Light spot analyzer and laser spot quality detection system

Abstract

The utility model discloses a light spot analyzer and a laser spot quality detection system, and belongs to the technical field of laser galvanometer calibration. The device comprises an acquisition assembly and a rotary lifting assembly, the acquisition assembly comprises a packaging shell and an acquisition unit, the acquisition unit is embedded in the packaging shell, and the acquisition unit can assist in calibrating laser precision; the rotary lifting assembly comprises a connecting rod, a lifting unit and a rotating unit, one end of the connecting rod is connected with the packaging shell, the lifting unit is connected with the other end of the connecting rod and the rotating unit, the lifting unit can drive the connecting rod to drive the packaging shell to lift relatively, and the rotating unit can drive the lifting unit to rotate relatively. According to the utility model, the polarization angle and the spot size of the laser can be changed, and the collection assembly is assisted to verify the laser precision.

Description

Technical Field

[0001] This utility model relates to the field of laser galvanometer calibration technology, and in particular to a spot analyzer and a laser spot quality detection system. Background Technology

[0002] Laser processing technology utilizes the interaction between a laser beam and matter to perform cutting, welding, surface treatment, drilling, and micromachining. With the continuous development of laser technology, laser processing has been widely applied in various fields. The galvanometer, as the actuator, moves the laser focus point on the workpiece along the desired trajectory. The processing accuracy of the galvanometer determines the accuracy of the entire laser processing system. Due to factors such as temperature, mechanical vibration, and the system's own reliability, galvanometer systems often experience distortion.

[0003] In general, the laser spot needs to be calibrated periodically to analyze its quality. During calibration, the calibration test board needs to be automatically raised, lowered, and rotated. Existing equipment cannot perform this task, resulting in long calibration times and low efficiency. Utility Model Content

[0004] In view of this, it is necessary to provide a spot analyzer and a laser spot quality detection system to solve the problem that existing calibration test boards are difficult to automatically lift, lower, and rotate.

[0005] In a first aspect, this utility model provides a light spot analyzer, comprising:

[0006] The acquisition component, wherein the acquisition unit is embedded in the packaging housing, and the acquisition unit can assist in calibrating laser accuracy;

[0007] A rotating lifting assembly includes a connecting rod, a lifting unit, and a rotating unit. One end of the connecting rod is connected to the packaging shell. The lifting unit is connected to the other end of the connecting rod and the rotating unit. The lifting unit can drive the connecting rod to move the packaging shell up and down relative to each other, and the rotating unit can drive the lifting unit to rotate relative to each other.

[0008] Furthermore, the acquisition unit includes a photoelectric sensor and a light-transmitting sheet. The light-transmitting sheet is embedded in the packaging housing. The two sides of the light-transmitting sheet are respectively positioned opposite the photoelectric sensor and the laser source. The light-transmitting sheet is provided with a diffuse reflection area and a non-diffuse reflection area.

[0009] Furthermore, the lifting unit includes a hydraulic cylinder and a piston, the piston being movably inserted into the hydraulic cylinder, and the end of the piston relatively close to the encapsulation housing being connected to the connecting rod.

[0010] Furthermore, a guide unit is provided between the connecting rod and the hydraulic cylinder body. The guide unit includes a slider and a slide groove. The slider is located at the end of the hydraulic cylinder body and protrudes relatively inward. The slide groove is formed on the connecting rod, and the slider is slidably engaged in the slide groove.

[0011] Furthermore, the end of the hydraulic cylinder away from the connecting rod cooperates with the piston to form a hydraulic chamber, and the hydraulic cylinder is provided with a hydraulic connector, which is connected to the hydraulic chamber and the outside world respectively.

[0012] Furthermore, the rotating unit includes a rotating base, a worm gear mechanism, and a driving component. The bottom of the hydraulic cylinder is mounted on the rotating base, and the driving component is connected to the rotating base through the worm gear mechanism to drive the rotating base to rotate the hydraulic cylinder relative to it.

[0013] Furthermore, the driving component is a rotary wheel and / or a servo motor, and the driving component is connected to the input end of the worm gear mechanism.

[0014] Furthermore, it also includes a base, which includes a seat body and a drive shaft. One end of the drive shaft is rotatably connected to the seat body via a bearing, and the other end of the drive shaft is connected to the output end of the worm gear mechanism.

[0015] Secondly, this utility model provides a laser spot quality detection system, comprising: a spot analyzer, a laser generating component, and a control component, wherein the control component is electrically connected to the spot analyzer and the laser generating component via cables.

[0016] Furthermore, the laser generating component includes a laser and a diaphragm driving unit. The diaphragm driving unit is positioned relative to the acquisition unit and is capable of receiving light from the laser and scanning according to a set trajectory direction.

[0017] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0018] (1) The present invention provides a spot analyzer and a laser spot quality detection system, which is equipped with a collection component. The collection component includes a package shell and a collection unit. The collection unit is embedded in the package shell. Each collection unit can independently collect data and verify the laser.

[0019] (2) The laser spot analyzer and laser spot quality detection system of this utility model are equipped with a rotating lifting assembly. The rotating lifting assembly includes a connecting rod, a lifting unit, and a rotating unit. One end of the connecting rod is connected to the encapsulation shell, and the lifting unit is connected to the other end of the connecting rod and the rotating unit. The lifting unit can drive the connecting rod to move relative to the rotating unit, thereby adjusting the distance between the encapsulation shell and the laser source, and thus changing the size of the spot on the acquisition unit. The rotating unit can drive the lifting unit and the connecting rod to rotate relative to each other, thereby adjusting the polarization direction of the spot relative to the acquisition unit. The automation function of the rotating lifting assembly can greatly improve the efficiency of the spot calibration process. Compared with traditional manual adjustment, the rotating lifting assembly can quickly realize lifting and rotation adjustment through electric drive or servo control system, thereby improving the automation level and operation efficiency of the entire calibration process. Attached Figure Description

[0020] The accompanying drawings, which are included to provide a further understanding of the present invention and form part of this application, illustrate exemplary embodiments of the present invention and, together with the description thereof, serve to explain the present invention and do not constitute an undue limitation thereof. In the drawings:

[0021] Figure 1 is a schematic diagram of the light spot analyzer provided by this utility model. Figure 1 ;

[0022] Figure 2 This is a schematic diagram of the rotating lifting component and the base in this utility model;

[0023] Figure 3 This is a schematic diagram of the acquisition component in this utility model. Figure 1 ;

[0024] Figure 4 This is a schematic diagram of the acquisition component in this utility model. Figure 2 ;

[0025] Figure 5 Schematic diagram of the light spot analyzer provided by this utility model Figure 2 ;

[0026] Figure 6 yes Figure 5 Schematic diagram of the cross section in the middle BB direction;

[0027] Figure 7 yes Figure 5 Schematic diagram of the cross section along the AA direction;

[0028] Figure 8 yes Figure 6 A magnified structural diagram of point A;

[0029] Figure 9Schematic diagram of the laser spot quality detection system provided by this utility model Figure 1 ;

[0030] In the diagram, 100 is the data acquisition component; 110 is the packaging housing; 120 is the data acquisition unit; 121 is the photoelectric sensor; 122 is the light-transmitting sheet; 122a is the diffuse reflection area; and 122b is the non-diffuse reflection area.

[0031] 200. Rotating lifting assembly; 210. Connecting rod; 220. Lifting unit; 221. Hydraulic cylinder body; 222. Piston; 223. Hydraulic connector; 230. Rotating unit; 231. Rotating base; 232. Worm gear mechanism; 233. Driving component; 240. Guide unit; 241. Slider; 242. Slide groove;

[0032] 300. Base; 310. Seat body; 320. Drive shaft;

[0033] 400. Laser generating assembly; 410. Laser; 420. Vibrator drive unit;

[0034] 500. Control components. Detailed Implementation

[0035] The preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings, which constitute a part of this application and are used together with the embodiments of the present invention to illustrate the principles of the present invention, but are not intended to limit the scope of the present invention.

[0036] This embodiment discloses a spot analyzer and a laser spot quality detection system, relating to the field of laser galvanometer calibration technology. A data acquisition unit 120 is installed on the encapsulation housing 110, which can test laser accuracy. A rotating and lifting assembly 200 can drive the encapsulation housing 110 to rotate and lift relative to each other, assisting the data acquisition unit 120 in verifying laser accuracy.

[0037] Please see Figures 1 to 9 This embodiment of a laser spot analyzer includes: a data acquisition component 100 and a rotation and lifting component 200. The data acquisition component 100 directly verifies the accuracy of the laser. The rotation and lifting component 200 can change the angle and distance between the data acquisition component 100 and the laser source, thereby adjusting the polarization angle and spot size of the laser and assisting the data acquisition component 100 in verifying the laser accuracy.

[0038] The acquisition component 100 includes a housing 110 and an acquisition unit 120. The acquisition unit 120 is embedded in the housing 110. Each acquisition unit 120 can independently acquire data and verify the laser.

[0039] The rotating lifting assembly 200 includes a connecting rod 210, a lifting unit 220, and a rotating unit 230. One end of the connecting rod 210 is connected to the encapsulation housing 110. The lifting unit 220 is connected to both the other end of the connecting rod 210 and the rotating unit 230. The lifting unit 220 can drive the connecting rod 210 to move relative to the rotating unit 230, thereby adjusting the distance between the encapsulation housing 110 and the laser source, and thus changing the size of the light spot on the acquisition unit 120. The rotating unit 230 can drive the lifting unit 220 and the connecting rod 210 to rotate relative to each other, thereby adjusting the polarization direction of the light spot relative to the acquisition unit 120. The automation function of the rotating lifting assembly 200 can greatly improve the efficiency of the light spot calibration process. Compared with traditional manual adjustment, the rotating lifting assembly 200, through electric drive or servo control system, can quickly realize lifting and rotation adjustment, thereby improving the automation level and operational efficiency of the entire calibration process.

[0040] In some embodiments, please refer to Figure 4 The acquisition unit 120 includes a photoelectric sensor 121 and a light-transmitting sheet 122. The light-transmitting sheet 122 is embedded in the encapsulation housing 110. The two sides of the light-transmitting sheet 122 are respectively positioned opposite the photoelectric sensor 121 and the laser source. The light-transmitting sheet 122 has a diffuse reflection area 122a and a non-diffuse reflection area 122b. When the laser light passes through the diffuse reflection area 122a, it is scattered and conducted within the light-transmitting sheet 122. The scattered light signal is received by the photoelectric sensor 121. The scattered light from the laser passing through the diffuse reflection area 122a can be effectively received and converted into an electrical signal by the photoelectric sensor 121.

[0041] In the specific implementation process, the diffuse reflection area 122a is strip-shaped and has a set width and length. There is a clear boundary between the diffuse reflection area 122a and the non-diffuse reflection area 122b. When the laser moves between the diffuse reflection area 122a and the non-diffuse reflection area 122b, abrupt changes can occur.

[0042] During operation, the spot analyzer is placed directly below the laser source. The rotating unit 230 drives the acquisition unit 120 to rotate, aligning the plane coordinate system of the acquisition unit 120 with the coordinate system of the laser source. The laser source scans the acquisition unit along a predetermined trajectory. Each scan along the predetermined trajectory records the velocity v and time t of the spot passing through the diffuse reflection region 122a. Using these two parameters, the width of the laser spot passing through the diffuse reflection region 122a of the light-transmitting plate 122 at the current scanning trajectory angle can be calculated. This process is repeated, allowing the laser to scan the diffuse reflection region 122a of the light-transmitting plate 122 at different angles, thus obtaining the spot width at different angles. After boundary fitting of the measured data, the shape of the laser spot on the current focal plane can be determined.

[0043] By comparing the obtained laser spot shape with the laser spot shape under the standard model, the quality of the laser spot on the current focal plane can be analyzed. Then, the lifting unit 220 located below the acquisition unit 120 is operated to adjust the height of the acquisition unit 120, and the laser is made to scan along the preset trajectory again. The above process is repeated to measure the quality of the laser spot on different focal planes.

[0044] It should be noted that the light-transmitting sheet 122 can be any object or medium that can conduct light and cause laser to be reflected, scattered, or diffusely reflected, such as light-transmitting glass, optical fiber, ceramic, metal, or coating.

[0045] The photoelectric sensor 121 can also be a photoelectric conversion element that can be used as a sensor to collect laser signals, such as a photodiode, photosensitive diode, or phototransistor. The incident laser can be any wavelength.

[0046] In some embodiments, please refer to Figure 6 The lifting unit 220 includes a hydraulic cylinder 221 and a piston 222. The piston 222 is movably inserted into the hydraulic cylinder 221. The end of the piston 222 that is relatively close to the encapsulation housing 110 is connected to the connecting rod 210. By inputting or outputting hydraulic oil into the hydraulic cylinder 221, the piston 222 can be driven to move the connecting rod 210 up and down.

[0047] Hydraulic systems, with their superior mechanical properties, can provide powerful lifting force while maintaining smooth movement. Compared to traditional mechanical lifting methods, hydraulic cylinders offer a more precise and linear lifting process, reducing errors caused by friction or mechanical instability. This is especially crucial in applications requiring high-precision spot calibration.

[0048] Hydraulic oil is incompressible, and its quantity directly controls the high-precision linear movement of piston 222 relative to hydraulic cylinder 221, making it particularly suitable for fine-tuning tasks. During the lifting and lowering process, minute adjustments to piston 222 can precisely control the position of the spot analyzer, ensuring that the height and accuracy of each lifting and lowering operation are accurate to the required micrometer level.

[0049] For further implementation methods, please refer to Figure 8 A guide unit 240 is provided between the connecting rod 210 and the hydraulic cylinder 221. The guide unit 240 includes a slider 241 and a groove 242. The slider 241 is located at the end of the hydraulic cylinder 221 and protrudes relatively inward. The groove 242 is opened on the connecting rod 210. The slider 241 is slidably engaged in the groove 242. During the movement of the connecting rod 210 relative to the hydraulic cylinder 221, the slider 241 is always engaged in the groove 242, which restricts the rotation of the connecting rod 210 and ensures that the lifting and lowering action of the connecting rod 210 will not interfere with the rotation action of the connecting rod 210.

[0050] Meanwhile, the locking action between the slider 241 and the slide groove 242 effectively suppresses vibrations and displacements generated during the movement of the hydraulic cylinder 221, reducing the impact of external vibrations on the lifting system. The guide unit 240 provides good shock resistance for the hydraulic lifting system, avoiding errors caused by vibration and ensuring precise operation.

[0051] For a spot analyzer, even the slightest vibration or displacement can affect the spot calibration results. The stable cooperation between slider 241 and groove 242 effectively reduces these unwanted disturbances, ensuring accuracy and stability.

[0052] As an approximate implementation, multiple grooves 242 can be formed on the outer wall of the connecting rod 210. The multiple grooves 242 are equidistantly arranged around the central axis of the connecting rod 210. Multiple sliders 241 are adapted to the connecting rod 210. By increasing the number of guide units 240, the guiding and shock absorption functions of the guide units 240 can be further improved.

[0053] In some embodiments, please refer to Figure 7 The rotating unit 230 includes a rotating base 231, a worm gear mechanism 232, and a driving component 233. The bottom of the hydraulic cylinder body 221 is mounted on the rotating base 231. The driving component 233 is connected to the rotating base 231 through the worm gear mechanism 232. The worm gear is set vertically relative to the rotating base 231. The top of the worm gear is fixedly connected to the rotating base 231, and the bottom of the worm gear is rotatably connected to the base. The driving component 233 is connected to the worm. The driving component 233 can drive the worm to rotate and drive the worm gear to rotate relative to it, thereby driving the rotating base 231, the connecting rod 210, and the acquisition component 100 to rotate as a whole, so as to adjust the change of the polarization angle of the acquisition unit 120 relative to the laser source.

[0054] The worm gear mechanism 232 provides high-precision rotation control. The worm gear drives the rotating base 231 through small angle changes, enabling the hydraulic cylinder 221 to rotate within a relatively precise angle range. Because the worm gear has a self-locking function, even without driving, the rotating base 231 is not prone to reverse rotation due to load or external force, thus enhancing system stability.

[0055] Please refer to [link / reference needed] for further information. Figure 1 and Figure 2 The drive component 233 is a rotary wheel and / or a servo motor. The drive component 233 is connected to the input end of the worm gear mechanism 232. The drive component 233 provides power input to the worm gear mechanism 232, ensuring precise rotation control of the hydraulic cylinder 221.

[0056] When the driving component 233 is a servo motor, the output shaft of the servo motor is rotatably connected to the end of the worm gear. The servo motor adjusts the rotation angle in real time through a precise feedback mechanism (such as an encoder and a sensor), thereby achieving precise rotation control. This high-precision performance of the servo motor ensures the accuracy of rotation angle, speed, and position control when the worm gear mechanism 232 drives the rotating base 231.

[0057] When the driving component 233 is a rotary wheel, the output shaft of the rotary wheel is rotatably connected to the end of the worm gear. The accuracy of the laser can be manually verified by rotating the rotary wheel and rotating the acquisition unit 120.

[0058] When the driving component 233 is a servo motor and a rotary wheel, the rotary wheel and the servo motor are rotatably connected to both ends of the worm gear, and the above two driving methods can be performed.

[0059] In some embodiments, please refer to Figure 7 A light spot analyzer also includes a base 300, which includes a seat 310 and a drive shaft 320. One end of the drive shaft 320 is rotatably connected to the seat 310 via a bearing. This rotatable connection effectively supports and stabilizes rotating components. The use of bearings reduces friction, ensuring the smoothness of the drive shaft 320 during rotation. As a key component connecting the output end of the worm gear to the base 300, the drive shaft 320 enables efficient power transmission and avoids offset or vibration caused by torque changes or external disturbances during rotation.

[0060] The other end of the drive shaft 320 is connected to the output end of the worm gear mechanism 232. Through the connection between the drive shaft 320 and the worm gear mechanism 232, the drive shaft 320 can smoothly transmit the rotational power of the worm gear output end to the rotating platform or optical element of the spot analyzer. The worm gear mechanism 232 can typically provide high torque output, and the drive shaft 320 bears and transmits these torques through bearings to achieve stable rotation under heavy loads.

[0061] Please see Figure 9 This embodiment of a laser spot quality detection system includes a spot analyzer, a laser generating component 400, and a control component 500. The control component 500 is electrically connected to the spot analyzer and the laser generating component via cables. The laser analyzer is positioned directly below the laser generating component 400. The spot analyzer drives the acquisition unit 120 to rotate relative to it, aligning the planar coordinate system of the acquisition unit 120 with the coordinate system of the laser generating component 400. The control component 500 controls the laser 410 to emit light and scan along a set trajectory direction, thereby completing the verification of the laser generating component 400.

[0062] As a further implementation, the laser generating component includes a laser 410 and a diaphragm driving unit 420. The diaphragm driving unit 420 is positioned relative to the light-transmitting sheet 122. When the power of the laser 410 is detected, the diaphragm driving unit 420 is used to make the laser spot pass through the diffuse reflection area 122a and the non-diffuse reflection area 122b of the acquisition unit 120. When the laser passes through the diffuse reflection area 122a, the laser will be scattered here. The scattered laser will be conducted through the interior of the light-transmitting sheet 122 and then received by the photoelectric sensor 121 located near the light-transmitting sheet 122. The photoelectric sensor 121 will receive the voltage signal, and the control component 500 will compare this voltage signal with the feature mapping table used for calibrating the system to complete the laser verification.

[0063] The control component 500 includes a computer with pre-defined software installed and a controller. The controller can receive signals from the computer and control the diaphragm drive unit 420 to perform deflection scanning. The diaphragm drive unit 420 includes a laser galvanometer and a drive module. The drive module can drive the laser galvanometer to deflect.

[0064] The laser spot quality detection system in this embodiment operates on the following principle:

[0065] 1. The computer controls the laser output and the laser galvanometer through the controller. The laser galvanometer controls the laser to scan on the diffuse reflection area 122a of the light-transmitting sheet 122 according to a preset trajectory. The laser moves on the upper surface of the light-transmitting sheet 122 perpendicular to the strip-shaped diffuse reflection area 122a.

[0066] 2. When the laser scans the non-diffuse reflection area of ​​the light-transmitting sheet 122, the laser directly penetrates and exits from the surface of the light-transmitting sheet 122. At this time, the laser will not scatter within the glass body, therefore, the photoelectric sensor 121 will not receive a signal.

[0067] 3. When the laser scans the diffuse reflection area 122a of the light-transmitting sheet 122, the laser will undergo diffuse reflection, causing the laser to be scattered inside the light-transmitting sheet 122.

[0068] 4. After the scattered laser light is conducted inside the light-transmitting plate 122, the photoelectric sensor 121 located near the light-transmitting plate 122 receives the light signal and converts the light signal into an electrical signal. When the laser light passes through the diffuse reflection area 122a along the preset trajectory, it will intersect the boundary of the diffuse reflection area 122a at points a and b respectively. That is, the acquisition unit will acquire the laser signal at points a and b and record the acquisition time as the time t1 when the light spot enters the diffuse reflection area 122a and the time t2 when the light spot exits the diffuse reflection area 122a. The time t = t2 - t1 can be obtained. Since the width of the diffuse reflection area 122a has been measured in advance, the width s of the diffuse reflection area 122a and the scanning speed v of the laser galvanometer are known. Therefore, the time for the laser spot to travel in the diffuse reflection area 122a is t3 = s / v. From the above conditions, the time Δt for the light spot to scan its own width is Δt = t - t3. In summary, the width of the laser spot at this time can be calculated as L1 = Δt * v.

[0069] 5. Drive the acquisition unit 120 to rotate clockwise by a certain angle. At the same time, the laser galvanometer controls the laser to scan along the predetermined trajectory direction again. After the laser trajectory passes through the diffuse reflection area, the system can calculate the laser spot width L2 at the current angle.

[0070] 6. By repeating the above process, the calculated spot widths after the laser spot passes through the diffuse reflection zone 122a under non-angular trend conditions can be obtained as L1, L2, L3.........Ln. Then, by fitting the above data to the boundary, the outer contour shape of the laser spot can be obtained.

[0071] 7. By comparing the fitted outer contour shape of the laser spot with the laser spot shape under the standard model, the quality of the laser spot on the current focal plane can be analyzed.

[0072] 8. By adjusting the lifting unit 220 below the acquisition unit 120, the height of the acquisition unit 120 relative to the laser galvanometer can be adjusted, and then the shape of the laser spot at different heights can be acquired.

[0073] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the present utility model should be included within the present utility model.

Claims

1. A spot analyzer, characterized in that, include: The acquisition component includes a housing and an acquisition unit, wherein the acquisition unit is embedded in the housing and can assist in calibrating laser accuracy; A rotating lifting assembly includes a connecting rod, a lifting unit, and a rotating unit. One end of the connecting rod is connected to the packaging shell. The lifting unit is connected to the other end of the connecting rod and the rotating unit. The lifting unit can drive the connecting rod to move the packaging shell up and down relative to each other, and the rotating unit can drive the lifting unit to rotate relative to each other.

2. The spot analyzer according to claim 1, characterized in that, The acquisition unit includes a photoelectric sensor and a light-transmitting sheet. The light-transmitting sheet is embedded in the packaging housing. The two sides of the light-transmitting sheet are respectively positioned opposite the photoelectric sensor and the laser source. The light-transmitting sheet is provided with a diffuse reflection area and a non-diffuse reflection area.

3. A spot analyzer according to claim 1, characterized in that, The lifting unit includes a hydraulic cylinder and a piston. The piston is movably inserted into the hydraulic cylinder, and the end of the piston that is relatively close to the encapsulation housing is connected to the connecting rod.

4. A spot analyzer according to claim 3, characterized in that, A guide unit is provided between the connecting rod and the hydraulic cylinder body. The guide unit includes a slider and a groove. The slider is located at the end of the hydraulic cylinder body and protrudes relatively inward. The groove is opened on the connecting rod, and the slider is slidably engaged in the groove.

5. A spot analyzer according to claim 4, characterized in that, The end of the hydraulic cylinder away from the connecting rod cooperates with the piston to form a hydraulic chamber. The hydraulic cylinder is provided with a hydraulic connector, which is connected to the hydraulic chamber and the outside.

6. A spot analyzer according to claim 4, characterized in that, The rotating unit includes a rotating base, a worm gear mechanism, and a driving component. The bottom of the hydraulic cylinder is mounted on the rotating base. The driving component is connected to the rotating base through the worm gear mechanism to drive the rotating base to rotate the hydraulic cylinder relative to it.

7. A spot analyzer according to claim 6, characterized in that, The driving component is a rotary wheel and / or a servo motor, and the driving component is connected to the input end of the worm gear mechanism.

8. A spot analyzer according to claim 6 or 7, characterized in that, It also includes a base, which includes a seat body and a drive shaft. One end of the drive shaft is rotatably connected to the seat body via a bearing, and the other end of the drive shaft is connected to the output end of the worm gear mechanism.

9. A laser spot quality detection system, characterized in that, include: A spot analyzer, a laser generating component, and a control component as described in any one of claims 1-8, wherein the control component is electrically connected to the spot analyzer and the laser generating component respectively via cables.

10. A laser spot quality detection system according to claim 9, characterized in that, The laser generating assembly includes a laser and a diaphragm driving unit. The diaphragm driving unit is positioned relative to the acquisition unit and is capable of receiving light from the laser and scanning along a set trajectory.

Images