Centering two-dimensional angle adjusting carrier for optical detection

Abstract

The utility model provides a centering two-dimensional angle adjusting carrier for optical detection, and belongs to the technical field of optical detection auxiliary equipment. The centering two-dimensional angle adjusting carrier for optical detection comprises a base, a U-shaped bracket and a clamping structure for clamping a quartz wafer, wherein the U-shaped bracket is horizontally and rotatably connected with the base through a first rotating shaft; the clamping structure is located in the U-shaped support, and the two opposite sides of the clamping structure are connected with the U-shaped support in an up-down deflection mode through second rotating shafts. Through the integrated design of two-dimensional angle adjustment and synchronous centering clamping, all brackets are synchronously driven to be accurately centered, operation is convenient and fast, and the falling risk is avoided; the circumference array structure guarantees the optical axis coincidence precision, and the two-dimensional angle is controllable and adapts to multiple detection scenes; the bracket assembly is stable in clamping and free of stress concentration, and the requirements for high precision and high stability of optical detection are comprehensively met.

Description

TECHNICAL FIELD

[0001] The utility model relates to optical detection auxiliary equipment technical field especially, relate to a kind of optical detection with centering two-dimensional angle adjustment carrier for things. BACKGROUND

[0002] Quartz wafer is clamped on the carrier for things dedicated to detection before optical detection, and is fixed by clamping. A kind of clamping tool of Chinese utility model (name: a clamping tool, announcement number: CN222114887U) includes: support, with round hole;Suspension piece, including the connecting portion and the supporting portion connected;Connecting portion is connected with support;The supporting portion is used to suspend quartz wafer in round hole;Longitudinal adjusting mechanism is used for moving the supporting portion longitudinally;Wherein, the one side of supporting portion has the arc that matches with the circumferential side of quartz wafer, or, the one side of supporting portion has the arc that matches with the circumferential side of quartz wafer after bending;The width of supporting portion matches with the thickness of quartz wafer.Supporting portion and quartz wafer are connected in the mode of surface contact, avoid the influence of detection result due to stress concentration phenomenon.Quartz wafer's vertical height can be adjusted, when detecting quartz wafer of different sizes, the purpose of making the standard mirror component of laser interferometer itself and the optical axis center of quartz wafer coincide is achieved.

[0003] However, when clamping quartz wafer using the clamping tool, three clamping block assemblies need to be manually adjusted respectively to realize the position fixation of wafer, which is tedious, and the repeatability of the coincidence of the optical axis center of quartz wafer and the optical axis center of optical detection instrument is poor, which finally affects the repeatability precision of detection result. Moreover, the operation of manually adjusting three clamping block assemblies to realize the position fixation of quartz wafer also has certain risk, and the incoordination among the three clamping block assemblies can cause the falling of quartz wafer, thereby damaging quartz wafer and related components of optical detection instrument, and easily causing huge loss. UTILITY MODEL CONTENT

[0004] The utility model discloses a centering two-dimensional angle adjustment carrier for optical detection, which is designed in an integrated manner of two-dimensional angle adjustment and synchronous centering clamping, can accurately center all the carriers by synchronous driving, is convenient to operate and avoids the risk of falling, and the circumferential array structure ensures the coincidence precision of optical axis, the two-dimensional angle is controllable and suitable for multiple detection scenarios, the seat assembly stably clamps without stress concentration, and can fully meet the requirements of high precision and high stability for optical detection.

[0005] The utility model discloses the technical scheme that adopts is:

[0006] The utility model provides a centering two -dimensional angle adjustment carrier for optical detection, including base, U type support and clamping structure for clamping quartz wafer, the U type support is connected with base can horizontal rotation through first rotation axis, the clamping structure is located in the U type support, and it includes parallel interval arrangement support plate and synchronous motion adjusting plate, and both set up work window simultaneously or one of them, the support plate and synchronous motion adjusting plate between through second linear adjusting component drive synchronous motion adjusting plate to the center of work window is the rotation center circumferential rotation, the support plate opposite two sides are connected with the U type support can be deflected up and down through second rotation axis, at least three linear slide rails are located between the support plate and the synchronous motion adjusting plate, and the circumferential array is uniformly arranged on the support plate, and the center of circumferential array coincides with the center of work window, the bracket is slidably arranged on each linear slide rail, the synchronous motion adjusting plate is set up with the third circular hole of corresponding linear slide rail, the third support column is vertically arranged on the bracket, the third support column is rolled with the inner wall of corresponding third circular hole through second bearing, and the arc length direction of third circular hole satisfies when the circumferential rotation of synchronous motion adjusting plate, and it drives all the bracket to be close to or away from the center of work window, and the end of the bracket is equipped with the bracket assembly adjacent to the center of work window for lifting fixed quartz wafer.

[0007] The utility model discloses a centering two -dimensional angle adjustment carrier for optical detection, including base, U type support and clamping structure for clamping quartz wafer, the U type support is connected with base can horizontal rotation through first rotation axis, the clamping structure is located in the U type support, and it includes parallel interval arrangement support plate and synchronous motion adjusting plate, and both set up work window simultaneously or one of them, the support plate and synchronous motion adjusting plate between through second linear adjusting component drive synchronous motion adjusting plate to the center of work window is the rotation center circumferential rotation, the support plate opposite two sides are connected with the U type support can be deflected up and down through second rotation axis, at least three linear slide rails are located between the support plate and the synchronous motion adjusting plate, and the circumferential array is uniformly arranged on the support plate, and the center of circumferential array coincides with the center of work window, the bracket is slidably arranged on each linear slide rail, the synchronous motion adjusting plate is set up with the third circular hole of corresponding linear slide rail, the third support column is vertically arranged on the bracket, the third support column is rolled with the inner wall of corresponding third circular hole through second bearing, and the arc length direction of third circular hole satisfies when the circumferential rotation of synchronous motion adjusting plate, and it drives all the bracket to be close to or away from the center of work window, and the end of the bracket is equipped with the bracket assembly adjacent to the center of work window for lifting fixed quartz wafer.

[0008] The utility model discloses a centering two -dimensional angle adjustment carrier for optical detection, including base, U type support and clamping structure for clamping quartz wafer, the U type support is connected with base can horizontal rotation through first rotation axis, the clamping structure is located in the U type support, and it includes parallel interval arrangement support plate and synchronous motion adjusting plate, and both set up work window simultaneously or one of them, the support plate and synchronous motion adjusting plate between through second linear adjusting component drive synchronous motion adjusting plate to the center of work window is the rotation center circumferential rotation, the support plate opposite two sides are connected with the U type support can be deflected up and down through second rotation axis, at least three linear slide rails are located between the support plate and the synchronous motion adjusting plate, and the circumferential array is uniformly arranged on the support plate, and the center of circumferential array coincides with the center of work window, the bracket is slidably arranged on each linear slide rail, the synchronous motion adjusting plate is set up with the third circular hole of corresponding linear slide rail, the third support column is vertically arranged on the bracket, the third support column is rolled with the inner wall of corresponding third circular hole through second bearing, and the arc length direction of third circular hole satisfies when the circumferential rotation of synchronous motion adjusting plate, and it drives all the bracket to be close to or away from the center of work window, and the end of the bracket is equipped with the bracket assembly adjacent to the center of work window for lifting fixed quartz wafer.

[0009] Further, the U-shaped support comprises a bottom plate, a left side plate and a right side plate, the left side plate and the right side plate are vertically arranged on both sides of the bottom plate with the first rotation axis as the mirror symmetry center. The utility model discloses a U-shaped support is constituted by the bottom plate, left side plate and right side plate, and the left and right side plates are arranged with the first rotation axis as the mirror symmetry center, which brings the following beneficial effects: the symmetrical structure makes the U-shaped support balanced force, provides stable and coaxial mounting datum for the clamping structure, ensures the axial center of the second rotation axis and the center of the working window accurate alignment, avoids the angle adjustment error caused by eccentric installation, the vertical connection structure of the bottom plate and the left and right side plates improves the carrying capacity of the U-shaped support, can stably support the clamping structure and the quartz wafer, prevents the centering accuracy from being influenced by the structure shaking during the detection, and the symmetrical design also facilitates processing and assembly, reduces manufacturing errors, indirectly improves the consistency of two-dimensional angle adjustment, provides a reasonable layout basis for the installation of subsequent support reinforcing plates and linear adjustment components, and guarantees the operation stability of the whole equipment.

[0010] Further, the left side plate and the right side plate are provided with a support reinforcing plate. The utility model discloses a support reinforcing plate is additionally arranged between the left side plate and the right side plate, and the core beneficial effect lies in that the structural rigidity and stability of the U-shaped support are strengthened: the deformation or relative displacement of the left and right side plates is avoided when the U-shaped support is used for a long time or bears the weight of the clamping structure and the quartz wafer, the installation accuracy of the second rotation axis is ensured from being influenced by the structural deformation, and then the smoothness and angle accuracy of the up-down deflection of the clamping structure are guaranteed, the stress of the left and right side plates is dispersed by the support reinforcing plate, local stress concentration is reduced, the service life of the U-shaped support is prolonged, and the equipment maintenance cost is reduced, and simultaneously, the stable U-shaped support structure provides a reliable basis for synchronous centering clamping, prevents the deviation of the bracket synchronous movement caused by the shaking of the side plate, guarantees the coincidence accuracy of the optical axis of the quartz wafer and the optical axis of the detection instrument, indirectly improves the repeatability and reliability of the detection result, and adapts to the long-term stable operation demand of optical detection.

[0011] Further, the first arc-shaped hole is provided with a locking bolt matched therein for locking the relative position of the base plate and the base.

[0012] Further, the U-shaped support is provided with a horizontal rotation indication scale at the length direction end of the bottom for indicating the horizontal rotation angle between the U-shaped support and the base; and / or, the U-shaped support is provided with an up-down deflection indication scale at the top outer side for displaying the up-down deflection rotation angle between the clamping structure and the U-shaped support.

[0013] Further, the base and the U-shaped support are provided with a first linear adjustment assembly for driving the U-shaped support to horizontally rotate around the first rotation shaft. The utility model discloses a first linear adjustment assembly is arranged between the base and the bottom plate, and the following key beneficial effects are brought about: the U-shaped support is driven to horizontally rotate through the linear adjustment assembly, manual operation is replaced, the adjustment process is labor-saving and accurate, subjective error of manual operation is avoided, and the angle control precision of horizontal rotation is greatly improved, the driving mode of the linear adjustment assembly can realize fine adjustment and controllable adjustment of the angle, the demand of optical detection to small angle adjustment is satisfied, and the coincidence precision of the optical axis is further ensured, simultaneously, the fixed and movable connection design of the adjustment assembly ensures that horizontal rotation is smooth and the structure is stable, avoids the jam or displacement deviation in the adjustment process, improves operation efficiency and equipment reliability, and angle adjustment can be completed without the cooperation of multiple persons, the detection process is simplified, and the use scene of batch detection or high-frequency adjustment is adapted.

[0014] Further, the U-shaped support and the support plate are provided with a third linear adjustment assembly for driving the support plate to deflect and rotate around the second rotation shaft. The utility model discloses a third linear adjustment assembly is arranged between the U-shaped support and the support plate, and the core beneficial effect lies in improving the pitch angle adjustment function of the clamping structure: the support plate is driven to deflect and rotate around the second rotation shaft through the linear adjustment assembly, manual adjustment is replaced, accurate and controllable adjustment of the pitch angle is realized, and the angle error caused by manual operation is avoided, the driving mode of the adjustment assembly can realize small angle fine adjustment, the strict requirement of optical detection to different pitch angles is satisfied, and the posture stability of the quartz wafer in the detection process is ensured, simultaneously, the fixed and movable connection design of the assembly ensures that the pitch angle adjustment is smooth and the structure is stable, avoids rebound or displacement after adjustment, improves the repeatability and reliability of angle adjustment, cooperates with horizontal rotation adjustment, forms a complete two-dimensional angle adjustment system, and fully satisfies the posture adjustment demand of optical detection.

[0015] Further, at least two or three first supporting columns are vertically arranged on the support plate around the working window, and at least three or two second supporting columns are correspondingly arranged; the top of the first supporting column is provided with a universal ball which is in rolling contact with the synchronous motion adjusting plate; the synchronous motion adjusting plate is provided with second arc-shaped holes corresponding to the second supporting columns, and the centers of curvature of the second arc-shaped holes coincide with the center of the working window; the second supporting columns are in rolling contact with the inner walls of the second arc-shaped holes through second bearings, and the top ends of the second supporting columns are provided with gland nuts which are in contact with the side of the synchronous motion adjusting plate away from the support plate.

[0016] Further, at least one fourth supporting column is vertically arranged on the support plate, the fourth supporting column passes through a corresponding second arc-shaped hole, and the top end of the fourth supporting column is provided with a pressing handle and a pressing part; the pressing handle is used to drive the pressing part to abut against the synchronous motion adjusting plate to lock the circumferential rotation state of the synchronous motion adjusting plate. Through the design of the fourth supporting column, the pressing handle and the pressing part, the core beneficial effect is to strengthen the state locking reliability of the synchronous motion adjusting plate: after clamping the wafer, the pressing handle can be actuated to drive the pressing part to abut against the synchronous motion adjusting plate, so that the circumferential rotation state of the synchronous motion adjusting plate is quickly locked, and the adjusting plate is prevented from being accidentally rotated due to equipment vibration or external interference during the detection process, thereby preventing the wafer from falling due to the loosening of the bracket; the locking operation does not require complex tools, is convenient and efficient, and meets the requirement of quick clamping and locking during the detection process; at the same time, the pressing type locking mode does not damage the synchronous motion adjusting plate or the supporting column structure, and only needs to actuate the pressing handle in the reverse direction when unlocking, so that the locking firmness and the operation flexibility are considered; in addition, the locking structure ensures the stable clamping of the wafer by the bracket, avoids the centering deviation caused by the slight movement of the adjusting plate, guarantees the coincidence precision of the optical axis, and improves the reliability of the detection result.

[0017] Further, the bracket is L-shaped, the support assembly is arranged on the part of the bracket extending along the through direction of the working window, and comprises a guide rail, a clamping fixed seat, a clamping sliding seat and an adjusting lead screw; the clamping fixed seat and the clamping sliding seat are arranged on the guide rail in a matched mode, and the adjusting lead screw passes through the clamping sliding seat and is movably connected with the clamping fixed seat, so as to adjust the distance between the clamping fixed seat and the clamping sliding seat to adapt to quartz wafers of different thicknesses. Through the design of the L-shaped bracket and the adjustable support assembly, the adaptability and stability are improved: the structure of the L-shaped bracket adapts to the circumferential support requirement of the quartz wafer, the part extending along the through direction of the working window provides a reasonable installation position for the support assembly, so that the stress of the wafer is balanced during lifting, and the local stress concentration is reduced; the adjusting lead screw of the support assembly can flexibly adjust the distance between the clamping fixed seat and the clamping sliding seat, can adapt to quartz wafers of different thicknesses, greatly expands the application range of the object carrier, does not need to replace special clamps for wafers of different thicknesses, and reduces the detection cost; the adjusting mode of the adjusting lead screw is accurately controllable, the wafer can be fixed at a proper tightness during clamping, the clamping stability is ensured, and the quartz wafer surface is prevented from being damaged due to excessive clamping, so that the sample during detection is protected; meanwhile, the stable clamping structure further ensures the position stability of the wafer after centering, avoids the light axis deviation caused by loose clamping during detection, improves the repeatability and accuracy of the detection result, and takes into account the adaptability, protection and accuracy. BRIEF DESCRIPTION OF DRAWINGS

[0018] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings needed to be used in the embodiments or prior art description. Obviously, the drawings in the following description only some embodiments of the present application, and for those skilled in the art, other drawings can be obtained without creative labor on the basis of these drawings.

[0019] Figure 1 It is a front view of the centering two-dimensional angle adjustment object carrier for optical detection in the embodiment.

[0020] Figure 2 It is a rear view of the centering two-dimensional angle adjustment object carrier for optical detection in the embodiment.

[0021] Figure 3 It is a top view of the centering two-dimensional angle adjustment object carrier for optical detection in the embodiment.

[0022] Figure 4 It is a three-dimensional structure schematic of the centering two-dimensional angle adjustment object carrier for optical detection in the embodiment Figure 1 .

[0023] Figure 5 It is a three-dimensional structure schematic of the centering two-dimensional angle adjustment object carrier for optical detection in the embodiment Figure 2.

[0024] Figure 6 Three-dimensional structure schematic view of the centering two-dimensional angle adjustment carrier for optical detection when the synchronous motion adjusting plate is hidden in the embodiment.

[0025] The reference signs are:

[0026] 100, base; 200, U-shaped support; 300, clamping structure;

[0027] 110, first rotating shaft;

[0028] 210, bottom plate; 211, first arc-shaped hole; 212, locking bolt; 220, left side plate; 221, up-down deflection indication scale; 230, right side plate; 240, horizontal rotation indication scale; 250, first linear adjustment assembly; 251, fixed seat; 252, adjusting screw rod; 253, hinged joint; 254, hinged seat; 260, support reinforcing plate;

[0029] 310, support plate; 311, first working window; 312, second rotating shaft; 313, linear slide rail; 314, bracket; 315, support seat assembly; 3151, guide rail; 3152, clamping fixed seat; 3153, clamping sliding seat; 3154, adjusting lead screw; 316, first support column; 3161, universal ball; 317, second support column; 3171, first bearing; 3172, gland; 318, fourth support column; 3181, pressing handle; 3182, pressing part;

[0030] 320, synchronous motion adjusting plate; 321, second working window; 322, second arc-shaped hole; 323, third arc-shaped hole; 324, third support column; 3241, second bearing; 330, second linear adjustment assembly; 340, third linear adjustment assembly. DETAILED DESCRIPTION

[0031] In the description of the present application, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0032] The following disclosure provides many different embodiments or examples for implementing various structures of this invention. To simplify the disclosure, specific examples of components and arrangements are described below. Of course, these are merely examples and are not intended to limit the scope of this invention.

[0033] The embodiments of the utility model will now be described in detail with reference to the accompanying drawings.

[0034] Figure 1 This is a front view of the centering two-dimensional angle adjustment carrier for optical detection in the embodiment. Figure 2 This is a rear view of the centering two-dimensional angle adjustment carrier for optical detection in the embodiment. Figure 3 This is a top view of the centering two-dimensional angle adjustment carrier for optical detection in the embodiment. Figure 4 This is a schematic diagram of the three-dimensional structure of the centering two-dimensional angle adjustment carrier for optical detection in the embodiment. Figure 1 . Figure 5 This is a schematic diagram of the three-dimensional structure of the centering two-dimensional angle adjustment carrier for optical detection in the embodiment. Figure 2 . Figure 6 This is a three-dimensional structural diagram of the centering two-dimensional angle adjustment carrier for optical detection when the synchronous motion adjustment plate is hidden, as shown in the embodiment. Figures 1 to 6 As shown, the optical detection centering two-dimensional angle adjustment carrier includes a base 100 and a U-shaped support 200. The U-shaped support 200 includes a rectangular base plate 210, a left side plate 220, and a right side plate 230. The base plate 210 is located on the upper surface of the base 100, and a first rotation axis 110 is vertically arranged between the two; thus, the base plate 210 and the base 100 can rotate horizontally about the first rotation axis 110 as the center of rotation. The left side plate 220 and the right side plate 230 are vertically arranged on opposite sides of the base plate 210 along its length about the first rotation axis 110 as the center of mirror symmetry, and cooperate with the base plate 210 to form a U-shaped structure.

[0035] like Figures 4 to 6As shown in FIG. 2, in order to better indicate the horizontal rotation angle between the base plate 210 and the base 100, the two ends of the base plate 210 in the length direction are respectively provided with horizontal rotation indication scales 240. At the same time, in order to keep the position of the base plate 210 and the base 100 fixed after the horizontal rotation angle between them meets the test requirements, the two ends of the base plate 210 in the length direction are respectively provided with first arc-shaped holes 211 near the two ends. The centers of curvature of the two first arc-shaped holes 211 coincide with the axial center of the first rotation shaft 110, and a cooperating locking bolt 212 is arranged in the first arc-shaped hole 211. The lower part of the locking bolt 212 is threadedly connected with the base 100. Thus, when the horizontal rotation angle between the base plate 210 and the base 100 meets the test requirements, the state of the base plate 210 and the base 100 can be locked by tightening the locking bolt 212 to prevent further horizontal rotation. It should be noted that in the present embodiment, according to requirements, only one end of the base plate 210 in the length direction can be provided with a horizontal rotation indication scale 240. Similarly, in the present embodiment, according to requirements, only one end of the base plate 210 in the length direction can be provided with a first arc-shaped hole 211 and a cooperating locking bolt 212. Similarly, in the present embodiment, the arc length of the first arc-shaped hole 211 can be set according to the horizontal rotation requirements.

[0036] As shown in FIG. 2, Figures 1 to 6 As shown in FIG. 2, in order to make the horizontal rotation between the base plate 210 and the base 100 in a controlled adjustment state, a first linear adjustment assembly 250 is arranged between the edge of the base plate 210 and the corresponding edge of the base 100 in the groove length direction of the U-shaped support 200. One end of the linear motion part of the first linear adjustment assembly 250 is movably connected with the edge of the base plate 210, and the remaining fixed part is connected with the base 100. The linear movement direction of the first linear adjustment assembly 250 is not towards the axial center of the first rotation shaft 110, thereby forming a force arm. Thus, the linear motion part of the first linear adjustment assembly 250 can drive the base plate 210 to rotate horizontally around the first rotation shaft 110. It should be noted that in the present embodiment, according to requirements, one end of the linear motion part of the first linear adjustment assembly 250 can also be movably connected with the edge of the base 100, and the remaining fixed part can be connected with the base plate 210. Similarly, the first linear adjustment assembly 250 in the present embodiment is a structure disclosed in the prior art that can realize linear adjustment function, such as the combination of a cylinder, a fixed seat and a hinged seat, or the combination of a screw rod, a fixed seat and a hinged seat. For example, Figures 4 to 6As shown in the figure, the first linear adjustment assembly 250 comprises a fixed seat 251, an adjustment screw 252, a hinged joint 253 and a hinged seat 254; wherein the fixed seat 251 is arranged on the base 100, and the hinged seat 254 is arranged on the bottom plate 210; the hinged joint 253 is matched with a hole on the hinged seat 254 through a hinged shaft (the arrangement mode and form of the hole are conventional technical means in the art, and the size matching of the hinged joint 253 and the hinged seat 254 is also conventional technical means in the art), to realize the need for giving way during hinging and horizontal rotation; the adjustment screw 252 is threadedly connected with the fixed seat 251, and the free end thereof is rotationally connected with the hinged joint 253. Similarly, the number of the first linear adjustment assembly 250 can be arranged according to requirements, for example, one set of first linear adjustment assembly 250 is arranged on each side of the bottom plate 210, and adjustment is also simultaneously performed.

[0037] As shown in the figure, Figures 1 to 6 As shown in the figure, in order to improve the stability of the structure between the left side plate 220 and the right side plate 230, a support reinforcing plate 260 is further arranged between the left side plate 220 and the right side plate 230 in the embodiment. It should be noted that the number of the support reinforcing plate 260 is not specifically limited in the embodiment, and the position thereof only needs to satisfy that it does not affect the clamping of the quartz wafer.

[0038] As shown in the figure, Figures 1 to 6 As shown in the figure, a clamping structure 300 for clamping the quartz wafer is arranged in the inner side region of the U-shaped support 200, and the opposite two sides of the clamping structure 300 are connected with the two sides of the U-shaped support 200, i.e. the left side plate 220 and the right side plate 230, thereby the clamping structure 300 can be deflected and rotated up and down around the shaft connection point, to change the pitch angle. In the embodiment, two-dimensional angle adjustment is realized through the horizontal rotation of the U-shaped support 200 and the up and down deflection rotation of the clamping structure 300, to meet the requirements of optical detection.

[0039] As shown in the figure, Figures 1 to 6As shown in the middle, the clamping structure 300 includes a support plate 310 and a synchronous movement adjusting plate 320 arranged in parallel. The middle of the support plate 310 is provided with a circular first working window 311, and the opposite sides thereof are connected with the adjacent left side plate 220 and right side plate 230 through second rotating shafts 312, respectively. The axial centers of the two second rotating shafts 312 coincide, and the axial center of the first rotating shaft 110 and the axial center of the second rotating shaft 312 are perpendicular to each other, and the intersection point is the center of the first working window 311. Moreover, an up-down deflection indication scale 221 is arranged on the outer side (i.e. the side away from the right side plate 230) of the top of the left side plate 220 to display the up-down deflection rotation angle of the support plate 310. Meanwhile, three linear slide rails 313 are uniformly arranged on the support plate 310 in a circular array manner with the center of the first working window 311 as the center; the length direction of each linear slide rail 313 is towards the diameter direction of the first working window 311, and each is provided with a matched L-shaped bracket 314, and the bracket 314 is provided with a bracket assembly 315 on the part adjacent to the center of the first working window 311 and extending along the through direction of the first working window 311. When the three brackets 314 are simultaneously close to the center of the first working window 311, the three bracket assemblies 315 can lift the quartz wafer, so that the position of the quartz wafer is the same each time, the repeatability of the coincidence of the optical axis center of the quartz wafer and the optical axis center of the optical detection instrument is high, the repeatability precision of the detection result is high, and the risk of the quartz wafer falling is low.

[0040] As Figures 1 to 6As shown in the middle, the synchronous motion adjusting plate 320 is located on the side of the support plate 310 where the linear slide rail 313 is located, and there is a certain gap between the two, and the support plate 310 is provided with 8 first support columns 316 in a circumferential manner with the center of the first working window 311; the bottom end of the first support column 316 is connected vertically with the support plate 310, and the top end is provided with a universal ball 3161, which is in rolling contact with the synchronous motion adjusting plate 320. The synchronous motion adjusting plate 320 is also provided with a circular second working window 321, and the axial through center of the second working window 321 coincides with the axial through center of the first working window 311. Three second arc-shaped holes 322 are also uniformly provided on the synchronous motion adjusting plate 320, and the center of curvature of the second arc-shaped hole 322 coincides with the center of the second working window 321. The support plate 310 is uniformly provided with 3 second support columns 317 in a circumferential manner with the center of the first working window 311, corresponding to one second arc-shaped hole 322 respectively; the bottom end of the second support column 317 is connected vertically with the support plate 310, and a first bearing 3171 is sleeved thereon, which is in rolling contact with the inner wall of the corresponding second arc-shaped hole 322; at the same time, the top end of the second support column 317 is provided with a gland 3172, and the edge of the gland 3172 is in contact with the side of the synchronous motion adjusting plate 320 away from the support plate 310; thus, the cooperation between the universal ball 3161 on the first support column 316 and the first bearing 3171 and the gland 3172 on the second support column 317 makes the parallel structure of the support plate 310 and the synchronous motion adjusting plate 320 stable. At the same time, a second linear adjusting assembly 330 is also provided between the support plate 310 and the synchronous motion adjusting plate 320; one end of the linearly moving part of the second linear adjusting assembly 330 is movably connected with the synchronous motion adjusting plate 320, and the remaining fixed part is connected with the support plate 310, and the linear moving direction of the second linear adjusting assembly 330 is not towards the center of the second working window 321, thereby forming a force arm; thus, the second linear adjusting assembly 330 can push the synchronous motion adjusting plate 320 to rotate circumferentially.In order to utilize the synchronous movement adjusting plate 320 to rotate circumferentially, the three brackets 314 are simultaneously driven to move linearly towards or away from the center of the first work window 311. Three third arc-shaped holes 323 are formed on the synchronous movement adjusting plate 320, which correspond to the positions of the three linear sliding rails 313. A third supporting column 324 is vertically arranged on the part of each bracket 314 that is in sliding connection with the linear sliding rail 313. The upper end of the third supporting column 324 is sleeved with a second bearing 3241, which is in rolling contact with the inner wall of the third arc-shaped hole 323. The arc length of the third arc-shaped hole 323 needs to meet the requirement that when the synchronous movement adjusting plate 320 rotates circumferentially, the three third supporting columns 324 and the three brackets 314 are simultaneously driven to move linearly towards or away from the center of the first work window 311, thereby completing the clamping and centering of the quartz wafer or removing the quartz wafer. It should be noted that, in this embodiment, a circular first work window 311 can also be formed in the middle of the supporting plate 310, or a circular second work window 321 can be formed on the synchronous movement adjusting plate 320. Similarly, the arc length of the second arc-shaped hole 322 and the third arc-shaped hole 323 in this embodiment needs to meet the requirement that when the second linear adjusting assembly 330 pushes the synchronous movement adjusting plate 320 to rotate circumferentially and simultaneously drives the three brackets 314 to move, the arc length can be adjusted according to the requirement. Similarly, the number of first supporting columns 316 in this embodiment is at least two or three, and the number of second arc-shaped holes 322 and the corresponding second supporting columns 317 is at least three or two, and the specific number can be set according to the requirement. The number of linear sliding rails 313 and the corresponding brackets 314 in this embodiment is at least three, and the number of third arc-shaped holes 323 and the corresponding third supporting columns 324 is consistent with the number of brackets 314, and the specific number can be set according to the requirement. Similarly, the structure of the second linear adjusting assembly 330 in this embodiment is similar to that of the first linear adjusting assembly 250, and can be adaptively obtained according to the installation and rotation requirement without creative labor.

[0041] As shown in Figures 1 to 6 In order to realize the controlled adjustment of the pitch angle of the clamping structure 300, a third linear adjusting assembly 340 is arranged between the lower edge of the supporting plate 310 and the bottom plate 210. The end of the part of the third linear adjusting assembly 340 that moves linearly is movably connected with the supporting plate 310, and the remaining fixed part is connected with the bottom plate 210. In this embodiment, the structure of the third linear adjusting assembly 340 is similar to that of the first linear adjusting assembly, and can be adaptively obtained according to the installation and rotation requirement without creative labor.

[0042] As shown in Figures 1 to 6As shown in FIG. 15, the holder assembly 315 in the embodiment includes a guide rail 3151, a clamping fixed seat 3152, a clamping sliding seat 3153, and an adjusting screw 3154; the clamping fixed seat 3152 and the clamping sliding seat 3153 are cooperatively arranged on the guide rail 3151, the adjusting screw 3154 passes through the clamping sliding seat 3153 and is movably connected with the clamping fixed seat 3152, so that rotating the adjusting screw 3154 can change the distance between the clamping fixed seat 3152 and the clamping sliding seat 3153 to adapt to the clamping of quartz wafers with different thicknesses.

[0043] As shown in FIG. 15, the holder assembly 315 in the embodiment includes a guide rail 3151, a clamping fixed seat 3152, a clamping sliding seat 3153, and an adjusting screw 3154; the clamping fixed seat 3152 and the clamping sliding seat 3153 are cooperatively arranged on the guide rail 3151, the adjusting screw 3154 passes through the clamping sliding seat 3153 and is movably connected with the clamping fixed seat 3152, so that rotating the adjusting screw 3154 can change the distance between the clamping fixed seat 3152 and the clamping sliding seat 3153 to adapt to the clamping of quartz wafers with different thicknesses. ​ As shown in FIG. 15, the holder assembly 315 in the embodiment includes a guide rail 3151, a clamping fixed seat 3152, a clamping sliding seat 3153, and an adjusting screw 3154; the clamping fixed seat 3152 and the clamping sliding seat 3153 are cooperatively arranged on the guide rail 3151, the adjusting screw 3154 passes through the clamping sliding seat 3153 and is movably connected with the clamping fixed seat 3152, so that rotating the adjusting screw 3154 can change the distance between the clamping fixed seat 3152 and the clamping sliding seat 3153 to adapt to the clamping of quartz wafers with different thicknesses.

[0044] When fixing the quartz wafer using the centering two-dimensional angle adjustment object holder for optical detection in the present example, first, the horizontal rotation of the U-shaped support 200 is rotated to a specified angle using the first linear adjustment assembly 250, then the pitch angle of the clamping structure 300 is adjusted to a specified angle using the third linear adjustment assembly 340, then the quartz wafer is manually lifted between the three holders 314, the circumferential rotation of the synchronous motion adjusting plate 320 is pushed using the second linear adjustment assembly 330, the three third support columns 324 and the three holders 314 are simultaneously driven to move linearly towards the center of the first working window 311 by the third arc-shaped hole 323, and the edges of the quartz glass wafer are clamped and held by the holder assembly 315, the complete quartz wafer is clamped, finally, the clamping part 3182 is tightened against the side of the synchronous motion adjusting plate 320 away from the support plate 310 by rotating the tightening handle 3181, so that the state of the synchronous motion adjusting plate 320 is locked. When removing the quartz wafer, first, the clamping part 3182 is loosened, the quartz wafer is manually held, the circumferential rotation of the synchronous motion adjusting plate 320 is pushed in the opposite direction using the second linear adjustment assembly 330, and the three holders 314 move linearly away from the center of the first working window 311.

Claims

1. A centering two-dimensional angle adjustment carrier for optical detection, comprising a base, a U-shaped support and a clamping structure for clamping a quartz disc, characterized in that The U-shaped support is horizontally rotatably connected with the base through a first rotating shaft; the clamping structure is located in the U-shaped support and includes support plates and synchronous movement adjusting plates which are arranged in parallel and at intervals, and both or one of which is provided with a work window; the support plates and the synchronous movement adjusting plates are driven by a second linear adjusting assembly to rotate the synchronous movement adjusting plates in a circumferential direction with the center of the work window as a rotating center; the opposite sides of the support plates are up-and-down deflectably connected with the U-shaped support through a second rotating shaft; at least three linear sliding rails are located between the support plates and the synchronous movement adjusting plates, are evenly arranged on the support plates in a circumferential array mode, and the center of the circumferential array coincides with the center of the work window; a bracket is slidably arranged on each linear sliding rail; the synchronous movement adjusting plate is provided with a third circular arc hole corresponding to the linear sliding rail; a third supporting column is vertically arranged on the bracket, and the third supporting column is rollingly matched with the inner wall of the corresponding third circular arc hole through a second bearing; the arc length direction of the third circular arc hole satisfies that when the synchronous movement adjusting plate rotates in the circumferential direction, it synchronously drives all the brackets to approach or move away from the center of the work window; one end of the bracket adjacent to the center of the work window is provided with a bracket seat assembly for lifting and fixing a quartz wafer.

2. The centering two-dimensional angle adjustment object holder for optical detection according to claim 1, characterized in that The U-shaped support includes a bottom plate, a left side plate and a right side plate, and the left side plate and the right side plate are vertically arranged on both sides of the bottom plate in a length direction as a mirror image symmetry center of the first rotating shaft.

3. The centering two-dimensional angle adjustment object holder for optical detection according to claim 2, characterized in that A supporting reinforcing plate is arranged between the left side plate and the right side plate.

4. The centering two-dimensional angle adjustment object holder for optical detection according to claim 2, characterized in that A first arc-shaped hole is arranged near the end of the bottom plate in the length direction, and the curvature center of the first arc-shaped hole coincides with the axial center of the first rotating shaft; a locking bolt is matched with the first arc-shaped hole, and is used for locking the relative position of the bottom plate and the base.

5. The centering two-dimensional angle adjustment carrier for optical detection according to any one of claims 1 to 4, characterized in that A horizontal rotating indication scale is arranged on the length direction end of the bottom of the U-shaped support, and is used for indicating the horizontal rotating angle between the U-shaped support and the base. And / or, an up-and-down deflection indication scale is arranged on the outside of the top of the U-shaped support, and is used for displaying the up-and-down deflection rotating angle between the clamping structure and the U-shaped support.

6. The centering two-dimensional angle adjustment object holder for optical detection according to claim 1, characterized in that A first linear adjusting assembly is arranged between the base and the U-shaped support, and is used for driving the U-shaped support to horizontally rotate around the first rotating shaft.

7. The centering two-dimensional angle adjustment object holder for optical inspection according to any one of claims 1 to 4 and 6, characterized in that A third linear adjusting assembly is arranged between the U-shaped support and the support plate, and is used for driving the support plate to up-and-down deflectively rotate around the second rotating shaft.

8. The centering two-dimensional angle adjustment object holder for optical inspection according to any one of claims 1 to 4 and 6, characterized in that At least two or three first supporting columns and at least three or two second supporting columns are vertically arranged around the work window on the support plate; a universal ball is arranged on the top of the first supporting column, and the universal ball is rollingly matched with the synchronous movement adjusting plate; a second arc-shaped hole corresponding to the second supporting column is arranged on the synchronous movement adjusting plate, and the curvature center of the second arc-shaped hole coincides with the center of the work window; the second supporting column is rollingly matched with the inner wall of the second arc-shaped hole through a second bearing, and a gland is arranged on the top end of the second supporting column, and the gland is in contact with the side of the synchronous movement adjusting plate away from the support plate.

9. The centering two-dimensional angle adjustment object holder for optical detection according to claim 8, characterized in that At least one fourth supporting column is vertically arranged on the supporting plate, and the fourth supporting column passes through a corresponding second arc-shaped hole, and a pressing handle and a pressing part are arranged on the top of the fourth supporting column, the pressing handle is used to drive the pressing part to abut against the synchronous movement adjusting plate to lock the circumferential rotation state of the synchronous movement adjusting plate.

10. The centering two-dimensional angle adjustment specimen holder for optical testing according to any one of claims 1 to 3 and 6, characterized in that The bracket is L-shaped, the bracket assembly is arranged on the part of the bracket extending along the through direction of the working window, and the bracket assembly comprises a guide rail, a clamping fixed seat, a clamping sliding seat and an adjusting lead screw; the clamping fixed seat and the clamping sliding seat are arranged on the guide rail in a matched mode, and the adjusting lead screw passes through the clamping sliding seat and is movably connected with the clamping fixed seat, so that the distance between the clamping fixed seat and the clamping sliding seat can be adjusted to adapt to quartz wafers with different thicknesses.

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