Forming cutter and machining equipment

Abstract

The utility model discloses a forming cutter and machining equipment, and relates to the field of machining, the forming cutter comprises a cutting part used for machining a sealing surface of a forming base, the cutting part is provided with a cutting unit and a chip removal unit, and the chip removal unit is arranged on one side of the cutting unit; the cutting unit comprises an inner blade arranged on the end surface of the cutting part; an outer blade connected to the outer peripheral surface of the cutting part; one end of the forming edge is connected with the inner edge, the other end of the forming edge is connected with the outer edge, the forming edge is connected with a forming edge rear tool face, the forming edge rear tool face is limited to form a forming groove, and the forming groove is communicated with the chip removal unit. According to the forming cutter provided by the technical scheme of the utility model, the sealing surface can be machined and formed by one-time clamping, and the machining precision of the sealing surface is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to mechanical processing technical field, especially a kind of forming tool and processing equipment. BACKGROUND

[0002] IGS comprehensive gas circuit is the core component of semiconductor equipment ultra-pure gas delivery, its structure includes flow controller MFC, gas passage runner block (metal base), metal sealing gasket, different kinds of valve body, screw and base, combined into integrated system. IGS runner can deliver corrosive gas, such as HBr, chlorine gas, once gas leaks, it is fatal. Leakage can occur in base and sealing ring assembly, parts itself or runner delivery process. Analyze the leakage failure reason, exclude human assembly factors, sealing gasket performance, raw material and other factors, the most easily ignored is base sealing surface processing.

[0003] The sealing surface feature of base is profiled, and it is difficult to be processed by one time using general tool in CNC machining center, the first clamping uses milling cutter to process plane, and then the second clamping uses CNC lathe to process the required shape and the profile of sealing surface. But at the same time, it meets the roughness standard of sealing surface in the industry, and the lathe uses at least rough turning blade and fine turning blade. The second assembly represents the change of equipment and clamp, which directly leads to the profile tolerance, roundness, concentricity deviation, center point reference error of sealing surface, or the three injuries of parts caused by clamping process. The micro-tolerance of sealing surface seriously affects the bite accuracy and position of sealing gasket, and slightly affects the assembly and / or pressure injury of sealing surface, and seriously affects the leakage, and the most serious case is that the corrosive gas catalyzes the aging of the part, and then the leakage dead point leads to sudden leakage. CONTENT OF UTILITY MODEL

[0004] The utility model discloses a kind of forming tool, to solve the technical problem that the sealing surface of current base needs second clamping, affects sealing surface precision, and then affects sealing effect.

[0005] To achieve the above-mentioned purpose, the forming tool provided by the utility model, including the cutting part for processing the sealing surface of forming base, the cutting part is provided with cutting unit and chip removal unit, the chip removal unit is arranged on one side of the cutting unit;

[0006] The cutting unit includes:

[0007] Inner blade, arranged on the end face of the cutting part;

[0008] Outer blade, connected with the outer periphery of the cutting part;And

[0009] A forming blade is connected to the inner blade at one end and connected to the outer blade at the other end, and a forming blade relief surface is connected to the forming blade, the forming blade relief surface defining a forming groove, the forming groove being in communication with the chip removal unit.

[0010] In an embodiment, the inner blade is connected to an inner blade relief surface, and the angle between the cross section of the cutting portion in the axial direction and the inner blade relief surface at the inner blade is 80 to 86 degrees.

[0011] In an embodiment, the chip removal unit includes a first chip removal groove, and the inner blade is further connected to an inner blade rake surface, the inner blade rake surface forming an inner wall of the first chip removal groove.

[0012] In an embodiment, the chip removal unit further includes a second chip removal groove, the second chip removal groove being in communication with the first chip removal groove, the outer blade is connected to an outer blade rake surface, the forming blade is connected to a forming blade rake surface, and the outer blade rake surface and the forming blade rake surface form an inner wall of the second chip removal groove.

[0013] In an embodiment, the second chip removal groove is spirally arranged.

[0014] In an embodiment, the outer blade is an arc shape protruding towards the rotation direction, the outer blade is connected to an outer blade relief surface, and the outer blade relief surface is an arc surface.

[0015] In an embodiment, the cutting portion includes multiple groups of the cutting unit and the chip removal unit, and the cutting unit and the chip removal unit are alternately arranged along the circumferential direction of the cutting portion.

[0016] In an embodiment, a gap is arranged between two inner blades.

[0017] In an embodiment, four groups of the cutting unit and the chip removal unit are respectively arranged, and the inner blades of opposite two groups of the cutting unit are parallel to each other.

[0018] The utility model further provides a processing equipment, including the forming tool as above.

[0019] The utility model discloses technical scheme through adopting the cutting unit and the chip removal unit of setting in cutting part, make cutting part complete cutting processing smoothly. Further, the cutting unit includes inner blade and outer blade, and the inner blade is located at the end of cutting part and is used for grinding, satisfies the roughness standard of industry to sealing surface. The outer blade is close to the outer periphery of cutting part and is used for milling cutting. The shape of forming blade is adapted to the sealing surface of the base to be processed to process forming, and the forming blade also defines a forming groove to avoid the base sealing surface. The forming tool provided by the technical scheme can grind the sealing surface while milling the sealing surface, so that the forming of the sealing surface can be completed by one-time processing without secondary clamping. The inner blade is used for grinding, which can meet the standard requirement of the roughness of the sealing surface. In this way, one-time clamping processing of the sealing surface can ensure the processing precision and save the process of the numerical control lathe, which means saving labor, saving the cost of clamps and auxiliary materials, reducing the processing time of the compressor and the damage and defects caused by clamping. The key is to solve the problem of the tolerance accuracy of the sealing surface caused by multiple clamping, directly improve the product stability and yield. The quality stability of the semiconductor IGS metal base sealing and the close degree of the flow channel are guaranteed. BRIEF DESCRIPTION OF DRAWINGS

[0020] In order to more clearly illustrate the technical scheme in the embodiments of the utility model or the prior art, the drawings needed to be used in the following embodiment or prior art description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the utility model, and those skilled in the art can obtain other drawings from the structures shown in these drawings without creating labor.

[0021] Figure 1 The structure schematic diagram of the forming tool embodiment provided by the utility model is shown.

[0022] Figure 2 The angle local enlarged structure schematic diagram of the forming tool embodiment provided by the utility model is shown.

[0023] Figure 3 The angle local enlarged structure schematic diagram of the forming tool embodiment provided by the utility model is shown.

[0024] Figure 4 The angle local enlarged structure schematic diagram of the forming tool embodiment provided by the utility model is shown.

[0025] Figure 5 The angle local enlarged structure schematic diagram of the forming tool embodiment provided by the utility model is shown.

[0026] Explanation of reference numerals:

[0027] 10, cutting part; 20, handle part;

[0028] 100, cutting unit; 110, inner blade; 111, inner blade relief; 112, inner blade rake face; 120, outer blade; 121, outer blade relief; 130, profile blade; 131, profile blade relief; 132, profile groove; 134, first section; 135, second section; 140, notch;

[0029] 200, chip removal unit; 210, first chip removal groove; 220, second chip removal groove.

[0030] The realization, functional features and advantages of the utility model will be further described with reference to the drawings in combination with embodiments. DETAILED DESCRIPTION

[0031] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the utility model.

[0032] It should be noted that if the embodiments of the utility model involve directional indications (such as up, down, left, right, front, back, etc.), the directional indications are only used to explain the relative position relationship, movement condition, etc. between components in a certain posture, and if the certain posture changes, the directional indications also change accordingly.

[0033] In addition, if the embodiments of the utility model involve descriptions of "first", "second", etc., the descriptions of "first", "second", etc. are only for description purposes, and cannot be understood as indicating or implying the relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features limited by "first", "second" can explicitly or implicitly include at least one of the features. In addition, "and / or" or "and / or" appearing throughout the text means that the three parallel schemes are included, for example, "A and / or B" includes A scheme, or B scheme, or A and B simultaneously satisfy the scheme. In addition, the technical solutions of each embodiment can be combined with each other, but it must be based on the realization of the ordinary skill in the art, and when the combination of technical solutions appears contradictory or unachievable, it should be considered that the combination of technical solutions does not exist, and is not within the protection scope required by the utility model.

[0034] In the prior art, the sealing surface feature of the base is of a special shape, and it is difficult to complete the machining by using a general tool in a CNC machining center. The first clamping uses a milling cutter to machine a plane, and then the second clamping uses a CNC lathe to machine the sealing surface profile and the required shape. However, the lathe uses at least a rough turning blade and a fine turning blade to meet the sealing surface roughness standard in the industry. The second assembly represents a change in equipment and a change in clamp, which directly leads to the profile tolerance, roundness, and core tolerance of the sealing surface, the center point reference error, or the three injuries of the parts caused by the clamping process. The micro-tolerance of the sealing surface seriously affects the bite accuracy and position of the sealing gasket, and slightly affects the assembly and / or pressure of the sealing surface. In severe cases, it affects leakage, and in the most serious case, it accelerates the aging of the parts under the catalysis of corrosive gas, and then causes sudden leakage due to the dead point of the leakage.

[0035] The utility model provides a forming tool.

[0036] Please refer to Figures 1 to 5 In an embodiment of the utility model, the forming tool includes a cutting part 10 for machining a sealing surface of a formed base, the cutting part 10 is provided with a cutting unit 100 and a chip removal unit 200, the chip removal unit 200 is arranged on one side of the cutting unit 100; the cutting unit 100 includes an inner blade 110, an outer blade 120 and a forming blade 130; wherein the inner blade 110 is arranged on the end face of the cutting part 10; the outer blade 120 is connected with the outer peripheral surface of the cutting part 10; one end of the forming blade 130 is connected with the inner blade 110, and the other end is connected with the outer blade 120, the forming blade 130 is connected with a forming blade relief 131, the forming blade relief 131 defines a forming groove 132, and the forming groove 132 is communicated with the chip removal unit 200.

[0037] It should be noted that the forming tool provided by the utility model further includes a tool shank part 20, the cutting part 10 is arranged on one end of the tool shank part 20, and the tool shank part 20 is used for clamping to a machining equipment. In addition, the forming tool of the technical solution can be rotated and driven to the right for cutting machining from the right side of the tool handle, or can be rotated and driven to the left for cutting machining. Referring to the drawings, the tool is taken as an example in the right cutting mode. Of course, the tolerance parameters of the forming tool, the number of the cutting unit 100 and the chip removal unit 200, the angle of the blade, the sharpness of the blade edge and the like can be changed according to the machining requirements. Figure 1

[0038] ​In the specific implementation process, the inner blade 110 of the cutting unit 100 is arranged at the end face of the cutting part 10, and one end of the inner blade 110 is close to the center of the end face of the cutting part 10, and the other end extends along the radial direction of the cutting part 10. The cutting edge angle of the inner blade 110 is close to 90 degrees, which produces a polishing grinding effect. The outer blade 120 is arranged at one end of the inner blade 110 away from the center of the cutting part 10 and close to the outer periphery of the cutting part 10, and the cutting edge angle of the outer blade 120 is smaller, so that the outer blade 120 mainly performs milling cutting.

[0039] The profile of the forming blade 130 matches the shape to be formed on the sealing surface to be machined, one end of the forming blade 130 is connected to the inner blade 110, and the other end is connected to the outer blade 120, the rear face of the forming blade 130 defines a forming groove 132, and the forming groove 132 avoids the forming part of the sealing surface. In this embodiment, the forming groove 132 extends in the circumferential direction of the cutting part 10, the forming blade 130 includes a first segment 134 and a second segment 135 connected to each other, the first segment 134 is a straight line and is connected to the inner blade 110, the second segment 135 is an arc line and is connected to the outer blade 120, and one end of the first segment 134 connected to the second segment 135 is located at the groove bottom of the forming groove 132. In addition, the included angle of the two side walls of the forming groove 132 formed at the groove bottom is 90 degrees, and in the circumferential direction of the cutting part 10, the one end of the second segment 135 close to the outer blade 120 is in front of the other end in the rotation direction, so that the outer blade 120 protrudes towards the rotation direction, facilitating milling cutting.

[0040] The technical scheme of the utility model discloses a cutting unit 100 and a chip removal unit 200 are arranged on the cutting part 10, so that the cutting part 10 can smoothly complete cutting machining. Further, the cutting unit 100 includes an inner blade 110 and an outer blade 120, the inner blade 110 is located at the end of the cutting part 10 and is used for grinding, meeting the roughness standard of the sealing surface in the industry. The outer blade 120 is close to the outer periphery of the cutting part 10 and is used for milling cutting. The shape of the forming blade 130 matches the base sealing surface to be machined, so as to be machined and formed, and the forming blade 130 further defines a forming groove 132 to avoid the base sealing surface. The forming tool provided by the technical scheme can grind the sealing surface while milling the sealing surface, so that the forming of the sealing surface can be completed at one time without the need for secondary clamping. The inner blade 110 is used for grinding and can meet the standard requirement of the roughness of the sealing surface. In this way, the machining precision can be ensured by clamping the sealing surface once, and the process of the numerical control lathe is saved, which means that labor is saved, the cost of the clamp and auxiliary materials is saved, the machining time of the compressor is reduced, damage and defects caused by clamping are reduced. The key is to solve the problem that the tolerance precision of the sealing surface is affected by multiple clamping, directly improve the product stability and yield. The quality of the semiconductor IGS metal base sealing and the close contact degree of the flow channel are more stable.

[0041] Reference Figures 2 to 4As shown, in an embodiment, the inner blade 110 is connected with an inner blade relief surface 111, and the angle between the cross section of the cutting part 10 along the axial direction and the inner blade relief surface 111 at the inner blade 110 is 80-86 degrees.

[0042] In the specific implementation process, the inner blade relief surface 111 is further connected with a bevel, the setting of the bevel makes the inner blade relief surface 111 be long strip-shaped, reduces the contact area with the to-be-processed sealing surface, facilitates grinding, and the angle between the cross section of the cutting part 10 along the axial direction and the inner blade relief surface 111 at the inner blade 110 is 80-86 degrees, so that the inner blade 110 produces a pressure polishing grinding effect, and the surface roughness of the sealing surface is less than 0.5 µm. The inner blade relief surface 111 is further connected with the chip removal unit 200, which facilitates grinding and chip removal of the inner blade 110.

[0043] In an embodiment, the chip removal unit 200 includes a first chip removal groove 210, and the inner blade 110 is further connected with an inner blade rake surface 112, which forms an inner wall of the first chip removal groove 210.

[0044] Specifically, the groove bottom surface of the first chip removal groove 210 is obliquely arranged, one end is close to the center of the cutting part 10, and the other end is inclined along the radial direction to the direction of the shank part 20, which facilitates chip removal of the inner blade 110. The inner blade rake surface 112 forms an inner wall of the first chip removal groove 210, and the other inner wall of the first chip removal groove 210 is connected with the inner blade relief surface 111 and the bevel in the adjacent other chip removal unit 200.

[0045] In an embodiment, the chip removal unit 200 further includes a second chip removal groove 220, the second chip removal groove 220 is communicated with the first chip removal groove 210, the outer blade 120 is connected with an outer blade 120 rake surface, the forming blade 130 is connected with a forming blade 130 rake surface, and the outer blade 120 rake surface and the forming blade 130 rake surface form the inner walls of the second chip removal groove 220.

[0046] In the specific implementation process, the second chip removal groove 220 is spirally arranged, and the second chip removal groove 220 spirals along the circumferential direction of the cutting part 10 and extends along the direction of the shank part 20. The second chip removal groove 220 is used for milling and chip removal of the outer blade 120. In addition, the inner wall edge of the second chip removal groove 220 further forms an outer peripheral blade, processes a side wall of the sealing surface of the forming base, and further avoids damaging the side wall of the base forming the sealing surface. The chip removal of the first chip removal groove 210 enters the second chip removal groove 220, and is discharged through the second chip removal groove 220. In addition, the second chip removal groove 220 is also used for avoiding grinding part of the sealing surface, and placing pressure or collision.

[0047] In an embodiment, the outer blade 120 is arc-shaped and protrudes towards the rotation direction, and the outer blade 120 is connected with an outer blade relief surface 121, which is arc-shaped, so as to improve the sharpness of the outer blade 120 and facilitate milling cutting. Meanwhile, the outer blade relief surface 121 forms the inner wall of the second chip groove 220, so that the second chip groove 220 is facilitated to discharge chips and forms a spiral shape.

[0048] In an embodiment, the cutting part 10 comprises a plurality of cutting units 100 and chip removal units 200, and the cutting units 100 and the chip removal units 200 are arranged alternately along the circumferential direction of the cutting part 10.

[0049] In the specific implementation process, the number of the cutting units 100 is set according to the machining requirement, and when there are two or more than two cutting units 100, the interval distance between the inner blades 110 and the outer blades 120 of adjacent cutting units 100 is arranged at the same angle.

[0050] Specifically, in the embodiment, the cutting units 100 and the chip removal units 200 are provided with four groups respectively, and are arranged oppositely in pairs, and the inner blades 110 of the two opposite cutting units 100 are parallel to each other, and the gap 140 is arranged between the two inner blades 110, and the gap 140 is located at the center of the cutting part 10. It should be noted that the sealing surface of the base is connected with the flow channel, and the flow channel needs to be processed first. The gap 140 is opposite to the channel. The two opposite inner blades 110 are located on the same side of the cutting unit 100, and the gap 140 can also avoid the problem of stress concentration of the inner blade 110 when the inner blade 110 grinds the sealing surface. It can be understood that the two sides of each cutting unit 100 are provided with the chip removal units 200, which facilitates chip removal and avoids damage to the sealing surface by the generated machining chips.

[0051] The utility model discloses still propose a kind of processing equipment, and the specific structure of the forming tool of this processing equipment refers to above-mentioned embodiment, since the processing equipment of the present application adopts all technical solutions of above-mentioned all embodiments, at least has all beneficial effects brought by the technical scheme of above-mentioned embodiment, here no longer one by one elaboration. Among them, forming tool is used to process base sealing surface. Forming tool is installed by tool handle, lock mouth and CNC milling machine equipment main shaft connection and is rotated by main shaft parameter setting and drives tool to carry out Z axis direction movement mode cutting, and it is adjusted and tested by checking tool blade wear and part detection data during cutting process, and processing effect satisfies product specification requirement after processing parameter is formulated.

[0052] The above merely illustrates the exemplary embodiments of the present application, and does not limit the patent scope of the present application, and any equivalent structural transformation or direct / indirect application in other related technical fields under the inventive concept of the present application is included in the patent protection scope of the present application.

Claims

1. A forming tool, characterized in that, The cutting part comprises a cutting unit and a chip removal unit arranged on one side of the cutting unit; The cutting unit comprises: an inner blade arranged on an end surface of the cutting part; an outer blade connected with an outer peripheral surface of the cutting part; a forming blade having one end connected with the inner blade and the other end connected with the outer blade, the forming blade being connected with a forming blade relief surface, the forming blade relief surface defining a forming groove, the forming groove being in communication with the chip removal unit; a first chip removal groove, the inner blade being further connected with an inner blade rake surface, the inner blade rake surface forming an inner wall of the first chip removal groove; and a second chip removal groove, the second chip removal groove being in communication with the first chip removal groove, the outer blade being connected with an outer blade rake surface, the forming blade being connected with a forming blade rake surface, the outer blade rake surface and the forming blade rake surface forming an inner wall of the second chip removal groove.

2. The forming tool of claim 1 wherein, The inner blade is connected with an inner blade relief surface, and an included angle between a cross section of the cutting part along an axial direction and the inner blade relief surface at the inner blade is 80-86 degrees.

3. The forming tool of claim 1 wherein, The second chip removal groove is arranged in a spiral shape.

4. The forming tool of claim 1 wherein, The outer blade is an arc shape protruding towards a rotation direction, the outer blade being connected with an outer blade relief surface, the outer blade relief surface being an arc surface.

5. The forming tool of claim 1 wherein, The cutting part comprises a plurality of groups of the cutting unit and the chip removal unit, and the cutting unit and the chip removal unit are arranged alternately along a circumferential direction of the cutting part.

6. The forming tool of claim 5, wherein, A gap is arranged between two inner blades.

7. The forming tool of claim 5 wherein, The cutting unit and the chip removal unit are respectively arranged in four groups, and the inner blades of opposite two groups of the cutting unit are parallel to each other.

8. A processing apparatus characterized by comprising: The forming tool comprises the forming tool according to any one of claims 1-7.

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