Dropping device of spin coater

Abstract

The utility model discloses a spin coater liquid dropping device which comprises a liquid dropping assembly and a liquid supply assembly which are arranged up and down in the vertical direction perpendicular to the horizontal plane, the liquid dropping assembly is configured to be capable of moving in at least two directions, the liquid dropping assembly moves to the position over a spin coater in the first direction, and the liquid supply assembly supplies liquid to the spin coater in the second direction. The liquid supply assembly moves towards the direction close to the liquid supply assembly in the second direction, the liquid supply assembly comprises a support assembly and a positioning assembly, the support assembly comprises a frame body and a support assembled on the frame body, the frame body is provided with a gear part, the support is correspondingly provided with a buckling part, the buckling part abuts against the gear part, and the frame body is further provided with a positioning hole; the buckling part is positioned between the gear part and the positioning hole; the positioning assembly can be inserted and exposed on the outer side of the positioning hole in an activatable mode, and the positioning assembly and the gear part jointly extrude and fix the buckling part. Compared with the prior art, the bracket assembly can flexibly position the bracket on the bracket assembly and is also convenient to disassemble.

Description

TECHNICAL FIELD

[0001] The utility model relates to a spin coater droplet device and belongs to the field of film manufacturing device. BACKGROUND

[0002] In the existing film manufacturing process, with the gradual increase of customer demand, the situation of droplet spin coating of different solutions usually occurs, and the specifications of the corresponding suction nozzles are also different, therefore, a plurality of different supports are usually required on the support for placing the suction nozzles to meet the demand of suction nozzles of different specifications. The existing suction nozzle support is usually a single specification in one piece, which is extremely inconvenient to disassemble, replace and clean.

[0003] Therefore, it is necessary to improve the existing spin coater droplet device to solve the above problems. SUMMARY

[0004] To solve the above technical problems, the utility model provides a spin coater droplet device, which can flexibly realize the positioning of the support on the support assembly, and is convenient to disassemble, replace and clean.

[0005] The technical scheme of the utility model is:

[0006] A spin coater droplet device, comprising a droplet assembly and a liquid supply assembly arranged vertically in the vertical direction perpendicular to the horizontal plane, the droplet assembly is configured to be movable in at least two directions, the droplet assembly is moved to the upper side of the spin coater in the first direction and is moved towards the liquid supply assembly in the second direction, the liquid supply assembly comprises:

[0007] A support assembly comprising a frame and a support assembled on the frame, the frame is provided with a blocking part, the support is provided with a buckling part corresponding to the blocking part, the buckling part and the blocking part abut each other, and the frame is further provided with a positioning hole, and the buckling part is located between the blocking part and the positioning hole.

[0008] A positioning assembly which can be activated to insert and expose outside the positioning hole and extrude and fix the buckling part together with the blocking part.

[0009] As a further improvement of the utility model, the positioning assembly comprises a positioning piece and a push-pull piece, the push-pull piece comprises a push-pull part and an abutting part abutting against the positioning piece, the abutting part is provided with a slope surface extending towards the positioning piece, one end of the positioning piece abuts against the slope surface and can move along the slope surface under the pulling of the push-pull part, and the other end of the positioning piece is inserted and exposed outside the positioning hole under the pulling of the push-pull part.

[0010] As a further improvement of the utility model, the positioning member comprises a positioning rod and an assembly part for assembling the positioning rod, and a sliding part adapted to the slope surface is arranged on the side of the assembly part away from the positioning rod.

[0011] As a further improvement of the utility model, the liquid supply assembly further comprises a blocking member connected with the support assembly, the blocking member extends towards the assembly part and comprises a through hole penetrating the positioning hole, and the end of the positioning rod inserted into the positioning hole is at least partially located in the through hole.

[0012] As a further improvement of the utility model, the liquid supply assembly further comprises a guide rail assembly and a bearing member assembled on the guide rail assembly, and the support assembly is assembled on the bearing member and can move along the extension direction of the guide rail assembly together with the bearing member.

[0013] As a further improvement of the utility model, the support assembly comprises a first support and a second support, the positioning assembly is assembled on the first support to position the first support through the positioning hole on the first support, and the drop liquid assembly can move to the positions opposite to the first support and the second support respectively in the moving direction of the drop liquid assembly.

[0014] As a further improvement of the utility model, the first support is used for containing a liquid suction member, the second support is used for containing a solution bottle, and the drop liquid assembly can move to the position opposite to the liquid suction member to be connected with the liquid suction member and suck the solution in the solution bottle through the liquid suction member in the moving direction of the drop liquid assembly.

[0015] As a further improvement of the utility model, the guide rail assembly comprises two guide rails arranged in parallel, the two ends of the bearing member are arranged on the two guide rails respectively, the liquid supply assembly further comprises a recycling box assembled on the bearing member, and the support assembly and the recycling box are located at the two ends of the bearing member respectively.

[0016] As a further improvement of the utility model, the bearing member is provided with a first baffle and a second baffle arranged oppositely, the recycling box is assembled between the first baffle and the second baffle, one side of the first baffle and / or the second baffle is provided with a locking member, and the locking member is configured to enable the first baffle and / or the second baffle to extrude and fix the recycling box.

[0017] As a further improvement of the utility model, the extension direction of the guide rail assembly is different from the first direction and the second direction, and the support assembly can move along the extension direction of the guide rail assembly to the moving path of the drop liquid assembly in the first direction or the second direction together with the bearing member.

[0018] The beneficial technical effects of the utility model are: through setting the blocking part on the frame body of the support assembly, setting the buckling part on the support correspondingly, making the buckling part and the blocking part abut each other, and setting the positioning hole on the frame body, making the buckling part be located between the blocking part and the positioning hole, then when the positioning assembly can be activated to insert and expose outside the positioning hole, the buckling part can be extruded and fixed together with the blocking part, the positioning of the support on the support assembly can be realized flexibly, and the support assembly is convenient to disassemble, replace and clean. BRIEF DESCRIPTION OF DRAWINGS

[0019] Figure 1 It is a structure schematic view of a spin coater liquid drop device according to the preferred embodiment of the utility model.

[0020] Figure 2 It is Figure 1 A structure schematic view of a liquid supply assembly.

[0021] Figure 3 It is Figure 2 An enlarged view of the dotted circle in the figure.

[0022] Figure 4 It is Figure 2 A structure schematic view of a first support and a positioning assembly.

[0023] Figure 5 It is Figure 2 A structure schematic view of a bearing part and a recovery box. DETAILED DESCRIPTION

[0024] In order to make the technical means of the utility model more clearly understood, and can be implemented according to the content of the specification, the specific embodiments of the utility model are further described in detail below, the following examples are used to illustrate the utility model, but not to limit the scope of the utility model.

[0025] Please refer to Figures 1 to 5 The utility model provides a kind of spin coater liquid drop device 100, including liquid drop assembly 1 and liquid supply assembly 2.The liquid drop assembly 1 is configured as at least can be driven module driven, to move in two directions, the liquid drop assembly 1 moves to the positive upper side of the spin coater 3 along first direction, moves along second direction towards the direction close to the liquid supply assembly 2.That is, the liquid drop assembly 1 is supplied with liquid by the liquid supply assembly 2, to spin coater 3 liquid drop, then realize subsequent spin coating process.In the embodiment, the first direction is horizontal direction parallel to horizontal plane, and second direction is vertical direction perpendicular to the horizontal plane.

[0026] Specifically, the liquid supply assembly 2 comprises a support assembly 21 and a positioning assembly 22, the support assembly 21 comprises a frame 211 and a support 212 assembled on the frame 211, and the positioning assembly 22 can activate to fix the support 212 on the frame 211. In other words, when the positioning assembly 22 is activated, the support 212 can be fixed, and when the positioning assembly 22 is deactivated, the support 212 can be disassembled for replacement. In this way, the support 212 provided with different receiving holes 2120 can be replaced, improving the practicability and compatibility.

[0027] Preferably, the frame 211 is provided with a blocking portion 213, the support 212 is correspondingly provided with a buckling portion 2121, the buckling portion 2121 abuts against the blocking portion 213, the frame 211 is further provided with a positioning hole 214, and the buckling portion 2121 is located between the blocking portion 213 and the positioning hole 214. The positioning assembly 22 can be activated to be inserted and exposed outside the positioning hole 214, and press and fix the buckling portion 2121 together with the blocking portion 213. In this way, the buckling portion 2121 is clamped by the blocking portion 213 and the positioning assembly 22, and then the support is fixed on the frame 211.

[0028] In the embodiment, the positioning assembly 22 comprises a positioning piece 221 and a push-pull piece 222, the push-pull piece 222 comprises a push-pull portion 2221 and an abutting portion 2222 abutting against the positioning piece 221, the abutting portion 2222 is provided with a slope surface 2220 extending towards the positioning piece 221, one end of the positioning piece 221 abuts against the slope surface 2220 and can move along the slope surface 2220 under the pulling of the push-pull portion 2221, and the other end of the positioning piece 221 is inserted and exposed outside the positioning hole 214 under the pulling of the push-pull portion 2221. That is, the vertical movement of the positioning piece 221 is driven by the horizontal movement of the push-pull portion 2221.

[0029] Preferably, the slope surface 2220 is a wedge protruding towards the positioning piece 221, when the push-pull portion 2221 is pulled, the abutting portion 2222 is driven to move the slope surface 2220 against the positioning piece 221, so that the positioning piece 221 is lifted or dropped, when the positioning piece 221 is lifted, one end of the positioning piece 221 is inserted and exposed outside the positioning hole 214 to clamp the buckling portion 2121 together with the blocking portion 213, and then the positioning of the support 212 is completed, and when the positioning piece 221 is dropped, the positioning piece 221 is separated from the positioning hole 214, so that the support 212 can be easily disassembled and replaced.

[0030] Preferably, the positioning member 221 comprises a positioning rod 2211 and an assembling portion 2212 for assembling the positioning rod 2211, and a sliding portion 2210 adapted to the slope surface 2220 is arranged on the side of the assembling portion 2212 away from the positioning rod 2211. The sliding portion 2210 is preferably a pulley, and can also be an inclined surface adapted to the shape of the slope surface 2220, as long as the sliding portion 2210 can slide more smoothly and the sliding resistance is reduced.

[0031] The liquid supply assembly 2 further comprises a stop member 215 connected to the support assembly 21, the stop member 215 extends towards the assembling portion 2212 and comprises a through hole penetrating the positioning hole 214, and the end of the positioning rod 2211 inserted into the positioning hole 214 is at least partially located in the through hole. In other words, in order to avoid the positioning rod 2211 tilting after being separated from the positioning hole 214 and failing to re-enter the positioning hole 214 when being lifted again, the stop member 215 is arranged to ensure the position of the positioning rod 2211, so that the positioning rod 2211 always moves towards the positioning hole 214 in the moving direction.

[0032] The liquid supply assembly 2 further comprises a guide rail assembly 23 and a carrier 24 assembled on the guide rail assembly 23, and the support assembly 21 is assembled on the carrier 24 and can move along the extension direction of the guide rail assembly 23 together with the carrier 24. The extension direction of the guide rail assembly 23 can be the same as the first direction, so that the liquid drop assembly 1 can be aligned with the liquid supply assembly 2 and the spin coater 3 in sequence during the movement in the first direction, so that the structure is more compact. The carrier 24 is preferably a carrier plate, and the guide rail assembly 23 is driven by a servo motor.

[0033] Of course, the extension direction of the guide rail assembly 23 can also be different from the first direction and the second direction, and the support assembly 21 can move along the extension direction of the guide rail assembly to the moving path of the liquid drop assembly 1 in the first direction or the second direction together with the carrier 24. In this way, the support assembly 21 can be arranged close to the loading port to facilitate placing the solution on the support assembly 21.

[0034] On the contrary, the liquid drop assembly 1 can also have a third direction different from the first direction and the second direction, and the liquid drop assembly 1 moves to the directly above the liquid supply assembly 2 along the third direction or moves to the directly above the liquid supply assembly 2 along the third direction and then moves along the first direction.

[0035] In the embodiment, the support assembly 21 comprises a first support 25 and a second support 26, the positioning assembly 22 is assembled to the first support 25 to position the first support 25 through the positioning hole 214 on the first support 25, and the drop assembly 1 can be moved to the first support 25 and the second support 26 in the moving direction of the drop assembly 1.

[0036] The first support 25 is used to accommodate a liquid suction member, and the second support 26 is used to accommodate a solution bottle, and the drop assembly 1 can be moved to the liquid suction member in the moving direction of the drop assembly 1 to be connected with the liquid suction member and to suck the solution in the solution bottle through the liquid suction member. The liquid suction member is preferably a suction nozzle, because different solutions can be placed in the same bottle, so the second support 26 does not need to be provided with the positioning assembly 22, and the liquid suction member needs to be adapted to different specifications according to different solutions and production needs. Therefore, the support 212 provided with a single accommodating hole 2120 cannot meet the use requirements, and even if the support 212 is provided with multiple accommodating holes 2120 adapted to different specifications, the current support 212 is mostly integrated and cannot be disassembled, replaced and cleaned. Therefore, by providing the positioning assembly 22, flexible disassembly can be ensured.

[0037] The guide rail assembly 23 comprises two parallel guide rails, and the two ends of the carrier 24 are respectively arranged on the two guide rails. The liquid supply assembly 2 further comprises a recycling box 27 assembled to the carrier 24, and the support assembly 21 and the recycling box 27 are respectively located at the two ends of the carrier 24. In this way, the balance of the two ends of the carrier 24 can be ensured. Preferably, the recycling box 27 is used to collect the liquid suction member after use, that is, the drop assembly 1 can be moved to the recycling box 27 after the drop on the spin coater 3 to disassemble the liquid suction member and recycle the liquid suction member into the recycling box 27.

[0038] In the embodiment, the first support 25 is located between the recycling box 27 and the second support 26, so that the first support 25, the second support 26 and the spin coater 3 are arranged in sequence, so that the drop assembly 1 can complete the assembly of the liquid suction member, the suction of the solution and the drop in one direction. In other embodiments, other layouts can also be adopted, which are not limited.

[0039] The bearing 24 is provided with a first baffle 241 and a second baffle 242 arranged oppositely, the recycling box 27 is arranged between the first baffle 241 and the second baffle 242, one side of the first baffle 241 and / or the second baffle 242 is provided with a locking piece 243, and the locking piece 243 is configured to enable the first baffle 241 and / or the second baffle 242 to press and fix the recycling box 27.

[0040] Preferably, one side of the first baffle 241 and / or the second baffle 242 is provided with a connected locking plate 244, the locking plate 244 is provided with a fixing hole 240, the locking piece 243 comprises a handle 2431, a screw rod 2432 and a nut 2433, the screw rod 2432 and the nut 2433 can be tightened by rotating the handle 2431, so as to give the locking plate 244 a tightening force, so as to press the recycling box 27 towards the corresponding baffle.

[0041] In summary, the liquid dripping device 100 of the spin coater can realize flexible positioning of the support 212 on the support assembly 21 by setting the stop portion 213 on the frame 211 of the support assembly 21, correspondingly setting the buckling portion 2121 on the support 212, making the buckling portion 2121 abut against the stop portion 213, and setting the positioning hole 214 on the frame 211, making the buckling portion 2121 located between the stop portion 213 and the positioning hole 214, and then being capable of being pressed and fixed together with the stop portion 213 when the positioning assembly 22 is activated to be inserted and exposed outside the positioning hole 214, and being capable of being flexibly positioned, disassembled, replaced and cleaned.

[0042] The above is only the preferred embodiment of the utility model, and is not used for limiting the utility model, and it should be pointed out that, for ordinary skilled persons in the technical field, several improvements and modifications can be made without departing from the technical principle of the utility model, and the improvements and modifications should be regarded as the protection range of the utility model.

Claims

1. A spin coater droplet device, characterized by, The liquid drop assembly (1) and the liquid supply assembly (2) are arranged in a vertical direction perpendicular to a horizontal plane, the liquid drop assembly (1) is configured to be movable in at least two directions, the liquid drop assembly (1) is movable in a first direction to a position directly above the spin coater (3) and is movable in a second direction towards the liquid supply assembly (2), and the liquid supply assembly (2) comprises: The bracket assembly (21) comprises a frame (211) and a bracket (212) mounted on the frame (211), the frame (211) is provided with a blocking portion (213), the bracket (212) is provided with a buckling portion (2121) corresponding to the blocking portion (213), the buckling portion (2121) and the blocking portion (213) abut each other, and the frame (211) is further provided with a positioning hole (214), and the buckling portion (2121) is located between the blocking portion (213) and the positioning hole (214); The positioning assembly (22) is activatable and is inserted and exposed outside the positioning hole (214) and is in common extrusion with the blocking portion (213) and fixes the buckling portion (2121).

2. The spin coater droplet device of claim 1, wherein, The positioning assembly (22) comprises a positioning member (221) and a push-pull member (222), the push-pull member (222) comprises a push-pull portion (2222) and an abutting portion abutting against the positioning member (221), the abutting portion is provided with a slope surface (2220) extending towards the positioning member (221), one end of the positioning member (221) abuts against the slope surface (2220) and is movable along the slope surface (2220) under the pulling of the push-pull portion (2222), and the other end of the positioning member (221) is inserted and exposed outside the positioning hole (214) under the pulling of the push-pull portion (2222).

3. The spin coater droplet device of claim 2, wherein, The positioning member (221) comprises a positioning rod (2111) and a mounting portion (2112) for mounting the positioning rod (2111), and the side of the mounting portion (2112) away from the positioning rod (2111) is provided with a sliding portion (2210) adapted to the slope surface (2220).

4. The spin coater droplet device of claim 3, wherein, The liquid supply assembly (2) further comprises a blocking member (215) connected with the bracket assembly (21), the blocking member (215) extends towards the mounting portion (2112) and comprises a through hole penetrating the positioning hole (214), and the end of the positioning rod (2111) inserted into the positioning hole (214) is at least partially located in the through hole.

5. The spin-cher apparatus of claim 1, wherein, The liquid supply assembly (2) further comprises a guide rail assembly (23) and a bearing member (24) mounted on the guide rail assembly (23), and the bracket assembly (21) is mounted on the bearing member (24) and is movable along the extension direction of the guide rail assembly (23) together with the bearing member (24).

6. The spin coater droplet device of claim 5, wherein, The support assembly (21) comprises a first support (25) and a second support (26), the positioning assembly (22) is assembled to the first support (25) to position the first support (25) through the positioning hole (214) on the first support (25), and the drop assembly (1) can be moved to the first support (25) and the second support (26) in the moving direction of the drop assembly (1) respectively.

7. The spin-cher spin-coater droplet device of claim 6, wherein, The first support (25) is used for containing a liquid suction member, and the second support (26) is used for containing a solution bottle, and the drop assembly (1) can be moved to the liquid suction member to be connected with the liquid suction member and suck the solution in the solution bottle through the liquid suction member in the moving direction of the drop assembly (1).

8. The spin-cher spin-coater droplet device of claim 5, wherein, The guide rail assembly (23) comprises two parallel guide rails, and the two ends of the carrier (24) are arranged on the two guide rails respectively, and the liquid supply assembly (2) further comprises a recovery box (27) assembled to the carrier (24), and the support assembly (21) and the recovery box (27) are located at the two ends of the carrier (24) respectively.

9. The spin coater droplet device of claim 8, wherein, The carrier (24) is provided with a first baffle (241) and a second baffle (242) arranged oppositely, the recovery box (27) is assembled between the first baffle (241) and the second baffle (242), one side of the first baffle (241) and / or the second baffle (242) is provided with a locking member (243), and the locking member (243) is configured to enable the first baffle (241) and / or the second baffle (242) to extrude and fix the recovery box (27).

10. The spin coater droplet device of claim 5, wherein, The extension direction of the guide rail assembly (23) is different from the first direction and the second direction, and the support assembly (21) can be moved to the moving path of the drop assembly (1) in the first direction or the second direction along with the carrier (24) in the extension direction of the guide rail assembly (23).

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