Spraying disc for semiconductor material processing

Abstract

The utility model discloses a spraying disc for semiconductor material processing, which relates to the field of semiconductor material processing, and comprises a spraying disc main body, the inner wall of the spraying disc main body is provided with a fixing frame, the outer wall of the fixing frame is provided with a rotating sleeve, the outer wall of the rotating sleeve abuts against a connecting frame, the outer wall of the connecting frame is bonded with a first magnetic ring, and the first magnetic ring is provided with a second magnetic ring. A second magnetic ring is attached to one side of the first magnetic ring, and a rubber ring is installed on the inner wall of the spraying disc body. The fixing frame is arranged to move the rotating sleeve, when the device is used, the fixing frame and the rotating sleeve are arranged to facilitate rapid installation of the spraying disc, the usability of the device is improved, the first magnetic ring is arranged to be tightly attached to the second magnetic ring, and when the device is used, the first magnetic ring is tightly attached to the second magnetic ring. And a first magnetic ring and a second magnetic ring are arranged, so that the spraying disc main body can be conveniently and quickly mounted and positioned, the mounting efficiency is conveniently improved, and the usability of the device is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of semiconductor material processing, concretely to a spray tray for semiconductor material processing. BACKGROUND

[0002] With the rapid development of semiconductor technology, chip manufacturing is constantly moving towards smaller nanometer scale, which puts almost stringent requirements on the precision, uniformity and stability of semiconductor material processing. As a core component for uniformly spraying process gas onto the surface of a semiconductor wafer, the performance of the spray tray directly affects the quality and performance of the final product, so a spray tray for semiconductor material processing is needed.

[0003] The existing spray tray for semiconductor material processing is inconvenient for quick positioning and quick installation of the spray tray, so there is an urgent need for a spray tray for semiconductor material processing. SUMMARY

[0004] Therefore, the utility model aims at providing a spray tray for semiconductor material processing to solve the problem of inconvenient quick positioning and quick installation of the existing spray tray for semiconductor material processing during use.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical scheme: a spray tray for semiconductor material processing, comprising a spray tray body, a fixed frame is installed on the inner wall of the spray tray body, a rotating sleeve is installed on the outer wall of the fixed frame, and a connecting frame is in contact with the outer wall of the rotating sleeve.

[0006] A first magnetic ring is bonded to the outer wall of the connecting frame, a second magnetic ring is attached to one side of the first magnetic ring, and a rubber ring is installed on the inner wall of the spray tray body.

[0007] Preferably, the spray tray body and the fixed frame are movably connected, and the fixed frames are arranged in an annular array on the inner wall of the spray tray body.

[0008] Preferably, the fixed frame and the rotating sleeve are movably connected, and the outer wall diameter of the fixed frame is smaller than the inner wall diameter of the rotating sleeve.

[0009] Preferably, the outer wall of the connecting frame is tightly attached to the outer wall of the first magnetic ring, and the inner wall of the connecting frame is designed as an open hole.

[0010] Preferably, the outer wall of the second magnetic ring is tightly attached to the outer wall of the spray tray body, and the outer wall diameter of the second magnetic ring is smaller than the outer wall diameter of the spray tray body.

[0011] Preferably, the rubber ring is connected with the spray tray body, and the inner wall of the spray tray body is designed as an open hole.

[0012] Compared with the prior art, the utility model has the advantages of:

[0013] 1、 the utility model discloses a fixed frame plays the activity to the sleeve, when using the device, the setting of fixed frame and sleeve is convenient for the quick installation of the spray tray, and the use of the device is increased.

[0014] 2、 the utility model discloses a first magnetic ring plays the close adhesion to the second magnetic ring, when using the device, the setting of first magnetic ring and second magnetic ring is convenient for the quick installation and positioning of the spray tray body, improves installation efficiency, and the use of the device is increased. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 It is the elevation view of the utility model;

[0016] Figure 2 It is the structure schematic diagram of the elevation view of the utility model;

[0017] Figure 3 It is the structure schematic diagram of the elevation view of the utility model;

[0018] Figure 4 It is the structure schematic diagram of the fixed frame part of the utility model.

[0019] In the drawing: 1, spray tray body;2, fixed frame;3, sleeve;4, connecting frame;5, first magnetic ring;6, second magnetic ring;7, rubber ring. DETAILED DESCRIPTION

[0020] The technical scheme in the embodiments of the utility model will be described clearly and completely below in conjunction with the drawings of the embodiments of the utility model. The embodiments described below with reference to the drawings are exemplary and are only used to explain the utility model, and cannot be understood as limiting the utility model.

[0021] The embodiments of the utility model will be described below according to the overall structure of the utility model.

[0022] Please refer to Figures 1-4 A spray tray for semiconductor material processing, comprising a spray tray body 1, the inner wall of the spray tray body 1 is installed with a fixed frame 2, the spray tray body 1 is movably connected with the fixed frame 2, and the fixed frame 2 is arranged in an annular array on the inner wall of the spray tray body 1, the outer wall of the fixed frame 2 is installed with a sleeve 3, the fixed frame 2 is movably connected with the sleeve 3, and the outer wall diameter of the fixed frame 2 is less than the inner wall diameter of the sleeve 3, the outer wall of the sleeve 3 abuts against a connecting frame 4, the fixed frame 2 plays the activity to the sleeve 3, when using the device, the setting of fixed frame 2 and sleeve 3 is convenient for the quick installation of the spray tray, and the use of the device is increased.

[0023] Please refer to Figures 1-4 The outer wall of the connecting frame 4 is bonded with the first magnetic ring 5, the outer wall of the connecting frame 4 is closely combined with the outer wall of the first magnetic ring 5, and the inner wall of the connecting frame 4 is designed as an open hole, one side of the first magnetic ring 5 is combined with the second magnetic ring 6, the outer wall of the second magnetic ring 6 is closely combined with the outer wall of the spray disc body 1, and the outer wall diameter of the second magnetic ring 6 is smaller than the outer wall diameter of the spray disc body 1, the inner wall of the spray disc body 1 is provided with the rubber ring 7, the rubber ring 7 is connected with the spray disc body 1, and the inner wall of the spray disc body 1 is designed as an open hole, the first magnetic ring 5 is closely combined with the second magnetic ring 6, and the first magnetic ring 5 and the second magnetic ring 6 are provided to facilitate quick installation and positioning of the spray disc body 1, thereby improving the installation efficiency and increasing the usability of the device.

[0024] Working principle: when in use, the device is taken out and placed in a designated position, the connecting frame 4 is closely combined with the first magnetic ring 5, the second magnetic ring 6 is closely combined with the spray disc body 1, the rubber ring 7 is fixed to the spray disc body 1, the spray disc body 1 is magnetically attracted to the connecting frame 4, the spray disc body 1 is rotated to close the fixed frame 2, the fixed frame 2 and the rotating sleeve 3 are fixed to the connecting frame 4, and the spray disc body 1 is used, so that the use process of the device is completed.

[0025] Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions recorded in the foregoing embodiments or make equivalent replacement to part of the technical features, and any modification, equivalent replacement, improvement, etc. within the spirit and principles of the utility model should be included in the protection scope of the utility model.

Claims

1. A showerhead for processing of semiconductor material, comprising a showerhead body (1), characterized in that: The inner wall of the spray disc body (1) is provided with a fixing frame (2), the outer wall of the fixing frame (2) is provided with a rotating sleeve (3), the outer wall of the rotating sleeve (3) is in contact with a connecting frame (4); The outer wall of the connecting frame (4) is attached with a first magnetic ring (5), one side of the first magnetic ring (5) is attached with a second magnetic ring (6), and the inner wall of the spray disc body (1) is provided with a rubber ring (7).

2. A showerhead for processing semiconductor material as defined in claim 1, wherein: The spray disc body (1) is movably connected with the fixing frame (2), and the fixing frame (2) is arranged in an annular array on the inner wall of the spray disc body (1).

3. The showerhead of claim 1, wherein: The fixing frame (2) is movably connected with the rotating sleeve (3), and the outer wall diameter of the fixing frame (2) is smaller than the inner wall diameter of the rotating sleeve (3).

4. The showerhead of claim 1, wherein: The outer wall of the connecting frame (4) is tightly attached with the outer wall of the first magnetic ring (5), and the inner wall of the connecting frame (4) is designed as an open type.

5. The showerhead of claim 1, wherein: The outer wall of the second magnetic ring (6) is tightly attached with the outer wall of the spray disc body (1), and the outer wall diameter of the second magnetic ring (6) is smaller than the outer wall diameter of the spray disc body (1).

6. The showerhead of claim 1, wherein: The rubber ring (7) is clamped and connected with the spray disc body (1), and the inner wall of the spray disc body (1) is designed as an open type.

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