Light shield for UV machine

Abstract

The utility model discloses a light shield for a UV machine, which is applied to the technical field of wafer processing and comprises a UV machine sliding disc, a wafer groove is arranged at the top of the UV machine sliding disc, four arc-shaped light shields are symmetrically and slidably connected in the wafer groove, and an extension light shield is welded at one end of each arc-shaped light shield. The four arc-shaped light shields are driven by the air cylinder to slide in the wafer groove, and sliding adjustment is carried out according to the size of the wafer, so that the arc-shaped light shields can be folded inwards or unfolded outwards to be automatically switched between 12 inches and 8 inches. Therefore, the device is suitable for two kinds of wafers with different sizes, avoids frequent manual replacement, saves manpower, and improves the efficiency. The bottom of the wafer is supported in four directions through the supporting round rods, the supporting round rods are adjusted to slide up and down in different directions, and the supporting round rods on the other two sides support rotation of the wafer. Therefore, the wafer can be freely inclined in multiple directions, the adhesive film can be quickly cured, and the practicability is improved.

Description

Technical Field

[0001] This utility model belongs to the field of wafer processing technology, and specifically relates to a light shield for a UV machine. Background Technology

[0002] In current technology, each wafer is divided into individual chips after dicing. The adhesive film on the back of the wafer is a UV (ultraviolet irradiation) film, which needs to be irradiated by a UV machine to reduce the adhesiveness of the film before subsequent sorting operations.

[0003] Currently, Chinese utility model patent CN221315510U discloses a UV shielding device. Existing wafers are mainly available in 12-inch and 8-inch sizes. When irradiating wafers of different sizes with a UV machine, manual operation is required to change the shielding to accommodate both sizes. Furthermore, during the UV irradiation process, some adhesive films may cure slowly. In this case, the wafer needs to be tilted to allow these areas to receive more UV light and cure faster. This requires removing the horizontally placed wafer and re-tilting it, which is inefficient, wastes production capacity, and increases the workload for personnel. Utility Model Content

[0004] The purpose of this invention is to provide a UV shield for a UV machine, which has the advantages of being able to automatically switch to suit two different sizes of wafers and to facilitate the adjustment of the wafer's tilt angle in multiple directions.

[0005] The above-mentioned technical objective of this utility model is achieved through the following technical solution: a UV machine light shield, including a UV machine slide, the top of the UV machine slide is provided with a wafer groove, four arc-shaped light shields are symmetrically slidably connected inside the wafer groove, one end of the four arc-shaped light shields is welded with an extended light shield, the end of the four arc-shaped light shields away from the extended light shields is provided with a sliding groove that is slidably connected to the extended light shield, four cylinders are symmetrically bolted to the top of the UV machine slide, and the output end of each of the four cylinders is bolted with a push block that is respectively bolted to the four arc-shaped light shields.

[0006] Using the above technical solution, four arc-shaped light shields are driven by cylinders to slide inside the wafer trough. The sliding adjustment is made according to the wafer size, allowing the arc-shaped light shields to automatically switch between 12-inch and 8-inch wafers by retracting inwards or expanding outwards. This allows for the use of two different wafer sizes, avoiding frequent manual changes, saving manpower, and improving efficiency. Support rods provide support in four directions at the bottom of the wafer, and the up-and-down sliding support rods in different directions are adjusted. The support rods on both sides support the wafer's rotation. This allows the wafer to freely tilt at multiple angles, enabling rapid curing of the adhesive film, facilitating operation, and improving practicality.

[0007] The present invention is further configured such that: a supporting round rod is slidably connected to one side of each of the four arc-shaped light shields that are close to each other; a threaded rod is rotatably connected inside the arc-shaped light shield; a threaded sleeve is threaded onto the surface of the threaded rod; a sliding block that is slidably connected to the arc-shaped light shield is welded to the side of the threaded sleeve that is close to the supporting round rod; and the supporting round rod is rotatably connected to the side of the sliding block that is away from the threaded sleeve.

[0008] By adopting the above technical solution, the wafer can be freely tilted at multiple angles, the adhesive film can be cured quickly, which facilitates operation and improves practicality.

[0009] The present invention is further configured such that: the end of the extended light shield away from the arc-shaped light shield is rotatably connected to a ball bearing that is slidably connected to the same groove.

[0010] By adopting the above technical solution, the sliding friction is reduced and the sliding stability is improved.

[0011] The present invention is further configured such that reflective stickers are adhered to the sides of the four arc-shaped light shields that are close to each other.

[0012] By adopting the above technical solution, ultraviolet rays can be reflected, enhancing the internal light brightness and improving the irradiation effect.

[0013] The present invention is further configured such that: the interior of the UV machine slide is provided with a through hole communicating with the interior of the wafer groove.

[0014] Using the above technical solution, it is difficult to remove the wafer from the top when it is laid flat. Therefore, the wafer can be pushed up from the bottom through a through-hole to facilitate removal.

[0015] The present invention is further configured such that: a knob is welded to the top of the threaded rod and rotates through it, connected to the arc-shaped light shield.

[0016] By adopting the above technical solution, the threaded rod is rotated inside the arc-shaped sunshade by turning the knob, which facilitates operation.

[0017] The present invention is further configured such that the surface of the supporting round rod is provided with anti-slip stripes.

[0018] The above technical solution improves surface friction and prevents wafer slippage and displacement.

[0019] In summary, this utility model has the following beneficial effects:

[0020] 1. Four arc-shaped light shields are driven by cylinders to slide inside the wafer trough, and the sliding adjustment is made according to the wafer size, so that the arc-shaped light shields can automatically switch between 12-inch and 8-inch wafers by retracting inward or opening outward. This allows them to be used for two different wafer sizes, avoiding frequent manual changes, saving manpower and improving efficiency;

[0021] 2. The wafer's bottom is supported in four directions by support rods, and the vertical sliding of these support rods in different directions can be adjusted. Additionally, the support rods on both sides support the wafer's rotation. This allows the wafer to tilt freely in multiple directions, enabling rapid curing of the adhesive film, facilitating operation, and improving practicality. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the structure of this utility model;

[0023] Figure 2 This is a top sectional view of a partial structure of this utility model;

[0024] Figure 3 This is a partial structural side sectional view of this utility model.

[0025] Reference numerals in the attached diagram: 1. UV machine slide; 2. Wafer groove; 3. Arc-shaped light shield; 4. Slide groove; 5. Extended light shield; 6. Push block; 7. Cylinder; 8. Threaded rod; 9. Threaded sleeve; 10. Sliding block; 11. Support rod; 12. Ball bearing; 13. Through hole; 14. Reflective sticker; 15. Knob. Detailed Implementation

[0026] The present invention will be further described in detail below with reference to the accompanying drawings.

[0027] Example 1:

[0028] refer to Figure 1 , Figure 2 A UV shield for a UV machine includes a UV machine slide 1. A wafer groove 2 is formed on the top of the slide 1. Four arc-shaped shields 3 are symmetrically slidably connected inside the wafer groove 2. An extension shield 5 is welded to one end of each of the four arc-shaped shields 3. A groove 4, slidably connected to the extension shield 5, is formed at the end of each arc-shaped shield 3 away from the extension shield 5. Four cylinders 7 are symmetrically bolted to the top of the slide 1. Each cylinder 7 has a pusher 6 bolted to one of the four arc-shaped shields 3. The cylinders 7 drive the four arc-shaped shields 3 to slide inside the wafer groove 2, and adjust the sliding according to the wafer size, allowing the arc-shaped shields 3 to automatically switch between 12-inch and 8-inch wafers by retracting inwards or opening outwards. This allows for the use of two different wafer sizes, avoiding frequent manual changes, saving manpower, and improving efficiency.

[0029] refer to Figure 2 The end of the extended sunshade 5 away from the curved sunshade 3 is rotatably connected to a ball bearing 12 that is slidably connected to the same groove 4. This reduces sliding friction and improves sliding stability.

[0030] refer to Figure 1 Each of the four curved light-shielding covers 3 has reflective stickers 14 attached to one side of each other. These reflect ultraviolet rays, enhancing the brightness of the internal light and improving the irradiation effect.

[0031] refer to Figure 1 The UV machine slide 1 has a through hole 13 inside that communicates with the inside of the wafer slot 2. When the wafer is laid flat, it is difficult to remove it from the top. Therefore, the wafer can be pushed up from the bottom through the through hole 13 for easy removal.

[0032] Brief description of the operation: By simultaneously activating four cylinders 7, the pusher block 6 slides on top of the UV machine slide plate 1, allowing the pusher block 6 to synchronously drive four arc-shaped light shields 3 to slide inside the wafer tank 2. When the four arc-shaped light shields 3 slide inward, the extension light shield 5 slides into the slide groove 4, causing the four arc-shaped light shields 3 to close together. Simultaneously, when the four arc-shaped light shields 3 slide outward from inside the slide groove 4, the extension light shield 5 slides outward, causing the four arc-shaped light shields 3 to open up, making it suitable for two different sized wafers. Finally, the UV machine slide plate 1 is pushed into the UV machine, so that the UV lamp plate in the UV machine covers the top of the arc-shaped light shields 3, irradiating the wafers inside the wafer tank 2.

[0033] Example 2:

[0034] refer to Figure 1 , Figure 2 , Figure 3 A UV shield for a UV machine comprises four arc-shaped shields 3, each with a supporting rod 11 slidably connected to one side of each other. A threaded rod 8 is rotatably connected inside each arc-shaped shield 3, and a threaded sleeve 9 is threadedly fitted onto the surface of the threaded rod 8. A sliding block 10, slidably connected to the arc-shaped shield 3, is welded to the side of the threaded sleeve 9 closest to the supporting rod 11. The supporting rod 11 is rotatably connected to the side of the sliding block 10 furthest from the threaded sleeve 9. The supporting rods 11 support the wafer in four directions, and the wafer's rotation is supported by adjusting the vertical sliding of the supporting rods 11 in different directions. The supporting rods 11 on the other two sides also support the wafer's rotation. This allows the wafer to be freely tilted in multiple directions, enabling rapid curing of the adhesive film, facilitating operation, and improving practicality.

[0035] refer to Figure 1 , Figure 3 A knob 15 is welded to the top of the threaded rod 8 and rotates through the arc-shaped light shield 3. By turning the knob 15, the threaded rod 8 rotates inside the arc-shaped light shield 3, thus facilitating operation.

[0036] refer to Figure 2 , Figure 3 The surface of the supporting rod 11 is provided with anti-slip stripes. This increases surface friction and prevents the wafer from slipping and shifting.

[0037] Brief description of the usage process: The wafer is placed on top of the support rod 11, which supports the wafer's bottom in four directions. Then, by rotating the threaded rod 8, it engages with the threaded sleeve 9, causing the threaded sleeve 9 to drive the sliding block 10 to slide up and down inside the wafer slot 2. When the sliding block 10 drives one side of the support rod 11 downwards, it drives the opposite side of the support rod 11 upwards, allowing the wafer to tilt at an angle with the support of the other two stationary support rods 11. Simultaneously, by adjusting the support rods 11 in different directions, the wafer can be freely tilted at multiple angles.

[0038] This specific embodiment is merely an explanation of the present utility model and is not intended to limit the present utility model. After reading this specification, those skilled in the art can make modifications to this embodiment without contributing any inventive step, but as long as they are within the scope of the claims of the present utility model, they are protected by patent law.

Claims

1. A UV shield for a UV machine, comprising a UV machine slide (1), characterized in that: The top of the UV machine slide (1) is provided with a wafer groove (2), and four arc-shaped light shields (3) are symmetrically slidably connected inside the wafer groove (2). An extension light shield (5) is welded to one end of each of the four arc-shaped light shields (3). A sliding groove (4) is provided at the end of each of the four arc-shaped light shields (3) away from the extension light shield (5) and is slidably connected to the extension light shield (5). Four cylinders (7) are symmetrically bolted to the top of the UV machine slide (1), and each of the four cylinders (7) is bolted with a push block (6) that is bolted to the four arc-shaped light shields (3).

2. A UV shield for a UV machine according to claim 1, characterized in that: Each of the four arc-shaped light shields (3) has a supporting round rod (11) slidably connected to one side of each other. The arc-shaped light shield (3) has a threaded rod (8) rotatably connected inside. The surface of the threaded rod (8) is threaded with a threaded sleeve (9). The side of the threaded sleeve (9) close to the supporting round rod (11) is welded with a sliding block (10) slidably connected to the arc-shaped light shield (3). The supporting round rod (11) is rotatably connected to the side of the sliding block (10) away from the threaded sleeve (9).

3. A UV shield for a UV machine according to claim 1, characterized in that: The extended light shield (5) is rotatably connected to a ball bearing (12) that is slidably connected to the slide groove (4) at one end away from the arc-shaped light shield (3).

4. A UV shield for a UV machine according to claim 1, characterized in that: Reflective stickers (14) are attached to the sides of the four curved light shields (3) that are close to each other.

5. A UV shield for a UV machine according to claim 1, characterized in that: The UV machine slide (1) has a through hole (13) inside that communicates with the inside of the wafer groove (2).

6. A UV shield for a UV machine according to claim 2, characterized in that: The top of the threaded rod (8) is welded with a knob (15) that is rotatably connected to the arc-shaped light shield (3).

7. A UV shield for a UV machine according to claim 2, characterized in that: The surface of the supporting round rod (11) is provided with anti-slip stripes.

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