Anti-sticking sheet electroplating hanger accessory

Abstract

The utility model discloses an anti-sticking sheet electroplating hanger accessory which is applied to the field of wafer processing accessories and comprises a base plate, a groove is formed in the top of the base plate, a through groove is formed in the groove, a cover plate is placed at the top of the base plate, a sealing ring is installed at the bottom of the cover plate, a locking bolt is arranged at the top of the cover plate in a penetrating mode, and the locking bolt is connected with the through groove. A threaded hole is formed in the top of the base plate, a U-shaped plate is slidably connected to one side of the base plate in an inserted mode, a lead screw is welded to the top of the base plate, and a sliding groove is formed in the top of the U-shaped plate. The anti-adhesion effect is good, the cover plate is prevented from being adhered together with the wafer after being detached, the safety of the wafer is improved, the separation burden of personnel is reduced, and meanwhile, the length of the cover plate can be conveniently adjusted. The operation is simple and convenient, the waste of the electroplating liquid caused by too deep lowering can be reduced, and the scraping burden of subsequent personnel can also be reduced.

Description

TECHNICAL FIELD

[0001] The utility model relates to wafer processing accessory field, especially in kind of anti -sticking piece electroplating hanger accessory. BACKGROUND

[0002] At present, the Chinese utility model with the announcement number CN216006068U discloses a wafer electroplating hanger. Although the hanger can play a limiting role by fixing the back plate with screws, there are still other problems in the use process, such as poor anti -sticking effect, the bottom of the back plate directly presses the wafer after installation, the contact area between the back plate and the wafer is wide, the bottom is easy to stick with the wafer when the back plate is opened and taken down, the wafer is easy to be damaged if it falls during the sticking process, the safety is poor, and it is not convenient to adjust the length of the hanger. The hanger base plate is integrally formed, and it is difficult to adjust after the hanger base plate and the driving assembly are installed. If the hanger is too long and is placed too deep, it will be more troublesome to clean up later, and it will also increase the waste of electroplating solution. In order to solve the above problems, we propose a kind of anti -sticking piece electroplating hanger accessory. CONTENT OF THE UTILITY MODEL

[0003] The utility model aims to provide a kind of anti -sticking piece electroplating hanger accessory, solve the problem that the anti -sticking effect of the existing hanger accessory is poor and is not convenient to adjust the length of itself.

[0004] The above technical purpose of the utility model is realized by the following technical scheme: a kind of anti -sticking piece electroplating hanger accessory, including base plate, recess is set in the top of the base plate, through slot is set in the inside of the recess, cover plate is placed in the top of the base plate, sealing ring is installed in the bottom of the cover plate, lock bolt is arranged in the top of the cover plate, threaded hole is set in the top of the base plate, U-shaped plate is slidably inserted in the side of the base plate, screw rod is welded in the top of the base plate, sliding slot is set in the top of the U-shaped plate, the other end of the screw rod is extended to the outside of the U-shaped plate through the sliding slot and is connected with nut by screwing.

[0005] The above technical scheme can achieve good anti -sticking effect, avoid the cover plate from sticking with the wafer when it is removed, improve the safety of the wafer, reduce the separation burden of personnel, and conveniently adjust the length of the hanger. The operation is simple and convenient, which can reduce the waste of electroplating solution caused by placing too deep, and also reduce the burden of subsequent personnel.

[0006] The utility model is further provided as follows: the base plate and the cover plate are both made of aluminum alloy material.

[0007] The base plate and the cover plate have the characteristics of lightweight, high strength, good corrosion resistance and strong plasticity.

[0008] The utility model further sets up: the bottom of sealing ring is equipped with the notched gap of teeth.

[0009] Adopt above-mentioned technical scheme, can further reduce the contact area between with wafer, will not produce seamless adhesion.

[0010] The utility model further sets up: the screw rod and nut are all made of stainless steel material.

[0011] Adopt above-mentioned technical scheme, screw rod and nut have the characteristics of high strength, small density and excellent corrosion resistance.

[0012] The utility model further sets up: the surface of screw rod is equipped with spring washer, spring washer is located between U-shaped plate and nut.

[0013] Adopt above-mentioned technical scheme, through the setting of spring washer, can improve the fixed effect after nut is tightened, plays the role of shockproof and anti-loosening.

[0014] The utility model further sets up: the quantity of screw rod, sliding groove, nut and spring washer is two.

[0015] Adopt above-mentioned technical scheme, can improve the stability when adjusting up and down of base plate, avoids the situation of inclination.

[0016] Summarized above, the utility model has following beneficial effect:

[0017] 1. the utility model discloses through first taking up wafer and putting into the recess, after putting in wafer, taking up cover plate, after taking up cover plate, sealing ring is inserted into recess, then cover plate is pressed down, when cover plate is pressed down to the bottom, its bottom will be pasted with base plate, and the sealing ring below will also be pressed tightly to wafer to avoid its shaking, finally locking bolt is inserted into screw hole and is rotated and locked, can realize good anti-adhesion effect, avoids cover plate after removal together with wafer sticking, improves the security of wafer, reduces personnel's separation burden;

[0018] 2. the utility model discloses through the vertical of base plate after wafer installation makes the back of U-shaped plate connect with drive assembly, then uses tool to loosen nut, after loosening nut, will remove the fixation of screw rod and base plate, then according to the depth of putting down, the base plate is lifted appropriately, when the base plate is lifted to the appropriate distance, re-tighten nut, can conveniently adjust the length of itself. Simple and convenient operation, can reduce the waste of electroplating solution caused by putting down too deep, also can reduce the subsequent personnel's scraping burden. BRIEF DESCRIPTION OF DRAWINGS

[0019] Figure 1 It is the utility model structure perspective view;

[0020] Figure 2 is the structure front view of the utility model;

[0021] Figure 3 is the structure local view of the utility model;

[0022] Figure 4 is the schematic diagram of the cover plate and the sealing ring of the utility model;

[0023] Figure 5 is the utility model Figure 2 A structure enlarged view.

[0024] Reference signs: 1, base plate; 2, recess; 3, through slot; 4, cover plate; 5, sealing ring; 6, locking bolt; 7, threaded hole; 8, U-shaped plate; 9, screw rod; 10, sliding groove; 11, nut; 12, spring washer. DETAILED DESCRIPTION

[0025] The utility model will be further explained in detail in connection with the drawings.

[0026] Example 1:

[0027] Reference Figure 1 , Figure 2 , Figure 3 , Figure 4 and Figure 5 , a kind of anti-sticking piece electroplating hanger accessory, including base plate 1, recess 2 is set in the top of base plate 1, through slot 3 is set in the inside of recess 2, cover plate 4 is placed in the top of base plate 1, sealing ring 5 is installed in the bottom of cover plate 4, locking bolt 6 is set in the top of cover plate 4, threaded hole 7 is set in the top of base plate 1, by first taking wafer and placing into recess 2, wafer is placed into after taking cover plate 4, cover plate 4 is taken after inserting sealing ring 5 into recess 2, then cover plate 4 is pressed down, when cover plate 4 is pressed to the bottom, its bottom will be attached with base plate 1, and the sealing ring 5 below will also be pressed to wafer to avoid its shaking, finally locking bolt 6 is inserted into threaded hole 7 and is rotated and locked, can realize good anti-sticking effect, avoid cover plate 4 after removal together with wafer is adhered, improve the security of wafer, reduce personnel's separation burden.

[0028] Reference Figure 1 , Figure 2 , Figure 3 , Figure 4 and Figure 5 , base plate 1 and cover plate 4 are made of aluminum alloy material, and base plate 1 and cover plate 4 have the characteristics of light weight, high strength, good corrosion resistance and high plasticity.

[0029] Reference Figure 4 and Figure 5The bottom of the sealing ring 5 is provided with a tooth-shaped notch, which can further reduce the contact area with the wafer and will not cause seamless adhesion.

[0030] Brief use process: first, pick up the wafer and put it into the groove 2, then pick up the cover plate 4, insert the sealing ring 5 into the groove 2 after picking up the cover plate 4, then press the cover plate 4 down, and the bottom of the cover plate 4 will be attached to the base plate 1 after being pressed to the bottom, and the sealing ring 5 below will also be pressed tightly to avoid the wafer from shaking, and finally the locking bolt 6 is inserted into the threaded hole 7 and rotated to lock.

[0031] Example 2:

[0032] Reference Figure 1 , Figure 2 and Figure 3 , a kind of anti-sticking piece electroplating hanger accessories, one side of base plate 1 is slidably inserted with U-shaped plate 8, top of base plate 1 is welded with screw rod 9, top of U-shaped plate 8 is provided with sliding groove 10, another end of screw rod 9 extends to outside of U-shaped plate 8 through sliding groove 10 and is threadedly connected with nut 11, after wafer installation, base plate 1 is stood up to make back of U-shaped plate 8 connected with driving assembly, then nut 11 is loosened with tool, nut 11 will release the fixation of screw rod 9 and base plate 1 after loosening, then base plate 1 is appropriately lifted according to the depth of lowering, and nut 11 is tightened again when base plate 1 is lifted to appropriate distance, which can conveniently adjust the length of itself. Simple and convenient operation can reduce the waste of electroplating solution caused by lowering too deep, and also reduce the burden of subsequent personnel.

[0033] Reference Figure 1 , Figure 2 and Figure 3 , screw rod 9 and nut 11 are both made of stainless steel material, and screw rod 9 and nut 11 have the characteristics of high strength, small density and excellent corrosion resistance.

[0034] Reference Figure 2 , spring washer 12 is sleeved on the surface of screw rod 9, and spring washer 12 is located between U-shaped plate 8 and nut 11, the setting of spring washer 12 can improve the fixation effect of nut 11 after tightening, and plays the role of shockproof and anti-loosening.

[0035] Reference Figure 1 , Figure 2 and Figure 3 , the number of screw rod 9, sliding groove 10, nut 11 and spring washer 12 is two, which can improve the stability of the up and down adjustment of base plate 1 and avoid tilting.

[0036] Brief description of the usage process: After wafer mounting, stand the substrate 1 upright so that the back of the U-shaped plate 8 is connected to the drive assembly. Then, use a tool to loosen the nut 11. After the nut 11 is loosened, it will release the fixation of the lead screw 9 and the substrate 1. Then, lift the substrate 1 appropriately according to the lowering depth. When the substrate 1 is lifted to the appropriate distance, tighten the nut 11 again.

[0037] This specific embodiment is merely an explanation of the present utility model and is not intended to limit the present utility model. After reading this specification, those skilled in the art can make modifications to this embodiment without contributing any inventive step, but as long as they are within the scope of the claims of the present utility model, they are protected by patent law.

Claims

1. An anti-stick electroplating fixture accessory, comprising a substrate (1), characterized in that: The substrate (1) has a groove (2) on its top and a through groove (3) inside the groove (2). A cover plate (4) is placed on the top of the substrate (1). A sealing ring (5) is installed at the bottom of the cover plate (4). A locking bolt (6) is installed through the top of the cover plate (4). A threaded hole (7) is provided on the top of the substrate (1). A U-shaped plate (8) is slidably inserted into one side of the substrate (1). A lead screw (9) is welded to the top of the substrate (1). A sliding groove (10) is provided on the top of the U-shaped plate (8). The other end of the lead screw (9) extends through the sliding groove (10) to the outside of the U-shaped plate (8) and is threadedly connected to a nut (11).

2. The anti-stick electroplating fixture accessory according to claim 1, characterized in that, Both the substrate (1) and the cover plate (4) are made of aluminum alloy.

3. The anti-stick electroplating fixture accessory according to claim 1, characterized in that, The bottom of the sealing ring (5) has a toothed notch.

4. The anti-stick electroplating fixture accessory according to claim 1, characterized in that, Both the lead screw (9) and the nut (11) are made of stainless steel.

5. The anti-stick electroplating fixture accessory according to claim 1, characterized in that, A spring washer (12) is fitted on the surface of the lead screw (9), and the spring washer (12) is located between the U-shaped plate (8) and the nut (11).

6. The anti-stick electroplating fixture accessory according to claim 5, characterized in that, The number of each of the lead screw (9), sliding groove (10), nut (11) and spring washer (12) is two.

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