process by utilizing low-quality fluorine-containing waste water in photovoltaic industry

By combining the treatment of low-quality fluoride-containing wastewater from the photovoltaic industry and ammonia-containing waste gas from the PECVD process, and utilizing technologies such as membrane solid-liquid concentration and separation and crystallization drying, ammonium bifluoride products are produced, solving the high cost problem of independent treatment lines and achieving environmental and economic benefits.

CN223788310UActive Publication Date: 2026-01-13深圳超纯水科技股份有限公司
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Patent Information

Application Number
CN202423179467.5
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-12-23
Publication Date
2026-01-13
Estimated Expiration
2034-12-23

AI Technical Summary

Technical Problem

In the photovoltaic industry, treating low-quality fluoride-containing wastewater and ammonia-containing waste gas generated by PECVD processes separately is costly and uneconomical, and the existing independent treatment lines lead to resource waste.

Method used

Design a system to combine the treatment of low-quality fluoride-containing wastewater and ammonia-containing waste gas. The ammonia-containing waste gas is absorbed by the fluoride-containing wastewater, and ammonium bifluoride product is produced by using components such as membrane solid-liquid concentration and separation, electrodialysis, and crystallization drying.

Benefits of technology

The combined treatment of wastewater and waste gas has been achieved, producing ammonium bifluoride products, which have good environmental protection and economic benefits, and reduce treatment costs.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model relates to the technical field of environmental protection, in particular to a system for treating ammonia-containing waste gas of a PEVCD process by utilizing low-quality fluorine-containing waste water in the photovoltaic industry. Comprising a wastewater conveying pipe for fluorine-containing wastewater, an ammonia-containing waste gas absorption device, a membrane type solid-liquid concentration and separation device, an electrodialyzer, a wastewater storage tank for high-concentration fluorine-containing wastewater, a crystallization part, a drying part and a wastewater station, a set of system for treating the ammonia-containing waste gas generated by the PEVCD process by utilizing the low-quality fluorine-containing waste water generated in the photovoltaic industry is provided for the waste water and waste gas treatment industry, the ammonium bifluoride product can be prepared while the fluorine-containing waste water and the ammonia-containing waste gas are treated by utilizing the treatment system disclosed by the invention, and the treatment system has relatively good environmental protection property and also can be used for treating the ammonia-containing waste gas generated by the PEVCD process. Good economic benefits can be generated, and high practicability is achieved.
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Description

TECHNICAL FIELD

[0001] The utility model relates to environmental protection technical field, concretely relates to a system of treating PEVCD process ammonia -containing waste gas by low -quality fluorine -containing wastewater of photovoltaic industry. BACKGROUND

[0002] Photovoltaic industry produces a large amount of fluorine-containing wastewater in the production process, the fluorine ion concentration in these wastewater is high, if directly discharging into the environment, can cause serious pollution to water body, influence water quality safety and ecological balance, ammonia-containing waste gas produced in the process of PECVD has pungent smell and toxicity, if directly discharging into the atmosphere, can cause harm to human health, such as causing respiratory diseases, so that the fluorine-containing wastewater produced in photovoltaic industry and the ammonia-containing waste gas produced in the process of PECVD need to be treated before being discharged externally.

[0003] The existing low-quality fluorine-containing wastewater produced in photovoltaic industry and the ammonia-containing waste gas produced in the process of PECVD are treated by two independent treatment lines, which leads to high treatment cost and lack of the effect of secondary economic benefit creation, therefore the system of treating PEVCD process ammonia -containing waste gas by low -quality fluorine -containing wastewater of photovoltaic industry is proposed. UTILITY MODEL CONTENT

[0004] In view of the problems in the prior art, the utility model provides a system of treating PEVCD process ammonia -containing waste gas by low -quality fluorine -containing wastewater of photovoltaic industry to provide a set of system for treating ammonia-containing waste gas produced in the process of PECVD by low-quality fluorine-containing wastewater produced in photovoltaic industry for wastewater and waste gas treatment industry, which can produce ammonium bifluoride product while treating fluorine-containing wastewater and ammonia-containing waste gas, has good environmental protection, can produce good economic benefit and has high practicability.

[0005] The utility model solves the technical scheme that it adopts a system of treating PEVCD process ammonia -containing waste gas by low -quality fluorine -containing wastewater of photovoltaic industry, including fluorine-containing wastewater's wastewater delivery pipe, ammonia-containing waste gas absorption device, membrane type solid-liquid concentration separation device, the wastewater storage tank for storing high concentration fluorine-containing wastewater, crystallization part, drying part and wastewater station, the output of wastewater delivery pipe is connected with the liquid inlet end of ammonia-containing waste gas absorption device, as the absorption liquid of ammonia-containing waste gas, the gas inlet end of ammonia-containing waste gas absorption device is connected with the waste gas pipe for ammonia-containing waste gas to enter, the liquid outlet end of ammonia-containing waste gas absorption device is connected with the liquid inlet end of membrane type solid-liquid concentration separation device, the water filter liquid outlet end of membrane type solid-liquid concentration separation device is connected with electrodialyzer, the liquid outlet end of electrodialyzer is connected with the liquid inlet end of wastewater storage tank, the waste liquid liquid outlet end of membrane type solid-liquid concentration separation device is connected with centrifugal separator.

[0006] By adopting the technical scheme, the components including the wastewater conveying pipe, the ammonia-containing waste gas absorption device, the membrane type solid-liquid concentration separation device, the electrodialyzer, the wastewater storage tank, the crystallization part, the drying part and the wastewater station are combined to provide a treatment system for ammonia-containing waste gas generated in the PEVCD process by using low-quality fluorine-containing wastewater generated in the photovoltaic industry, which can produce hydrogen fluoride ammonium products while treating the fluorine-containing wastewater and the ammonia-containing waste gas, has good environmental protection and good economic benefits, and has high practicability.

[0007] Specifically, the liquid outlet end of the wastewater storage tank is connected with a concentration evaporator, the liquid outlet end of the concentration evaporator is connected with a crystallization part, and the gas outlet end of the crystallization part is connected with the gas inlet end of the ammonia-containing waste gas absorption device.

[0008] By adopting the technical scheme, the hydrogen fluoride ammonium solution discharged from the wastewater storage tank is further concentrated by the concentration evaporator to improve the concentration of the hydrogen fluoride ammonium, and the hydrogen fluoride ammonium solution with improved concentration is subjected to -℃ crystallization and centrifugal treatment by the crystallization part. As the temperature decreases, the solubility of the hydrogen fluoride ammonium decreases, and the hydrogen fluoride ammonium begins to crystallize and precipitate. After centrifugation, high-purity hydrogen fluoride ammonium raw materials can be obtained.

[0009] Specifically, the drying part is a fluidized bed dryer or a vacuum rake dryer, and a conveying line is built between the treatment end of the crystallization part and the drying part.

[0010] The gas outlet end of the drying part is connected with a condenser, the liquid outlet end of the condenser is connected with the liquid inlet end of the concentration evaporator, and the gas outlet end of the condenser is connected with the gas inlet end of the ammonia-containing waste gas absorption device.

[0011] By adopting the technical scheme, the hydrogen fluoride ammonium treated by the crystallization part is sent to the drying part, and the hydrogen fluoride ammonium raw material after crystallization is dried by the drying part to obtain hydrogen fluoride ammonium products.

[0012] Specifically, the waste liquid discharge ends of the concentration evaporator and the crystallization part are connected with a transfer tank for collecting waste liquid, the liquid outlet end of the transfer tank is connected with a centrifugal separator, the liquid outlet end of the centrifugal separator is connected with a water washing storage tank with a stirrer, and the liquid outlet end of the water washing storage tank is connected with a wastewater station.

[0013] By adopting the technical scheme, the low-concentration waste liquid generated after concentration and centrifugal treatment of the concentration evaporator and the crystallization part is temporarily stored in the transfer tank, the waste material sent from the membrane type solid-liquid concentration separation device and the transfer tank is subjected to centrifugal separation treatment by the centrifugal separator, so that the liquid material and the solid material are separated, and the wastewater generated by the centrifugal separator is fully stirred and homogenized in the water washing storage tank with a stirrer and then sent to the wastewater station for treatment.

[0014] The beneficial effects of this utility model are as follows: The system comprises components such as a wastewater conveying pipe, an ammonia-containing waste gas absorption device, a membrane solid-liquid concentration and separation device, a wastewater storage tank, a crystallization section, a drying section, and a wastewater station. This system provides a wastewater and waste gas treatment industry with a system for treating ammonia-containing waste gas generated by the PEVCD process using low-quality fluoride-containing wastewater from the photovoltaic industry. Simultaneously treating fluoride-containing wastewater and ammonia-containing waste gas, this system can produce ammonium bifluoride. By merging the treatment lines for low-quality fluoride-containing wastewater from the photovoltaic industry and ammonia-containing waste gas from the PEVCD process, it achieves both good environmental protection and economic benefits, demonstrating high practicality. It solves the problem that existing treatment lines for low-quality fluoride-containing wastewater from the photovoltaic industry and ammonia-containing waste gas from the PEVCD process are two separate lines, resulting in high treatment costs and a lack of secondary economic benefits. Attached Figure Description

[0015] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0016] Figure 1 This is a flowchart of the present invention;

[0017] In the diagram: 1. Wastewater conveying pipe; 2. Ammonia-containing waste gas absorption device; 3. Waste gas pipe; 4. Membrane solid-liquid concentration and separation device; 5. Wastewater storage tank; 6. Concentrator evaporator; 7. Crystallization section; 8. Drying section; 9. Transfer tank; 10. Centrifuge; 11. Water washing and storage tank; 12. Wastewater station; 13. Electrodialysis unit. Detailed Implementation

[0018] To make the technical means, creative features, objectives and effects of this utility model easier to understand, the present utility model will be further described below in conjunction with specific embodiments.

[0019] like Figure 1 As shown, the present invention discloses a system for treating ammonia-containing waste gas from the PEVCD process using low-quality fluoride-containing wastewater from the photovoltaic industry. The system includes a wastewater conveying pipe 1 for fluoride-containing wastewater, an ammonia-containing waste gas absorption device 2, a membrane solid-liquid concentration and separation device 3, an electrodialysis unit 12, a wastewater storage tank 4 for high-concentration fluoride-containing wastewater, a crystallization section 6, a drying section 7, and a wastewater station 11. The output end of the wastewater conveying pipe 1 is connected to the inlet end of the ammonia-containing waste gas absorption device 2, serving as the absorbent for the ammonia-containing waste gas. The inlet end of the ammonia-containing waste gas absorption device 2 is connected to a waste gas pipe 21 for the ammonia-containing waste gas to enter. The discharge end of the ammonia-containing waste gas absorption device 2 is connected to the inlet end of the membrane solid-liquid concentration and separation device 3. The filtration and discharge end of the membrane solid-liquid concentration and separation device 3 is connected to the electrodialysis unit 12. The discharge end of the electrodialysis unit 12 is connected to the inlet end of the wastewater storage tank 4. The waste liquid discharge end of the membrane solid-liquid concentration and separation device 3 is connected to a centrifuge 9.

[0020] In use, a set of treatment systems for ammonia-containing waste gas generated by PEVCD process using low-quality fluorine-containing waste water generated in photovoltaic industry is provided by the components such as waste water conveying pipe 1, ammonia-containing waste gas absorption device 2, membrane type solid-liquid concentration separation device 3, electrodialyzer 12, waste water storage tank 4, crystallization part 6, drying part 7 and waste water station 11, and the treatment system can produce ammonium bifluoride product while treating fluorine-containing waste water and ammonia-containing waste gas, has good environmental protection and good economic benefits, and has high practicability.

[0021] The low-quality fluorine-containing waste water generated in photovoltaic industry is conveyed to the ammonia-containing waste gas absorption device 2 through the waste water conveying pipe 1, so that the low-quality fluorine-containing waste water generated in photovoltaic industry is used as the absorption liquid of the ammonia-containing waste gas absorption device 2 for treating waste gas, the ammonia-containing waste gas is sprayed, the ammonia-containing waste gas is sprayed by the fluorine-containing waste water and falls to the bottom of the ammonia-containing waste gas absorption device 2, and the ammonia-containing waste gas absorption device 2 is discharged to the membrane type solid-liquid concentration separation device 3, after being treated by the membrane type solid-liquid concentration separation device 3, the filtered solution enters the electrodialyzer 12 for electrodialysis concentration treatment, and then enters the waste water storage tank 4 for storage, and the high-concentration waste material generated after being filtered by the membrane type solid-liquid concentration separation device 3 is sent to the centrifugal separator 9 for centrifugal separation treatment.

[0022] The utility model still includes, the liquid outlet of waste water storage tank 4 is connected with concentration evaporator 5, the liquid outlet of concentration evaporator 5 is connected with crystallization part 6, the exhaust end of crystallization part 6 is connected with the air inlet of ammonia-containing waste gas absorption device 2;

[0023] In use, the waste water discharged from the waste water storage tank 4 is further concentrated by the concentration evaporator 5, the concentration of ammonium bifluoride is improved, the ammonium bifluoride solution with improved concentration is subjected to-5 DEG C crystallization and centrifugal treatment by the crystallization part 6, with the decrease of temperature, the solubility of ammonium bifluoride decreases, and crystallization and precipitation start, and then centrifugal solid-liquid separation is carried out.

[0024] The utility model still includes, the drying part 7 is fluidized bed dryer or vacuum rake dryer, and a conveying line is built between the treatment end of the crystallization part 6 and the drying part 7.

[0025] The exhaust end of the drying part 7 is connected with a condenser 13, the liquid outlet of the condenser 13 is connected with the liquid inlet of the concentration evaporator 5, and the air inlet of the ammonia-containing waste gas absorption device 2 is connected with the exhaust end of the condenser 13.

[0026] In use, the crystallized ammonium bifluoride raw material is dried by the drying part 7 to obtain ammonium bifluoride product.

[0027] The utility model also includes, the waste liquid discharge end of concentrated evaporimeter 5 and crystallization part 6 is connected with the transfer tank 8 for collecting waste liquid for collecting waste liquid, the liquid end of transfer tank 8 is connected with centrifugal separator 9, the liquid end of centrifugal separator 9 is connected with the water washing storage tank 10 with agitator, the liquid end of water washing storage tank 10 is connected with waste water station 11.

[0028] In use, the low concentration waste liquid generated after concentration and centrifugal treatment of the concentrated evaporimeter 5 and the crystallization part 6 is temporarily stored in the transfer tank 8, the waste material sent by the membrane type solid-liquid concentration separation device 3 and the transfer tank 8 is centrifugally separated by the centrifugal separator 9, so that the liquid material and the solid material are separated, and the waste water generated by the centrifugal separator 9 is fully stirred and homogenized by the water washing storage tank 10 with an agitator, and then sent to the waste water station 11 for treatment.

[0029] In use, the low quality low concentration fluorine-containing waste water generated in the photovoltaic industry is transported to the ammonia-containing waste gas absorption device 2 through the waste water conveying pipe 1, the low concentration fluorine-containing waste water is used as the absorption liquid for treating the waste gas of the ammonia-containing waste gas absorption device 2, the ammonia-containing waste gas generated in the PEVCD process is sprayed, the ammonia-containing waste gas is sprayed by the fluorine-containing waste water and falls to the bottom of the ammonia-containing waste gas absorption device 2, and then is sent to the membrane type solid-liquid concentration separation device 3 through the liquid discharge end of the ammonia-containing waste gas absorption device 2, after being treated by the membrane type solid-liquid concentration separation device 3, the treated waste water enters the electrodialyzer 12 for electrodialysis concentration treatment, and then is stored in the waste water storage tank 4, the waste water discharged from the waste water storage tank 4 is further concentrated by the concentrated evaporimeter 5, the concentration of ammonium hydrogen fluoride is improved, the ammonium hydrogen fluoride solution with improved concentration is crystallized at-5 DEG C and centrifugally treated by the crystallization part 6, with the decrease of temperature, the solubility of ammonium hydrogen fluoride decreases, and the crystallization is started, after the centrifugal solid-liquid separation, the ammonium hydrogen fluoride raw material treated by the crystallization part 6 is sent to the drying part 7, the crystallized ammonium hydrogen fluoride raw material is dried by the drying part 7, and the ammonium hydrogen fluoride product is obtained.

[0030] The gas generated by the drying part 7 is condensed by the condenser 13, and the liquid obtained after condensation is sent to the concentrated evaporimeter 5 together with the waste water sent from the waste water storage tank 4, and the gas that cannot be condensed by the condenser 13 is sent to the ammonia-containing waste gas absorption device 2 together with the newly entered ammonia-containing waste gas and the newly entered fluorine-containing waste water for spray absorption treatment.

[0031] The low concentration waste liquid generated after concentration and centrifugal treatment of the concentrated evaporimeter 5 and the crystallization part 6 is temporarily stored in the transfer tank 8, the waste material sent by the membrane type solid-liquid concentration separation device 3 and the transfer tank 8 is centrifugally separated by the centrifugal separator 9, so that the liquid material and the solid material are separated, and the waste water generated by the centrifugal separator 9 is fully stirred and homogenized by the water washing storage tank 10 with an agitator, and then sent to the waste water station 11 for treatment.

[0032] The pH value of the waste liquid after the electrodialysis of the electrodialyzer 12 is 2-7.

[0033] The temperature of the waste gas after the concentration of the concentrator 5 is -5℃.

[0034] The basic principle, main features and advantages of the present application are shown and described above. Those skilled in the art should understand that the present application is not limited by the above examples. The above description and description in the specification are only to illustrate the principle of the present application. Without departing from the spirit and scope of the present application, various changes and improvements can be made to the present application. These changes and improvements all fall within the scope of the present application. The scope of protection of the present application is defined by the appended claims and their equivalents.

Claims

1. A system for treating ammonia-containing exhaust gas of a PEVCD process using low-quality fluorine-containing wastewater of a photovoltaic industry, characterized in that, The waste water conveying pipe (1) containing fluorine waste water, the ammonia-containing waste gas absorption device (2), the membrane type solid-liquid concentration separation device (3), the electrodialyzer (12), the waste water storage tank (4) of high-concentration fluorine-containing waste water, the crystallization part (6), the drying part (7) and the waste water station (11), the output end of the waste water conveying pipe (1) is connected with the liquid inlet end of the ammonia-containing waste gas absorption device (2), the gas inlet end of the ammonia-containing waste gas absorption device (2) is connected with the waste gas pipe (21) for ammonia-containing waste gas, the liquid outlet end of the ammonia-containing waste gas absorption device (2) is connected with the liquid inlet end of the membrane type solid-liquid concentration separation device (3), the water filter liquid outlet end of the membrane type solid-liquid concentration separation device (3) is connected with the electrodialyzer (12), the liquid outlet end of the electrodialyzer (12) is connected with the liquid inlet end of the waste water storage tank (4), and the waste liquid outlet end of the membrane type solid-liquid concentration separation device (3) is connected with the centrifugal separator (9).

2. The system for treating ammonia-containing waste gas by PEVCD process using low-quality fluorine-containing wastewater from photovoltaic industry according to claim 1, characterized in that, The liquid outlet end of the waste water storage tank (4) is connected with the concentration evaporator (5), the liquid outlet end of the concentration evaporator (5) is connected with the crystallization part (6), and the gas outlet end of the crystallization part (6) is connected with the gas inlet end of the ammonia-containing waste gas absorption device (2).

3. The system for treating ammonia-containing exhaust gas of PEVCD process with low-quality fluorine-containing wastewater from photovoltaic industry according to claim 2, characterized in that, The drying part (7) is a fluidized bed dryer or a vacuum rake dryer, and a conveying line is built between the processing end of the crystallization part (6) and the drying part (7).

4. The system for treating ammonia-containing exhaust gas of PEVCD process with low-quality fluorine-containing wastewater from photovoltaic industry according to claim 3, characterized in that, The waste liquid outlet ends of the concentration evaporator (5) and the crystallization part (6) are connected with the transfer tank (8) for collecting waste liquid, the liquid outlet end of the transfer tank (8) is connected with the centrifugal separator (9), the liquid outlet end of the centrifugal separator (9) is connected with the water washing storage tank (10) provided with a stirrer, and the liquid outlet end of the water washing storage tank (10) is connected with the waste water station (11).

5. The system for treating ammonia-containing exhaust gas of PEVCD process with low-quality fluorine-containing wastewater of photovoltaic industry according to claim 4, characterized in that, The gas outlet end of the drying part (7) is connected with the condenser (13), the liquid outlet end of the condenser (13) is connected with the liquid inlet end of the concentration evaporator (5), and the gas outlet end of the condenser (13) is connected with the gas inlet end of the ammonia-containing waste gas absorption device (2).