Dedusting filter vat applied to CVD (Chemical Vapor Deposition)

Abstract

The utility model discloses a dedusting filter vat applied to CVD (chemical vapor deposition), which comprises an upper vat body and a lower vat body which are connected with each other, the upper part of the upper vat body is provided with a closed cooling cavity, the upper part of the upper vat body is provided with a liquid inlet and a liquid outlet which are communicated with the cooling cavity, and the side surface of the upper vat body is provided with a tail gas inlet positioned below the cooling cavity; a supporting piece is arranged in the lower barrel body close to the bottom, a filter element is arranged on the supporting piece, and a tail gas outlet connected with the filter element is formed in the bottom of the lower barrel body; an upper partition plate and a lower partition plate are arranged between the upper barrel body and the lower barrel body, an interlayer is formed between the upper partition plate and the lower partition plate, an opening communicated with the filter element is formed in the lower partition plate, a protruding part staggered with the opening is arranged on the upper partition plate, a channel penetrating to the interlayer is arranged on the protruding part, and the diameter of the channel is gradually increased from top to bottom. The tail gas is effectively cooled and dedusted, the working environment of the tail gas pipeline is improved, the service life is prolonged, and disassembly and replacement are more convenient and faster through hoop connection.

Description

Technical Field

[0001] This utility model relates to the field of chemical vapor deposition technology, and in particular to a dust removal filter barrel used in CVD. Background Technology

[0002] CVD (Chemical Vapor Deposition) is a process that utilizes gaseous or vaporous substances to react at the gas phase or gas-solid interface to form solid deposits. Due to its rapid growth rate and high controllability, CVD technology has seen increasing applications. This process often involves a large amount of dust and solid particles. CVD requires extremely precise pressure control, with an accuracy of ±1 mbar. Its pressure-controlled butterfly valve is typically located on the exhaust gas pipeline. If particulate dust from the pipeline adheres to the valve plate, it will significantly affect the pressure control accuracy. Therefore, the butterfly valve needs to be cleaned regularly. First, the toxic and harmful gases in the pipeline must be completely replaced before disassembly. Second, the exhaust gas installation location is often cramped, making disassembly and cleaning a very cumbersome process. Furthermore, the temperature of the CVD reaction is generally quite high. If the exhaust gas pipeline is not cooled, the butterfly valve seals and other seals on the pipeline will be exposed to a high-temperature environment for extended periods, reducing their lifespan. Utility Model Content

[0003] To address the aforementioned technical problems, the purpose of this utility model is to provide a dust removal filter barrel for CVD applications, extending its service life and making maintenance more convenient.

[0004] To achieve the above objectives, this utility model provides the following technical solution:

[0005] A dust removal filter for CVD includes an upper barrel and a lower barrel connected together. The upper barrel has a sealed cooling chamber at its upper part, and an inlet and an outlet communicating with the cooling chamber at its upper part. An exhaust gas inlet is located on the side of the upper barrel below the cooling chamber. A support member is provided near the bottom of the lower barrel, and a filter element is mounted on the support member. An exhaust gas outlet connected to the filter element is provided at the bottom of the lower barrel. An upper partition and a lower partition are provided between the upper barrel and the lower barrel, forming a partition layer. An opening communicating with the filter element is provided on the lower partition, and a protrusion offset from the opening is provided on the upper partition. A channel penetrating to the partition layer is provided on the protrusion, and the diameter of the channel gradually increases from top to bottom.

[0006] Preferably, the opening is located at the center of the lower partition, and the protrusion has two parts located at the edge of the upper partition.

[0007] Preferably, the channel has an upper diameter of 30mm, a lower diameter of 45mm, a height of 40mm, and a bottom distance of 20mm from the filter element.

[0008] Preferably, a sealing ring is provided between the upper barrel and the lower barrel, and the upper barrel and the lower barrel are connected by a clamp.

[0009] Preferably, the support member is plate-shaped and has 20 dust collection holes with a diameter of 10 mm each.

[0010] Preferably, the bottom of the lower barrel is provided with three support feet fixed by screws.

[0011] Preferably, a cooling surface is formed at the bottom of the cooling chamber, and the cooling surface is a circular plane with a diameter of 297 mm.

[0012] Due to the application of the above technical solution, this utility model has the following advantages compared with the prior art:

[0013] This utility model relates to a dust removal filter for CVD, comprising an upper and lower barrel connected together. The upper barrel has a sealed cooling chamber at its upper part, with an inlet and outlet communicating with the cooling chamber. An exhaust gas inlet is located on the side of the upper barrel below the cooling chamber. A support member is located near the bottom of the lower barrel, and a filter element is mounted on the support member. An exhaust gas outlet connected to the filter element is located at the bottom of the lower barrel. An upper and lower partition are provided between the upper and lower barrels, forming a partition layer. The lower partition has an opening communicating with the filter element, and the upper partition has a protrusion offset from the opening, with a channel penetrating the partition layer. The diameter of the channel gradually increases from top to bottom. After entering, the exhaust gas first contacts the cooling chamber for cooling, reducing its temperature. After being diverted by the two channels, the flow rate is reduced, improving cooling efficiency. Dust backflow is avoided. The dust is then filtered through the filter element, and large dust particles fall into the dust collection area, effectively cooling and removing dust from the exhaust gas. This improves the working environment of the exhaust gas pipeline and extends its service life. The upper and lower buckets are installed with clamps, making disassembly and replacement more convenient and quick. Attached Figure Description

[0014] The technical solution of this utility model will be further described below with reference to the accompanying drawings:

[0015] Appendix Figure 1 This is a top view of the dust removal filter barrel of this utility model applied to CVD;

[0016] Appendix Figure 2 For the appendix Figure 1 AA section view;

[0017] Appendix Figure 3 This is an exploded view of the dust removal filter barrel of this utility model applied to CVD.

[0018] The components are as follows: 1. Upper barrel; 2. Lower barrel; 3. Cooling chamber; 31. Cooling surface; 4. Liquid inlet; 5. Liquid outlet; 6. Exhaust gas inlet; 7. Support component; 8. Filter element; 9. Exhaust gas outlet; 10. Upper partition; 11. Lower partition; 12. Partition; 13. Opening; 14. Protrusion; 141. Channel; 15. Sealing ring; 16. Clamp; 17. Support foot. Detailed Implementation

[0019] The preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings, so that the advantages and features of the present invention can be more easily understood by those skilled in the art, thereby making a clearer and more definite definition of the scope of protection of the present invention.

[0020] It should be noted that when a component is described as "fixed to" another component, it can be directly on the other component or may have a component in between. When a component is considered "connected to" another component, it can be directly connected to the other component or may have a component in between. When a component is considered "set on" another component, it can be directly set on the other component or may have a component in between. The terms "vertical," "horizontal," "left," "right," and similar expressions used in this document are for illustrative purposes only.

[0021] As attached Figure 1 Appendix Figure 2 The image shows a dust removal filter barrel of this invention applied to CVD, comprising an upper barrel 1 and a lower barrel 2 connected together. A sealed cooling chamber 3 is formed in the upper part of the upper barrel 1. The upper part of the upper barrel 1 has an inlet 4 and an outlet 5 communicating with the cooling chamber 3. An external circulation device provides cryogenic liquid and circulation power. The cryogenic liquid enters the cooling chamber 3 through the inlet 4 and returns to the external circulation device through the outlet 5, thus completing the cooling cycle. A cooling surface 31 is formed at the bottom of the cooling chamber 3, and the cooling surface 31 is a circular plane with a diameter of 297 mm. An exhaust gas inlet 6 is installed on the side of the upper barrel 1, located below the cooling chamber 3. After entering, the exhaust gas contacts the cooling surface 31 for cooling.

[0022] A support 7 is fixedly installed near the bottom of the lower barrel 2 by screws. A filter element 8 is placed on the support 7. The bottom of the lower barrel 2 has an exhaust gas outlet 9 connected to the filter element 8. The filtered exhaust gas is discharged from the exhaust gas outlet 9.

[0023] An upper partition 10 and a lower partition 11 are installed between the upper barrel 1 and the lower barrel 2, forming a partition layer 12. The lower partition 11 has an opening 13 communicating with the filter element 8. The upper partition 10 has a protrusion 14 offset from the opening 13, and the protrusion 14 has a channel 141 that extends through to the partition layer 12. The diameter of the channel 141 gradually increases from top to bottom. The exhaust gas entering the upper barrel 1 enters the partition layer 12 through the channel 141, changes direction, and then passes through the filter element 8 through the opening 13, preventing a large amount of dust from flowing back. In this embodiment, the opening 13 is located at the center of the lower partition 11, and there are two protrusions 14 located at the edge of the upper partition 10. The upper diameter of the channel 141 is 30 mm, the lower diameter is 45 mm, and the height is 40 mm. The distance between the bottom of the channel 141 and the filter element 8 is 20 mm.

[0024] A sealing ring 15 is installed between the upper barrel 1 and the lower barrel 2. The upper barrel 1 and the lower barrel 2 are connected by a clamp 16, making it very convenient to disassemble and replace the filter element 8. The filter element 8 not only blocks dust but also blocks some acidic gases, reducing corrosion of the sealing ring 15.

[0025] The support component 7 is plate-shaped and has 20 dust collection holes, each 10mm in diameter. After the exhaust gas filtration process is completed, the dust settles downwards and does not adhere to the filter element 8, thus extending the service life of the filter element 8.

[0026] The bottom of the lower tank 2 is evenly equipped with three support feet 17 fixed with screws. The screws prevent the feet from shaking during the air extraction process, ensuring stability and reliability.

[0027] This invention relates to a dust collector filter used in CVD (Continuous Chemical Vapor Deposition) systems. Infrared thermometer measurements show that the exhaust gas temperature at the front of the filter is 150℃, but by the time it reaches the pressure-controlled butterfly valve, the temperature is only 50℃. The operating temperature of the pressure-controlled butterfly valve's sealing ring is 120℃. This cooling process increases the lifespan of the sealing ring. The lower operating temperature also allows for the use of cheaper sealing rings on other parts of the exhaust gas pipeline, eliminating the need for special high-temperature resistant sealing rings and reducing costs. Previously, the pressure-controlled butterfly valve required disassembly and maintenance every three months; now, it requires no maintenance, only a yearly filter element replacement, making it more convenient and economical.

[0028] The above description is merely an embodiment of this utility model and does not limit the patent scope of this utility model. Any equivalent structural or procedural transformations made based on the content of this utility model specification, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this utility model.

Claims

1. A dust collection filter for CVD, characterized in that: The device includes an upper barrel and a lower barrel connected together. The upper barrel has a sealed cooling chamber at its upper part, and an inlet and an outlet communicating with the cooling chamber at its upper part. An exhaust gas inlet is located on the side of the upper barrel below the cooling chamber. A support member is located near the bottom of the lower barrel, and a filter element is mounted on the support member. An exhaust gas outlet connected to the filter element is located at the bottom of the lower barrel. An upper partition and a lower partition are provided between the upper barrel and the lower barrel, forming a partition layer. An opening communicating with the filter element is provided on the lower partition, and a protrusion offset from the opening is provided on the upper partition. A channel penetrating to the partition layer is provided on the protrusion, and the diameter of the channel gradually increases from top to bottom.

2. The dust removal filter bucket for CVD as described in claim 1, characterized in that: The opening is located at the center of the lower partition, and there are two protrusions located at the edge of the upper partition.

3. The dust removal filter bucket for CVD as described in claim 1, characterized in that: The channel has an upper diameter of 30mm, a lower diameter of 45mm, and a height of 40mm. The distance between the bottom of the channel and the filter element is 20mm.

4. The dust removal filter bucket for CVD as described in claim 1, characterized in that: A sealing ring is provided between the upper and lower barrels, and the upper and lower barrels are connected by clamps.

5. The dust removal filter bucket for CVD as described in claim 1, characterized in that: The support member is plate-shaped and has 20 dust collection holes with a diameter of 10mm each.

6. The dust removal filter bucket for CVD as described in claim 1, characterized in that: The bottom of the lower barrel is equipped with three support feet fixed with screws.

7. The dust collection filter bucket for CVD as described in claim 1, characterized in that: The bottom of the cooling chamber has a cooling surface, which is a circular plane with a diameter of 297 mm.

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