Ion source dismounting device

Abstract

The utility model discloses an ion source dismounting device which comprises a mounting base, a mounting groove is formed in the top of the mounting base, an ion source body is mounted in the mounting groove, a plurality of fixing blocks are fixedly connected to the side wall of the bottom end of the ion source body, a positioning hole is formed in each fixing block, and the ion source body is mounted in the mounting groove. A plurality of positioning rods and a plurality of fixing seats are fixedly connected to the top of the mounting seat, rotating grooves are formed in the fixing seats, a locking assembly is mounted on each fixing seat, a pair of supports is fixedly connected to the top of the mounting seat, rod holes are formed in the surfaces of the supports, and clamping assemblies are arranged in the rod holes. According to the utility model, the ion source body can be dismounted without using extra tools, the dismounting is convenient, the dismounting work efficiency is high, the dismounting and mounting of the ion source body can be ensured to be along a specified path all the time, the alignment offset is reduced, and the internal parts of the equipment are protected from being worn.

Description

TECHNICAL FIELD

[0001] The utility model belongs to ion source technical field, especially, relate to a kind of ion source dismounting device. BACKGROUND

[0002] Ion source is a kind of neutral atom or molecule ionization, and from among the ion beam current device. It is indispensable component in a variety of equipment such as ion accelerator, mass spectrometer, electromagnetic isotope separator, ion implanter, ion beam etching device, ion thruster and controlled fusion device neutral beam injector etc.

[0003] There are some ion source structures on the market at present, such as the long rod-shaped telescopic rotary ion source disclosed on Chinese patent network with the announcement number CN205508760U, the ion source structure can meet the requirements of ion source free telescopic length, rotatable, convenient to dismount and have self-cooling function, and the structure is simple and convenient to install, but there are some defects and deficiencies to be improved: (1) some existing ion sources are usually fixed by using bolts and other fasteners when installing, when ion source needs to be dismounted and installed, additional tools are often needed, which is not only more inconvenient, but also reduces the efficiency of dismounting work;(2) some existing ion sources are prone to position deviation during dismounting process due to insufficient precision, which makes it difficult to align when reinstalling, thereby increasing the risk of equipment wear and tear. Therefore, in view of the above problems, the utility model provides an ion source dismounting device, which has important significance. UTILITY MODEL CONTENT

[0004] The utility model provides a kind of ion source dismounting device, by clamping assembly can be clamped and fixed to ion source body, by locking assembly can be locked to the ion source body after fixing, to prevent its generation slack, and ion source body can be dismounted without using additional tools, not only make the dismounting of ion source body more convenient, also greatly improve the efficiency of dismounting work;By the mutual cooperation between positioning block and positioning groove can be quickly guided and positioned to ion source body, to ensure that ion source body can be placed into installation slot along correct position, and by the mutual cooperation between positioning rod and positioning hole can further be positioned to ion source body, to ensure that the dismounting and installation of ion source body can always be along specified path, thereby reducing the alignment deviation caused by human error, in turn, protect the internal components of equipment from wear and tear, the above-mentioned problems in the background art are solved.

[0005] To solve the above technical problems, the utility model is realized by the following technical solutions:

[0006] The utility model discloses a kind of ion source dismounting devices, including mounting seat, the bottom of mounting seat is fixedly connected with several support rods, and the top of mounting seat is equipped with mounting groove, the groove bottom of mounting groove is equipped with through-hole, and the ion source body is installed in mounting groove, the bottom end side wall of ion source body is fixedly connected with several fixed blocks, every fixed block is equipped with positioning hole, the top of mounting seat is fixedly connected with several positioning rods and several fixed seats respectively, the fixed seat is equipped with rotating groove, and every fixed seat is equipped with locking assembly, the top of mounting seat is fixedly connected with a pair of bracket, the bracket is symmetrically distributed about mounting groove, its surface is equipped with rod hole, the rod hole is provided with clamping assembly;

[0007] The locking assembly includes a locking block, a locking groove is formed on one side of the locking block, and a rotating block and a rotating block are fixedly connected to the top and bottom of the locking block respectively.

[0008] The clamping assembly includes a pull rod, the pull rod is inserted into the rod hole, and a pull ring and a clamping block are fixedly connected to the two ends of the pull rod respectively. One side of the clamping block is arc-shaped, and a plurality of springs are fixedly connected between the other side of the clamping block and the bracket.

[0009] Further, the mounting groove and the ion source body are both circular, and their diameters correspond to each other. The inner wall of the mounting groove is fixedly connected with a plurality of positioning blocks, the bottom of the ion source body is provided with a plurality of positioning grooves, the positioning grooves and the positioning blocks are both rectangular, have the same number, and their widths correspond to each other. The centers of the positioning grooves and the centers of the positioning blocks correspond to each other one by one.

[0010] Further, the number of positioning rods is the same as that of fixed blocks, the rod diameter of the positioning rods corresponds to the hole diameter of the positioning holes, and the centers of the positioning rods and the centers of the positioning holes correspond to each other one by one.

[0011] Further, the number of fixed seats and locking assemblies is the same as that of positioning rods. The rotating block and the rotating groove are both ladder-shaped circular, and their diameters correspond to each other. The locking groove is a U-shaped groove structure, and its groove width corresponds to the rod diameter of the positioning rods. The centers of the locking grooves and the centers of the positioning rods correspond to each other one by one.

[0012] Further, the groove wall surface of the locking groove is provided with a layer of wear-resistant pad.

[0013] Further, the diameter of the arc surface of the clamping block corresponds to the diameter of the ion source body, and the arc surface of the clamping block is provided with a layer of anti-slip pad. The surface of the anti-slip pad is provided with a chevron anti-slip pattern.

[0014] Compared with the prior art, the utility model has the following beneficial effects:

[0015] (1) The ion source dismounting device in the utility model is convenient for dismounting the ion source body, and greatly improves the efficiency of dismounting work.

[0016] (2) The ion source dismounting device in the utility model is convenient for dismounting the ion source body, and greatly improves the efficiency of dismounting work.

[0017] Of course, it is not necessary for any product implementing the utility model to achieve all the advantages mentioned above. BRIEF DESCRIPTION OF DRAWINGS

[0018] In order to more clearly illustrate the technical scheme of the embodiments of the utility model, the following will briefly introduce the drawings needed to be used in the embodiment description, obviously, the drawings in the following description are only some embodiments of the utility model, and for the ordinary skilled in the art, other drawings can also be obtained according to these drawings without creative labor.

[0019] Figure 1 It is a structure schematic view of the ion source dismounting device of the utility model;

[0020] Figure 2 It is a structure schematic view of the mounting seat in the utility model;

[0021] Figure 3 It is a top view of the mounting seat in the utility model;

[0022] Figure 4 It is a structure schematic view of the ion source body in the utility model;

[0023] Figure 5 It is a bottom view of the ion source body in the utility model;

[0024] Figure 6 It is a structure schematic view of the locking assembly in the utility model;

[0025] Figure 7 It is a structure schematic view of the clamping assembly in the utility model.

[0026] The components represented by the reference numbers in the drawings are listed as follows:

[0027] 1, mounting seat; 2, support rod; 3, mounting groove; 4, through hole; 5, ion source body; 6, fixing block; 7, positioning hole; 8, positioning rod; 9, fixing seat; 10, rotating groove; 11, bracket; 12, rod hole; 13, locking block; 14, locking groove; 15, rotating block; 16, rotating block; 17, pull rod; 18, pull ring; 19, clamping block; 20, spring; 21, positioning block; 22, positioning groove; 23, wear-resistant pad; 24, anti-skid pad. DETAILED DESCRIPTION

[0028] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0029] In the description of the present application, it should be understood that the terms "relative", "one end", "internal", "transverse", "end", "two ends", "two sides", "front", "one end surface", "the other end surface" and the like indicate the orientation or positional relationship, which are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the components or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application.

[0030] Please refer to Figures 1-7 As shown in the drawings, the ion source dismounting device of the present application comprises a mounting seat 1, a plurality of support rods 2 are fixedly connected to the bottom of the mounting seat 1, and a mounting groove 3 is formed in the top of the mounting seat 1, a through hole 4 is formed in the groove bottom of the mounting groove 3, and an ion source body 5 is installed in the mounting groove 3, the ion source body 5 is a prior art, a plurality of fixing blocks 6 are fixedly connected to the bottom end side wall of the ion source body 5, a positioning hole 7 is formed in each fixing block 6, a plurality of positioning rods 8 and a plurality of fixing seats 9 are fixedly connected to the top of the mounting seat 1, a rotating groove 10 is formed in the fixing seat 9, and a locking assembly is installed on each fixing seat 9, a pair of brackets 11 are fixedly connected to the top of the mounting seat 1, the brackets 11 are symmetrically distributed about the mounting groove 3, a rod hole 12 is formed in the surface of the bracket 11, and a clamping assembly is arranged in the rod hole 12;

[0031] The locking assembly comprises a locking block 13, one side of the locking block 13 is provided with a locking groove 14, and the top and bottom of the locking block 13 are fixedly connected with a rotating block 15 and a rotating block 16 respectively, the rotating block 16 is located in the rotating groove 10, and the rotating block 15 can drive the locking block 13 and the rotating block 16 to rotate around the rotating groove 10;

[0032] The clamping assembly comprises a pull rod 17 inserted into the rod hole 12, and the two ends of the pull rod 17 are fixedly connected with a pull ring 18 and a clamping block 19 respectively, one side of the clamping block 19 is arc-shaped, and a plurality of springs 20 are fixedly connected between the other side of the clamping block 19 and the support 11, the pull ring 18 can drive the pull rod 17 and the clamping block 19 to move towards the support 11, and when the pull ring 18 is released, the clamping block 19 can be attached to the side wall of the ion source body 5 under the elastic reset action of the spring 20, so as to clamp and fix the ion source body 5, thereby improving the stability of the ion source body 5 after installation.

[0033] Wherein, the installation groove 3 and the ion source body 5 are both circular, the diameters thereof correspond to each other, the inner wall of the installation groove 3 is fixedly connected with a plurality of positioning blocks 21, the bottom of the ion source body 5 is provided with a plurality of positioning grooves 22, the positioning grooves 22 and the positioning blocks 21 are both rectangular, the number and width of the positioning grooves 22 and the positioning blocks 21 correspond to each other, and the center of each positioning groove 22 and the center of each positioning block 21 correspond to each other, when the ion source body 5 is placed in the installation groove 3, each positioning block 21 can be aligned and inserted into the corresponding positioning groove 22, at this time, the ion source body 5 can be quickly guided and positioned through the cooperation between the positioning block 21 and the positioning groove 22, so as to ensure that the ion source body 5 can be placed in the installation groove 3 along the correct position.

[0034] Wherein, the number of the positioning rods 8 is the same as that of the fixed blocks 6, the rod diameter of the positioning rods 8 corresponds to the hole diameter of the positioning holes 7, and the center of each positioning rod 8 and the center of each positioning hole 7 correspond to each other, when the ion source body 5 is placed in the installation groove 3, each positioning rod 8 can be aligned and inserted into the corresponding positioning hole 7, at this time, the ion source body 5 can be further positioned through the cooperation between the positioning rod 8 and the positioning hole 7, so as to ensure that the disassembly and installation of the ion source body 5 can always be along the specified path, thereby reducing the alignment deviation caused by human error, and protecting the internal components of the equipment from being worn out.

[0035] The fixed seat 9 and the number of locking assemblies are same as the positioning rods 8, the rotating block 16 and the rotating groove 10 are both ladder-shaped circles, the diameters of the rotating block 16 and the rotating groove 10 are corresponding and equal, the rotating block 16 is located in the rotating groove 10, the locking groove 14 is a U-shaped groove structure, the groove width of the locking groove 14 is corresponding and equal to the rod diameter of the positioning rod 8, the centers of the locking grooves 14 and the centers of the positioning rods 8 are one-to-one corresponding, when the ion source body 5 is placed into the mounting groove 3, the positioning rods 8 can be aligned and attached in the corresponding locking grooves 14 by rotating the locking block 13, at this time, the ion source body 5 can be locked by the mutual cooperation between the locking groove 14 and the positioning rod 8, so that the ion source body 5 is prevented from loosening, when the ion source body 5 needs to be disassembled, the positioning rod 8 can be separated from the locking groove 14 by reversely rotating the locking block 13, without using additional tools, so that the disassembly of the ion source body 5 is more convenient, and the efficiency of the disassembly work is greatly improved.

[0036] The groove wall surface of the locking groove 14 is provided with a wear-resistant pad 23, the wear-resistant pad 23 can be selected from elastic materials such as sponge, and is fixed by means of glue, when the positioning rod 8 is attached in the locking groove 14, the wear-resistant pad 23 can play a protection role against wear, so that the positioning rod 8 and the locking groove 14 are prevented from colliding and being worn by directly contacting.

[0037] The diameter of the arc surface of the clamping block 19 is corresponding and equal to the diameter of the ion source body 5, and the arc surface of the clamping block 19 is provided with a layer of anti-skid pad 24, the surface of the anti-skid pad 24 is provided with a chevron anti-skid pattern, the anti-skid pad 24 can be selected from elastic materials such as rubber, and is fixed by means of glue, when the clamping block 19 is attached to the side wall of the ion source body 5, the anti-skid pad 24 can play a certain buffering protection role, so that the clamping force of the clamping block 19 is prevented from being too large and causing the surface of the ion source body 5 to be damaged, at the same time, the anti-skid pattern on the surface of the anti-skid pad 24 can increase the friction force between the ion source body 5 and the clamping block 19, so as to play an anti-skid role, thereby further improving the stability of the ion source body 5 after installation.

[0038] The circuit, electronic components and chip modules involved in the utility model are all prior art, and can be realized by those skilled in the art without further description, and the content protected by the utility model does not involve improvement of software and methods.

[0039] The standard parts used in the application file can be purchased from the market, all the components in the application file can be ordered according to the description and the drawings, and the specific connection mode of each part adopts the conventional means such as bolts, rivets and welding in the prior art, and the machinery, parts and equipment adopt conventional models in the prior art.

[0040] The working principle of the utility model is:

[0041] The utility model discloses when using, can through the pull ring 18 drive pull rod 17 together with clamping block 19 to the direction of support 11 movement, then put ion source body 5 into installation groove 3, and make each positioning block 21 align and insert to corresponding locating slot 22, with this, each positioning rod 8 can align and pass through corresponding positioning hole 7, then loosen pull ring 18, clamping block 19 can be in the elastic reset action of spring 20 and adhere to the lateral wall of ion source body 5 at this time, so as to clamp and fix ion source body 5, when ion source body 5 put into installation groove 3, through the rotation locking block 13 can make each positioning rod 8 align and adhere to corresponding locking groove 14, at this time, through the mutual cooperation between locking groove 14 and positioning rod 8 can lock ion source body 5 to prevent it from loosening, when needing to disassemble ion source body 5, just reverse rotation locking block 13 and make positioning rod 8 from locking groove 14 and can, without using extra tool, not only make the disassembly of ion source body 5 more convenient, also greatly improve the efficiency of dismounting work.

[0042] The above disclosed preferred embodiments of the utility model are only used to help the elaboration of the utility model. The preferred embodiments do not describe all the details exhaustively, and also do not limit the utility model to only the specific implementation manners described. Obviously, according to the content of the specification, many modifications and changes can be made. The specification selects and specifically describes these embodiments in order to better explain the principle and practical application of the utility model, so that the person skilled in the art can well understand and utilize the utility model. The utility model is limited by the claims and the whole scope and equivalents thereof.

Claims

1. An ion source disassembly apparatus, characterized by, The utility model provides an ion source body fixing device, including the mounting seat, the bottom of mounting seat is fixedly connected with a plurality of support rods, and the top of mounting seat is equipped with the installation groove, the groove bottom of installation groove is equipped with through -hole, and the ion source body is installed in the installation groove, the bottom end side wall of ion source body is fixedly connected with a plurality of fixed blocks, and the positioning hole is equipped on each fixed block, the top of mounting seat is fixedly connected with a plurality of positioning rods and a plurality of fixed seats respectively, the fixed seat is equipped with the rotation groove, and the locking assembly is installed on each fixed seat, the top of mounting seat is fixedly connected with a pair of supports, the support is about the symmetrical distribution of installation groove, and the surface is equipped with the rod hole, and the rod hole is provided with clamping assembly, The locking assembly includes a locking block, a locking groove is formed on one side of the locking block, and a rotating block and a rotating block are fixedly connected to the top and bottom of the locking block, respectively, and the rotating block is located in the rotating groove; The clamping assembly includes a pull rod, the pull rod is inserted into the rod hole, and the pull rod is fixedly connected with a pull ring and a clamping block at both ends, respectively, one side of the clamping block is arc-shaped, and a plurality of springs are fixedly connected between the other side of the clamping block and the support.

2. The ion source disassembly apparatus of claim 1, wherein, The installation groove and the ion source body are circular, the diameters correspond to each other, and a plurality of positioning blocks are fixedly connected to the inner wall of the installation groove, a plurality of positioning grooves are formed in the bottom of the ion source body, the positioning grooves and the positioning blocks are rectangular, the number is the same, the width corresponds to each other, and the center of each positioning groove and the center of each positioning block correspond one by one.

3. The ion source disassembly apparatus of claim 1, wherein, The number of positioning rods is the same as that of fixed blocks, the rod diameter corresponds to the hole diameter, and the center of each positioning rod and the center of each positioning hole correspond one by one.

4. The ion source disassembly apparatus of claim 1, wherein, The number of fixed seats and locking assemblies is the same as that of positioning rods, the rotating block and the rotating groove are ladder-shaped circular, the diameters correspond to each other, the locking groove is a U-shaped groove structure, the groove width corresponds to the rod diameter, and the center of each locking groove and the center of each positioning rod correspond one by one.

5. The ion source disassembly apparatus of claim 1, wherein, The groove wall surface of the locking groove is provided with a layer of wear-resistant pad.

6. The ion source disassembly apparatus of claim 1, wherein, The diameter of the arc surface of the clamping block corresponds to the diameter of the ion source body, and the arc surface of the clamping block is provided with a layer of anti-skid pad, and the surface of the anti-skid pad is provided with a herringbone anti-skid pattern.

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