360-degree rotating structure for evaporation transmission arm

Abstract

The utility model relates to a 360-degree rotating structure for an evaporation transmission arm, which comprises a motor mounting rack, a rotating component arranged at the lower part of the motor mounting rack and a pushing component driven by the rotating component to rotate around a vertical shaft, the rotating component comprises a rotating motor and a driving shaft driven by the rotating motor, the middle part of the rotating assembly is fixed at the upper end of the driving shaft, the sliding ring is used for transmitting electric power to the pushing assembly and comprises a rotor and a stator, the rotor is fixed on the driving shaft, and the stator is fixed on the motor mounting frame and surrounds the rotor. By means of the structure, 360-degree seamless continuous rotation of the pushing assembly can be achieved, the situation that a motor wire harness restricts the rotating angle of the evaporation transmission arm is avoided, and the working efficiency of the cluster type evaporation equipment is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of evaporation technology, especially relates to a 360 degree rotation structure for evaporation transmission arm. BACKGROUND

[0002] Cluster type vacuum coating is an advanced coating technology, which completes multiple coating steps in an integrated system to improve coating quality and production efficiency. This technology usually involves multiple vacuum coating chambers and a vacuum transfer chamber, and the product is transferred between different coating devices by a mechanical hand to ensure that all coating processes are completed in a vacuum environment, avoiding quality problems caused by exposure to the atmosphere.

[0003] Evaporation transmission arm is a device used to transfer evaporation substrates. In a cluster type vacuum coating equipment, evaporation substrates need to be sequentially transferred into each evaporation chamber and finally sent out from the initial position of the evaporation equipment. The evaporation transmission arm includes a rotating assembly and a pushing assembly, and the pushing assembly is located on the upper part of the rotating assembly and is driven by the rotating assembly to rotate. In some pushing assemblies, a driving motor is used, and the motor wire harness is used for power supply. However, due to the positional relationship between the pushing assembly and the rotating assembly, the ordinary motor wire harness does not allow the pushing assembly to rotate 360 degrees seamlessly and continuously. Therefore, the evaporation substrate needs to be rotated by a large angle to return to the inlet and outlet of the equipment after completing evaporation, and the rotation speed cannot be too fast, otherwise the evaporation substrate will fall, which becomes a factor restricting the work efficiency.

[0004] Chinese patent CN205077139U discloses a flame hydrolysis evaporation device, wherein a slip ring is provided on the driving shaft. The slip ring is an electrical component for connecting and transmitting energy and signals for rotating bodies. However, the function of the slip ring here is to maintain power supply for the heater during the rotation of the turntable, rather than for the pushing assembly of the evaporation transmission arm.

[0005] Therefore, it is necessary to design a special transmission structure to solve the above problems. UTILITY MODEL CONTENT

[0006] The main purpose of the utility model is to provide a 360 degree rotation structure for evaporation transmission arm, which can realize 360 degree seamless and continuous rotation of the pushing assembly, avoid the restriction of the motor wire harness on the rotation angle of the evaporation transmission arm, and improve the work efficiency of the cluster type evaporation equipment.

[0007] This utility model achieves the above-mentioned objective through the following technical solution: a 360° rotating structure for a vapor deposition transfer arm, comprising a motor mounting bracket, a rotating assembly disposed at the lower part of the motor mounting bracket, and a pushing assembly driven by the rotating assembly to rotate around a vertical axis. The rotating assembly includes a rotary motor and a drive shaft driven by the rotary motor. The middle part of the rotating assembly is fixed to the upper end of the drive shaft. It also includes a slip ring for transmitting power to the pushing assembly. The slip ring includes a rotor and a stator. The rotor is fixed to the drive shaft, and the stator is fixed to the motor mounting bracket and surrounds the rotor.

[0008] Specifically, the pushing component includes a rotating bracket connected to the drive shaft, a pushing motor disposed within the rotating bracket, a turntable disposed on the upper part of the rotating bracket, and a telescopic arm that moves horizontally on the turntable. The pushing motor drives the telescopic arm to move through a first synchronous belt pulley mechanism, and the slip ring supplies power to the pushing motor.

[0009] Furthermore, the rotating bracket, the push motor, the motor mounting bracket, the rotating assembly, and the slip ring are all located inside a cylindrical outer shell.

[0010] Furthermore, the cylindrical outer shell is also provided with a fixed bracket and a lifting assembly. The rotary motor is surrounded by the fixed bracket and located at the center of the fixed bracket. The lifting assembly includes a lifting motor, a screw, and a second synchronous pulley mechanism. The lifting motor is eccentrically fixed to the lower part of the motor mounting bracket. The lifting motor drives the screw to rotate around a vertical axis. The fixed bracket is provided with a threaded sleeve that is threaded to the screw. The fixed bracket includes several guide rods that vertically pass through the motor mounting bracket. The motor mounting bracket is provided with linear bearings that match the guide rods.

[0011] Furthermore, a height sensor is provided inside the motor mounting bracket, and a height sensing plate that cooperates with the height sensor is provided on the fixed bracket.

[0012] The beneficial effects of this utility model's technical solution are:

[0013] The motor mounting bracket is the basic rotating structure of the push assembly, so the stator must be fixed to the motor mounting bracket. The rotor needs to rotate with the push motor, so it must be connected to the drive shaft. The rotation angle between the stator and rotor can be arbitrarily changed, but they will maintain an electrical connection, thus enabling 360° seamless continuous rotation of the push assembly. This avoids the motor wiring harness restricting the rotation angle of the vapor deposition transfer arm, improving the working efficiency of the cluster vapor deposition equipment. Attached Figure Description

[0014] Figure 1 This is a perspective view of the 360° rotating structure of the embodiment;

[0015] Figure 2 This is a perspective view of the 360° rotating structure after removing the cylindrical outer shell;

[0016] Figure 3 for Figure 2 A partial sectional view at position A in the middle.

[0017] The numbers in the diagram represent:

[0018] 1-Motor mounting bracket, 11-Linear bearing, 12-Height sensor,

[0019] 2-Rotating assembly, 21-Rotating motor, 22-Drive shaft,

[0020] 3-Pushing component, 31-Rotating bracket, 32-Pushing motor, 33-Turntable, 34-Telescopic arm, 35-First synchronous belt pulley mechanism;

[0021] 4-Slip ring, 41-Rotor, 42-Stator;

[0022] 5-Fixed bracket, 51-Screw sleeve, 52-Guide rod, 53-Height sensor plate;

[0023] 6-Lifting assembly, 61-Lifting motor, 62-Screw, 63-Second synchronous belt pulley mechanism;

[0024] 7- Cylindrical outer shell. Detailed Implementation

[0025] The present invention will be further described in detail below with reference to specific embodiments.

[0026] Example:

[0027] like Figures 1 to 3 As shown, the present invention provides a 360° rotating structure for a vapor deposition transfer arm, comprising a motor mounting bracket 1, a rotating component 2, a pushing component 3, a slip ring 4, a fixed bracket 5, and a lifting component 6. The rotating component 2 is located at the lower part of the motor mounting bracket 1, the pushing component 3 is driven by the rotating component 2 to rotate around a vertical axis, and the slip ring 4 transmits power to the pushing component 3.

[0028] like Figure 3 As shown, the rotating component 2 includes a rotating motor 21 and a drive shaft 22 driven by the rotating motor 21, with the middle part of the rotating component 2 fixed to the upper end of the drive shaft 22.

[0029] This vapor deposition transfer arm is used within a vacuum transfer chamber. Because the cluster-type vacuum coating equipment has one vacuum transfer chamber and multiple vacuum coating chambers arranged around it, the rotating component 2 needs to drive the pushing component 3 to the corresponding positions of each vacuum coating chamber, thereby enabling the pushing component 3 to deliver the vapor deposition substrate into the vacuum coating chamber. Therefore, the connection point between the drive shaft 22 and the pushing component 3 is generally located at the center of its structure.

[0030] like Figure 2 As shown, the push assembly 3 includes a rotating bracket 31 connected to the drive shaft 22, a push motor 32 disposed in the rotating bracket 31, a turntable 33 disposed on the upper part of the rotating bracket 31, and a telescopic arm 34 that moves horizontally on the turntable 33. The push motor 32 drives the telescopic arm 34 to move through the first synchronous belt pulley mechanism 35, and the slip ring 4 supplies power to the push motor 32.

[0031] The push motor 32 transmits power through the first synchronous belt pulley mechanism 35, thereby driving the extension and retraction of the telescopic arm 34. The push motor 32 maintains a relative position with the turntable 33. In order for the push assembly 3 to rotate seamlessly and continuously 360°, the push motor 32 also needs to rotate 360°. Therefore, to avoid wire harness tangling, a slip ring 4 is required as the power supply mechanism for the push motor 32.

[0032] like Figure 3 As shown, the slip ring 4 includes a rotor 41 and a stator 42. The rotor 41 is fixed on the drive shaft 22, and the stator 42 is fixed on the motor mounting bracket 1 and surrounds the rotor 41.

[0033] The motor mounting bracket 1 serves as the basic rotating structure for the push assembly 3, so the stator 42 must be fixed to the motor mounting bracket 1. The rotor 41 needs to rotate together with the push motor 32, so it must be connected to the drive shaft 22. The rotation angle between the stator 42 and the rotor 41 can be arbitrarily changed, but they will maintain an electrical connection, thus enabling the push assembly 3 to rotate 360° seamlessly and continuously. This avoids the motor wiring harness restricting the rotation angle of the vapor deposition transfer arm, improving the working efficiency of the cluster vapor deposition equipment.

[0034] like Figure 3 As shown, the rotary motor 21 is surrounded by the fixed bracket 5 and located at the center of the fixed bracket 5. The lifting assembly 6 includes a lifting motor 61, a screw 62, and a second synchronous belt pulley mechanism 63. The lifting motor 61 is eccentrically fixed to the lower part of the motor mounting bracket 1. The lifting motor 61 drives the screw 62 to rotate around a vertical axis. The fixed bracket 5 is provided with a threaded sleeve 51 that is threadedly engaged with the screw 62. The fixed bracket 5 includes several guide rods 52 that vertically pass through the motor mounting bracket 1. The motor mounting bracket 1 is provided with linear bearings 11 that match the guide rods 52. A height sensor 12 is provided inside the motor mounting bracket 1, and a height sensing plate 53 that cooperates with the height sensor 12 is provided on the fixed bracket 5.

[0035] The vapor-deposited substrate is placed above the front end of the telescopic arm 34. When the substrate reaches the vapor deposition chamber, the telescopic arm 34 sometimes needs to be slightly raised or lowered to position it. Therefore, the lower part of the rotating assembly 2 also needs to be raised or lowered via the lifting assembly 6. Because the guide rod 52 restricts the motor mounting bracket 1 to only move up and down, the screw sleeve 51 can only maintain its angle. The lifting assembly 6 uses the rotation of the screw 62 to drive the screw sleeve 51 to move up and down, thus enabling all components on the motor mounting bracket 1 to rise and fall vertically. The relative position of the height sensing plate 53 and the fixed bracket 5 is fixed. The height sensor 12 will rise and fall with the motor mounting bracket 1, so when the height sensor 12 senses the height sensing plate 53, it can determine whether the vapor-deposited substrate has reached the lifting limit position.

[0036] like Figure 1 and Figure 2 As shown, the rotating bracket 31, the push motor 32, the motor mounting bracket 1, the rotating component 2, the slip ring 4, the fixed bracket 5, and the lifting component 6 are all located inside a cylindrical outer shell 7.

[0037] Because the rotating bracket 31, push motor 32, motor mounting bracket 1, rotating component 2, slip ring 4, fixed bracket 5 and lifting component 6 will all move actively or passively, the cylindrical housing 7 is needed to protect these parts to prevent foreign objects from getting stuck in the gaps of the parts and affecting the smoothness of the movement.

[0038] The above descriptions are merely some embodiments of this utility model. For those skilled in the art, various modifications and improvements can be made without departing from the inventive concept of this utility model, and all such modifications and improvements fall within the protection scope of this utility model.

Claims

1. A 360° rotating structure for a vapor deposition transfer arm, comprising a motor mounting bracket, a rotating assembly disposed at the lower part of the motor mounting bracket, and a pushing assembly driven by the rotating assembly to rotate about a vertical axis, the rotating assembly comprising a rotary motor and a drive shaft driven by the rotary motor, the middle part of the rotating assembly being fixed to the upper end of the drive shaft, characterized in that: It also includes a slip ring for transmitting power to the push assembly, the slip ring comprising a rotor and a stator, the rotor being fixed to the drive shaft and the stator being fixed to the motor mounting bracket and surrounding the rotor.

2. The 360° rotating structure for a vapor deposition transfer arm according to claim 1, characterized in that: The pushing assembly includes a rotating bracket connected to the drive shaft, a pushing motor disposed within the rotating bracket, a turntable disposed on the upper part of the rotating bracket, and a telescopic arm that moves horizontally on the turntable. The pushing motor drives the telescopic arm to move through a first synchronous belt pulley mechanism, and the slip ring supplies power to the pushing motor.

3. The 360° rotating structure for a vapor deposition transfer arm according to claim 2, characterized in that: The rotating bracket, the push motor, the motor mounting bracket, the rotating assembly, and the slip ring are all located inside a cylindrical outer shell.

4. The 360° rotating structure for a vapor deposition transfer arm according to claim 3, characterized in that: The cylindrical outer shell is further provided with a fixed bracket and a lifting assembly. The rotary motor is surrounded by the fixed bracket and located at the center of the fixed bracket. The lifting assembly includes a lifting motor, a screw, and a second synchronous pulley mechanism. The lifting motor is eccentrically fixed to the lower part of the motor mounting bracket. The lifting motor drives the screw to rotate around a vertical axis. The fixed bracket is provided with a threaded sleeve that is threaded to the screw. The fixed bracket includes several guide rods that vertically pass through the motor mounting bracket. The motor mounting bracket is provided with linear bearings that match the guide rods.

5. The 360° rotating structure for a vapor deposition transfer arm according to claim 4, characterized in that: The motor mounting bracket is equipped with a height sensor, and the fixed bracket is equipped with a height sensing plate that cooperates with the height sensor.

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