Wafer clamp for thin film deposition
By designing a wafer jig with a bracket and a motor-driven double-threaded rod to adjust the spacing of the clamping plates, the problems of existing jigs obstructing the wafer surface and lacking adaptability are solved, achieving high precision, stability and wide adaptability, and reducing costs.
Patent Information
- Application Number
- CN202520188389.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-02-07
- Publication Date
- 2026-01-20
- Estimated Expiration
- 2035-02-07
AI Technical Summary
Existing wafer jigs tend to obstruct both sides of the wafer during clamping, resulting in reduced processing accuracy and an inability to accommodate wafers of different diameters, thus limiting their application range.
A clamping structure including a support, a motor, a double threaded rod, a moving frame, a limiting rod, and clamping plates was designed. The clamping plate spacing is adjusted by driving the double threaded rod with the motor. Combined with the design of grooves and mating slots, stable clamping of wafers of different diameters is achieved, and wear is reduced by the rubber layer.
It improves wafer processing accuracy and the range of applications for fixtures, ensuring that coating operations can be performed on both sides of the wafer, and has high clamping stability, adapting to wafers of different diameters, and reducing production and maintenance costs.
Smart Images
Figure CN223816404U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to wafer clamp technical field, especially in kind of wafer clamp for thin film deposition. BACKGROUND
[0002] Thin film deposition technology is widely used in optical lens, semiconductor technology and other fields, and a wafer clamp is needed in the processing of wafer.
[0003] Although the existing clamp can clamp the wafer in the use process, the existing clamp is easy to block the two faces of the wafer when clamping the wafer, so that the user cannot carry out film coating operation on the two complete faces of the wafer when working on the wafer, thereby reducing the processing precision of the wafer by the user, and the clamp does not have an adjusting mechanism, so it cannot clamp different diameter wafers, thereby reducing the use range of the existing clamp, therefore, the wafer clamp for thin film deposition is provided to meet the needs. SUMMARY
[0004] The technical problem to be solved by the utility model is to provide a wafer clamp for thin film deposition to solve the problems in the background.
[0005] To solve the above technical problems, the utility model provides the following technical scheme:
[0006] A wafer clamp for thin film deposition, comprising: a support, the outer wall of the support is provided with a movable slot, the outer wall of the support is fixedly assembled with a motor, the output shaft of the motor is fixedly assembled with a double-threaded rod, the outer wall of the double-threaded rod is threadedly connected with a moving frame, the outer wall of the moving frame is respectively provided with a screw rod and a limiting rod, the outer wall of the limiting rod is fixedly assembled with a handle, the end of the limiting rod away from the handle is rotatably connected with a connecting plate, the outer wall of the connecting plate is in contact with a spring, the outer wall of the spring is fixedly assembled with a clamping plate, the outer wall of the clamping plate is provided with a body, and the two ends of the body are provided with butt joints.
[0007] The number of the clamping plates is two, the two ends of the other clamping plate are provided with grooves, and the shape of the grooves is matched with the shape of the butt joints.
[0008] The outer wall of the moving frame is provided with a sliding hole, and the inner wall of the sliding hole is slidably connected with the outer wall of the limiting rod.
[0009] The outer wall of the moving frame is slidably connected with the inner wall of the movable slot, and the moving frame is prepared by galvanized iron metal.
[0010] The outer wall of the moving frame is provided with a threaded hole, and the outer wall of the screw rod is threadedly connected with the inner wall of the threaded hole.
[0011] The body is fixedly connected with the support through the clamping plate, the outer wall of the clamping plate is provided with a rubber layer, and the outer wall of the rubber layer is tightly attached to the outer wall of the body.
[0012] Compared with the prior art, the utility model has at least the following beneficial effects:
[0013] 1、The bracket, the movable slot, the butt joint groove, the body and the clamping plate structure are arranged, so that the user can clamp the body through the movable characteristics of the clamping plate during use, the clamping plate does not block the two complete surfaces of the body during clamping, thereby facilitating the user to work on the two complete surfaces of the body, and the processing precision of the user on the body is improved.
[0014] 2、The motor, the double-threaded rod, the moving frame, the limiting rod, the handle and the connecting plate structure are arranged, so that the user can rotate the double-threaded rod through the operation of the motor during use of the clamp, thereby adjusting the spacing between the two clamping plates, so as to realize the clamping effect on bodies of different diameters, and the user can also fine-tune the spacing of the clamping plates by rotating the screw rod during adjustment, thereby ensuring the stability of the clamp on the body and improving the use range of the clamp. BRIEF DESCRIPTION OF DRAWINGS
[0015] The accompanying drawings, which are incorporated herein and constitute part of the specification, illustrate embodiments of the present disclosure and, together with the description, further serve to explain the principles of the present disclosure and to enable a person skilled in the relevant art to implement and use the present disclosure.
[0016] Figure 1 It is a schematic diagram of a three-dimensional structure of a wafer clamp for thin film deposition;
[0017] Figure 2 It is a schematic diagram of a side view structure of a wafer clamp for thin film deposition;
[0018] Figure 3 It is a schematic diagram of a limiting rod structure of a wafer clamp for thin film deposition;
[0019] Figure 4 It is a schematic diagram of a movable slot structure of a wafer clamp for thin film deposition.
[0020] [REFERENCE NUMERALS]
[0021] 1, support; 2, movable slot; 3, motor; 4, double-threaded rod; 5, moving frame; 6, screw rod; 7, spring; 8, limiting rod; 9, clamping plate; 10, body; 11, butt joint groove; 12, handle; 13, connecting plate.
[0022] As shown in the drawings, in order to clearly realize the structure of the embodiment of the utility model, specific structure and device are marked in the drawings, but this is only for the need of illustration, and is not intended to limit the utility model in the specific structure, device and environment, according to specific needs, the device and environment can be adjusted or modified by the ordinary skilled in the art, and the adjustment or modification still includes in the range of the appended claims. DETAILED DESCRIPTION
[0023] The wafer clamp for thin film deposition provided by the utility model is described in detail below in combination with the drawings and specific embodiments. It is explained here that in order to make the embodiments more detailed, the following embodiments are the best and preferred embodiments, and other alternative ways can also be adopted by some skilled in the art to implement; and the drawings are only used to more specifically describe the embodiments, and are not intended to specifically limit the utility model.
[0024] It should be noted that in the specification, "one embodiment", "embodiment", "exemplary embodiment", "some embodiments" and the like indicate that the described embodiments can include specific features, structures or characteristics, but not necessarily every embodiment includes the specific features, structures or characteristics. In addition, when a specific feature, structure or characteristic is described in combination with an embodiment, it should be within the knowledge of the skilled in the related art to realize this feature, structure or characteristic in combination with other embodiments (whether or not explicitly described).
[0025] As Figure 1 and Figure 2As shown, the embodiment of the utility model provides a wafer clamp for thin film deposition, include: support 1, support 1's outer wall is equipped with movable slot 2, support 1's outer wall is fixedly equipped with motor 3, motor 3's output shaft is fixedly equipped with double screw rod 4, double screw rod 4's outer wall is threadedly connected with moving frame 5, moving frame 5's outer wall is equipped with screw 6 and limit rod 8 respectively, limit rod 8's outer wall is fixedly equipped with handle 12, limit rod 8 away from handle 12 one end rotationally connected with connecting plate 13, connecting plate 13's outer wall is in contact with spring 7, spring 7's outer wall is fixedly equipped with clamping plate 9, clamping plate 9's outer wall is equipped with body 10, body 10 both ends are equipped with docking slot 11, through the support 1, movable slot 2, motor 3, double screw rod 4, moving frame 5, body 10, docking slot 11 structure, make the clamp in the use process, user can make the spacing between two moving frames 5 be adjusted through the operation of motor 3, so as to facilitate the user to carry out clamping operation to the body 10 of different diameters, the recess and docking slot 11 can be docked simultaneously using the characteristics to make two clamping plates 9 can continuously move towards each other, so as to ensure that the outer wall of the two clamping plates 9 can be closely attached to the outer wall of the body 10, and the body 10 with smaller diameter can also be clamped by the two clamping plates 9, thereby improving the use range of the clamp and the clamping stability of the body 10.
[0026] As Figure 1 and Figure 2 shown, the number of clamping plates 9 is two, and the two ends of the other clamping plate 9 are provided with recesses, and the shape of the recesses is matched with the shape of the docking slot 11. Through the setting of the recess and the docking slot 11 structure, in the process of moving the two clamping plates 9 towards each other, the characteristics of the shape of the docking slot 11 and the recess being matched are used to ensure that the two bodies 10 can be attached, thereby ensuring that the body 10 with smaller diameter can also be clamped, and thereby ensuring the normal use of the clamp.
[0027] As Figure 2 and Figure 3 shown, the outer wall of the moving frame 5 is provided with a sliding hole, and the inner wall of the sliding hole is slidably connected with the outer wall of the limit rod 8. Through the setting of the sliding hole and the limit rod 8 structure, in the process of translation of the two clamping plates 9, the limit rod 8 is used to limit the clamping plate 9, so as to avoid the shaking of the clamping plate 9 in the process of spacing adjustment, thereby ensuring that the clamping plate 9 can stably move towards the body 10, and thereby ensuring the clamping effect of the clamping plate 9 on the body 10, and improving the stability of the clamping plate 9 in the process of translation.
[0028] As Figure 1 and Figure 2As shown, the outer wall of the moving frame 5 is in sliding connection with the inner wall of the movable groove 2, and the moving frame 5 is made of galvanized iron metal, which has the characteristics of hardness and wear resistance, can effectively reduce the wear degree of the moving frame 5 during movement, thereby prolonging the service life of the moving frame 5, and the galvanized iron metal also has the characteristics of low cost, thereby reducing the production and maintenance cost of the clamp.
[0029] As shown in Figure 1 and Figure 4 , the outer wall of the moving frame 5 is provided with a threaded hole, and the outer wall of the screw rod 6 is in threaded connection with the inner wall of the threaded hole. Through the structure of the threaded hole and the screw rod 6, the user can adjust the distance between the two clamping plates 9 by rotating the screw rod 6, thereby realizing the effect of clamping different diameter bodies 10. When rotating the screw rod 6, the user does not need to hold the clamping plate 9 to ensure that the clamping plate 9 accurately fits the outer wall of the body 10, thereby facilitating the user to operate, and improving the practicability of the clamp.
[0030] As shown in Figure 1 and Figure 3 , the body 10 is fixedly connected with the support 1 through the clamping plate 9, the outer wall of the clamping plate 9 is provided with a rubber layer, and the outer wall of the rubber layer is tightly fitted with the outer wall of the body 10. Through the structure of the rubber layer, the wear of the body 10 can be reduced during clamping by the clamping plate 9, thereby avoiding the wear and even the rupture of the body 10 during clamping, and thereby ensuring the integrity of the body 10.
[0031] The technical scheme provided by the utility model, when working, the distance between the two moving frames 5 is adjusted by the operation of the motor 3, thereby realizing the effect of clamping different diameter bodies 10. When the two moving frames 5 move towards each other, the distance between the two bodies 10 becomes smaller until the outer wall of the body 10 is fitted. If it is necessary to clamp a smaller diameter body 10, the user can make the motor 3 continuously work, so that the groove on one body 10 is fitted with the inner wall of the butt joint groove 11, thereby realizing the effect that a smaller diameter body 10 can also be clamped. The user can also adjust the work by rotating the screw rod 6. When the screw rod 6 is rotated, the clamping plate 9 is limited by the limiting rod 8 and cannot be offset, thereby ensuring that the clamping plate 9 can stably move towards the body 10, thereby accurately clamping the body 10. The clamp has the characteristics of simple structure, convenient operation and high stability. After the clamping plate 9 clamps the body 10, the two faces of the body 10 are not blocked, thereby ensuring that the user can perform physical deposition work on the two complete faces of the body 10, thereby improving the machining precision of the user on the body 10.
[0032] The utility model covers any alternative, modification, equivalent method and scheme which are made on the essence and range of the utility model. In order to make the public have the thorough understanding of the utility model, the specific details are explained in the above preferred embodiment of the utility model, and the utility model can be completely understood without the description of these details for the person skilled in the art. In addition, in order to avoid unnecessary confusion to the essence of the utility model, the well-known method, process, flow, element and circuit are not explained in detail.
[0033] Those skilled in the art can understand that all or part of the steps of the above-mentioned embodiment methods can be completed by instructing the relevant hardware through programs, and the programs can be stored in computer readable storage medium, such as ROM / RAM, magnetic disc, optical disc and the like.
[0034] The above is only the preferred embodiment of the utility model, and it should be pointed out that, for the ordinary skilled in the art, on the premise of not departing from the principle of the utility model, a number of improvements and refinements can be made, and these improvements and refinements should also be regarded as the protection range of the utility model.
Claims
1. A wafer fixture for thin film deposition, characterized in that, include: A bracket (1) has an movable groove (2) on its outer wall. A motor (3) is fixedly mounted on the outer wall of the bracket (1). A double threaded rod (4) is fixedly mounted on the output shaft of the motor (3). A movable frame (5) is threadedly connected to the outer wall of the double threaded rod (4). A screw (6) and a limiting rod (8) are respectively provided on the outer wall of the movable frame (5). A handle (12) is fixedly mounted on the outer wall of the limiting rod (8). A connecting plate (13) is rotatably connected to the end of the limiting rod (8) away from the handle (12). A spring (7) is abutted on the outer wall of the connecting plate (13). A clamping plate (9) is fixedly mounted on the outer wall of the spring (7). A body (10) is provided on the outer wall of the clamping plate (9). Both ends of the body (10) are provided with docking grooves (11).
2. The wafer fixture for thin film deposition according to claim 1, characterized in that: The number of clamps (9) is two, and the two ends of the other clamp (9) are provided with grooves, and the shape of the grooves is adapted to the shape of the docking groove (11).
3. A wafer fixture for thin film deposition according to claim 1, characterized in that: The outer wall of the movable frame (5) is provided with a sliding hole, and the inner wall of the sliding hole is slidably connected to the outer wall of the limiting rod (8).
4. A wafer fixture for thin film deposition according to claim 1, characterized in that: The outer wall of the movable frame (5) is slidably connected to the inner wall of the movable groove (2), and the movable frame (5) is made of galvanized iron metal.
5. A wafer fixture for thin film deposition according to claim 1, characterized in that: The outer wall of the movable frame (5) is provided with a threaded hole, and the outer wall of the screw (6) is threadedly connected to the inner wall of the threaded hole.
6. A wafer fixture for thin film deposition according to claim 1, characterized in that: The main body (10) is fixedly connected to the bracket (1) by a clamp (9). The outer wall of the clamp (9) is provided with a rubber layer, and the outer wall of the rubber layer is in close contact with the outer wall of the main body (10).