Semiconductor device transmission device and detection equipment thereof
By introducing an electrostatic adsorption and vacuum removal system into the semiconductor device transport device, combined with laser detection, the automatic removal of particles along the transport path is achieved without stopping the machine. This solves the problem of contaminants in the transport equipment affecting product quality, improves production efficiency, and reduces costs.
Patent Information
- Application Number
- CN202423106611.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-16
- Publication Date
- 2026-01-13
- Estimated Expiration
- 2034-12-16
AI Technical Summary
In existing semiconductor manufacturing processes, particulate contaminants generated by transmission equipment along the transmission path affect product quality, and existing detection and cleaning operations require downtime, resulting in low production efficiency and increased costs.
Design a semiconductor device transport device, including an electrostatic adsorption device, a vacuum generator, and a detection device, which can automatically detect and remove particles in the transport path without stopping the machine. It gathers pollutants through electrostatic adsorption and discharges them using the vacuum generator. Combined with a laser detection and control system, it achieves automated cleaning.
It enables efficient cleaning of the transport path without stopping the machine, improving cleaning efficiency, reducing production and labor costs, and ensuring product quality.
Smart Images
Figure CN223798655U_ABST