Lifting device and equipment for wafer pre-alignment

Abstract

The utility model discloses a lifting device and equipment for wafer pre-alignment. The lifting device for wafer pre-alignment comprises a lifting platform, a connecting mechanism and a lifting driving assembly, the lifting platform is used for placing a wafer; the lifting platform is mounted on the connecting mechanism; the lifting driving assembly comprises a lifting vertical plate, a driver and a rotating structure, the driver is installed on the lifting vertical plate, the rotating structure is installed at the output end of the driver, the driver is used for driving the rotating structure to rotate, the connecting mechanism is limited to be vertically and slidably installed on the lifting vertical plate, and the output end of the rotating structure is connected to the connecting mechanism; when the driver drives the rotating structure to rotate, the output end of the rotating structure drives the connecting mechanism to ascend or descend. The lifting platform can be accurately positioned, the lifting speed can be accurately controlled, and the lifting driving assembly is simple in structure and convenient to install.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, and in particular to a lifting device and equipment for wafer pre-alignment. Background Technology

[0002] Wafer pre-alignment is a crucial step in semiconductor manufacturing. It refers to the preliminary positioning and adjustment of the wafer after it has been placed on the workpiece stage by a robotic arm. This process uses a series of technical means to ensure that the wafer is accurately and stably fixed in the predetermined position, providing a precise basis for subsequent inspection or processing steps.

[0003] Traditional wafer pre-alignment lifting devices mainly employ two methods: cylinder-driven lifting and gear-driven lifting. However, both methods have the following drawbacks:

[0004] 1. The lifting method driven by cylinders has low lifting accuracy, the lifting speed is uncontrollable due to changes in air pressure, and there are only two relatively accurate positions.

[0005] 2. Gear-driven lifting: The meshing motion of the gears causes slight vibrations in the wafer during lifting, and the gears and racks exhibit noticeable backlash and runout during rotation, affecting lifting accuracy. Furthermore, gear-driven lifting also suffers from drawbacks such as demanding installation requirements, complex structure, and high maintenance costs. Utility Model Content

[0006] The purpose of this utility model is to provide a lifting device and equipment for wafer pre-alignment, which can accurately position the lifting platform, control the lifting speed more precisely, and has a simple structure that is easy to install.

[0007] To achieve the above objectives, this utility model provides a lifting device for wafer pre-alignment, comprising:

[0008] A lifting platform is used to place wafers;

[0009] A connecting mechanism is provided, on which the lifting platform is mounted;

[0010] A lifting drive assembly includes a vertically arranged lifting plate, a driver, and a rotating structure. The driver is mounted on the lifting plate, and the rotating structure is fixedly mounted on the output end of the driver. The driver is used to drive the rotating structure to rotate. The connecting mechanism is restricted to be vertically slidably mounted on the lifting plate, and the output end of the rotating structure is connected to the connecting mechanism.

[0011] When the driver drives the rotating structure to rotate, the output end of the rotating structure drives the connecting mechanism to rise or fall.

[0012] Optionally, the driver is a stepper motor, which is fixedly mounted on the lifting vertical plate, and the rotating structure is fixedly mounted on the rotating shaft of the stepper motor.

[0013] Optionally, the lifting vertical plate is provided with a first mounting through hole, the rotating shaft of the stepper motor passes through the first mounting through hole to connect with the driving rotating block, the rotating structure is fixedly installed on the rotating shaft, and the rotating structure and the stepper motor are respectively located on opposite sides of the lifting vertical plate.

[0014] Optionally, the rotating structure includes a driving rotating block and a cam follower, the cam follower being fixedly mounted on the driving rotating block and offset from the rotation center of the driving rotating block;

[0015] The drive rotating block is installed at the output end of the driver, the connecting mechanism has a sliding groove extending in the horizontal direction, and the roller of the cam follower is slidably disposed in the sliding groove.

[0016] Optionally, it also includes a sensing and limiting mechanism, which includes a sensing plate, an upper limit sensor and a lower limit sensor. The upper limit sensor and the lower limit sensor are spaced apart and disposed on the same side wall of the lifting vertical plate. The sensing plate is fixedly installed on the side of the connecting mechanism.

[0017] When the lifting drive assembly drives the connecting mechanism to rise or fall, when the sensing plate rises to the upper limit sensor or falls to the lower limit sensor, the sensing plate triggers the upper limit sensor or the lower limit sensor, and the driver shuts down according to the trigger signal of the upper limit sensor or the lower limit sensor.

[0018] Optionally, the connecting mechanism includes a platform mounting block and a platform connecting plate. The platform connecting plate is restricted to be vertically slidably mounted on the lifting vertical plate. The output end of the rotating structure is connected to the platform connecting plate. The platform mounting block is fixedly mounted on the upper end of the platform connecting plate on the side opposite to the lifting vertical plate. The lifting platform is mounted on the platform mounting block.

[0019] Optionally, the lifting plate is provided with a vertical slide rail, and the connecting structure is provided with a slider, which is slidably mounted on the vertical slide rail.

[0020] To achieve the above objectives, this utility model also provides a device, including the lifting device as described above.

[0021] In this embodiment of the invention, the lifting device includes a lifting platform, a connecting mechanism, and a lifting drive assembly. The lifting drive assembly includes a lifting vertical plate, a driver, and a rotating structure. The lifting platform is fixed to the connecting mechanism, which is vertically slidably mounted on the lifting vertical plate. The driver is fixedly mounted on the lifting vertical plate, and the rotating structure is mounted on the output end of the driver. The driver drives the rotating structure to rotate, which in turn drives the connecting mechanism to move vertically, thereby lifting the lifting platform. This lifting device can be applied to wafer inspection or handling equipment. By driving the rotating structure to lift, precise positioning of the lifting platform can be achieved. The rotation of the rotating structure ultimately drives the lifting platform to lift, allowing for relatively precise control of the lifting speed. Furthermore, the lifting drive assembly has a simple structure, is easy to install, and helps reduce production costs. Attached Figure Description

[0022] Figure 1 This is a three-dimensional structural diagram of the lifting device in an embodiment of this utility model.

[0023] Figure 2 This is a three-dimensional structural diagram of the lifting drive assembly in an embodiment of this utility model.

[0024] Figure 3 This is a three-dimensional structural diagram of the driver and rotating structure in an embodiment of the present invention. Detailed Implementation

[0025] To explain in detail the technical content, structural features, and effects of this utility model, the following description is provided in conjunction with the embodiments and accompanying drawings.

[0026] To make the above-mentioned objects, features, and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a full understanding of this utility model. However, this utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this utility model. Therefore, this utility model is not limited to the specific embodiments disclosed below.

[0027] Please see Figures 1 to 3This utility model discloses a lifting device 1 for wafer pre-alignment, including a lifting platform 10, a connecting mechanism 20, and a lifting drive assembly 30. The lifting platform 10 is used to place the wafer and is mounted on the connecting mechanism 20. The lifting drive assembly 30 includes a vertically arranged lifting plate 31, a driver 32, and a rotating structure 33. The driver 32 is mounted on the lifting plate 31, and the rotating structure 33 is mounted on the output end of the driver 32. The driver 32 drives the rotating structure 33 to rotate. The connecting mechanism 20 is vertically slidably mounted on the lifting plate 31, and the output end of the rotating structure 33 is connected to the connecting mechanism 20. When the driver 32 drives the rotating structure 33 to rotate, the output end of the rotating structure 33 drives the connecting mechanism 20 to rise or fall.

[0028] In this embodiment of the invention, the lifting device 1 includes a lifting platform 10, a connecting mechanism 20, and a lifting drive assembly 30. The lifting drive assembly 30 includes a lifting vertical plate 31, a driver 32, and a rotating structure 33. The lifting platform 10 is fixed to the connecting mechanism 20, and the connecting mechanism 20 is vertically slidably mounted on the lifting vertical plate 31. The driver 32 is fixedly mounted on the lifting vertical plate 31, and the rotating structure 33 is mounted on the output end of the driver 32. The driver 32 drives the rotating structure 33 to rotate, which in turn drives the connecting mechanism 20 to move vertically, thereby lifting the lifting platform 10. This lifting device 1 can be applied to semiconductor equipment fields such as wafer inspection or handling. By driving the rotating structure 33 to lift and lower using the driver 32, precise positioning of the lifting platform 10 can be achieved. The rotation of the rotating structure 33 ultimately drives the lifting platform 10 to lift and lower, allowing for more precise control of the lifting speed. Furthermore, the lifting drive assembly 30 has a simple structure, is easy to install, and helps reduce production costs.

[0029] Please see Figure 2 and Figure 3 In some embodiments, the driver 32 is a stepper motor, which is fixedly mounted on the lifting vertical plate 31, and the rotating structure 33 is mounted on the rotating shaft of the stepper motor.

[0030] A power source can be provided by using a stepper motor. Of course, the driver 32 of this invention is not limited to a stepper motor.

[0031] The lifting vertical plate 31 has a first mounting through hole 311. The rotating shaft of the stepper motor passes through the first mounting through hole 311 to connect with the drive rotating block 331. The rotating structure 33 is fixedly installed on the rotating shaft. The rotating structure and the stepper motor are located on opposite sides of the lifting vertical plate 31.

[0032] Please see Figure 2 and Figure 3In some embodiments, the rotating structure 33 includes a driving rotating block 331 and a cam follower 332, the cam follower 332 being fixedly mounted on the driving rotating block 331 and offset from the rotation center of the driving rotating block 331.

[0033] The drive rotating block 331 is installed at the output end of the driver 32, and the connecting mechanism 20 has a sliding groove 21 extending in the horizontal direction. The roller of the cam follower 332 is slidably disposed in the sliding groove 21.

[0034] It is important to understand that when the stepper motor is running, the rotating shaft rotates, which drives the drive rotating block 331 to rotate. The cam follower 332, which is fixedly installed on the drive rotating block 331, will also rotate. When the cam follower 332 rotates, since the connecting mechanism 20 is restricted to being vertically slidably installed on the lifting vertical plate 31, and the cam follower 332 is offset from the rotation center of the drive rotating block 331, the vertical component of the cam follower 332 drives the connecting mechanism 20 to rise and fall through the sliding groove 21. By setting the horizontally extending sliding groove 21, the cam follower 332 can be given a horizontal degree of freedom, eliminating the adverse effects of the horizontal component of the force on the lifting device 1, making the lifting of the connecting mechanism 20 smoother, and helping to avoid vibration during the lifting process of the lifting platform 10.

[0035] Please see Figure 1 In some embodiments, the lifting device 1 further includes a sensing limit mechanism 40, which includes a sensing plate 41, an upper limit sensor 42 and a lower limit sensor 43. The upper limit sensor 42 and the lower limit sensor 43 are spaced apart on the same side wall of the lifting vertical plate 31, and the sensing plate 41 is installed on the side of the connecting mechanism 20.

[0036] When the lifting drive assembly 30 drives the connecting mechanism 20 to rise or fall, the highest point of the sensing plate 41 does not exceed the upper limit sensor 42, and the lowest point of the sensing plate 41 does not exceed the lower limit sensor 43. When the sensing plate 41 rises to the upper limit sensor 42 or falls to the lower limit sensor 43, the sensing plate 41 triggers the upper limit sensor 42 or the lower limit sensor 43, and the driver 32 shuts down according to the trigger signal of the upper limit sensor 42 or the lower limit sensor 43.

[0037] When the sensing element 41 approaches or contacts the upper limit sensor 42 or the lower limit sensor 43, the upper limit sensor 42 or the lower limit sensor 43 will detect the presence of the sensing element 41 and send a signal. After the device receives the signal, the device will immediately stop the stepper motor to prevent the lifting device 1 from continuing to rise or fall and exceeding the predetermined upper or lower limit position. By setting the sensing limit mechanism 40 and setting the sensing element 41 on the connecting mechanism 20, and using the upper limit sensor 42 and the lower limit sensor 43 to limit its upper and lower ends respectively, the lifting platform 10 can be accurately positioned and the lifting height can be controlled within a reasonable range.

[0038] In some embodiments, the connecting mechanism 20 includes a platform mounting block 22 and a platform connecting plate 23. The platform connecting plate 23 is restricted to be vertically slidably mounted on the lifting vertical plate 31. The output end of the rotating structure 33 is connected to the platform connecting plate 23. The platform mounting block 22 is fixedly mounted on the upper end of the platform connecting plate 23 on the side opposite to the lifting vertical plate 31. The lifting platform 10 is mounted on the platform mounting block 22.

[0039] In a specific example, the platform mounting block 22 has a second mounting through hole 221 that runs vertically through it, and the lifting platform 10 is rotatably mounted in the second mounting through hole 221 via a connecting shaft 11 connected to the lower side of the lifting platform 10.

[0040] Specifically, the sliding groove 21 is formed on the platform connecting plate 23.

[0041] In some embodiments, the lifting vertical plate 31 is provided with a vertical slide rail 34, and the connecting structure 20 is provided with a slider 35, which is slidably disposed on the vertical slide rail 34.

[0042] The connecting mechanism 20 is slidably mounted on the lifting vertical plate 31 via the vertical slide rail 34.

[0043] In a specific example, when the driver 32 drives the rotating structure 33 to rotate clockwise, the connecting mechanism 20 moves upward along the vertical slide rail 34; when the driver 32 drives the rotating structure 33 to rotate counterclockwise, the connecting mechanism 20 moves downward along the vertical slide rail 34.

[0044] This utility model also proposes a device, including the lifting device 1 as described above, which can be used for wafer inspection or wafer handling.

[0045] The above-disclosed examples are merely preferred embodiments of the present utility model, intended to facilitate understanding and implementation by those skilled in the art. They should not be construed as limiting the scope of the present utility model. Therefore, any equivalent variations made in accordance with the scope of the present utility model patent shall still fall within the scope of the present utility model.

Claims

1. A lifting device for wafer pre-alignment, characterized in that, include: A lifting platform is used to place wafers; A connecting mechanism is provided, on which the lifting platform is mounted; A lifting drive assembly includes a vertically arranged lifting plate, a driver, and a rotating structure. The driver is mounted on the lifting plate, and the rotating structure is fixedly mounted on the output end of the driver. The driver is used to drive the rotating structure to rotate. The connecting mechanism is restricted to be vertically slidably mounted on the lifting plate, and the output end of the rotating structure is connected to the connecting mechanism. When the driver drives the rotating structure to rotate, the output end of the rotating structure drives the connecting mechanism to rise or fall.

2. The lifting device as described in claim 1, characterized in that, The driver is a stepper motor, which is fixedly mounted on the lifting vertical plate, and the rotating structure is fixedly mounted on the rotating shaft of the stepper motor.

3. The lifting device as described in claim 2, characterized in that, The lifting vertical plate has a first mounting through hole, the rotating shaft of the stepper motor passes through the first mounting through hole, the rotating structure is fixedly installed on the rotating shaft, and the rotating structure and the stepper motor are respectively located on opposite sides of the lifting vertical plate.

4. The lifting device as described in claim 1, characterized in that, The rotating structure includes a driving rotating block and a cam follower. The cam follower is fixedly mounted on the driving rotating block and is offset from the rotation center of the driving rotating block. The drive rotating block is installed at the output end of the driver, the connecting mechanism has a sliding groove extending in the horizontal direction, and the roller of the cam follower is slidably disposed in the sliding groove.

5. The lifting device as described in claim 1, characterized in that, It also includes a sensing and limiting mechanism, which includes a sensing plate, an upper limit sensor and a lower limit sensor. The upper limit sensor and the lower limit sensor are spaced apart and arranged on the same side wall of the lifting vertical plate. The sensing plate is fixedly installed on the side of the connecting mechanism. When the lifting drive assembly drives the connecting mechanism to rise or fall, when the sensing plate rises to the upper limit sensor or falls to the lower limit sensor, the sensing plate triggers the upper limit sensor or the lower limit sensor, and the driver shuts down according to the trigger signal of the upper limit sensor or the lower limit sensor.

6. The lifting device as described in claim 1, characterized in that, The connecting mechanism includes a platform mounting block and a platform connecting plate. The platform connecting plate is restricted to be vertically slidably mounted on the lifting vertical plate. The output end of the rotating structure is connected to the platform connecting plate. The platform mounting block is fixedly mounted on the upper end of the platform connecting plate on the side opposite to the lifting vertical plate. The lifting platform is mounted on the platform mounting block.

7. The lifting device as described in claim 1, characterized in that, The lifting vertical plate is provided with a vertical slide rail, and the connecting mechanism is provided with a slider, which is slidably mounted on the vertical slide rail.

8. A device, characterized in that, Includes the lifting device as described in any one of claims 1 to 7.

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