Safe and efficient combustion washing tower for high-concentration silane tail gas

Abstract

The utility model discloses a safe and efficient combustion washing tower for high-concentration silane tail gas, which comprises a combustion treatment barrel, a gas inlet pipe arranged at the front end of the combustion treatment barrel and a connecting cover clamped and mounted at the lower end of the combustion treatment barrel, and a filter screen and a pipeline are clamped and mounted in the connecting cover. And the pipeline is rotationally mounted in the upper end of the combustion treatment barrel, multiple sets of atomization nozzles are mounted at the lower end of the pipeline at equal intervals, and the connecting mechanism is composed of a mounting plate, a mounting rod, an auxiliary rod and a fixing cap. According to the safe and efficient combustion washing tower for the high-concentration silane tail gas, the atomizing spray head swings back and forth in the combustion treatment barrel, so that the actual spraying area is greatly increased, the more uniform spraying effect is achieved, and a connecting mechanism is combined to drive a connecting cover to ascend and descend at the lower end of the combustion treatment barrel; and therefore, the filter screen and filtered impurity particles can be conveniently cleaned, and the filter screen is prevented from being blocked.

Description

TECHNICAL FIELD

[0001] The utility model relates to the related technical field of silane tail gas treatment, specifically to a kind of high concentration silane tail gas safe and efficient combustion washing tower. BACKGROUND

[0002] In the process of semiconductor manufacturing and solar panel production, the waste gas generated after the use of silane is called silane tail gas, which contains various harmful components, mainly including organosilicon compounds, particulate matter and other harmful substances, so a combustion washing tower is needed to treat the silane tail gas accordingly.

[0003] For example, the publication number CN221155959U discloses a silane combustion cylinder with tail gas filtering device, which belongs to the technical field of silane combustion cylinder. To solve the problem of dust remaining in the tail gas during the discharge of silane waste gas after combustion, which is not conducive to environmental protection. The upper part of the combustion cylinder is fixedly installed with a filter box, the upper part of the filter box is fixedly installed with an output pipe, the side of the filter box is provided with a water supply pipe, and the water supply pipe extends into the inside of the filter box. The inside of the filter box is provided with a spray head below the water supply pipe, and the lower part of the filter box is provided with a filter bag. The lower part of the filter box is fixedly installed with a drain pipe. The upper part of the combustion cylinder is cylindrical, and the lower part of the combustion cylinder is inverted pyramidal. The front end of the combustion cylinder is fixedly installed with an air inlet pipe, which is in the tangent direction of the cylinder cavity of the combustion cylinder. The upper part of the air inlet pipe is fixedly installed with an air pipe.

[0004] However, in the existing technology, the spraying area is limited during the spraying treatment of the tail gas, which cannot fully contact with the tail gas, affecting the actual treatment efficiency. Moreover, it is not convenient to remove the filtered impurities during the filtering treatment of the impurities in the tail gas. For example, the above-mentioned comparative patent has this problem.

[0005] Therefore, we propose a high concentration silane tail gas safe and efficient combustion washing tower to solve the above problems. Utility model content

[0006] The utility model aims at providing a high concentration silane tail gas safe and efficient combustion washing tower to solve the problem of limited spraying area during the spraying treatment of the tail gas, which cannot fully contact with the tail gas, affecting the actual treatment efficiency, and it is not convenient to remove the filtered impurities during the filtering treatment of the impurities in the tail gas.

[0007] To achieve the above object, the utility model provides the following technical scheme: A high -concentration silane tail gas safe and efficient combustion washing tower, including combustion treatment cylinder, the air pipe of setting in the front end of combustion treatment cylinder and the connecting cover of engaging installation in the lower extreme of combustion treatment cylinder, the upper end of combustion treatment cylinder is provided with the exhaust port;

[0008] Also includes:

[0009] Connecting cover, the inside engaging installation of filter screen of connecting cover, and the sealing gasket of abutment setting between connecting cover and combustion treatment cylinder, filter screen abutment setting between connecting cover and combustion treatment cylinder, and the lower extreme of connecting cover is installed valve;

[0010] Pipeline, the inside rotation is installed in the upper end of combustion treatment cylinder, and the lower extreme of pipeline is installed with multiple groups of atomizing nozzles, and the pipeline is driven with motorized telescopic handle, movable block, connecting block and fixed rod atomizing nozzle constitutes the front and back swing structure in the inside of combustion treatment cylinder;

[0011] Wherein, the pipeline is connected with the pump body outside through the hose;

[0012] Multiple sets of connecting mechanisms, the connecting mechanism drives connecting cover to constitute the lifting structure in the lower extreme of combustion treatment cylinder, and the connecting mechanism is composed of mounting plate, mounting rod, auxiliary rod and fixed cap.

[0013] Preferably, the right upper end of the combustion treatment cylinder is fixedly installed with a motorized telescopic handle for driving, and the output end of the motorized telescopic handle is fixedly connected with a movable block.

[0014] Preferably, the motorized telescopic handle pushes the movable block to move forward and backward at the upper end of the combustion treatment cylinder, and the right end of the movable block is rotatably connected with a connecting block, which is sleeved on the outer surface of a fixed rod.

[0015] Preferably, the fixed rod and the connecting block constitute a sliding structure, and the fixed rod is fixedly connected to the right end of the pipeline.

[0016] Preferably, the outer side of the lower end of the combustion treatment cylinder is fixedly connected with a fixed plate, and the middle part of the fixed plate and the mounting plate in the vertical state constitute an up-down sliding structure, the upper end of the mounting plate is fixedly connected with a mounting rod, and the mounting plate is fixedly connected to the left and right sides of the upper end of the connecting cover.

[0017] Preferably, the upper end of the mounting plate is engagingly connected with an auxiliary rod, and the auxiliary rod is fixedly connected to the outer side of the combustion treatment cylinder, and the outer surface of the auxiliary rod is threadedly connected with a fixed cap for supporting and locking.

[0018] Preferably, the fixed cap is engagingly connected to the outer side of the upper end of the mounting plate.

[0019] Compared with the prior art, the high-concentration silane tail gas safe and efficient combustion washing tower has the advantages that the silane tail gas in the combustion treatment cylinder is sprayed through the pipeline and the atomizing nozzle, the water mist contacts and adheres to the impurity particles in the tail gas, and the impurity particles are filtered through the filter screen under the action of gravity, the atomizing nozzle is driven to swing back and forth in the combustion treatment cylinder through the electric telescopic rod, the movable block, the connecting block and the fixed rod, the actual spraying area is greatly increased, the spraying effect is more uniform, the connecting cover is driven to ascend and descend at the lower end of the combustion treatment cylinder through the connecting mechanism, and thus the filter screen and the filtered impurity particles can be conveniently cleaned to prevent the filter screen from being blocked.

[0020] 1. The filter screen, the pipeline and the atomizing nozzle are provided, the tail gas is sprayed through the pipeline and the atomizing nozzle, and the impurity particles adhered to the impurity particles fall and are filtered through the filter screen.

[0021] 2. The electric telescopic rod, the movable block, the connecting block and the fixed rod are provided, the atomizing nozzle is driven to swing back and forth in the combustion treatment cylinder through the electric telescopic rod, the movable block, the connecting block and the fixed rod, and thus the actual spraying area is increased, and the spraying effect is more uniform.

[0022] 3. The connecting mechanism is provided, the connecting mechanism comprises the mounting plate, the mounting rod, the auxiliary rod and the fixed cap, the connecting cover is driven to ascend and descend at the lower end of the combustion treatment cylinder through the connecting mechanism, and thus the filter screen and the filtered impurity particles can be conveniently cleaned. BRIEF DESCRIPTION OF DRAWINGS

[0023] Figure 1 It is a whole structure schematic view of the utility model;

[0024] Figure 2 It is a top view structure schematic view of the utility model;

[0025] Figure 3 It is a front view cut structure schematic view of the utility model;

[0026] Figure 4 It is a pipeline, atomizing nozzle, connecting block and fixed rod bottom view structure schematic view of the utility model;

[0027] Figure 5 It is a combustion treatment cylinder, pipeline and atomizing nozzle exploded structure schematic view of the utility model;

[0028] Figure 6 It is a Figure 1 enlarged structure schematic view of the utility model in A place;

[0029] Figure 7 It is a connecting mechanism whole structure schematic view of the utility model;

[0030] Figure 8 Figure 1 is a whole structure schematic diagram of the connection cover and the combustion processing cylinder in the disassembled state.

[0031] In the figure: 1, combustion processing cylinder; 2, air inlet pipe; 3, connection cover; 4, filter screen; 5, pipeline; 6, atomizing nozzle; 7, electric telescopic rod; 8, movable block; 9, connecting block; 10, fixed rod; 11, fixed plate; 12, connecting mechanism; 13, mounting plate; 14, mounting rod; 15, auxiliary rod; 16, fixed cap. DETAILED DESCRIPTION

[0032] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of the present application.

[0033] Please refer to Figures 1-8 The present application provides the following technical solutions.

[0034] Embodiment 1: In order to solve the problems in the prior art, therefore, the present embodiment provides a high-concentration silane tail gas safe and efficient combustion washing tower, which is provided with a combustion processing cylinder 1, an air inlet pipe 2, a connection cover 3, a filter screen 4, a pipeline 5 and an atomizing nozzle 6. The front side of the combustion processing cylinder 1 is provided with the air inlet pipe 2. The lower end of the combustion processing cylinder 1 is clamped and installed with the connection cover 3. The upper end of the combustion processing cylinder 1 is provided with an exhaust port. The inside of the connection cover 3 is clamped and installed with the filter screen 4. A sealing gasket is arranged between the connection cover 3 and the combustion processing cylinder 1. The filter screen 4 is arranged between the connection cover 3 and the combustion processing cylinder 1. A valve is installed at the lower end of the connection cover 3. The pipeline 5 is rotatably installed in the inside of the upper end of the combustion processing cylinder 1. Multiple groups of atomizing nozzles 6 are installed at the lower end of the pipeline 5 at equal intervals. The pipeline 5 is connected with an external pump body through a hose. As shown in Figure 1 、 Figure 2 、 Figure 3 and Figure 4 Silane tail gas is introduced into the combustion processing cylinder 1 through the air inlet pipe 2. Water source is pumped into the pipeline 5 by the external pump body and then sprayed out by the atomizing nozzles 6. The water mist adheres to the impurity particles in the tail gas, so that the impurity particles fall down under the action of gravity and are filtered by the filter screen 4. The sprayed water is discharged outward through the valve at the lower end of the connection cover 3. The treated tail gas is discharged outward through the exhaust port at the upper end of the combustion processing cylinder 1.

[0035] Embodiment 2: In order to solve the problem that the area of the spray is limited in the existing tail gas spray treatment process, and the tail gas cannot be fully contacted, thereby affecting the actual treatment efficiency, therefore, the technical scheme is as follows: a high-concentration silane tail gas safe and efficient combustion washing tower is provided with an electric telescopic rod 7, a movable block 8, a connecting block 9 and a fixed rod 10, the pipeline 5 together with the electric telescopic rod 7, the movable block 8, the connecting block 9 and the fixed rod 10 drive the atomizing nozzle 6 to constitute a front and rear swinging structure inside the combustion treatment cylinder 1, the right upper end of the combustion treatment cylinder 1 is fixedly installed with the electric telescopic rod 7 for driving, and the output end of the electric telescopic rod 7 is fixedly connected with the movable block 8, the electric telescopic rod 7 pushes the movable block 8 to move forward and backward at the upper end of the combustion treatment cylinder 1, and the right end of the movable block 8 is rotatably connected with the connecting block 9, the connecting block 9 is sleeved on the outer surface of the fixed rod 10, and the fixed rod 10 and the connecting block 9 constitute a sliding structure, and the fixed rod 10 is fixedly connected to the right end of the pipeline 5, as shown in Figure 3 、 Figure 4 and Figure 5 , in the spraying process, the electric telescopic rod 7 is started, the electric telescopic rod 7 drives the movable block 8 to move forward and backward at the upper end of the combustion treatment cylinder 1, so that the electric telescopic rod 7 drives the movable block 8 and the connecting block 9 to rotate, the connecting block 9 drives the outer surface of the fixed rod 10 to slide, so that the fixed rod 10 drives the pipeline 5 to rotate inside the combustion treatment cylinder 1, the fixed rod 10 together with the pipeline 5 drives the atomizing nozzle 6 to constitute a front and rear swinging structure inside the combustion treatment cylinder 1, thereby increasing the actual spraying area and achieving more sufficient and uniform spraying effect.

[0036] Embodiment 3: In order to solve the problem that it is inconvenient to remove the filtered impurities in the existing technology when filtering the impurities in the tail gas, therefore, the technical scheme is as follows: a high-concentration silane tail gas safe and efficient combustion washing tower is provided with a fixed plate 11 and a connecting mechanism 12, the connecting mechanism 12 drives the connecting cover 3 to constitute a lifting structure at the lower end of the combustion treatment cylinder 1, and the connecting mechanism 12 is composed of a mounting plate 13, a mounting rod 14, an auxiliary rod 15 and a fixed cap 16, the outer side of the lower end of the combustion treatment cylinder 1 is fixedly connected with the fixed plate 11, and the middle part of the fixed plate 11 and the mounting plate 13 in a vertical state constitute an up and down sliding structure, the upper end of the mounting plate 13 is fixedly connected with the mounting rod 14, and the mounting plate 13 is fixedly connected on the left and right sides of the upper end of the connecting cover 3, the upper end of the mounting plate 13 is clamped and connected with the auxiliary rod 15, and the auxiliary rod 15 is fixedly connected to the outer side of the combustion treatment cylinder 1, the outer surface of the auxiliary rod 15 is threadedly connected with the fixed cap 16 for supporting and locking, and the fixed cap 16 is clamped and connected to the outer side of the upper end of the mounting plate 13, as shown in Figure 6 、 Figure 7 and Figure 8As shown, after use, the fixing cap 16, which is threaded onto the outer surface of the auxiliary rod 15, can be rotated to move the fixing cap 16 out from the upper end of the mounting plate 13 and detach it from the auxiliary rod 15, thereby loosening the limiting position between the mounting plate 13 and the auxiliary rod 15. Then, the auxiliary rod 15 can be held and pulled down, causing the mounting plate 13 and the fixing plate 11 to slide together, which in turn causes the connecting cover 3 to move down, thus disassembling the connecting cover 3 from the combustion treatment cylinder 1. Then, the filter screen 4 can be removed from the inside of the connecting cover 3, which facilitates the cleaning of the filter screen 4 and the filtered impurity particles, preventing the filter screen 4 from becoming clogged.

[0037] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A high-concentration silane tail gas safe and efficient combustion scrubbing tower, comprising a combustion treatment cylinder (1), an air inlet pipe (2) disposed at the front end of the combustion treatment cylinder (1), and a connecting cover (3) snapped onto the lower end of the combustion treatment cylinder (1), wherein an exhaust port is provided at the upper end of the combustion treatment cylinder (1); Its features are, Also includes: A connecting cover (3) is provided, and a filter screen (4) is installed inside the connecting cover (3). A sealing gasket is provided between the connecting cover (3) and the combustion treatment cylinder (1). The filter screen (4) is provided between the connecting cover (3) and the combustion treatment cylinder (1). A valve is installed at the lower end of the connecting cover (3). Pipe (5), the pipe (5) is rotatably installed inside the upper end of the combustion treatment cylinder (1), and multiple sets of atomizing nozzles (6) are installed at equal intervals at the lower end of the pipe (5). The pipe (5), together with the electric telescopic rod (7), movable block (8), connecting block (9) and fixed rod (10), drives the atomizing nozzles (6) to form a back-and-forth swinging structure inside the combustion treatment cylinder (1). The pipe (5) is connected to the external pump body via a flexible hose; Multiple sets of connecting mechanisms (12) are provided. The connecting mechanisms (12) drive the connecting cover (3) to form a lifting structure at the lower end of the combustion treatment cylinder (1). The connecting mechanisms (12) are composed of a mounting plate (13), a mounting rod (14), an auxiliary rod (15), and a fixing cap (16).

2. The high-concentration silane tail gas safe and efficient combustion scrubbing tower according to claim 1, characterized in that: An electric telescopic rod (7) for driving is fixedly installed at the upper right end of the combustion treatment cylinder (1), and a movable block (8) is fixedly connected to the output end of the electric telescopic rod (7).

3. The high-concentration silane tail gas safe and efficient combustion scrubbing tower according to claim 2, characterized in that: The electric telescopic rod (7) pushes the movable block (8) to move back and forth at the upper end of the combustion treatment cylinder (1), and the right end of the movable block (8) is rotatably connected to the connecting block (9), which is sleeved on the outer surface of the fixed rod (10).

4. The high-concentration silane tail gas safe and efficient combustion scrubbing tower according to claim 3, characterized in that: The fixed rod (10) and the connecting block (9) form a sliding structure, and the fixed rod (10) is fixedly connected to the right end of the pipe (5).

5. The high-concentration silane tail gas safe and efficient combustion scrubbing tower according to claim 1, characterized in that: A fixing plate (11) is fixedly connected to the outer side of the lower end of the combustion treatment cylinder (1), and the middle part of the fixing plate (11) and the vertical mounting plate (13) form an up-and-down sliding structure. The upper end of the mounting plate (13) is fixedly connected to the mounting rod (14), and the mounting plate (13) is fixedly connected to the left and right sides of the upper end of the connecting cover (3).

6. The high-concentration silane tail gas safe and efficient combustion scrubbing tower according to claim 5, characterized in that: An auxiliary rod (15) is engaged at the upper end of the mounting plate (13), and the auxiliary rod (15) is fixedly connected to the outer side of the combustion treatment cylinder (1). A fixing cap (16) for support and locking is threaded onto the outer surface of the auxiliary rod (15).

7. The high-concentration silane tail gas safe and efficient combustion scrubbing tower according to claim 6, characterized in that: The fixing cap (16) is snapped onto the outer side of the upper end of the mounting plate (13).

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