Sealed air bag pump

Abstract

The utility model discloses a sealed air bag pump, and belongs to the technical field of pump body equipment. The sealing air bag pump comprises a pump head and a sealing air bag, wherein the pump head comprises a liquid inlet channel and a liquid outlet channel; the pump body comprises two gas phase working chambers, and each gas phase working chamber is provided with a gas inlet and a gas outlet; the interior of the air bag is hollow to form a liquid phase working cavity, a first annular boss and a second annular boss are arranged at the first end of the air bag, a first groove and a second groove are formed in the connecting face of the pump head and the air bag, the second groove is formed in the inner side of the first groove, and the air bag is arranged in the first groove. The first boss abuts against the first groove, and the second groove is in interference fit with the second boss. Through the structural design of the pump head and one end of the air bag, good sealing of the air bag and the pump head is achieved, the risks of pollution and sealing failure are reduced, and the production efficiency of fluid pumping of the air bag pump is improved.

Description

TECHNICAL FIELD

[0001] The application relates to a sealed air bag pump and belongs to the technical field of pump body equipment. BACKGROUND

[0002] Air bag pumps made of fluororesin have been widely used for conveying semiconductor cleaning liquid, and a reciprocating air bag pump generally comprises two object fluid chambers, each of which is provided with an inflatable or contractible air bag; by inflation or contraction of the air bag, the object fluid in the object fluid chamber is inhaled or discharged.

[0003] In the prior art patent JP3519364B2, an air bag pump is disclosed, and the patent Figure 2 According to the description in the patent and the description, after the opening end of the air bag and the pump head are connected through the clamping between the protrusion and the groove (11a and 14c), the inner thread 14d of the groove 14c and the outer thread 11b of the protrusion 11a are screwed to be connected and fixed. The connection mode of the opening end of the air bag to the pump head through the inner and outer threads may also affect the liquid sealing of the protrusion and the groove. Because of the influence of the liquid with a relatively high temperature (150-180 DEG C) in the object fluid chamber in the air bag, the inner and outer threads may be softened to a certain extent, so that the connection strength of the air bag opening end and the pump head is reduced, and the reciprocating air bag may cause the liquid sealing of the protrusion and the groove to fail.

[0004] In a common pump body, a gasket or O-ring is arranged between the pump head and the air bag for sealing, but in semiconductor production, strong acid, strong base and solvent are involved in pumping, and the use of gaskets or O-rings may be contaminated by the fluid to cause sealing failure. Therefore, it is still necessary to design a stable and non-polluting sealing structure for the air bag pump. CONTENT OF THE UTILITY MODEL

[0005] In order to solve the above problems, a sealed air bag pump is provided, which can realize the connection of the air bag and the pump head without welding the air bag or screwing the air bag on the pump head through the threads on the air bag, and ensure the sealing of the liquid phase working chamber of the air bag pump.

[0006] According to one aspect of the application, a sealed air bag pump is provided, comprising:

[0007] A pump head, the pump head comprising a liquid inlet channel and a liquid outlet channel;

[0008] A pump body, the pump body comprising two gas phase working chambers, the gas phase working chambers being provided with gas inlets and gas outlets;

[0009] The air bag is arranged in the gas-phase working chamber and connected with the pump head, the second end of the air bag is closed and hollowed to form a liquid-phase working chamber, the first end of the air bag is provided with a ring-shaped first boss and a ring-shaped second boss, the second boss is arranged inside the first boss, the connecting surface of the pump head and the air bag is provided with a first groove and a second groove, the second groove is arranged inside the first groove, the first boss is in abutment with the first groove, and the second groove is in interference fit with the second boss for sealing the liquid-phase working chamber.

[0010] Specifically, the radial section of the first boss and the second boss is any shape capable of abutting or fitting with the first groove and the second groove respectively; and preferably, the radial section of the first boss and the second boss is a stepped shape.

[0011] Optionally, the second boss is higher than the first boss, and the depth of the second groove is greater than the depth of the first groove.

[0012] Optionally, a third groove is arranged between the second boss and the first boss.

[0013] A third boss is arranged between the second groove and the first groove, and the third boss is in interference fit with the third groove.

[0014] Optionally, a positioning column is fixedly connected to the pump head, and a first flange is further arranged on the outer periphery of the first end of the air bag, the first flange is provided with a positioning hole matched with the positioning column, and the positioning column is clamped with the positioning hole.

[0015] Optionally, at least four openings are arranged on the pump head, a first connecting rod is fixed in the openings, a first through hole corresponding to the openings is arranged on the first flange, and the first connecting rod passes through the first through hole to fixedly connect the air bag and the pump head.

[0016] Specifically, the first connecting rod and the pump head can be clamped, sleeved or integrally formed.

[0017] Optionally, a protection plate is fixedly connected to the second end of the air bag.

[0018] Optionally, a spring is arranged between the protection plate and the pump body, and at least one end of the spring is fixedly connected to the protection plate or the inner side of the pump body.

[0019] Optionally, a first connecting plate and a second connecting plate are arranged at both ends of the pump body respectively, the first connecting plate and the second connecting plate are connected through a second connecting rod, the second connecting rod is at least four and is uniformly arranged along the circumference of the pump body.

[0020] Optionally, a gasket is arranged between the pump body and the pump head, the gasket has an annular structure, and a cross section of the gasket has an I-shaped structure.

[0021] Optionally, a check valve is arranged in the liquid inlet channel and the liquid outlet channel, the check valve is a spring check valve, and a valve seat of the check valve abuts against inner walls of the liquid inlet channel and the liquid outlet channel.

[0022] The beneficial effects of the present application include but are not limited to:

[0023] 1. The wind bag pump of the present application can not only limit the position of the wind bag, reduce the position deviation caused by the expansion and contraction vibration of the wind bag in the long-term working process, but also realize the sealing of the liquid phase working chamber by arranging the first boss and the second boss on the wind bag and matching the first groove and the second groove arranged on the pump head.

[0024] 2. The wind bag pump of the present application can improve the stability of the connection between the wind bag and the pump head and improve the material pumping efficiency by arranging the height difference between the first boss and the second boss or arranging the third groove matched with the third boss between the first boss and the second boss.

[0025] 3. The wind bag pump of the present application can limit and fasten the wind bag, the pump head and the pump body by arranging the positioning column and the second connecting rod matched with the groove and the boss on the pump head and the wind bag, improve the overall sealing of the wind bag pump, and make the production more safe and efficient. BRIEF DESCRIPTION OF DRAWINGS

[0026] The drawings described herein are used to provide further understanding of the present application, constitute a part of the present application, the illustrative embodiments of the present application and the description thereof are used to explain the present application, and do not constitute improper limitation on the present application. In the drawings:

[0027] Figure 1 It is a whole schematic view of the wind bag pump related to the embodiments of the present application.

[0028] Figure 2 It is a cross-sectional view schematic diagram of the wind bag pump related to the embodiments of the present application.

[0029] Figure 3 It is a structure schematic diagram of the first end of the wind bag related to the embodiments of the present application.

[0030] Figure 4 It is a structure schematic diagram of the pump head matched with the wind bag shown in the figure. Figure 3

[0031] Figure 5 ​This is a schematic diagram of another structure of the first end of the wind bag involved in the embodiments of this application.

[0032] Figure 6 The embodiments of this application involve and Figure 5 The diagram shows the pump head structure matched with the airbag.

[0033] Figure 7 This is a schematic diagram of the radial cross-section of the gasket involved in the embodiments of this application.

[0034] List of components and reference numerals:

[0035] 1. Pump head; 2. Liquid inlet channel; 3. Liquid outlet channel; 4. Opening; 5. First connecting rod; 6. Pump body; 7. Gas phase working chamber; 8. Air inlet; 9. Air outlet; 10. Air bag; 11. Liquid phase working chamber; 12. First flange; 13. First through hole; 14. First groove; 15. First boss; 16. Second boss; 17. Second groove; 18. Third groove; 19. Positioning post; 20. Protective plate; 21. Spring; 22. Second connecting rod; 23. Gasket; 24. Check valve. Detailed Implementation

[0036] To better understand the above-mentioned objectives, features, and advantages of this application, the application will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be noted that, unless otherwise specified, the embodiments and features described in these embodiments can be combined with each other.

[0037] Many specific details are set forth in the following description in order to provide a full understanding of this application. However, this application may also be implemented in other ways different from those described herein. Therefore, the scope of protection of this application is not limited to the specific embodiments disclosed below.

[0038] Furthermore, it should be understood in the description of this application that the terms "center," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0039] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, "a plurality of" means two or more, unless otherwise explicitly specified.

[0040] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, an electrical connection, or a communication connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0041] In this application, unless otherwise expressly specified and limited, the "above" or "below" of the second feature can mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. In the description of this specification, references to terms such as "an embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described can be combined in any suitable manner in one or more embodiments or examples.

[0042] In the attached diagram, dashed lines are used to represent invisible outlines or invisible edges.

[0043] refer to Figures 1-7 This application discloses a sealed airbag pump, comprising:

[0044] Pump head 1, which includes an inlet channel 2 and an outlet channel 3;

[0045] Pump body 6, which includes two gas phase working chambers 7, each of which is provided with an air inlet 8 and an air outlet 9;

[0046] The air bag 10 is disposed in the gas phase working chamber 7 and connected to the pump head 1. The second end of the air bag 10 is closed and the interior is hollow to form a liquid phase working chamber 11. The first end of the air bag 10 is provided with an annular first protrusion 15 and an annular second protrusion 16. The second protrusion 16 is located inside the first protrusion 15. The connection surface between the pump head 1 and the air bag 10 is provided with a first groove 14 and a second groove 17. The second groove 17 is located inside the first groove 14. The first protrusion 15 abuts against the first groove 14, and the second groove 17 is press-fitted with the second protrusion 16 to seal the liquid phase working chamber 11.

[0047] The first boss 15 and the second boss 16, by abutting or interference fitting with the first groove 14 and the second groove 17 respectively, not only limit the position of the air bag 10 and reduce the positional displacement caused by the expansion and contraction vibration of the air bag 10 during long-term operation, but also achieve the sealing of the liquid phase working chamber 11. The first boss 15 and the second boss 16 form a concave sealing structure, which further improves the sealing performance of the liquid phase working chamber 11, reduces the risk of leakage, and improves the safety of the production and transportation process.

[0048] As a specific implementation, the radial cross section of the first boss 15 and / or the second boss 16 is trapezoidal, which can provide better self-alignment capability when the air bag 10 is deformed under force, avoid sealing failure caused by uneven force, thereby enhancing the connection stability between the air bag 10 and the pump head 1, improving the conveying capacity and improving the stability and safety of production.

[0049] refer to Figures 3-4 In one embodiment, the second boss 16 is higher than the first boss 15; the depth of the second groove 17 is greater than the depth of the first groove 14.

[0050] The height difference between the first protrusion 15 and the second protrusion 16, and between the first groove 14 and the second groove 17, can better limit the position of the air bag 10, and prevent misalignment and slippage during the installation and maintenance of the air bag pump, thereby improving the stability of the connection between the air bag 10 and the pump head 1.

[0051] refer to Figures 5-6 In one embodiment, a third groove 18 is provided between the second boss 16 and the first boss 15; a third boss is provided between the second groove 17 and the first groove 14, and the third boss and the third groove 18 are interference-fitted.

[0052] The third protrusion, together with the first protrusion 15 and the second protrusion 16, forms a toothed structure, which can further enhance the cooperation between the air bag 10 and the pump head 1, improve the sealing of the liquid phase working chamber 11, improve the connection stability between the air bag 10 and the pump head 1, and improve the pump's delivery efficiency.

[0053] In one embodiment, a positioning post 19 is fixedly connected to the pump head 1, and a first flange 12 is provided on the outer periphery of the first end of the air bag 10. The first flange 12 is provided with a positioning hole that cooperates with the positioning post 19, and the positioning post 19 is engaged with the positioning hole.

[0054] The positioning column 19 is fixedly connected to the pump head 1, so that the positioning column 19 will not loosen due to vibration when the pump is working. The design of the positioning column 19 not only improves the reliable connection between the pump head 1 and the air bag 10, but also increases the friction between the positioning column 19 and the air bag 10 by enhancing the surface roughness, which significantly improves the connection stability between the air bag 10 and the pump head 1, making the movement of the air bag 10 in the gas phase working chamber 7 more stable, thereby improving the pump's discharge efficiency and reducing the phenomenon of liquid retention in the pump.

[0055] In one embodiment, the pump head 1 is provided with at least four openings 4, in which a first connecting rod 5 is fixed. The first flange 12 is provided with a first through hole 13 corresponding to each of the openings 4. The first connecting rod 5 passes through the first through hole 13 to fix the air bag 10 and the pump head 1.

[0056] The first connecting rod 5 passes through the first through hole 13 on the first flange 12 of the air bag 10, which can fix the air bag 10 and the pump head 1 by pressing. With this setting, since the first connecting rod 5 is fixed in the pump head 1, it can avoid the first connecting rod 5 from loosening due to the vibration generated by the operation of the air bag pump, thereby preventing the seal from being damaged. This improves the sealing of the air bag pump during operation, increases the conveying capacity of the air bag pump, and extends its service life.

[0057] In one implementation, a protective plate 20 is fixedly connected to the second end of the air bag 10.

[0058] The protective plate 20 can reinforce and protect the second end of the air bag 10, thereby improving the load-bearing capacity and impact resistance of the air bag 10 when conveying liquid and extending the service life of the air bag pump.

[0059] In one embodiment, a spring 21 is provided between the protective plate 20 and the pump body 6, and at least one end of the spring 21 is fixedly connected to the inner side of the protective plate 20 or the pump body 6.

[0060] During operation, when the gas pressure in the gas phase working chamber 7 changes, the spring 21 can provide appropriate reaction force according to the degree of deformation of the air bag 10, ensuring that the air bag 10 quickly returns to its original shape when the gas pressure changes, thereby improving the working efficiency and response speed of the pump; in addition, the presence of the spring 21 can also effectively reduce the vibration and noise of the air bag 10 and improve the overall stability of the air bag pump operation.

[0061] In one embodiment, a first connecting plate and a second connecting plate are respectively provided at both ends of the pump body 6. The first connecting plate and the second connecting plate are connected by a second connecting rod 22. There are at least four second connecting rods 22, which are evenly arranged along the circumference of the pump body 6.

[0062] The second connecting rod 22 further tightens the two opposite ends of the pump body 6, improving the reliability of the airbag pump installation and the safety of its operation; the evenly distributed second connecting rod 22 makes the force on both ends of the pump body 6 more uniform along the axial direction, improving the durability of the airbag pump.

[0063] In one embodiment, a gasket 23 is provided between the pump body 6 and the pump head 1. The gasket 23 has an annular structure, and its cross-section is I-shaped. (Refer to...) Figure 7 .

[0064] The I-shaped gasket 23 can form an effective seal with the pump head 1 and the pump body 6 through its edge, and when under pressure, the middle part of the I-shape can expand outward, thereby increasing the contact area with the inner wall of the pump body 6 and thus improving the sealing effect. In addition, the I-shaped design also makes the gasket 23 easier to align during installation, reducing the risk of leakage due to improper installation.

[0065] In one embodiment, a check valve 24 is provided in the inlet channel 2 and the outlet channel 3. The check valve 24 is a spring-loaded check valve, and the valve seat of the check valve 24 abuts against the inner wall of the inlet channel 2 and the outlet channel 3.

[0066] In one embodiment, a check valve 24 is provided in the inlet channel 2 and the outlet channel 3. The check valve 24 is a spring-loaded check valve, and the valve seat of the check valve 24 abuts against the inner wall of the inlet channel 2 and the outlet channel 3.

[0067] Spring-loaded check valves ensure effective sealing when fluid flows in the opposite direction, preventing backflow. Simultaneously, they suppress water hammer in pipelines, preventing check valve failure, improving the stability of the air pump operation, avoiding frequent malfunctions and maintenance, and increasing production efficiency.

[0068] The working principle of the airbag pump is as follows: Compressed gas is introduced into the gas phase working chamber 7 at one end, increasing the pressure in the gas phase working chamber 7. The airbag 10 in the chamber is compressed under force, and the check valve 24 of the liquid outlet channel 3 in the liquid phase working chamber 11 on the same side opens while the check valve 24 of the liquid inlet channel 2 closes, allowing the liquid to be pumped to the outlet. Gas is discharged from the gas phase working chamber 77 at the other end, decreasing the pressure in the gas phase working chamber. The airbag 10 in the chamber expands, and the check valve 24 of the liquid outlet channel 3 in the liquid phase working chamber 11 on the same side closes while the check valve 24 of the liquid inlet channel 2 opens, allowing the liquid to be pumped in from the inlet. The pressure in the gas phase working chambers 7 on both sides alternately increases and decreases, and the corresponding airbags 10 alternately compress and expand, thus realizing the pumping of liquid.

[0069] During the above operation, the first boss 15 and the first groove 14 cooperate, and the second boss 16 and the second groove 17 cooperate to seal the liquid phase working chamber 11. The first connecting rod 5 is used to press and fix the air bags 10 on both sides. The second connecting rod 22 presses and fixes both ends of the pump body 6, and a sealing ring is set between the pump body 6 and the pump head 1 to seal the gas phase working chamber 7. The above settings not only achieve good sealing performance of the air bag pump, but also reduce the risk of contamination of the materials transported by the air bag pump.

[0070] The above are merely embodiments of this application, and the scope of protection of this application is not limited to these specific embodiments, but is determined by the claims of this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the technical concept and principles of this application should be included within the scope of protection of this application.

Claims

1. A sealed airbag pump, characterized in that, include: The pump head includes an inlet channel and an outlet channel; The pump body includes two gas phase working chambers, each of which has an air inlet and an air outlet. An air bag is disposed within the gas phase working chamber and connected to the pump head. The second end of the air bag is closed, and its interior is hollow to form a liquid phase working chamber. The first end of the air bag is provided with an annular first protrusion and an annular second protrusion. The second protrusion is located inside the first protrusion. The connection surface between the pump head and the air bag is provided with a first groove and a second groove. The second groove is located inside the first groove. The first protrusion abuts against the first groove, and the second groove is press-fitted with the second protrusion to seal the liquid phase working chamber.

2. The sealed airbag pump according to claim 1, characterized in that, The second boss is higher than the first boss; the depth of the second groove is greater than the depth of the first groove.

3. The sealed airbag pump according to claim 1, characterized in that, A third groove is provided between the second boss and the first boss; A third boss is provided between the second groove and the first groove, and the third boss is interference-fitted with the third groove.

4. The sealed airbag pump according to claim 2 or 3, characterized in that, A positioning post is fixedly connected to the pump head, and a first flange is provided on the outer periphery of the first end of the air bag. The first flange is provided with a positioning hole that cooperates with the positioning post, and the positioning post is engaged with the positioning hole.

5. The sealed airbag pump according to claim 4, characterized in that, The pump head is provided with at least four openings, in which a first connecting rod is fixed. The first flange is provided with a first through hole corresponding to each of the openings. The first connecting rod passes through the first through hole to fix the air bag and the pump head.

6. The sealed airbag pump according to claim 1, characterized in that, A protective plate is fixedly connected to the second end of the airbag.

7. The sealed airbag pump according to claim 6, characterized in that, A spring is provided between the protective plate and the pump body, and at least one end of the spring is fixedly connected to the inside of the protective plate or the pump body.

8. The sealed airbag pump according to claim 1, characterized in that, The pump body is provided with a first connecting plate and a second connecting plate at both ends, and the first connecting plate and the second connecting plate are connected by a second connecting rod. There are at least four second connecting rods, which are evenly arranged along the circumference of the pump body.

9. The sealed airbag pump according to claim 1, characterized in that, A gasket is provided between the pump body and the pump head. The gasket has an annular structure and an I-shaped cross-section.

10. The sealed airbag pump according to claim 1, characterized in that, The inlet and outlet channels are equipped with check valves, which are spring-loaded check valves, and the valve seat of the check valve abuts against the inner wall of the inlet and outlet channels.

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