Wafer positioning and arranging device with Frame

Abstract

The utility model relates to the technical field of wafer positioning and arranging, in particular to a wafer positioning and arranging device with a Frame function. The device comprises a first protection box body, a second protection box body is arranged above the first protection box body, a conveying mechanism is arranged on one side of the first protection box body in a penetrating mode, a rotating mechanism is arranged on one side of the conveying mechanism, a gap is formed between the conveying mechanism and the rotating mechanism, and a pressing mechanism is arranged on one side of the rotating mechanism. A second motor is started, a second moving block can clamp a wafer, a fixed column is provided with a graduated scale, after the wafer is clamped, the size of the wafer can be detected and recorded, a lifting rod can ascend and descend and can jack up the wafer, and then second fixed blocks on the two sides can push a wafer buckle gasket and wrap the wafer. Therefore, the wafer is not easy to damage, the subsequent damage of the wafer is reduced, the cost is reduced, and the safety of subsequent manual picking of the wafer is improved.

Description

Technical Field

[0001] This utility model relates to the field of wafer positioning and sorting technology, specifically to a wafer positioning and sorting device with a frame. Background Technology

[0002] The development of wafer positioning and sorting equipment can be traced back to the early days of the semiconductor manufacturing industry. With advancements in integrated circuit technology, the demand gradually shifted from simple positioning systems to more precise automated equipment. As manufacturing technologies progressed, especially microelectronics and automation, wafer positioning equipment increasingly adopted more advanced materials and algorithms to improve processing speed and accuracy.

[0003] A search revealed that in the prior art, Chinese Patent Publication No. CN210866145U, authorized on June 26, 2020, discloses a wafer positioning mechanism, including a clamping cylinder and protective grippers. The clamping cylinder includes a cylinder body and two gripper heads slidably mounted on the cylinder body. The protective grippers include two clamping components, each fixed to one gripper head. Each clamping component has a coarse positioning clamping surface and a fine positioning clamping surface, which are connected. After coarse positioning on the coarse positioning clamping surface of the two clamping components, the wafer slides to the fine positioning clamping surface for fine positioning. During the entire positioning process, only the wafer side edge contacts the coarse and fine positioning clamping surfaces, while the photolithographic surface does not contact, thus preventing contamination.

[0004] However, the device still has the following drawbacks: although it can clamp wafer pairs and hold different wafers, it cannot record the size of the wafers and cannot wrap the wafers, which will lead to damage to the wafers in subsequent processes, causing unnecessary trouble and economic losses. Utility Model Content

[0005] The purpose of this invention is to provide a wafer positioning and sorting device with a frame, which has the advantages of wafer positioning and sorting, solves the problems of wafer size detection and recording, and can protect the wafer, thereby reducing unnecessary troubles. This device is equipped with a conveying device that can transport the inspected wafer to the next process.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a wafer positioning and sorting device with a frame, comprising a first protective housing, a second protective housing above the first protective housing, a conveying mechanism penetrating one side of the first protective housing, a rotating mechanism on one side of the conveying mechanism, with a gap between the conveying mechanism and the rotating mechanism, a pressing mechanism on one side of the rotating mechanism, with a gap between the rotating mechanism and the pressing mechanism, the pressing mechanism comprising a second protective shell, the second protective shell being installed inside the first protective housing, a support ring on the top of the second protective shell, two sets of push frames on the top of the support ring, wafer clipping pads inside the two sets of push frames, a through block installed on the top of the two sets of push frames, and a... A second electric push rod is connected to the first protective housing via a transmission connection. The base of the second electric push rod is provided with a second fixing block. One side wall of the second fixing block is installed on the inner wall of the first protective housing. A second motor is provided inside the second protective housing and is located above the first protective housing. The output end of the second motor is connected to a lifting rod via a transmission connection. A rotating block is provided on the outer wall of the lifting rod. The rotating block has a rotating groove. A connecting rod is provided on the inner wall of the rotating groove. A fixed column is provided above the rotating block. Several sets of scales are arranged in a circular array on the top of the fixed column. A gap is provided between one side wall of the scale and the lifting rod. The connecting rod passes through the fixed column. The fixed column has a moving groove. A limiting block and a second moving block are provided on the top of the connecting rod. The second moving block is slidably connected above the fixed column.

[0007] Furthermore, as a preferred embodiment of this utility model, the rotating mechanism includes a first motor, which is installed inside the first protective housing. The output end of the first motor is connected to a lifting column, and the outer wall of the lifting column is provided with a spiral lifting groove. A limiting block is provided on one side of the outer wall of the lifting column.

[0008] Furthermore, as a preferred embodiment of this utility model, a limiting post is provided through one side of the outer wall of the limiting block, and a first fixing block is provided on one side of the outer wall of the lifting column. The outer wall of the first fixing block has a circular array of several sets of first electric push rods, and the output ends of the several sets of first electric push rods are all equipped with support clamps.

[0009] Furthermore, as a preferred embodiment of this utility model, the transmission mechanism includes a servo motor, the output end of the servo motor is connected to a first threaded rod, the outer wall of the first threaded rod is threaded to a first moving block, the outer wall of the first moving block is fitted with a first protective shell, and the top of the first moving block is fitted with a storage box.

[0010] Furthermore, as a preferred embodiment of this utility model, the top of the through block is provided with an isolation plate, and two sets of gripper mechanisms are provided above the isolation plate. The gripper mechanism includes a third motor, the output end of the third motor is drivenly connected to a second threaded rod, a third moving block is threadedly connected to the outer wall of the second threaded rod, a third protective shell is provided on the outer wall of the third moving block, a third electric push rod is provided at the bottom of the third moving block, and a gripper is drivenly connected to the output end of the third electric push rod. The gripper is located above the through block.

[0011] Furthermore, as a preferred embodiment of this utility model, a conveyor belt is provided below one side of the gripper mechanism, a support column is provided at the bottom of one side of the conveyor belt, the other side of the conveyor belt is installed on the top of the isolation plate, a baffle is provided on one side of the conveyor belt, a wafer buckle pad is provided on the conveyor belt, a first observation window is provided on one side wall of the first protective box, and a second observation window is provided on one side of the second protective box.

[0012] Beneficial effects: The technical solution of this application has the following technical effects:

[0013] 1. This device is equipped with a clamping mechanism. When the second motor is started, the second moving block can clamp the wafer. The fixed column is equipped with a scale. After the wafer is clamped, the size of the wafer can be detected and recorded. The lifting rod can be raised and lowered to lift the wafer. Then, the second fixed blocks on both sides can push the wafer clip pads to wrap the wafer, making the wafer less prone to breakage, reducing subsequent wafer damage, reducing costs, and increasing the safety of subsequent manual handling of the wafer.

[0014] 2. In this device, the rotating mechanism, through the spiral lifting groove opened in the lifting column, can transport the packaged wafers to the storage box. The storage box can then be transported to the outside of the first protective box through its conveying mechanism, reducing manual intervention and increasing the efficiency of wafer sorting.

[0015] It should be understood that all combinations of the foregoing concepts and the additional concepts described in more detail below can be considered as part of the utility model subject matter of this disclosure, provided that such concepts do not contradict each other. Attached Figure Description

[0016] The accompanying drawings are provided to further illustrate the present invention and form part of the specification. They are used together with the embodiments of the present invention to explain the present invention, but do not constitute a limitation thereof. In the drawings:

[0017] Figure 1 This is a schematic diagram of the overall device of this utility model;

[0018] Figure 2This is a schematic diagram of the internal structure of the device of this utility model;

[0019] Figure 3 This is a schematic diagram of the structural arrangement of a portion of the present utility model.

[0020] Figure 4 This is a schematic diagram of the gripper mechanism of this utility model;

[0021] Figure 5 This is a schematic diagram of the conveyor belt part of the present invention;

[0022] Figure 6 This is a schematic diagram of the conveying mechanism of this utility model;

[0023] Figure 7 This is a schematic diagram of the clamping mechanism of this utility model;

[0024] Figure 8 This is a schematic diagram of the internal workings of the clamping mechanism of this utility model;

[0025] Figure 9 This is a schematic diagram of the rotating mechanism of this utility model;

[0026] Figure 10 This is a schematic diagram of the internal structure of the rotating mechanism of this utility model.

[0027] The meanings of the reference numerals in the figures are as follows: 1. First protective housing; 2. Second protective housing; 3. Conveying mechanism; 301. Servo motor; 302. First threaded rod; 303. First moving block; 304. First protective shell; 305. Storage box; 4. Rotating mechanism; 401. First motor; 402. Lifting column; 403. Limiting block; 404. Limiting post; 405. First fixing block; 406. First electric push rod; 407. Support clamp; 5. Pressing mechanism; 501. Second protective shell; 502. Support ring; 503. Push frame; 504. Through block; 505. Second electric push rod; 506. Second fixed block; 507. Second motor; 508. Lifting rod; 509. Rotating block; 510. Connecting rod; 511. Fixed column; 512. Second moving block; 513. Scale; 6. Isolation plate; 7. Gripper mechanism; 701. Third motor; 702. Second threaded rod; 703. Third moving block; 704. Third protective shell; 705. Third electric push rod; 706. Gripper; 8. Conveyor belt; 9. Support column; 10. Baffle; 11. Wafer clip gasket; 12. First observation window; 13. Second observation window. Detailed Implementation

[0028] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings. To better understand the technical content of the present utility model, specific embodiments are provided and described in conjunction with the accompanying drawings. Various aspects of the present utility model are described in this disclosure with reference to the accompanying drawings, which show many illustrative embodiments. It should be understood that the various concepts and embodiments described above, as well as those described in more detail below, can be implemented in any of many ways. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the scope of protection of the present utility model.

[0029] As attached Figure 1 To be continued Figure 10As shown: This embodiment provides a wafer positioning and sorting device with a frame, including a first protective housing 1, a second protective housing 2 above the first protective housing 1, a conveying mechanism 3 penetrating one side of the first protective housing 1, a rotating mechanism 4 on one side of the conveying mechanism 3, and a gap between the conveying mechanism 3 and the rotating mechanism 4. A pressing mechanism 5 on one side of the rotating mechanism 4, and a gap between the rotating mechanism 4 and the pressing mechanism 5, the pressing mechanism 5 including a second protective shell 501, the second protective shell 501 being installed inside the first protective housing 1. The top of the protective shell 501 is provided with a support ring 502, and the top of the support ring 502 is provided with two sets of push frames 503. Each set of push frames 503 has a wafer clip 11 inside. Each set of push frames 503 has a through block 504 installed on its top. A second electric push rod 505 is connected to the outer wall of each set of push frames 503. The base of the second electric push rod 505 is provided with a second fixing block 506. One side wall of the second fixing block 506 is installed on the inner wall of the first protective housing 1. The second protective shell 501 contains a second motor 507, and the second motor 507 is located in the... Above the protective housing 1, the output end of the second motor 507 is connected to a lifting rod 508. A rotating block 509 is provided on the outer wall of the lifting rod 508. The rotating block 509 has a rotating groove, and a connecting rod 510 is provided on the inner wall of the rotating groove. A fixed column 511 is provided above the rotating block 509. Several sets of scales 513 are arranged in a circular array on the top of the fixed column 511. A gap is provided between one side wall of the scales 513 and the lifting rod 508. The connecting rod 510 passes through the fixed column 511. The fixed column 511 has a moving groove, and a limit position is provided on the top of the connecting rod 510. The second moving block 512 is slidably connected above the fixed column 511. The second protective shell 501 mainly supports the pressing mechanism 5 and protects the internal structure. The push frame 503 has a circular groove for the output end of the second electric push rod 505 to pass through and push the internal structure of the push frame 503. The through block 504 is mainly used as a material falling channel. The lifting rod 508 is used to lift the wafer. The rotating block 509 has a rotating groove for the connecting rod 510 to move on its inner wall. The second moving block 512 is mainly used for placing the wafer.

[0030] Specifically, the rotating mechanism 4 includes a first motor 401, which is installed inside the first protective housing 1. The output end of the first motor 401 is connected to a lifting column 402. The outer wall of the lifting column 402 has a spiral lifting groove. A limiting block 403 is provided on one side of the outer wall of the lifting column 402. A limiting post 404 is provided through one side of the outer wall of the limiting block 403. A first fixing block 405 is provided on one side of the outer wall of the lifting column 402. Several sets of first electric push rods 406 are arranged in a circular array on the outer wall of the first fixing block 405. The output ends of the several sets of first electric push rods 406 are all equipped with support clamps 407. The spiral lifting groove on the outer wall of the lifting column 402 is mainly used for the lifting and rotation of the lifting column 402 itself. The limiting block 403 is mainly used to prevent the rotating mechanism 4 from shaking. The limiting post 404 is mainly used to ensure the stable operation of the spiral lifting groove. The support clamp 407 is mainly used to lift the packaged wafer.

[0031] Specifically, the transmission mechanism 3 includes a servo motor 301. The output end of the servo motor 301 is connected to a first threaded rod 302. The outer wall of the first threaded rod 302 is threadedly connected to a first moving block 303. A first protective shell 304 is installed on the outer wall of the first moving block 303. A storage box 305 is installed on the top of the first moving block 303. The storage box 305 is mainly used to store the packaged wafers.

[0032] Specifically, the top of the through block 504 is provided with an isolation plate 6, and above the isolation plate 6 are two sets of gripper mechanisms 7. The gripper mechanism 7 includes a third motor 701, the output end of the third motor 701 is driven to a second threaded rod 702, the outer wall of the second threaded rod 702 is threaded to a third moving block 703, the outer wall of the third moving block 703 is provided with a third protective shell 704, the bottom of the third moving block 703 is provided with a third electric push rod 705, the output end of the third electric push rod 705 is driven to a gripper 706, the gripper 706 is located above the through block 504. The isolation plate 6 is mainly used to isolate the structure between the first protective box 1 and the second protective box 2 to prevent collision and to prevent the gripper 706 from falling into the first protective box 1 when holding materials. The third electric push rod 705 is mainly used to drive the gripper 706 to hold the materials. The gripper 706 is mainly used for holding.

[0033] Specifically, a conveyor belt 8 is provided below one side of the gripper mechanism 7, a support column 9 is provided at the bottom of one side of the conveyor belt 8, the other side of the conveyor belt 8 is installed on the top of the isolation plate 6, a baffle 10 is provided on one side of the conveyor belt 8, a wafer clip pad 11 is provided on the conveyor belt 8, a first observation window 12 is provided on one side wall of the first protective box 1, a second observation window 13 is provided on one side of the second protective box 2, the support column 9 is mainly used to support the conveyor belt 8 to prevent bending and breakage during operation, and the isolation cover baffle 10 is mainly used to prevent the wafer clip pad 11 from falling off.

[0034] The working principle and usage process of this utility model are as follows: The conveyor belt 8 is started, and the wafer clip pad 11 is transported to the baffle 10 via the transmission belt. Then, the third motor 701 is started, and the third moving block 703 moves on the outer wall of the second threaded rod 702. When the third moving block 703 moves above the conveyor belt 8, the third electric push rod 705 is started. At this time, the gripper 706 can clamp the wafer clip pad 11. After clamping, the third motor 701 reverses, causing the third moving block 703 to move closer to the pressing mechanism 5. When the wafer clip pad 11 moves to the top of the through block 504, the gripper 706 opens, and the wafer clip pad 11 falls into the push frame 503 through the through block 504.

[0035] The user places the wafer into the top inner side of the second moving block 512 through the first observation window 12 of the connecting bracket, starts the second motor 507, and the lifting rod 508 rotates. The lifting rod 508 is fixedly connected to the rotating block 509. The lifting rod 508 drives the rotating block 509 to rotate, and then the connecting rod 510 moves on the inner wall of the rotating groove opened in the rotating block 509. The top of the second protective shell 501 is fixedly connected to the bottom of the second moving block 512. The second moving block 512 is installed on the top of the fixing post 511. Subsequently, the connecting rod 510 moves in the moving groove opened in the fixing post 511. The connecting rod 510 drives the second moving block 512 to move on the top of the fixing post 511, which can realize the fixed clamping of the wafer. The top surface of the wafer 11 is equipped with a scale 513. After the wafer is fixed, the user can observe and record the wafer size by using the scale. Then, the lifting rod 508 can be raised and lowered under the drive of the second motor 507. When it reaches a certain height, the lifting rod 508 stops rising, and the second electric push rod 505 is activated. The output end of the second electric push rod 505 passes through one side wall of the push frame 503 and pushes the wafer locking pad 11. The wafer locking pad 11 wraps around the wafer, so that the wafer will not be damaged in subsequent processes. Then, the first motor 401 is activated. The output end of the first motor 401 is connected to the lifting column 402. The outer wall of the lifting column 402 is provided with a spiral lifting mechanism. The spiral lifting groove has a limiting block 403 on one outer wall of the lifting column 402, and a limiting column 404 connected to the inner wall of the spiral lifting groove. The limiting block 403 is fixedly connected to the limiting column 404 and to the inner wall of the first protective box 1. The fixed connection between the limiting block 403 and the first protective box 1 prevents the rotating mechanism 4 from shaking during operation. The other side of the lifting column 402 is fixedly connected to the first fixed block 405. The rotation of the lifting column 402 drives the first fixed block 405 to rotate. The outer wall of the first fixed block 405 has a circular array of several sets of first electric push rods 406. The output end of the first electric push rod 406 is fixedly connected to the support clamp 407, and the first electric push rod 406 can extend and retract. The support clamp 407 extends to the outer wall of the lifting rod 508, lifting the wafer. Then, the first electric push rod 406 retracts, and the lifting column 402 rises and rotates to transport the packaged wafer into the storage box 305. When the storage box 305 is full, the servo motor 301 is activated, and the first moving block 303 slides on the outer wall of the first threaded rod 302. The storage box 305 is mounted on the top of the first moving block 303, which can transport the storage box 305 out of the first protective box 1. The user then replaces the storage box 305, and the servo motor 301 reverses, driving the first moving block 303 to drag the storage box 305 into the first protective box 1. This process is repeated.

[0036] It should be noted that in this paper, relational terms such as first and second are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations.

[0037] Although the present invention has been disclosed above with reference to preferred embodiments, it is not intended to limit the present invention. Those skilled in the art to which this invention pertains can make various modifications and refinements without departing from the spirit and scope of the present invention. Therefore, the scope of protection of this invention shall be determined by the claims.

Claims

1. A wafer positioning and sorting device with a frame, comprising a first protective housing (1), characterized in that: A second protective housing (2) is provided above the first protective housing (1). A conveying mechanism (3) is provided through one side of the first protective housing (1). A rotating mechanism (4) is provided on one side of the conveying mechanism (3), and there is a gap between the conveying mechanism (3) and the rotating mechanism (4). A pressing mechanism (5) is provided on one side of the rotating mechanism (4), and there is a gap between the rotating mechanism (4) and the pressing mechanism (5). The pressing mechanism (5) includes a second protective shell (501). The second protective shell (501) is installed... The second protective shell (501) is installed inside the first protective housing (1). A support ring (502) is provided on the top of the second protective shell (501). Two sets of push frames (503) are provided on the top of the support ring (502). Each set of push frames (503) has a wafer clip (11) inside. A through block (504) is installed on the top of each set of push frames (503). A second electric push rod (505) is connected to the outer wall of each set of push frames (503). The base of the second electric push rod (505) has a second fixing block (504). 6) One side wall of the second fixing block (506) is installed on the inner wall of the first protective housing (1). The second protective housing (501) is equipped with a second motor (507), and the second motor (507) is located above the first protective housing (1). The output end of the second motor (507) is connected to a lifting rod (508). The outer wall of the lifting rod (508) is equipped with a rotating block (509). The rotating block (509) has a rotating groove, and the inner wall of the rotating groove is equipped with a connecting rod (510). A fixed column (511) is provided above the rotating block (509). The top of the fixed column (511) has a circular array of several sets of scales (513). There is a gap between one side wall of the scales (513) and the lifting rod (508). The connecting rod (510) passes through the fixed column (511). The fixed column (511) has a moving groove. The top of the connecting rod (510) is provided with a limiting block and a second moving block (512). The second moving block (512) is slidably connected above the fixed column (511).

2. The wafer positioning and sorting device with a frame according to claim 1, characterized in that: The rotating mechanism (4) includes a first motor (401), which is installed inside the first protective housing (1). The output end of the first motor (401) is connected to a lifting column (402). The outer wall of the lifting column (402) is provided with a spiral lifting groove, and a limiting block (403) is provided on one side of the outer wall of the lifting column (402).

3. The wafer positioning and sorting device with a frame according to claim 2, characterized in that: A limiting post (404) is provided through one side of the outer wall of the limiting block (403), and a first fixing block (405) is provided on one side of the outer wall of the lifting column (402). The outer wall of the first fixing block (405) has a circular array of several sets of first electric push rods (406), and the output ends of the several sets of first electric push rods (406) are all equipped with support clamps (407).

4. The wafer positioning and sorting device with a frame according to claim 1, characterized in that: The conveying mechanism (3) includes a servo motor (301), the output end of which is connected to a first threaded rod (302), the outer wall of which is threadedly connected to a first moving block (303), a first protective shell (304) is installed on the outer wall of the first moving block (303), and a storage box (305) is installed on the top of the first moving block (303).

5. The wafer positioning and sorting device with a frame according to claim 1, characterized in that: The top of the through block (504) is provided with an isolation plate (6), and two sets of gripper mechanisms (7) are provided above the isolation plate (6). The gripper mechanism (7) includes a third motor (701). The output end of the third motor (701) is driven to a second threaded rod (702). The outer wall of the second threaded rod (702) is threaded to a third moving block (703). The outer wall of the third moving block (703) is provided with a third protective shell (704). The bottom of the third moving block (703) is provided with a third electric push rod (705). The output end of the third electric push rod (705) is driven to a gripper (706). The gripper (706) is located above the through block (504).

6. The wafer positioning and sorting device with a frame according to claim 5, characterized in that: A conveyor belt (8) is provided below one side of the gripper mechanism (7). A support column (9) is provided at the bottom of one side of the conveyor belt (8). The other side of the conveyor belt (8) is installed on the top of the isolation plate (6). A baffle (10) is provided on one side of the conveyor belt (8). A wafer clip pad (11) is provided on the conveyor belt (8). A first observation window (12) is opened on one side wall of the first protective box (1). A second observation window (13) is opened on one side of the second protective box (2).

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