Evaporation boat assembly and evaporation device comprising same

Abstract

The evaporation boat assembly comprises a boat body, a supporting piece is arranged at the bottom of the boat body, and the supporting piece is in contact with the bottom of the boat body; and the heating assembly is used for providing heat for the contact part of the supporting piece and the boat body. According to the assembly, a good positioning and supporting effect can be achieved on the boat body, the breakage condition of the boat body in the using process is reduced, and the influence of supporting pieces on the working temperature of the boat body can be reduced.

Description

Technical Field

[0001] This utility model relates to the field of vapor deposition equipment technology, and in particular to an evaporation boat assembly and a vapor deposition apparatus including the same. Background Technology

[0002] Vacuum evaporation, or evaporation for short, refers to a process in which a coating material (or film material) is evaporated under vacuum conditions using a specific heating and evaporation method, causing the particles to fly to the surface of a substrate and condense into a film.

[0003] Currently, in vacuum evaporation, evaporation boats are commonly used as evaporation devices, with a linear target feeding device installed at one end. Traditional evaporation boats are generally clamped and fixed to the electrode assemblies on both sides by clamping components, and the length of the evaporation boat is not too long, around 13cm. Therefore, the risk of breakage due to the clamping force in the clamping components is relatively low.

[0004] However, as evaporation proceeds, especially after a certain period of use, the corrosion at the wire feeding point of the evaporation boat intensifies and the temperature becomes high (up to 1400℃). At this time, under the clamping force of the clamping components, it is more likely to break at the wire feeding point. After the breakage, it will seriously affect the quality of the vapor-deposited product. For example, if the boat breaks, the molten target material will splash onto the film surface, which will cause the tape to break and may even lead to the film being scrapped.

[0005] Therefore, further improvements are needed. Utility Model Content

[0006] This utility model aims to at least partially solve one of the technical problems in the related art. Therefore, one objective of this utility model is to provide an evaporation boat assembly that provides good positioning and support for the boat body, reducing the occurrence of breakage during use and minimizing the impact of the support components on the boat body's operating temperature.

[0007] Another objective of this invention is to provide a vapor deposition system comprising the aforementioned evaporation boat assembly, which can significantly improve…

[0008] The technical solution of this utility model is as follows:

[0009] An evaporation boat assembly includes a boat body, and a support member is provided at the bottom of the boat body, with the support member in contact with the bottom of the boat body;

[0010] It also includes heating components to provide heat to the parts of the support that come into contact with the hull.

[0011] Based on the above technical solution, while ensuring the support of the boat body after clamping, heat loss caused by contact of the support components can be reduced and compensated.

[0012] Furthermore, the support components are configured in multiple sets.

[0013] Based on the above technical solution, setting up multiple support components can ensure the reliability of the support.

[0014] Furthermore, the support component is in contact with at least the middle of the boat hull.

[0015] Based on the above technical solution, a support component is installed in the middle, which can minimize the probability of stress fracture after the boat is clamped.

[0016] Furthermore, support components and heating assemblies are installed at the ends of the boat hull.

[0017] Based on the above technical solution, the temperature loss caused by the contact electrodes on both sides of the boat hull can also be compensated.

[0018] Furthermore, the support member includes a stop portion and a support portion. The stop portion contacts the boat hull, and the support portion contacts the stop portion and provides a supporting force. The stop portion is heated by a heating assembly.

[0019] Furthermore, the abutment and support parts cooperate in a limiting manner.

[0020] Based on the above technical solution, the abutment and support parts can be prevented from slipping.

[0021] Furthermore, the heating component is configured as a contact heat transfer component.

[0022] Furthermore, the heating component is configured as a thermal radiation heating component.

[0023] Furthermore, the heating element is configured as an induction heating element.

[0024] Furthermore, the part of the abutment that contacts the hull is designed as an insulating part.

[0025] Based on the above technical solution, the installation of insulation can prevent further energy loss and also avoid safety hazards.

[0026] Furthermore, the support part is made of a material with a low thermal conductivity, which is less than 5 W / (m·K).

[0027] Furthermore, the length of the hull is greater than 150mm.

[0028] This application also discloses a vapor deposition apparatus including the above-mentioned evaporation boat assembly, and further includes an electrode assembly for clamping and electrically connecting with the boat body 1, and a wire feeding assembly is provided on the end side of the boat body 1 for wire feeding.

[0029] Furthermore, a silk feeding system is installed on both sides of the boat. Attached Figure Description

[0030] The accompanying drawings are provided to further illustrate the present invention and form part of the specification. They are used together with the embodiments of the present invention to explain the present invention, but do not constitute a limitation thereof. In the drawings:

[0031] Figure 1 This is a top view of the evaporation boat assembly proposed in this utility model.

[0032] Figure 2 This is a schematic diagram of the first type of support structure;

[0033] Figure 3 This is a schematic diagram of the second type of support structure.

[0034] In the figure: 1-hull; 2-support component; 21-abutment part; 22-support part; 23-fitting part; 3-heating component.

[0035] Figure 1 The horizontal direction is the direction of the current, corresponding to the longitudinal direction of the evaporation boat, and the vertical direction is the thickness direction of the evaporation boat. Detailed Implementation

[0036] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0037] Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain the present invention, and should not be construed as limiting the present invention.

[0038] Reference Figures 1-3 Some embodiments of this application disclose an evaporation boat assembly, including a boat body 1, with a support member 2 disposed at the bottom of the boat body 1. The support member 2 contacts the boat body, preferably at least at the middle of the boat body, to ensure support for the boat body after clamping and prevent stress fracture caused by clamping force. It also includes a heating component 3 to provide heat to the contact portion between the support member 2 and the boat body 1, reducing the impact of contact heat transfer on the temperature of the boat body system. When multiple sets of support members 2 are provided, such as with support members and heating components at the middle and ends, temperature loss due to contact electrodes on both sides of the boat body can be compensated. For example, appropriately increasing the heating power of the heating component near the end can increase the temperature of the boat body at the end to a certain extent. Of course, the position of the support member 2 can also be adapted to the shape and size of the evaporation tank and the boat body; for example, the support member can also be disposed on both sides of the boat body, abutting against the sides (and bottom) of the boat body to provide clamping support force.

[0039] like Figure 2 The support member 2 includes an abutment part 21 and a support part 22. The abutment part 21 contacts the boat body 1, and the support part 22 contacts the abutment part 21 and provides a supporting force. The support part 22 is connected and fixed to other structural components, such as the evaporation tank base or other installation structural components. The abutment part 21 is heated by the heating component 3 to compensate for the working temperature of the boat body. Preferably, the abutment part 21 and the support part 22 are limited when they are engaged to prevent slippage, such as by providing a mating part 23, which is limited based on the interlocking structure.

[0040] The heating method can be contact heating, such as heat conduction. The heating component is set as a heating tube or heating plate, which is attached to the abutment part 21 to transfer heat. At this time, heating components such as heating tubes can be embedded at the bottom (or inside) of the abutment part 21 to heat the abutment part 21, so as to reduce the temperature loss caused by the setting of the support during the normal vapor deposition process.

[0041] Of course, heat can also be transferred non-contactly, such as through radiation, like heating by infrared radiation from an electric heating wire; or through induction heating, such as... Figure 3 The abutment part includes a conductive part, which is made of a conductive material, such as graphite or metal. At this time, the induction coil is coiled around the periphery of the abutment part 21. After generating an induced current, it heats the graphite or metal material to generate heat that is transferred to the boat body.

[0042] In addition, the part of the contact between the abutment part 21 and the boat body 1 is preferably set as an insulating part, which has insulation properties to avoid further energy loss and also to avoid safety hazards; the insulating part can be set as a thermally conductive material with relatively good insulation properties such as boron nitride, silicon nitride, aluminum nitride, aluminum oxide, and silicon carbide.

[0043] When using induction heating, the abutment part 21 is provided with a space for installing and accommodating induction heating material, and the induction coil is arranged around the periphery of the abutment part. The shape of the induction heating material can be adapted to be plate-shaped or column-shaped and is attached to the abutment part 21 to form good thermal conductivity contact.

[0044] The support portion 22 is preferably made of a material with a low thermal conductivity, preferably less than 5 W / (m·K), such as some ceramic materials, for example, zirconium oxide.

[0045] This application also discloses a vapor deposition apparatus including the above-mentioned evaporation boat assembly, and further includes an electrode assembly for clamping and electrically connecting with the boat body 1, and a wire feeding assembly is further provided on the end side of the boat body 1 for wire feeding. The remaining related structures are consistent with conventional vapor deposition apparatuses and will not be described in detail here.

[0046] Furthermore, the boat body can be further lengthened, for example, to a length greater than 150mm, preferably greater than 250mm; this can increase the total wire feeding amount, thereby increasing the vapor deposition efficiency. For the lengthened boat body 1, support members can be adaptively set at multiple locations along the length of the boat body.

[0047] Furthermore, a wire feeding system can be set on both sides of the boat body to feed wires from both sides, thereby further increasing the total amount and uniformity of wire feeding, and thus improving the amount of vapor deposition.

[0048] In this application, the structures and connections not described in detail are all prior art, and their structures and principles are well known, so they will not be described in detail here.

[0049] In the description of this utility model, it should be noted that the terms "upper," "lower," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are used only for the convenience of describing the utility model and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the utility model. Furthermore, the terms "first," "second," or "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0050] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0051] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. An evaporation boat assembly, comprising a boat body and a support member in contact with the boat body, the support member being used to provide a supporting force to the boat body; Its features are, It also includes a heating component for providing heat to the part of the support member that contacts the boat body. The support member includes a backing part and a supporting part. The backing part contacts the boat body, and the supporting part contacts the backing part and provides a supporting force. The backing part is heated by the heating component.

2. The evaporation boat assembly as described in claim 1, characterized in that, The support components are set in multiple groups.

3. The evaporation boat assembly as described in claim 2, characterized in that, The support component should be in contact with at least the middle of the boat hull.

4. The evaporation boat assembly as described in claim 3, characterized in that, Support components and heating elements are installed at the ends of the boat hull.

5. The evaporation boat assembly as described in claim 1, characterized in that, The abutment and support parts cooperate in the limiting position.

6. The evaporation boat assembly as claimed in claim 1, characterized in that, The heating component is configured as a contact heat transfer component, a thermal radiation heating component, or an induction heating component.

7. The evaporation boat assembly as claimed in claim 1, characterized in that, The part of the abutment that contacts the hull is made into an insulating part.

8. The evaporation boat assembly as described in any one of claims 5-7, characterized in that, The support part is made of a material with low thermal conductivity, which is less than 5 W / (m·K).

9. A vapor deposition apparatus, characterized in that, The assembly includes the evaporation boat assembly as described in claim 8, and further includes an electrode assembly for clamping and electrically connecting to the boat body, and a wire feeding assembly is provided on the end side of the boat body.

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