Waffle hole cover plate

Abstract

The utility model discloses a waffle hole cover plate, and belongs to the technical field of cleaning rooms in semiconductor electronic plants. Comprising a cover plate, ventilation holes and a supporting assembly. The cover plate is circular, the diameter of the cover plate is larger than that of the waffle hole, two ribs which are perpendicular to each other and integrated with the cover plate are arranged on the cover plate, the cover plate is divided into four parts by the two ribs, and ventilation holes are evenly formed in the four parts. The bottom surface part is provided with a supporting assembly, the supporting assembly comprises a supporting ring and supporting strips, the two supporting strips are correspondingly and fixedly connected with the ribs, the two ends of each supporting strip are fixedly connected with the inner diameter side of the supporting ring, and the supporting ring is fixedly connected with the cover plate and is concentric with the cover plate; the four parts of ventilation holes are formed in the area in the supporting ring. The anti-static aluminum alloy cover plate effectively solves the problem that an aluminum alloy anti-static cover plate is not provided with a supporting part, and collapse caused by insufficient bearing capacity is prone to occurring in a factory area.

Description

Technical Field

[0001] This utility model belongs to the field of cleanroom technology in semiconductor and electronic manufacturing plants, and specifically relates to a waffle hole cover plate. Background Technology

[0002] With the rapid development of electronic technology, the construction scale of high-tech semiconductor electronics factory projects in China is expanding daily, and the engineering technology is becoming increasingly sophisticated. Among these, the environmental quality of the cleanroom and the stable operation of the production line are of paramount importance, and are also crucial guarantees for the yield rate of the production line processes. In addition to temperature, humidity, and pressure, the environmental quality of a cleanroom also includes its cleanliness level, such as the commonly referred to Class 1000 cleanroom, Class 100 cleanroom, or even higher levels. To ensure the cleanliness level of the cleanroom, the airflow organization of the factory is particularly important. The raised floor ventilation support structure and the waffle perforation structure are key components for maintaining vertical airflow in the cleanroom.

[0003] Chip manufacturing facilities typically have a four-story structure. The cleanroom raised floor and waffle slabs are located on the third floor, which is the main production area (FAB). The second floor (Sub-FAB), located below the waffle slabs, houses many high-value process equipment. When secondary processing or maintenance is required below the raised floor, any tools or parts falling through the waffle slabs into the Sub-FAB will inevitably cause equipment malfunctions or damage, personnel injuries, production line downtime, and safety accidents, ultimately compromising product yield. Therefore, technicians typically use waffle slab covers to prevent tools and parts from falling into the Sub-FAB.

[0004] Among existing waffle hole cover plates, the Chinese utility model patent titled "An SMC Waffle Hole Cover Plate Device" (authorization announcement number CN206233575U) discloses that the bottom flat plate of the SMC waffle plate has closed convex lips on all four sides, cylindrical ventilation holes on the bottom flat plate, reinforcing ribs at the connection between the ventilation holes and the bottom flat plate, and rounded corners at the connection between the upper surface of the bottom flat plate and the outer wall of the ventilation holes. The bottom flat plate is divided into four equally divided sub-bottom plates by isolation ribs 1. A conductive bushing is installed on the top of the ventilation holes, four metal conductive sheets are evenly arranged on the inner ring of the conductive bushing, and an aluminum alloy anti-static cover plate is installed on the conductive bushing.

[0005] The above technology has the following problems:

[0006] 1. The aluminum alloy antistatic cover has no supporting components, which can easily lead to collapse due to insufficient load-bearing capacity in the factory area.

[0007] 2. The ventilation holes on the aluminum alloy anti-static cover may cause small parts to fall through the cover and into the machine, causing machine malfunction. Summary of the Invention

[0008] The purpose of this utility model is to overcome the above-mentioned problems and propose a waffle hole cover plate to solve the problems of insufficient load-bearing capacity and excessive hole diameter in the existing technology.

[0009] To achieve the above objectives, the technical solution adopted by this utility model is as follows:

[0010] A waffle-shaped perforated cover plate, characterized in that it comprises a cover plate, ventilation holes, and a support assembly; the cover plate is circular, with a diameter larger than the diameter of the waffle holes; two ribs integral with and perpendicular to each other are provided on the cover plate, dividing the cover plate into four parts, with ventilation holes evenly distributed on the four parts; a support assembly is provided on the bottom surface of the cover plate, the support assembly comprising a support ring and support bars, two support bars being fixedly connected to the ribs respectively, the two ends of the support bars being fixedly connected to the inner diameter side of the support ring, the support ring being fixedly connected to the cover plate and concentric with the cover plate; the four ventilation holes are located in the area within the support ring.

[0011] The support ring is cylindrical and perpendicular to the cover plate.

[0012] The center of the ventilation holes closest to both sides of the support bar is 8.5mm away from the support bar.

[0013] The center-to-center distance between adjacent ventilation holes in each of the four sections is the same, which is 14.2 mm.

[0014] The number of ventilation holes is the same in each of the four parts.

[0015] Each of the four sections has 154 ventilation holes, each with a diameter of 12mm.

[0016] Both support bars are 30mm high, 2mm thick, and 396mm long.

[0017] The support ring is 30mm high, 2mm thick, and has an inner diameter of 396mm.

[0018] The cover plate has a diameter of 450 mm.

[0019] The area formed by the outer diameter side of the support ring and the edge of the cover plate supports the cover plate on the surface of the waffle hole.

[0020] The advantages of using this utility model are:

[0021] I. Compared with the existing technology, the ribs set on the surface of the cover plate increase the load-bearing strength of the cover plate surface. At the same time, the support strips and support rings are set on the bottom part of the ribs to support the surface. The support components on the basis of the ribs further increase the load-bearing strength of the cover plate.

[0022] Second, compared with the existing technology, the design of the support strip and the support ring with a center distance of 8.5mm between the center of the ventilation hole and the support strip, a center distance of 14.2mm between adjacent ventilation holes, a height of 30mm, a thickness of 2mm, and a length of 396mm can ensure that a single cover plate can withstand a weight of 350 pounds without breaking, ensuring safety without affecting the space.

[0023] Third, compared with existing technologies, each part has 154 ventilation holes, ensuring that the cover plate has at least 50% open area for air circulation, without affecting the original airflow organization, and achieving good ventilation effect.

[0024] Fourth, compared with existing technologies, the 12mm diameter ventilation hole can prevent any object larger than 1 / 2 inch from falling. Without affecting ventilation, it effectively solves the problem of equipment malfunction or damage and personnel injury caused by small parts falling into cleanrooms.

[0025] 5. The cover plate can be easily inserted into the waffle hole without any hardware or tools, making installation convenient and quick. The area formed by the outer diameter side of the support ring and the edge of the cover plate simultaneously supports the cover plate inside the waffle hole, improving support strength. Attached Figure Description

[0026] Figure 1 This is a schematic diagram of the surface of the cover plate of this utility model;

[0027] Figure 2 This is a schematic diagram of the bottom surface of the cover plate of this utility model;

[0028] Figure 3 This is a schematic diagram of the ventilation holes and support strips of this utility model;

[0029] Figure 4 This is a schematic diagram of the support component of this utility model.

[0030] The markings in the diagram are: 1. Cover plate, 2. Ventilation hole, 3. Support component, 4. Support strip, 5. Support ring, 6. Rib. Detailed Implementation Example

[0031] A waffle-shaped perforated cover plate includes a cover plate 1, ventilation holes 2, and a support assembly 3. The cover plate 1 is circular, with a diameter larger than the diameter of the waffle holes. Two ribs 6 are integral with and perpendicular to each other on the cover plate 1, dividing the cover plate 1 into four parts. Ventilation holes 2 are evenly distributed on the four parts. The support assembly 3 is provided on the bottom surface of the cover plate. The support assembly 3 includes a support ring 5 and support bars 4. The two support bars 4 are fixedly connected to the ribs 6. The two ends of the support bars 4 are fixedly connected to the inner diameter side of the support ring 5. The support ring 5 is fixedly connected to the cover plate 1 and is concentric with the cover plate 1. The four ventilation holes 2 are located in the area inside the support ring 5.

[0032] The support ring 5 is cylindrical and perpendicular to the cover plate 1.

[0033] The center of the ventilation hole 2 closest to both sides of the support bar 4 is 8.5mm away from the support bar 4.

[0034] The center-to-center distance between adjacent ventilation holes 2 in each of the four parts is the same, which is 14.2mm.

[0035] The number of ventilation holes 2 is the same in each of the four parts.

[0036] Each of the four parts has 154 ventilation holes 2, each with a diameter of 12mm.

[0037] Both support bars 4 are 30mm high, 2mm thick, and 396mm long.

[0038] The support ring 5 is 30mm high, 2mm thick, and has an inner diameter of 396mm.

[0039] The cover plate 1 has a diameter of 450 mm.

[0040] The area formed by the outer diameter side of the support ring 5 and the edge of the cover plate 1 supports the cover plate 1 on the surface of the waffle hole.

[0041] like Figure 1-4As shown, the ribs 6 on the surface of cover plate 1 increase its load-bearing strength. Support strips 4 are also provided on the bottom surface of the cover plate, further increasing its load-bearing strength through a combination of support strips and support rings. The distance between the center of the ventilation hole and the support strip is 8.5mm, and the distance between the centers of adjacent ventilation holes is 14.2mm. The design of the support strips and support rings, with a height of 30mm, thickness of 2mm, and length of 396mm, ensures that a single cover plate can withstand a weight of 350 pounds without breaking, ensuring safety without affecting space. Each section has 154 ventilation holes, ensuring that the cover plate has at least 50% open area for air circulation, achieving a good cooling effect. The ventilation hole diameter is 12mm, which can prevent any object larger than 1 / 2 inch from falling. Without affecting ventilation, this effectively solves the problem of machine malfunctions caused by small parts falling into the cleanroom. The cover plate 1 can be easily inserted into the waffle hole without any hardware or tools, making it convenient and quick to install. The 5mm wide, un-drilled portion of the outer diameter of the support ring 5 is also supported by the cover plate 1 inside the waffle hole, increasing the support strength.

Claims

1. A waffle-shaped perforated cover plate, characterized in that: The system includes a cover plate (1), ventilation holes (2), and a support assembly (3). The cover plate (1) is circular, and its diameter is larger than that of the waffle hole. Two ribs (6) are provided on the cover plate (1) and are perpendicular to each other. The two ribs (6) divide the cover plate (1) into four parts, and ventilation holes (2) are evenly provided on the four parts. The support assembly (3) is provided on the bottom surface of the cover plate. The support assembly (3) includes a support ring (5) and a support bar (4). The two support bars (4) are fixedly connected to the ribs (6). The two ends of the support bars (4) are fixedly connected to the inner diameter side of the support ring (5). The support ring (5) is fixedly connected to the cover plate (1) and is concentric with the cover plate (1). The ventilation holes (2) in the four parts are located in the area inside the support ring (5).

2. The waffle hole cover plate according to claim 1, characterized in that: The support ring (5) is cylindrical and perpendicular to the cover plate (1).

3. A waffle hole cover plate according to claim 1 or 2, characterized in that: The center of the ventilation hole (2) closest to both sides of the support bar (4) is 8.5mm away from the support bar (4).

4. A waffle hole cover plate according to claim 3, characterized in that: The center-to-center distance between adjacent ventilation holes (2) in each of the four parts is the same, which is 14.2 mm.

5. A waffle perforated cover plate according to claim 1, 2, or 4, characterized in that: The number of ventilation holes (2) in each of the four parts is the same.

6. A waffle hole cover plate according to claim 5, characterized in that: The number of ventilation holes (2) in each of the four parts is 154 and the diameter of each hole is 12mm.

7. A waffle hole cover plate according to claim 1, 2, 4, or 6, characterized in that: Both support bars (4) are 30mm high, 2mm thick and 396mm long.

8. A waffle hole cover plate according to claim 7, characterized in that: The support ring (5) is 30 mm high, 2 mm thick and 396 mm inner diameter.

9. A waffle hole cover plate according to claim 1, 2, 4, 6, or 8, characterized in that: The cover plate (1) has a diameter of 450 mm.

10. A waffle hole cover plate according to claim 9, characterized in that: The area formed by the outer diameter side of the support ring (5) and the edge of the cover plate (1) supports the cover plate (1) on the waffle hole surface.

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