Wafer grabbing device with buffering protection function

Abstract

The utility model belongs to the technical field of semiconductor equipment, and particularly relates to a wafer gripping device with buffer protection, which comprises an outer shell, a driving piece, a fixed finger and a movable finger assembly, and the movable finger assembly comprises an adapter base, a movable finger main body, a guide rod, a buffer spring and a limiting screw. According to the utility model, through the matching arrangement structure of the switching base, the movable finger main body, the guide rod, the buffer spring and the limiting screw, a certain buffer effect can be achieved when the movable finger main body linearly moves forwards and clamps and grabs a wafer; a part of force generated when a wafer is clamped and grabbed by the movable clamping protrusion on the movable finger body and the fixed clamping protrusion on the fixed finger is removed by the buffer spring, the possibility of edge breakage and fragment of the wafer in the clamping process is structurally reduced, the wafer is effectively protected, the action is accurate and stable, disassembly, assembly and maintenance are convenient, and the working efficiency is improved. And adjustment can be conveniently carried out according to different process requirements.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the technical field of semiconductor equipment, and concretely relates to a wafer grabbing device with buffer protection. BACKGROUND

[0002] At present, a common wafer grabbing device in semiconductor equipment generally comprises a shell, a driving member, a fixed finger and a movable finger, one end of the fixed finger is fixed to the shell, a fixed clamping protrusion is arranged on the other end of the fixed finger, a movable clamping protrusion is arranged on the movable finger, the driving member is located inside the shell, the driving end of the driving member is connected to the movable finger through a connecting rod and is used to drive the movable finger to extend or retract, and the fixed clamping protrusion of the fixed finger and the movable clamping protrusion of the movable finger are used together to clamp a wafer.

[0003] However, the fixed clamping protrusion of the fixed finger and the movable clamping protrusion of the movable finger of the wafer grabbing device may sometimes generate too large a clamping force due to the direct connection of the driving member to the movable finger through the connecting rod and the driving of the movable finger, and do not have a buffer protection effect, so that the wafer may be damaged and even broken into pieces. CONTENT OF THE UTILITY MODEL

[0004] In view of the above problems, the utility model aims to provide a wafer grabbing device with buffer protection.

[0005] The utility model aims to realize the following technical scheme:

[0006] A wafer grabbing device with buffer protection, comprising an outer shell, a driving member, a fixed finger, one end of the fixed finger is fixed on the outer shell, the other end of the fixed finger is provided with a fixed clamping protrusion, the driving member is located in the inner part of the outer shell, one end of the connecting rod is connected with the driving end of the driving member, the driving end of the driving member drives the connecting rod to move towards or away from the direction of the fixed clamping protrusion on the fixed finger, further comprising a movable finger assembly, the movable finger assembly comprises an adapter base, a movable finger body, a guide rod, a buffer spring and a limiting screw, the other end of the connecting rod is connected with the adapter base, the movable finger body is provided with a movable clamping protrusion, the movable clamping protrusion on the movable finger body and the fixed clamping protrusion on the fixed finger are used for clamping the wafer together, a plurality of guide rods are installed on the movable finger body, the axial center line of each guide rod is parallel to the moving direction of the connecting rod, a plurality of guide holes are formed on the side of the adapter base away from the outer shell, the other end of each guide rod is inserted into the corresponding guide hole, the outer side of each guide rod between the side of the adapter base away from the outer shell and the movable finger body is sleeved with the buffer spring, one end of each buffer spring abuts against the adapter base, the other end of each buffer spring abuts against the movable finger body, the limiting screw has a limiting head and a threaded shaft, the outer diameter of the limiting head is larger than that of the threaded shaft, the threaded shaft of the limiting screw passes through the movable finger body and is connected with the side of the adapter base away from the outer shell through threads, the axial center line of the limiting screw is parallel to the moving direction of the connecting rod, and the limiting head of the limiting screw is used for axially limiting the movable finger body.

[0007] One end of the fixed finger is fixed on the outer shell through the pressing plate A and a plurality of screws A, each screw A passes through the pressing plate A and one end of the fixed finger in sequence and is connected with the outer shell through threads.

[0008] A connecting rod slot is formed on the adapter base and matched with the other end of the connecting rod, a pressing plate B is installed on the adapter base through a plurality of screws B, and the other end of the connecting rod is inserted into the connecting rod slot on the adapter base and fixed by the pressing plate B.

[0009] One end of each guide rod is inserted into the inner part of the movable finger body, a screw C is arranged on the movable finger body corresponding to one end of each guide rod, and each screw C is used for abutting against and pressing one end of the corresponding guide rod.

[0010] The other end face of each of the guide rods is hemispherical.

[0011] The guide rods and the buffer springs are both in pairs, and the limiting screw is in one pair. The two guide rods are located on both sides of the axial center line of the limiting screw and are symmetrical to each other.

[0012] The movable finger body has a countersunk through hole for the threaded shaft of the limiting screw to pass through and for blocking the limiting head that accommodates the limiting screw.

[0013] The fixing and clamping protrusion is installed on the fixing finger by screw D.

[0014] The movable finger body and the movable clamping protrusion on the movable finger body are an integral structure.

[0015] The movable finger body has a limiting protrusion in the middle, and the fixed finger has a limiting through groove that cooperates with the limiting protrusion. The limiting protrusion passes through the limiting through groove on the fixed finger.

[0016] The advantages and positive effects of this utility model are as follows:

[0017] This invention utilizes a structure consisting of an adapter base, a movable finger body, a guide rod, a buffer spring, and a limiting screw. This structure provides a buffering effect when the movable finger body moves forward linearly and grips the wafer. The buffer spring dissipates some of the force exerted by the movable gripping protrusion on the movable finger body and the fixed gripping protrusion on the fixed finger when gripping the wafer. Structurally, this reduces the possibility of wafer chipping or breakage during gripping, effectively protecting the wafer. Furthermore, the operation is accurate and stable, and disassembly and maintenance are convenient, allowing for adjustments to suit different process requirements. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0019] Figure 2 This is one of the schematic diagrams showing the arrangement structure of the fixed finger and movable finger assembly of this utility model;

[0020] Figure 3 This is the second schematic diagram of the structure of the fixed finger and movable finger assembly of this utility model;

[0021] Figure 4 This is the third schematic diagram of the structure of the fixed finger and movable finger assembly of this utility model;

[0022] Figure 5 This is one of the schematic diagrams showing the arrangement structure of the movable finger component of this utility model;

[0023] Figure 6 This is the second schematic diagram of the structure of the movable finger component of this utility model;

[0024] Figure 7 This is the third schematic diagram of the structure of the movable finger component of this utility model;

[0025] Figure 8 This is the fourth schematic diagram of the structure of the movable finger component of this utility model.

[0026] In the diagram: 1 is the outer shell, 2 is the fixed finger, 201 is the limiting through groove, 3 is the fixed clamping protrusion, 4 is the connecting rod, 5 is the adapter base, 501 is the guide hole, 502 is the connecting rod slot, 6 is the movable finger body, 601 is the movable clamping protrusion, 602 is the countersunk through hole, 603 is the limiting protrusion, 7 is the guide rod, 8 is the buffer spring, 9 is the limiting screw, 901 is the limiting head, 902 is the threaded shaft, 10 is the pressure plate A, 11 is the pressure plate B, 12 is the screw C, and 13 is the screw D. Detailed Implementation

[0027] The following is in conjunction with the appendix Figures 1-8 The present invention will be described in further detail.

[0028] A wafer gripper with buffer protection, such as Figures 1-8 As shown, the device includes a housing 1, a drive unit, and a fixed finger 2. One end of the fixed finger 2 is fixed to the housing 1, and the other end of the fixed finger 2 has a fixing and clamping protrusion 3. The drive unit is located inside the housing, and the drive end of the drive unit is connected to one end of a connecting rod 4 via a floating connector. The drive end of the drive unit drives the connecting rod 4 to move closer to or away from the fixing and clamping protrusion 3 on the fixed finger 2. In this embodiment, the structure of the housing 1 itself adopts existing technology, and the drive unit can be a commercially available linear cylinder product, with its operation controlled by an external controller.

[0029] The wafer gripping device with buffer protection proposed in this utility model also includes a movable finger assembly. The movable finger assembly includes an adapter base 5, a movable finger body 6, a guide rod 7, a buffer spring 8, and a limiting screw 9. The adapter base 5 is connected to the other end of the connecting rod 4. The movable finger body 6 is provided with a movable clamping protrusion 601. The movable clamping protrusion 601 on the movable finger body 6 and the fixed clamping protrusion 3 on the fixed finger 2 are used together to clamp the wafer. Two guide rods 7 are installed on one end of the movable finger body 6. The axial center line of each guide rod 7 is parallel to the moving direction of the connecting rod 4. Two guide holes 501 are opened on the side of the adapter base 5 away from the outer shell 1. The other end of each guide rod 7 is inserted into the corresponding guide hole 501. A buffer spring 8 is sleeved on the outer side of each guide rod 7 between the side of the adapter base 5 away from the outer shell 1 and the movable finger body 6. One end of each buffer spring 8 abuts against the adapter base 5, and the other end of each buffer spring 8 abuts against the movable finger body 6. One limiting screw 9 is provided. The limiting screw 9 has a limiting head 901 and a threaded shaft 902. The outer diameter of the limiting head 901 of the limiting screw 9 is larger than the outer diameter of the threaded shaft 902. The threaded shaft 902 of the limiting screw 9 passes through the movable finger body 6 and is threadedly connected to the side of the adapter base 5 away from the outer shell 1. The axial center line of the limiting screw 9 is parallel to the moving direction of the connecting rod 4. The limiting head 901 of the limiting screw 9 is used to axially limit the movable finger body 6, ensuring that the movable finger body 6 can move together with the adapter base 5. Two guide rods 7 are located on both sides of the axial center line of the limiting screw 9 and are symmetrical to each other, which can make the movable finger body 6 bear force evenly. The structure is relatively simple.

[0030] Specifically, such as Figure 2 and Figure 3 As shown, in this embodiment, one end of the fixed finger 2 is fixed to the outer shell 1 by a pressure plate A10 and four screws A. Each screw A passes through the pressure plate A10 and one end of the fixed finger 2 in sequence and is connected to the outer shell 1 by threads, which facilitates the assembly and disassembly of the fixed finger 2.

[0031] Specifically, such as Figure 4 and Figure 8 As shown, in this embodiment, the adapter base 5 is provided with a connecting rod slot 502 that fits with the other end of the connecting rod 4. A pressure plate B11 is installed on the adapter base 5 by a number of screws B. Each screw B passes through the pressure plate B11 and is connected to the adapter base 5 by a thread. The other end of the connecting rod 4 is inserted into the connecting rod slot 502 on the adapter base 5 and is pressed and fixed by the pressure plate B11.

[0032] Specifically, such as Figure 5 , Figure 6 and Figure 7As shown, in this embodiment, one end of each guide rod 7 is inserted into the interior of the movable finger body 6. A screw C12 is threaded onto the movable finger body 6 at a position corresponding to one end of each guide rod 7. The axial center line of each screw C12 is perpendicular to the axial center line of the corresponding guide rod 7. Each screw C12 is used to press against and tighten one end of the corresponding guide rod 7, facilitating the assembly and disassembly of the guide rod 7 and the movable finger body 6. The other end of each guide rod 7 has a hemispherical end face, allowing the guide rod 7 to be smoothly inserted into the corresponding guide hole 501.

[0033] Specifically, such as Figure 6 and Figure 8 As shown, in this embodiment, the movable finger body 6 is provided with a countersunk through hole 602 for the threaded shaft portion 902 of the limiting screw 9 to pass through and block the limiting head 901 that accommodates the limiting screw 9, so as to facilitate the accurate installation of the limiting screw 9.

[0034] Specifically, such as Figure 4 As shown, in this embodiment, the fixing and clamping protrusion 3 is installed on the fixing finger 2 by screw D13, which facilitates the replacement of the appropriate fixing and clamping protrusion 3 according to different process requirements without removing the fixing finger 2. In this embodiment, the movable finger body 6 and the movable clamping protrusion 601 on the movable finger body 6 are an integral structure, which is convenient for manufacturing. The movable finger body 6 and the fixing and clamping protrusion 3 can be removed and replaced separately to suit different process requirements.

[0035] Specifically, such as Figure 2 and Figure 3 As shown, in this embodiment, the movable finger body 6 has a limiting protrusion 603 protruding from the middle, and the fixed finger 2 has a limiting through groove 201 that cooperates with the limiting protrusion 603. The limiting protrusion 603 passes through the limiting through groove 201 on the fixed finger 2. When the movable finger body 6 moves to a predetermined limit position, the limiting protrusion 603 can be blocked by the limiting through groove 201 to play a limiting role, effectively preventing the movable finger body 6 from moving excessively or even damaging the wafer it is holding.

[0036] Working principle:

[0037] In use, the drive unit inside the outer casing 1 drives the connecting rod 4 and the movable finger assembly to move forward in a straight line. The buffer spring 8 installed outside the guide rod 7 plays a certain buffering role when the movable finger body 6 moves forward in a straight line and clamps and grasps the wafer. This reduces the force exerted by the movable clamping protrusion 601 on the movable finger body 6 and the fixed clamping protrusion 3 on the fixed finger 2 on the wafer when they clamp and grasp it. Structurally, this reduces the possibility of the wafer chipping during clamping and effectively protects the wafer. The cooperation between the guide rod 7 and the adapter base 5 with the guide hole 501 also allows the movable finger body 6 to move accurately along the moving direction of the connecting rod 4.

Claims

1. A wafer gripping device with buffer protection, comprising a housing (1), a driving member, and a fixing finger (2), one end of the fixing finger (2) being fixed to the housing (1), and the other end of the fixing finger (2) having a fixing clamping protrusion (3), the driving member being located inside the housing, the driving end of the driving member being connected to one end of a connecting rod (4), the driving end of the driving member driving the connecting rod (4) to move closer to or away from the fixing clamping protrusion (3) on the fixing finger (2) in the direction of the fixing clamping protrusion (3), characterized in that: It also includes a movable finger assembly, which includes an adapter base (5), a movable finger body (6), a guide rod (7), a buffer spring (8), and a limiting screw (9). The adapter base (5) is connected to the other end of the connecting rod (4). The movable finger body (6) is provided with a movable clamping protrusion (601). The movable clamping protrusion (601) on the movable finger body (6) and the fixed clamping protrusion (3) on the fixed finger (2) are used together to clamp the wafer. One end of several guide rods (7) is installed on the movable finger body (6). The axial center line of each guide rod (7) is parallel to the moving direction of the connecting rod (4). Several guide holes (501) are opened on the side of the adapter base (5) away from the outer shell (1). The other end of each guide rod (7) is inserted into a corresponding guide hole (501). The side of the adapter base (5) away from the outer shell (1) is provided with several guide holes (501). The outer side of each guide rod (7) between one side of the movable finger body (6) and the outer side of each guide rod (7) is fitted with a buffer spring (8). One end of each buffer spring (8) abuts against the adapter base (5), and the other end of each buffer spring (8) abuts against the movable finger body (6). The limiting screw (9) has a limiting head (901) and a threaded shaft (902). The outer diameter of the limiting head (901) of the limiting screw (9) is larger than the outer diameter of the threaded shaft (902) of the limiting screw (9). The threaded shaft (902) of the limiting screw (9) passes through the movable finger body (6) and is threadedly connected to the side of the adapter base (5) away from the outer shell (1). The axial center line of the limiting screw (9) is parallel to the moving direction of the connecting rod (4). The limiting head (901) of the limiting screw (9) is used to axially limit the movable finger body (6).

2. The wafer gripping device with buffer protection according to claim 1, characterized in that: One end of the fixed finger (2) is fixed to the outer shell (1) by a pressure plate A (10) and a number of screws A. Each screw A passes through the pressure plate A (10) and one end of the fixed finger (2) in sequence and is connected to the outer shell (1) by threads.

3. The wafer gripping device with buffer protection according to claim 1, characterized in that: The adapter base (5) has a connecting rod slot (502) that matches the other end of the connecting rod (4). A pressure plate B (11) is installed on the adapter base (5) by a number of screws B. The other end of the connecting rod (4) is inserted into the connecting rod slot (502) on the adapter base (5) and then pressed and fixed by the pressure plate B (11).

4. A wafer gripping device with buffer protection according to claim 1, characterized in that: One end of each of the guide rods (7) is inserted into the interior of the movable finger body (6). The movable finger body (6) is provided with screws C (12) at the corresponding positions of one end of each of the guide rods (7). Each screw C (12) is used to press against and tighten one end of the corresponding guide rod (7).

5. A wafer gripping device with buffer protection according to claim 1, characterized in that: The other end face of each of the guide rods (7) is hemispherical.

6. A wafer gripping device with buffer protection according to claim 1, characterized in that: The guide rod (7) and the buffer spring (8) are both two in number, and the limiting screw (9) is one in number. The two guide rods (7) are located on both sides of the axial center line of the limiting screw (9) and are symmetrical to each other.

7. A wafer gripping device with buffer protection according to claim 1, characterized in that: The movable finger body (6) has a countersunk through hole (602) for the threaded shaft portion (902) of the limiting screw (9) to pass through and block the limiting head (901) that accommodates the limiting screw (9).

8. A wafer gripping device with buffer protection according to claim 1, characterized in that: The fixing clamping protrusion (3) is installed on the fixing finger (2) by screw D (13).

9. A wafer gripping device with buffer protection according to claim 1, characterized in that: The movable finger body (6) and the movable clamping protrusion (601) on the movable finger body (6) are an integral structure.

10. A wafer gripping device with buffer protection according to claim 1, characterized in that: The movable finger body (6) has a limiting protrusion (603) protruding in the middle, and the fixed finger (2) has a limiting through groove (201) that cooperates with the limiting protrusion (603). The limiting protrusion (603) passes through the limiting through groove (201) on the fixed finger (2).

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