Spiral powerful cleaning brush

Abstract

The utility model relates to the technical field of cleaning brushes, in particular to a spiral powerful cleaning brush, which comprises a rotating shaft, a rotating shaft, a driving device and a driving device, and is characterized in that the left end of the rotating shaft is provided with a limiting ring; the surface of the rotating shaft is provided with reference stripes and a sliding groove. An adjusting structure is mounted on the outer side of the rotating shaft and comprises a mounting sleeve, the rotating shaft is sleeved with the mounting sleeve, rubber rings are bonded to the two side walls of the mounting sleeve, angle scales are arranged on the inner wall of the mounting sleeve, a brush sleeve is arranged on the outer wall of the mounting sleeve, and a brush rod is arranged on the brush sleeve. The right end of the outer side of the rotating shaft is sleeved with a fixing ring. According to the utility model, the mounting sleeve is sleeved on the outer side of the rotating shaft and can rotate on the rotating shaft so as to adjust the angle between the plurality of groups of brush sleeves, so that the plurality of groups of brush sleeves are spirally distributed, the number of the brush sleeves in contact with the wafer at the same time is reduced, the use effect is ensured, the wafer is kept intact, and the practicability of the device is improved.

Description

Technical Field

[0001] This utility model relates to the field of cleaning brush technology, specifically a spiral-type powerful cleaning brush. Background Technology

[0002] In the chemical mechanical polishing (CMP) process, after the wafer is polished in the grinding unit, it needs to enter the cleaning unit to complete the cleaning and drying steps. The cleaning brush plays a crucial role in the cleaning unit; the wafer needs to be cleaned by the combined action of the cleaning brush and chemical agents to remove particles, residues, and other contaminants from the wafer's surface and back side.

[0003] However, in existing technologies, the protrusions on the surface of cleaning brushes are mostly arranged in a straight line. When in use, the protrusions on the same straight line will contact the chip at the same time, causing the chip surface to be subjected to strong force in a short period of time, which can easily scratch the chip and make the chip quality substandard, thus affecting the company's production efficiency.

[0004] Therefore, in order to solve the above problems, a spiral-type powerful cleaning brush is proposed. Utility Model Content

[0005] The purpose of this utility model is to provide a spiral-type powerful cleaning brush to solve the problem mentioned in the background art that the protrusions on the surface of the cleaning brush are mostly arranged in a straight line. When in use, the protrusions on the same straight line will contact the wafer at the same time, so that the surface of the wafer is subjected to a strong force in a short period of time, which can easily scratch the wafer, resulting in the wafer quality not meeting the standards and affecting the production efficiency of enterprises.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a spiral-type high-power cleaning brush, comprising: a rotating shaft, wherein a limit ring is installed at the left end of the rotating shaft;

[0007] The surface of the rotating shaft is provided with reference stripes and grooves;

[0008] An adjustment structure is installed on the outer side of the rotating shaft. The adjustment structure includes a mounting sleeve, which is fitted onto the outer side of the rotating shaft. Rubber rings are adhered to the two side walls of the mounting sleeve. An angle scale is provided on the inner wall of the mounting sleeve. A brush sleeve is provided on the outer wall of the mounting sleeve. A fixing ring is fitted on the right side of the outer side of the rotating shaft. A slider is integrally formed on the inner wall of the fixing ring. A hand-threaded sleeve is threadedly connected to the outer right side of the rotating shaft.

[0009] Preferably, the slide groove is provided in two sets, and the two sets of slide grooves are respectively located on both sides of the reference stripe.

[0010] Preferably, the mounting sleeve is located between the limiting ring and the fixing ring, and both the limiting ring and the fixing ring are fitted to the side wall of the mounting sleeve.

[0011] Preferably, the angle scale and the limiting ring cooperate with each other.

[0012] Preferably, the slider is slidably mounted on the inner side of the groove.

[0013] Preferably, the left side wall of the hand-screwed sleeve abuts against the right side wall of the fixing ring.

[0014] Compared with the prior art, the beneficial effects of this utility model are: the mounting sleeve of this utility model is sleeved on the outside of the rotating shaft and can rotate on the rotating shaft to adjust the angle between multiple sets of brush sleeves, so that the multiple sets of brush sleeves are distributed in a spiral shape, reducing the number of brush sleeves in contact with the wafer at the same time, ensuring the use effect while maintaining the integrity of the wafer, and improving the practicality of the device.

[0015] This invention features an adjustment structure. During assembly, multiple mounting sleeves are fitted onto the outside of the rotating shaft. A limiting ring restricts the mounting sleeves, preventing them from detaching from the shaft. Rotating the mounting sleeves causes the angle markings on them to deflect relative to reference stripes on the rotating shaft. By observing the position of the angle markings relative to the reference stripes, the deflection angle of the mounting sleeve can be determined. Then, based on the deflection angle, the other mounting sleeves are rotated sequentially, resulting in a spiral distribution among the multiple brush sleeves. Next, a fixing ring is fitted onto the outside of the rotating shaft, causing the slider to engage within the groove. Finally, a hand-threaded sleeve is screwed onto the rotating shaft. Turning the threaded sleeve pushes the fixing ring, allowing... The fixed ring moves on the rotating shaft, and the slider can slide within the groove. The slider, in conjunction with the groove, provides guidance and limitation for the movement of the fixed ring on the rotating shaft, ensuring that the fixed ring approaches the mounting sleeve vertically. This prevents the fixed ring from rotating relative to the mounting sleeve, which would cause displacement of the mounting sleeve and lead to an imbalance in the angles between multiple sets of mounting sleeves, affecting subsequent use. After the fixed ring is in contact with the mounting sleeve, it can push the mounting sleeve vertically, bringing multiple sets of mounting sleeves closer together. The rubber rings on adjacent sets of mounting sleeves are compressed and deformed, increasing the friction between adjacent sets of mounting sleeves. This connects multiple sets of mounting sleeves into a single unit, preventing the brush sleeve from causing the mounting sleeve to deflect on the rotating shaft during use. Attached Figure Description

[0016] Figure 1 This is a front view schematic diagram of the structure of this utility model;

[0017] Figure 2 This is an exploded view of the structure of this utility model;

[0018] Figure 3 This is a side view schematic diagram of the structure of the mounting sleeve of this utility model;

[0019] Figure 4 This is an exploded view of the rotating shaft structure of this utility model.

[0020] In the diagram: 1. Rotating shaft; 11. Limiting ring; 12. Reference stripe; 13. Slide groove; 2. Adjustment structure; 21. Mounting sleeve; 22. Rubber ring; 23. Angle scale; 24. Brush sleeve; 25. Fixing ring; 26. Slider; 27. Hand-twisted threaded sleeve. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0022] Please see Figures 1-4 An embodiment of a spiral-type powerful cleaning brush provided by this utility model:

[0023] The rotating shaft 1 and brush sleeve 24 used in this application are products that can be purchased directly from the market. Their principles and connection methods are existing technologies well known to those skilled in the art, so they will not be described in detail here.

[0024] A spiral-type high-power cleaning brush includes: a rotating shaft 1, with a limit ring 11 installed at the left end of the rotating shaft 1;

[0025] The surface of the rotating shaft 1 is provided with reference stripes 12 and grooves 13;

[0026] An adjustment structure 2 is installed on the outer side of the rotating shaft 1. The adjustment structure 2 includes a mounting sleeve 21, which is fitted onto the outer side of the rotating shaft 1. Rubber rings 22 are adhered to the two side walls of the mounting sleeve 21. Angle scales 23 are provided on the inner wall of the mounting sleeve 21. Brush sleeves 24 are provided on the outer wall of the mounting sleeve 21. A fixing ring 25 is fitted onto the right end of the outer side of the rotating shaft 1. A slider 26 is integrally formed on the inner wall of the fixing ring 25. A hand-twisted threaded sleeve 27 is threadedly connected to the outer right end of the rotating shaft 1. The mounting sleeve 21 is fitted onto the outer side of the rotating shaft 1 and can rotate on the rotating shaft 1 to adjust the angle between multiple sets of brush sleeves 24, so that the multiple sets of brush sleeves 24 are distributed in a spiral shape, reducing the number of brush sleeves 24 in contact with the wafer at the same time, ensuring the effect of use, maintaining the integrity of the wafer, and improving the practicality of the device.

[0027] Furthermore, two sets of slide grooves 13 are provided, with the two sets of slide grooves 13 located on both sides of the reference stripe 12. By observing the position between the angle scale 23 and the reference stripe 12, the deflection angle of the mounting sleeve 21 can be obtained. The slide groove 13, together with the slider 26, provides guidance and limit for the movement of the fixing ring 25 on the rotating shaft 1.

[0028] Furthermore, the mounting sleeve 21 is located between the limiting ring 11 and the fixing ring 25. Both the limiting ring 11 and the fixing ring 25 are in contact with the side wall of the mounting sleeve 21. The limiting ring 11 and the fixing ring 25 can press and fix the mounting sleeve 21 on the rotating shaft 1.

[0029] Furthermore, the angle scale 23 and the limiting ring 11 work together, and by observing the position between the angle scale 23 and the reference stripe 12, the deflection angle of the mounting sleeve 21 can be obtained.

[0030] Furthermore, the slider 26 is slidably mounted on the inner side of the slide groove 13. The slide groove 13, together with the slider 26, provides guidance and limit for the movement of the fixed ring 25 on the rotating shaft 1, so that the fixed ring 25 is straight and close to the mounting sleeve 21, avoiding the fixed ring 25 from rotating relative to the mounting sleeve 21 and causing the mounting sleeve 21 to shift, resulting in the angle confusion between multiple sets of mounting sleeves 21, which would affect subsequent use.

[0031] Furthermore, the left side wall of the hand-threaded sleeve 27 abuts against the right side wall of the retaining ring 25. When the hand-threaded sleeve 27 rotates, it can push the retaining ring 25, causing the retaining ring 25 to abut against the mounting sleeve 21, so that multiple sets of mounting sleeves 21 are brought closer to each other.

[0032] Working principle: During assembly, multiple sets of mounting sleeves 21 are fitted onto the outside of the rotating shaft 1. The limiting ring 11 can limit the multiple sets of mounting sleeves 21 to prevent them from falling off the rotating shaft 1. Then, the mounting sleeves 21 are rotated, and the angle scale 23 on the mounting sleeves 21 will deflect relative to the reference stripe 12 on the rotating shaft 1. By observing the position between the angle scale 23 and the reference stripe 12, the deflection angle of the mounting sleeves 21 can be obtained. Then, according to the deflection angle, the other mounting sleeves 21 are rotated in sequence, so that the multiple sets of brush sleeves 24 are distributed in a spiral shape. Next, the fixing ring 25 is fitted onto the outside of the rotating shaft 1, so that the slider 26 is locked in the slide groove 13. Then, the hand-twisted threaded sleeve 27 is screwed onto the rotating shaft 1. The hand-twisted threaded sleeve 27 can push the fixing ring 25, so that the fixing ring 25 rotates. The slider 26 moves on the rotating shaft 1 and slides within the groove 13. The slider 26, in conjunction with the groove 13, provides guidance and limitation for the movement of the fixing ring 25 on the rotating shaft 1, ensuring that the fixing ring 25 moves straight towards the mounting sleeve 21. This prevents the fixing ring 25 from rotating relative to the mounting sleeve 21 and causing displacement of the mounting sleeve 21, which would lead to confusion in the angles between multiple sets of mounting sleeves 21 and affect subsequent use. After the fixing ring 25 is in contact with the mounting sleeve 21, it can push the mounting sleeve 21 straight, causing multiple sets of mounting sleeves 21 to move closer to each other. The rubber rings 22 on adjacent sets of mounting sleeves 21 will be squeezed and deformed, increasing the friction between adjacent sets of mounting sleeves 21. This connects multiple sets of mounting sleeves 21 into a whole, preventing the brush sleeve 24 from causing the mounting sleeve 21 to deflect on the rotating shaft 1 during use.

[0033] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model in any way. Those skilled in the art can readily implement this utility model based on the accompanying drawings and the above description. However, any modifications, alterations, or equivalent variations made by those skilled in the art without departing from the scope of the utility model's technical solution, utilizing the disclosed technical content, are considered equivalent embodiments of this utility model. Furthermore, any equivalent changes, alterations, or variations made to the above embodiments based on the essential technology of this utility model are still within the protection scope of this utility model's technical solution.

Claims

1. A spiral-type high-power cleaning brush, comprising: A rotating shaft (1) is provided, with a limit ring (11) installed at the left end of the rotating shaft (1); Its features are: The rotating shaft (1) has reference stripes (12) and grooves (13) on its surface; An adjustment structure (2) is installed on the outside of the rotating shaft (1). The adjustment structure (2) includes a mounting sleeve (21). The mounting sleeve (21) is fitted on the outside of the rotating shaft (1). Rubber rings (22) are glued to the two side walls of the mounting sleeve (21). An angle scale (23) is opened on the inner wall of the mounting sleeve (21). A brush sleeve (24) is provided on the outer wall of the mounting sleeve (21). A fixing ring (25) is fitted on the right side of the rotating shaft (1). A slider (26) is integrally formed on the inner wall of the fixing ring (25). A hand-twisted threaded sleeve (27) is threaded to the right side of the rotating shaft (1).

2. The spiral-type high-power cleaning brush according to claim 1, characterized in that: The slide (13) has two sets, and the two sets of slide (13) are located on both sides of the reference stripe (12).

3. The spiral-type high-power cleaning brush according to claim 1, characterized in that: The mounting sleeve (21) is located between the limiting ring (11) and the fixing ring (25), and both the limiting ring (11) and the fixing ring (25) are attached to the side wall of the mounting sleeve (21).

4. The spiral-type high-power cleaning brush according to claim 1, characterized in that: The angle scale (23) and the limiting ring (11) cooperate with each other.

5. A spiral-type high-power cleaning brush according to claim 1, characterized in that: The slider (26) is slidably mounted on the inside of the groove (13).

6. A spiral-type high-power cleaning brush according to claim 1, characterized in that: The left side wall of the hand-screwed sleeve (27) abuts against the right side wall of the fixing ring (25).

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