Device for observing liquid opening distance of single crystal furnace

Abstract

The utility model discloses a single crystal furnace liquid opening distance observation device which comprises an observation head, a focusing adjusting cylinder, a magnifying lens, a focusing adjusting knob, a scale lens adjusting cylinder, a scale lens, a scale lens adjusting knob and a lens body mounting cylinder, and the outer peripheral wall of the focusing adjusting cylinder is rotationally connected with the inner peripheral wall of the observation head; the magnifying lens is located between the limiting folded edge and the upper end face of the focusing adjusting cylinder; the inner peripheral wall of the upper end of the focusing adjusting knob is rotationally connected with the outer peripheral wall of the focusing adjusting cylinder; the scale mirror is mounted at the lower end of the scale mirror adjusting barrel, and the tail ends of scale marks of the scale mirror are connected to form a circular boundary positioning line; the inner peripheral wall of the upper end of the scale mirror adjusting knob is rotationally connected with the outer peripheral wall of the scale mirror adjusting cylinder; and the lower end of the mirror body mounting cylinder is mounted on an observation window of the single crystal furnace. According to the technical scheme, the observation device is arranged on the observation window, the liquid outlet distance can be accurately measured, the observation device can accurately measure the liquid outlet distance simply by manpower, convenience and rapidness are achieved, and cost is saved.

Description

TECHNICAL FIELD

[0001] The utility model relates to monocrystal silicon preparation technical field, especially a kind of observation device of single crystal furnace liquid port distance. BACKGROUND

[0002] Liquid port distance is one of important process parameters in Czochralski silicon, and liquid port distance has important influence on crystal growth and crystal bar quality;Due to the influence of high temperature and complex environment, the traditional observation device has many inconveniences and limitations. For example, using CCD camera to measure liquid port distance is to fix CCD camera on single crystal furnace, to capture the boundary point of the lower edge of flow guide cylinder and the pixel value of its corresponding inverted point in molten silicon by CCD camera, to determine liquid port distance according to pixel distance and preset coefficient. Therefore, using CCD camera to measure liquid port distance needs the cooperation of other parts of measurement system, which leads to low measurement efficiency of liquid port distance and easy systematic risk.

[0003] Therefore, designing an observation device of single crystal furnace liquid port distance to improve the measurement efficiency of liquid port distance is a problem to be solved by the present technical personnel. UTILITY MODEL CONTENT

[0004] Therefore, the utility model provides an observation device of single crystal furnace liquid port distance to improve the measurement efficiency of liquid port distance.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical scheme:

[0006] An observation device of single crystal furnace liquid port distance comprises:

[0007] Observation head, the observation head is cylindrical structure, and the upper end edge of the observation head is folded to form limiting fold edge to the center;

[0008] Focusing adjusting cylinder, the outer peripheral wall of the focusing adjusting cylinder is rotationally connected with the inner peripheral wall of the observation head;

[0009] Magnifying glass, the magnifying glass is located between the limiting fold edge and the upper end surface of the focusing adjusting cylinder;

[0010] Focusing adjusting knob, the focusing adjusting knob is cylindrical structure, the upper end inner peripheral wall of the focusing adjusting knob is rotationally connected with the outer peripheral wall of the focusing adjusting cylinder, so that the focusing adjusting knob can drive the focusing adjusting cylinder to move axially;And the lower end inner peripheral wall of the focusing adjusting knob has focusing knob limiting groove;

[0011] Scale mirror adjusting cylinder, the upper end outer peripheral wall of the scale mirror adjusting cylinder has scale mirror adjusting cylinder limiting protrusion, the focusing knob limiting groove is rotationally connected with the scale mirror adjusting cylinder limiting protrusion, and the lower end inner peripheral wall of the scale mirror adjusting cylinder is provided with scale mirror adjusting cylinder mounting groove.

[0012] A scale mirror is installed in the scale mirror adjusting cylinder mounting groove. The scale mirror is a lens, and the scale line ends of the scale mirror are connected to form a circular boundary positioning line.

[0013] An upper end inner peripheral wall of the scale mirror adjusting knob is rotationally connected with an outer peripheral wall of the scale mirror adjusting cylinder, so that the scale mirror adjusting knob can drive the scale mirror adjusting cylinder to move axially. A lower end inner peripheral wall of the scale mirror adjusting knob has a scale mirror knob limiting groove.

[0014] An upper end of the mirror body mounting cylinder has a mounting cylinder limiting protrusion, which is rotationally connected with the scale mirror knob limiting groove. A lower end of the mirror body mounting cylinder is used to be mounted on an observation window of a single crystal furnace.

[0015] Preferably, the inner peripheral wall of the observation head and the outer peripheral wall of the focusing adjusting cylinder are connected by threads to realize the rotation connection therebetween. One of the inner peripheral wall of the observation head and the outer peripheral wall of the focusing adjusting cylinder is provided with internal threads, and the other is provided with external threads.

[0016] Preferably, the upper end inner peripheral wall of the focusing adjusting knob and the outer peripheral wall of the focusing adjusting cylinder are connected by threads to realize the rotation connection therebetween. One of the upper end inner peripheral wall of the focusing adjusting knob and the outer peripheral wall of the focusing adjusting cylinder is provided with internal threads, and the other is provided with external threads.

[0017] Preferably, the upper end inner peripheral wall of the scale mirror adjusting knob and the outer peripheral wall of the scale mirror adjusting cylinder are connected by threads to realize the rotation therebetween. One of the upper end inner peripheral wall of the scale mirror adjusting knob and the outer peripheral wall of the scale mirror adjusting cylinder is provided with internal threads, and the other is provided with external threads.

[0018] Preferably, the magnifying lens is a convex lens, and the convex surface of the convex lens faces the scale mirror.

[0019] Preferably, the observation head, the magnifying lens, the focusing adjusting cylinder, the focusing adjusting knob, the scale mirror adjusting cylinder, the scale mirror adjusting knob, the mirror body mounting cylinder and the scale mirror are coaxially arranged.

[0020] Preferably, the outer peripheral wall of the focusing adjusting cylinder is provided with a focusing adjusting cylinder positioning guide groove along the axial direction thereof.

[0021] The inner peripheral wall of the scale mirror adjusting cylinder is provided with a scale mirror adjusting cylinder positioning guide protrusion along the axial direction thereof, and the scale mirror adjusting cylinder positioning guide protrusion is slidably connected with the focusing adjusting cylinder positioning guide groove.

[0022] Preferably, the outer peripheral wall of the scale mirror adjusting cylinder is provided with a scale mirror adjusting cylinder positioning guide groove along the axial direction thereof;

[0023] The inner peripheral wall of the mirror body mounting cylinder is provided with a mounting cylinder positioning guide protrusion along the axial direction thereof, and the mounting cylinder positioning guide protrusion and the scale mirror adjusting cylinder positioning guide groove are in sliding connection.

[0024] Preferably, the lower end of the mirror body mounting cylinder is fixed to the observation window through a fixing support.

[0025] Preferably, the fixing support is provided with a support positioning protrusion, and the outer peripheral wall of the mirror body mounting cylinder is provided with a mounting cylinder guide groove along the axial direction thereof, which can be clamped into the support positioning protrusion.

[0026] It can be seen from the above technical solution that the observation device provided by the utility model can accurately measure the liquid port distance, avoids inaccurate measurement of the liquid port distance by using a CCD camera, and can accurately measure the liquid port distance by manual operation only, which is convenient, fast and cost-saving. BRIEF DESCRIPTION OF DRAWINGS

[0027] In order to more clearly illustrate the technical solutions in the embodiments of the utility model or the prior art, the drawings needed to be used in the embodiments or the prior art description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the utility model, and other drawings can be obtained by those skilled in the art without creative labor on the premise of not paying creative labor.

[0028] Figure 1 The perspective view of the observation device provided by the embodiment of the utility model is shown in the drawings;

[0029] Figure 2 The cross-sectional view of the observation device provided by the embodiment of the utility model is shown in the drawings;

[0030] Figure 3 The cross-sectional view of the observation head provided by the embodiment of the utility model is shown in the drawings;

[0031] Figure 4 The front view of the magnifying glass provided by the embodiment of the utility model is shown in the drawings;

[0032] Figure 5 The perspective view of the focusing adjusting cylinder provided by the embodiment of the utility model is shown in the drawings;

[0033] Figure 6 The cross-sectional view of the focusing adjusting knob provided by the embodiment of the utility model is shown in the drawings;

[0034] Figure 7The sectional view of the scale mirror adjusting cylinder is provided for the embodiment of the utility model;

[0035] Figure 8 The sectional view of the scale mirror adjusting cylinder is provided for the embodiment of the utility model;

[0036] Figure 9 The sectional view of the scale mirror adjusting cylinder is provided for the embodiment of the utility model;

[0037] Figure 10 The sectional view of the scale mirror adjusting cylinder is provided for the embodiment of the utility model;

[0038] Figure 11 The sectional view of the scale mirror adjusting cylinder is provided for the embodiment of the utility model;

[0039] Figure 12 The sectional view of the scale mirror adjusting cylinder is provided for the embodiment of the utility model;

[0040] Figure 13 The sectional view of the scale mirror adjusting cylinder is provided for the embodiment of the utility model;

[0041] Figure 14 The sectional view of the scale mirror adjusting cylinder is provided for the embodiment of the utility model;

[0042] Figure 15 The sectional view of the scale mirror adjusting cylinder is provided for the embodiment of the utility model;

[0043] The meanings of various reference numerals in the drawing are as follows:

[0044] 1 is an observation head, and 11 is a limiting folded edge;

[0045] 2 is a magnifying glass;

[0046] 3 is a focusing adjusting cylinder, and 31 is a focusing adjusting cylinder positioning guide groove;

[0047] 4 is a focusing adjusting knob, and 41 is a focusing knob limiting groove;

[0048] 5 is a scale mirror adjusting cylinder, 51 is a scale mirror adjusting cylinder limiting protrusion, 52 is a scale mirror adjusting cylinder mounting groove, 53 is a scale mirror adjusting cylinder positioning guide protrusion, and 54 is a scale mirror adjusting cylinder positioning guide groove;

[0049] 6 is a scale mirror adjusting knob, and 61 is a scale mirror knob limiting groove;

[0050] 7 is a mirror body mounting cylinder, 71 is a mounting cylinder limiting protrusion, 72 is a mounting cylinder positioning guide protrusion, and 73 is a mounting cylinder guide groove;

[0051] 8 is a scale mirror, and 81 is a circular boundary positioning line;

[0052] 9 is a fixed support, 91 is a support positioning protrusion, and 92 is a positioning foot;

[0053] 10 is an observation window, and 101 is a positioning groove;

[0054] A is a projection line of a lower edge of an outer flow guide cylinder in molten silicon, B is a line where the lower edge of the outer flow guide cylinder and a positioning line 81 of a circular boundary coincide, and C is the observation device. DETAILED DESCRIPTION

[0055] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the utility model.

[0056] The observation device for the distance of a liquid port of a single crystal furnace provided by the embodiments of the utility model, as shown in the drawings, comprises: Figures 1-15

[0057] An observation head 1, which is a cylindrical structure, has its upper end edge folded towards the center to form a limiting folded edge 11, as shown in the drawings. Figure 3

[0058] A focusing adjusting cylinder 3, which is rotationally connected to the inner peripheral wall of the observation head 1, as shown in the drawings. Figure 2

[0059] A magnifying glass 2, which is located between the limiting folded edge 11 and the upper end face of the focusing adjusting cylinder 3, as shown in the drawings. Figure 2

[0060] A focusing adjusting knob 4, which is a cylindrical structure, has its upper end inner peripheral wall rotationally connected to the outer peripheral wall of the focusing adjusting cylinder 3, so that the focusing adjusting knob 4 can drive the focusing adjusting cylinder 3 to move axially (i.e. up and down movement); and the lower end inner peripheral wall of the focusing adjusting knob 4 has a focusing knob limiting recess 41, as shown in the drawings. Figure 2 Figure 6

[0061] A scale mirror adjusting cylinder 5, which has a scale mirror adjusting cylinder limiting protrusion 51 on its upper end outer peripheral wall, and the focusing knob limiting recess 41 and the scale mirror adjusting cylinder limiting protrusion 51 are rotationally connected; and the lower end inner peripheral wall of the scale mirror adjusting cylinder 5 is provided with a scale mirror adjusting cylinder mounting recess 52.

[0062] ​​​​​​The graduated mirror 8 is installed in the graduated mirror adjusting cylinder mounting groove 52. The graduated mirror 8 is a lens, and the ends of the graduated lines of the graduated mirror 8 are connected to form a circular boundary positioning line 81, such as... Figure 10 As shown;

[0063] The graduated mirror adjustment knob 6 has its upper inner circumferential wall rotatably connected to the outer circumferential wall of the graduated mirror adjustment cylinder 5, so that the graduated mirror adjustment knob 6 can drive the graduated mirror adjustment cylinder 5 to move axially; and the lower inner circumferential wall of the graduated mirror adjustment knob 6 has a graduated mirror knob limiting groove 61, such as Figure 9 As shown;

[0064] The mirror mounting cylinder 7 has a mounting cylinder limiting protrusion 71 at its upper end, which is rotatably engaged with the scale mirror knob limiting groove 61; the lower end of the mirror mounting cylinder 7 is used to install on the observation window 10 of the single crystal furnace, such as... Figure 11 As shown.

[0065] In the above technical solution, the observation device is mounted on the observation window 10 of the single crystal furnace via the lower end of the mirror mounting cylinder 7. The focusing adjustment cylinder 3 is axially moved by the focusing adjustment knob 4 (i.e.,...). Figure 2 The up-and-down movement of the magnifying glass 2 causes it to move axially, thus adjusting the focus; simultaneously, the scale adjustment knob 6 drives the scale adjustment cylinder 5 to move axially, causing the scale mirror 8 to move axially (i.e., to adjust the focus). Figure 2 The up-and-down movement of the scale mirror 8 is used to adjust the scale mirror 8.

[0066] In summary, based on the measurement principle of the liquid outlet distance, the first step is to calibrate the scale of the graduated mirror 8 (that is, the actual distance represented by each division on the horizontal and vertical axis scales of the graduated mirror 8; for the same external guide tube, only one calibration is required).

[0067] Calibration process: After installing this observation device, align the circular boundary positioning line 81 of the scale mirror 8 with the lower edge of the outer guide tube of the single crystal furnace. At this point, assume the crucible is in its original position and record the original position of the crucible (i.e., the height value). It should be noted that because the axis of the observation window 10 is set at an angle to the axis of the single crystal furnace, the observation from the perspective of this observation device will be as follows: Figure 15 As shown, A is the projection line of the lower edge of the outer guide tube in the molten silicon, B is the line where the lower edge of the outer guide tube coincides with the circular boundary positioning line 81, and C is the observation device.

[0068] Then the crucible is moved so that the projection of the lower edge of the outer shroud in the molten silicon moves one scale on the horizontal axis and one scale on the vertical axis of the scale mirror 8, respectively, and the position of the crucible after the projection of the lower edge of the outer shroud in the molten silicon moves one scale on the horizontal axis and one scale on the vertical axis of the scale mirror 8, respectively, is recorded; the actual distance represented by each scale on the horizontal axis and the vertical axis of the scale mirror is calculated through the original position of the crucible and the position of the crucible after moving one scale, and the actual distance represented by each scale on the horizontal axis and the vertical axis of the scale mirror can be set as x and y, respectively (i.e. the graduation value of each scale is x and y, respectively). After the scale calibration is completed, the liquid mouth distance can be measured.

[0069] The measurement principle is that, after the observation device is installed, the scale positioning boundary line of the scale mirror coincides with the lower edge of the outer shroud of the single crystal furnace, the scale number occupied by the projection of the lower edge of the outer shroud in the molten silicon on the horizontal axis or the vertical axis of the scale mirror is recorded, the scale number occupied on the horizontal axis of the scale mirror is set as n, the scale number occupied on the vertical axis of the scale mirror is set as n, and the liquid mouth distance is calculated by using n*x and n*y. In actual application, only one vertical axis coordinate or horizontal axis coordinate is needed (i.e. the liquid mouth distance is n*x or n*y), and as an optimization, the horizontal axis scale or the vertical axis scale is used to measure the liquid mouth distance according to different situations.

[0070] It should be noted that the scale direction selection for measurement is as follows: before temperature adjustment, the liquid mouth distance is measured, since the liquid mouth distance is large before temperature adjustment, the projection of the lower edge of the outer shroud in the molten silicon in the horizontal axis direction is small, and it is not convenient to measure by using the scale in the horizontal axis direction of the scale mirror, so the scale in the vertical axis direction of the scale mirror is selected for measurement; during the crystal pulling process, the liquid mouth distance is measured, since the scale in the vertical axis direction of the scale mirror is blocked, the scale in the horizontal axis direction is selected for measurement. The measurement principles of the liquid mouth distance in the two cases are consistent as described above.

[0071] In the above technical solution, by setting the observation device on the observation window 10, the liquid mouth distance can be accurately measured, avoiding inaccurate measurement of the liquid mouth distance by using a CCD camera, and the liquid mouth distance can be accurately measured by the observation device simply by manual operation, which is convenient, fast and cost-saving.

[0072] In an optional embodiment, as shown in Figure 1 and Figure 2 the inner peripheral wall of the observation head 1 and the outer peripheral wall of the focusing adjusting cylinder 3 are connected by threads to realize the rotational connection therebetween; one of the inner peripheral wall of the observation head 1 and the outer peripheral wall of the focusing adjusting cylinder 3 is provided with internal threads, and the other is provided with external threads.

[0073] In the above technical solution, the relative rotation of the observation head 1 and the focusing adjusting cylinder 3 can be realized through the thread connection therebetween, and the relative position of the magnifying lens 2 is adjusted, so that the focusing function is achieved.

[0074] In an optional embodiment, the upper end inner circumferential wall of the focusing adjustment knob 4 is connected with the outer circumferential wall of the focusing adjustment cylinder 3 through threads to realize the rotation connection between them; wherein, one of the upper end inner circumferential wall of the focusing adjustment knob 4 and the outer circumferential wall of the focusing adjustment cylinder 3 is provided with internal threads, and the other is provided with external threads.

[0075] In the above technical solution, through the thread connection between the focusing adjustment knob 4 and the focusing adjustment cylinder 3, the relative rotation of the focusing adjustment knob 4 and the focusing adjustment cylinder 3 can be realized, and then the relative position of the magnifying lens 2 is adjusted, so as to achieve the effect of adjusting the focus.

[0076] In an optional embodiment, the upper end inner circumferential wall of the focusing adjustment knob 4 is connected with the outer circumferential wall of the focusing adjustment cylinder 3 through threads to realize the rotation connection between them; wherein, one of the upper end inner circumferential wall of the focusing adjustment knob 4 and the outer circumferential wall of the focusing adjustment cylinder 3 is provided with internal threads, and the other is provided with external threads.

[0077] In the above technical solution, through the thread connection between the focusing adjustment knob 4 and the focusing adjustment cylinder 3, the relative rotation of the focusing adjustment knob 4 and the focusing adjustment cylinder 3 can be realized, and then the relative position of the magnifying lens 2 is adjusted, so as to achieve the effect of adjusting the focus.

[0078] In an optional embodiment, as shown in Figure 4 The magnifying lens 2 is a convex lens, and the convex surface of the convex lens faces the scale mirror 8. The convex lens is a process product, which is conducive to reducing the cost. In another embodiment, the diameter of the convex lens is 1mm smaller than the inner diameter of the observation head 1, which is convenient for installation, and the magnification is 1.5-2 times. The main function is to enlarge the inverted image of the flow guide cylinder in the molten silicon in the crucible and the scale line, which is convenient for observation and reading of the scale.

[0079] In an optional embodiment, the observation head 1, the magnifying lens 2, the focusing adjustment cylinder 3, the focusing adjustment knob 4, the scale mirror adjustment cylinder 5, the scale mirror adjustment knob 6, the mirror body mounting cylinder 7 and the scale mirror 8 are coaxially arranged. Such arrangement makes the structure of the observation device more compact. In another embodiment, the height of the observation head 1 is 6-10mm, the outer diameter is 25-35mm, and the inner diameter is 23-33mm. An observation opening (which is surrounded by the limiting folding edge 11) with a diameter of 15-20mm is left on the observation head 1, and the human eye observes the liquid level distance through the observation opening.

[0080] In an optional embodiment, the outer circumferential wall of the focusing adjustment cylinder 3 is provided with a focusing adjustment cylinder positioning guide groove 31 along the axial direction thereof, as shown in Figure 5

[0081] The inner circumferential wall of the scale mirror adjustment cylinder 5 is provided with a scale mirror adjustment cylinder positioning guide protrusion 53 along the axial direction thereof, as shown in Figure 8 ​As shown, the scale mirror adjusting cylinder positioning guide protrusion 53 is in sliding connection with the focusing adjusting cylinder positioning guide groove 31.

[0082] In the above technical solution, the scale mirror adjusting cylinder positioning guide protrusion 53 and the focusing adjusting cylinder positioning guide groove 31 play a positioning and guiding role on the observation head 1; it can also be understood that, through the focusing adjusting knob 4 (which plays a limiting role on the movement direction of the focusing adjusting cylinder 3, so that it moves axially), when adjusting the height of the observation head 1, the observation head 1 can only be raised or lowered, and cannot be axially rotated.

[0083] In the above technical solution, the scale mirror adjusting cylinder positioning guide protrusion 53 and the focusing adjusting cylinder positioning guide groove 31 play a positioning and guiding role on the observation head 1; it can also be understood that, through the focusing adjusting knob 4 (which plays a limiting role on the movement direction of the focusing adjusting cylinder 3, so that it moves axially), when adjusting the height of the observation head 1, the observation head 1 can only be raised or lowered, and cannot be axially rotated. Figure 8

[0084] As shown, the scale mirror adjusting cylinder positioning guide protrusion 53 is in sliding connection with the focusing adjusting cylinder positioning guide groove 31. Figure 11

[0085] In the above technical solution, the scale mirror adjusting cylinder positioning guide protrusion 53 and the focusing adjusting cylinder positioning guide groove 31 play a positioning and guiding role on the observation head 1; it can also be understood that, through the focusing adjusting knob 4 (which plays a limiting role on the movement direction of the focusing adjusting cylinder 3, so that it moves axially), when adjusting the height of the observation head 1, the observation head 1 can only be raised or lowered, and cannot be axially rotated.

[0086] In an optional embodiment, it further comprises a fixed support 8; the lower end of the mirror body mounting cylinder 7 is fixed to the observation window 9 through the fixed support 8, and the setting of the fixed support 8 improves the assembly efficiency.

[0087] In the above technical solution, the scale mirror adjusting cylinder positioning guide protrusion 53 and the focusing adjusting cylinder positioning guide groove 31 play a positioning and guiding role on the observation head 1; it can also be understood that, through the focusing adjusting knob 4 (which plays a limiting role on the movement direction of the focusing adjusting cylinder 3, so that it moves axially), when adjusting the height of the observation head 1, the observation head 1 can only be raised or lowered, and cannot be axially rotated. Figure 12 Figure 14 As shown, the scale mirror adjusting cylinder positioning guide protrusion 53 is in sliding connection with the focusing adjusting cylinder positioning guide groove 31. Figure 11 As shown, the scale mirror adjusting cylinder positioning guide protrusion 53 is in sliding connection with the focusing adjusting cylinder positioning guide groove 31.

[0088] ​​​Further optimization of the above technical solutions, the fixed support 9 is made of high-temperature resistant material, H-shaped structure, height of 6-9mm, centering on the cylinder structure (which is provided with support positioning convex 91), the cylinder inner diameter is the same as the mirror body mounting cylinder 7 outer diameter, wall thickness of 2-3mm, the convex height of the support positioning convex 91 is 0.5-1.5mm, the width is 1-3mm, the length is through the whole cylinder inside axial; It should be noted that the four positioning feet 92 of the fixed support 9 are 6-9mm high, 3-5mm wide, and the length is determined according to the size of the observation window 10 of the single crystal furnace; The center of the observation window 10 of the single crystal furnace is symmetrically arranged on the upper and lower edges of the frame of the observation window 10 of the single crystal furnace, and two positioning grooves 101 are arranged on the upper and lower edges, respectively, to match the four feet of the fixed support 9, and ensure that the center cylinder of the fixed support 9 is in the center position of the observation window of the single crystal furnace. It should be noted that the fixed support 9 is mainly used in cooperation with the mirror body mounting cylinder 7 to connect the scale magnifying glass (including observation head 1, magnifying glass 2, focusing adjusting cylinder 3, focusing adjusting knob 4, scale mirror adjusting cylinder 5, scale mirror adjusting knob 6, mirror body mounting cylinder 7 and scale mirror 8) to be fixed on the observation window 10 of the single crystal furnace.

[0089] The technical features mentioned above, the technical features to be mentioned below, and the technical features shown in the drawings alone can be combined with each other arbitrarily, as long as the combined technical features are not contradictory to each other. All feasible feature combinations are explicitly described herein. Any one of the multiple features included in the same sentence can be independently applied, and does not have to be applied together with other features.

[0090] The present scheme will be further described below in conjunction with specific embodiments:

[0091] In one technical solution, as shown in Figure 5 The outer diameter of the focusing adjusting cylinder 3 is the same as the inner diameter of the observation head 1, the height is 20-25mm, the wall thickness is 1-2mm, and the whole body is an external thread structure, wherein the focusing adjusting cylinder positioning guide groove 31 has a depth of 0.5-1.5mm, a width of 1-3mm, and a length of 15-20mm; The focusing adjusting cylinder 3 is mainly used to fix the magnifying glass 2 by threadedly connecting with the observation head 1; Secondly, the focusing adjusting knob 4 is threadedly connected to adjust the height of the observation head 1.

[0092] In another technical solution, as shown in Figure 6As shown, the outer diameter of the focusing adjustment knob 4 is 3-5 mm larger than the outer diameter of the observation head 1, and its height is 8-15 mm. It is divided into upper and lower ends. The inner diameter of the upper port is the same as the outer diameter of the focusing adjustment cylinder 3, and its height is 4-6 mm. A threaded structure is provided on the inner side, running through the entire upper port. The inner diameter of the lower port of the focusing adjustment cylinder 3 is 2-3 mm larger than the inner diameter of the upper port. A focusing knob limiting groove 41 is provided on the inner side 2-3 mm above the bottom edge of the lower port. The focusing knob limiting groove 41 has a depth of 0.5-1.5 mm and a width of 2-3 mm. The main function of the focusing adjustment knob 4 is to connect the focusing adjustment cylinder 3 and the scale adjustment cylinder 5, and to adjust the observation head 1 axially.

[0093] In another technical solution, such as Figure 7 and Figure 8 As shown, the inner diameter of the scale lens adjusting cylinder 5 is 3-5mm larger than the outer diameter of the focusing adjusting cylinder 3, and its height is 35-40mm. It is divided into upper and lower ends. The upper end has a height of 4-6mm, and an annular groove with a depth of 0.5-1.5mm and a width of 2-3mm is provided on the outer side of the top edge of the upper port, 2-3mm downwards. This groove mates with the lower end of the focusing adjustment knob 4. The lower end has a height of 31-34mm and a threaded structure on the outer side, extending upwards from the bottom edge of the lower port. The thread height is 26-29mm, and a scale lens adjusting cylinder positioning guide groove 54 is provided on the outer side. The groove 54 extends upward from the bottom edge of the lower port, with a depth of 0.5-1.5mm, a width of 1-3mm, and a length of 15-20mm. A scale adjustment cylinder mounting groove 52 is provided on the inner side, 1-2mm above the bottom edge of the lower port, for fixing the scale mirror 8. A scale adjustment cylinder positioning guide protrusion 53 is provided on the inner side of the scale adjustment cylinder 5, extending downward from the top edge of the upper port, with a height of 1.5-2.5mm, a width of 1-3mm, and a length of 15-20mm, matching the focusing adjustment cylinder positioning guide groove 31 on the outer side of the focusing adjustment cylinder 3. The main function of the scale adjustment cylinder 5 is to support the scale mirror 8 and, through the scale adjustment knob 6, cooperate with the mirror mounting cylinder 7 to axially (i.e.,...) adjust the scale mirror 8. Figure 2 The upper and lower directions of the mirror can be adjusted. The positioning guide groove 54 of the outer scale mirror adjustment cylinder cooperates with the positioning guide protrusion 72 of the inner mounting cylinder of the mirror body mounting cylinder 7 to play a positioning and guiding role.

[0094] In another technical solution, such as Figure 9 As shown, the structure of the graduated mirror adjustment knob 6 is the same as that of the focus adjustment knob 4, and they are the same height. The circular graduated mirror knob limiting groove 61 and the focus knob limiting groove 41 have the same depth. The outer diameter, upper port diameter, and lower port diameter of the graduated mirror adjustment knob 6 are all 2-4 mm larger than those of the focus adjustment knob 4. The main function of the graduated mirror adjustment knob 6 is to connect the graduated mirror adjustment cylinder 5 and the mirror body mounting cylinder 7, and to perform axial adjustment of the graduated mirror 8.

[0095] In another technical scheme, as shown in the figure, Figure 10 The diameter of the scale mirror 8 is 1-2 mm larger than the inner diameter of the scale mirror adjusting cylinder 5, and the thickness is 2-3 mm. A circular boundary positioning line 81 with a radius of 15 mm is drawn with the center point of the scale mirror as the center. The circular boundary positioning line 81 is taken as the zero point, and longitudinal and transverse scale lines are drawn every 1 mm from the boundary positioning line to the center point. When the scale mirror 8 is assembled, the longitudinal scale lines are perpendicular to the upper and lower edges of the frame of the single crystal furnace observation window.

[0096] In another technical scheme, as shown in the figure, Figure 11 The inner diameter of the mirror body mounting cylinder 7 is 1-2 mm larger than the outer diameter of the scale mirror adjusting cylinder 5, and the height is 10-15 mm. The upper end has a height of 4-6 mm, and an annular groove structure is arranged on the outer side of the top of the upper end port downward 2-3 mm. The groove depth is 0.5-1.5 mm, the width is 2-3 mm, and it is matched and connected with the lower end of the scale mirror adjusting knob 6. The lower end has a height of 6-9 mm, and an installation cylinder guiding groove 73 is arranged on the outer side along the bottom of the lower end port upward. The groove depth is 0.5-1.5 mm, the width is 1-3 mm, and the length is 6-9 mm, which is matched with the bracket positioning protrusion 91 of the fixed support 9. The inner side is provided with an installation cylinder positioning guiding protrusion 72 extending downward from the top of the upper end port upward. The protrusion height is 1.5-2.5 mm, the width is 1-3 mm, and the length is 10-15 mm, which is matched with the scale mirror adjusting cylinder positioning guiding groove 54. The main function of the mirror body mounting cylinder 7 is to match and connect the scale magnifying glass with the fixed support 9, and at the same time, it is matched with the scale mirror adjusting cylinder 5 and the scale mirror adjusting knob 6 to axially adjust the scale mirror 8.

[0097] The advantages of the utility model are:

[0098] At present, the single crystal furnace liquid port distance measurement is mainly captured by a CCD camera. The accuracy of the liquid port distance measurement is affected by factors such as inaccurate pixel parameter setting, unclear captured image, and unclear reflection of the lower edge of the flow guide cylinder in the molten silicon. When the reflection of the lower edge of the flow guide cylinder in the molten silicon is unclear, the CCD camera cannot capture the boundary point of the reflection, resulting in a serious deviation in the liquid port distance measurement, which seriously affects the crystal pulling process. At this time, manual observation of the liquid port distance with the naked eye is needed, but there is no practical measuring tool for manual observation of the liquid port distance at present, and it needs to be experienced. The liquid port distance observed by different people is very different, and the accuracy is poor. The present scheme can effectively solve the problem of inaccurate observation of the liquid port distance by the naked eye of the operator by using the cylinder magnifying glass with scales to observe the liquid port distance, providing an accurate measuring method for manual observation of the liquid port distance. At the same time, it can provide a good reference for correcting the liquid port distance measurement of the CCD camera. The two can better ensure the accuracy and uniformity of the liquid port distance measurement.

[0099] The various embodiments described in this specification are presented for the purpose of illustration and description. Each of the embodiments highlights a different aspect of the disclosure, and the embodiments are presented separately for ease of understanding. The same or similar elements are denoted by the same or similar reference numbers throughout the figures and the specification.

[0100] The above description of disclosed embodiments is intended to be illustrative and not restrictive. Many modifications of these embodiments by one having ordinary skill in the art are intended to be within the scope of the disclosure. The scope of the disclosure is not to be limited to the embodiments described herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A device for observing the liquid outlet distance of a single crystal furnace, characterized in that, The utility model relates to a kind of focusing and zooming mechanism of single crystal furnace, including: Observation head (1), the observation head (1) is cylindrical structure, and the upper end edge of the observation head (1) is folded into limiting fold (11) to center; Magnifying glass (2), the magnifying glass (2) is located between limiting fold (11) and the upper end surface of focusing adjustment cylinder (3); Focusing adjustment knob (4), the focusing adjustment knob (4) is cylindrical structure, the upper end inner wall of the focusing adjustment knob (4) is rotatably connected with the outer wall of focusing adjustment cylinder (3), so that the focusing adjustment knob (4) can drive focusing adjustment cylinder (3) axial movement;And the lower end inner wall of the focusing adjustment knob (4) has focusing knob limiting groove (41); Scale mirror adjustment cylinder (5), the upper end outer wall of the scale mirror adjustment cylinder (5) has scale mirror adjustment cylinder limiting protrusion (51), the focusing knob limiting groove (41) is rotatably connected with the scale mirror adjustment cylinder limiting protrusion (51), and the lower end inner wall of the scale mirror adjustment cylinder (5) is provided with scale mirror adjustment cylinder mounting groove (52); Scale mirror (8), the scale mirror (8) is installed in scale mirror adjustment cylinder mounting groove (52), the scale mirror (8) is lens, and the scale line end of the scale mirror (8) is connected, forms circular boundary positioning line (81); Scale mirror adjustment knob (6), the upper end inner wall of the scale mirror adjustment knob (6) is rotatably connected with the outer wall of scale mirror adjustment cylinder (5), so that the scale mirror adjustment knob (6) can drive scale mirror adjustment cylinder (5) axial movement;And the lower end inner wall of the scale mirror adjustment knob (6) has scale mirror knob limiting groove (61); Mirror body mounting cylinder (7), the upper end of the mirror body mounting cylinder (7) has mounting cylinder limiting protrusion (71), and the mounting cylinder limiting protrusion (71) is rotatably connected with the scale mirror knob limiting groove (61);The lower end of the mirror body mounting cylinder (7) is used to install on the observation window (10) of single crystal furnace. The inner wall of the observation head (1) and the outer wall of the focusing adjustment cylinder (3) are connected by thread, to realize the rotatable connection between them;Wherein, the inner wall of the observation head (1) and the outer wall of the focusing adjustment cylinder (3) are provided with internal thread and external thread respectively.

2. The viewing device of claim 1, wherein, The upper end inner wall of the focusing adjustment knob (4) and the outer wall of the focusing adjustment cylinder (3) are connected by thread, to realize the rotatable connection between them;Wherein, the upper end inner wall of the focusing adjustment knob (4) and the outer wall of the focusing adjustment cylinder (3) are provided with internal thread and external thread respectively.

3. The viewing device of claim 1, wherein, The upper end inner wall of the scale mirror adjustment knob (6) and the outer wall of the scale mirror adjustment cylinder (5) are connected by thread, to realize the rotatably between them;Wherein, the upper end inner wall of the scale mirror adjustment knob (6) and the outer wall of the scale mirror adjustment cylinder (5) are provided with internal thread and external thread respectively.

4. The viewing device of claim 1, wherein, ​ 5. The viewing device of claim 1, wherein, The magnifying lens (2) is a convex lens, and the convex surface of the convex lens faces the scale mirror (8).

6. The viewing device of claim 1, wherein, The observation head (1), the magnifying lens (2), the focusing adjusting cylinder (3), the focusing adjusting knob (4), the scale mirror adjusting cylinder (5), the scale mirror adjusting knob (6), the mirror body mounting cylinder (7) and the scale mirror (8) are coaxially arranged.

7. The viewing device of claim 1, wherein, The outer peripheral wall of the focusing adjusting cylinder (3) is provided with a focusing adjusting cylinder positioning and guiding groove (31) along the axial direction thereof; The inner peripheral wall of the scale mirror adjusting cylinder (5) is provided with a scale mirror adjusting cylinder positioning and guiding protrusion (53) along the axial direction thereof, and the scale mirror adjusting cylinder positioning and guiding protrusion (53) is slidably connected with the focusing adjusting cylinder positioning and guiding groove (31).

8. The viewing device of claim 1, wherein, The outer peripheral wall of the scale mirror adjusting cylinder (5) is provided with a scale mirror adjusting cylinder positioning and guiding groove (54) along the axial direction thereof; The inner peripheral wall of the mirror body mounting cylinder (7) is provided with a mounting cylinder positioning and guiding protrusion (72) along the axial direction thereof, and the mounting cylinder positioning and guiding protrusion (72) is slidably connected with the scale mirror adjusting cylinder positioning and guiding groove (54).

9. The viewing device of claim 1, wherein, Further comprising: A fixing support (9) is arranged, and the lower end of the mirror body mounting cylinder (7) is fixed to the observation window (10) through the fixing support (9).

10. The viewing device of claim 9, wherein, The fixing support (9) is provided with a support positioning protrusion (91), and the outer peripheral wall of the mirror body mounting cylinder (7) is provided with a mounting cylinder guiding groove (73) along the axial direction thereof, and the mounting cylinder guiding groove (73) can be clamped into the support positioning protrusion (91).

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