Special numerical control bar digging machine for polycrystalline silicon ingots and quartz round weights

Abstract

The utility model relates to the technical field of semiconductor production, and discloses a special numerical control bar digging machine for a polycrystalline silicon ingot and a quartz round weight, which comprises an integrally formed U-shaped base, a pair of heightened beam seats are fixed at the upper end of the base, and a cross beam capable of longitudinally moving is slidably connected onto the pair of heightened beam seats. A movable base capable of moving transversely is connected to the cross beam in a sliding mode, a box capable of ascending and descending is connected into the movable base in a sleeved mode, a gear motor is fixed into the box, and an output shaft of the gear motor is detachably and fixedly connected with a bar digging cutter. Raw materials are vertically fixed, feeding, discharging and fixing work of the raw materials can be facilitated, the clamping stability of the raw materials is improved, and bar drawing work is facilitated; and through vertical arrangement, the stroke range of the bar digging cutter can be effectively enlarged, bar digging work can be conducted on raw materials with larger weight and larger size, and practicability is high. The cutting torque of the bar digging cutter can be increased through the gear motor, and the bar digging efficiency can be further improved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and in particular to a CNC rod-removing machine specifically for polycrystalline silicon ingots and quartz round weights. Background Technology

[0002] A rod-extracting machine is used to extract cylindrical rods from crystals such as polycrystalline silicon ingots and quartz balls. Patent announcement number CN212352496U discloses a rod-extracting machine with a headstock and an indexing plate structure, including a rod-extracting blade. A bearing housing is located at the rear end of the rod-extracting blade, and a first servo motor is mounted directly above the bearing housing. One end of the first servo motor is connected to a synchronous pulley, and a synchronous belt is mounted on the pulley. A silicon rod is positioned at the front end of the rod-extracting blade and is mounted on a floating clamp. Both the silicon rod and the floating clamp are mounted on an indexing plate, and a second servo motor is mounted at one end of the indexing plate. A reduction gearbox is mounted on one side of the second servo motor. This horizontal rod-extracting method has the following disadvantages: First, after the raw materials such as polycrystalline silicon ingots and quartz balls are clamped, most of their structure is suspended in the air; larger raw materials are prone to clamping instability, and loading and unloading are unstable during clamping; second, due to space limitations, the torque of the motor driving the rod-extracting blade is small, resulting in low rod-extracting efficiency. Utility Model Content

[0003] The purpose of this invention is to provide a special CNC rod-removing machine for polycrystalline silicon ingots and quartz round weights. By vertically fixing raw materials such as polycrystalline silicon ingots and quartz round weights, it is convenient to load and unload raw materials and fix them, while providing effective support and improving the clamping stability of the raw materials, thus facilitating the rod-removing operation. The cutting torque of the rod-removing blade can be increased by the reduction motor, which can further improve the rod-removing efficiency.

[0004] The above-mentioned technical objective of this utility model is achieved through the following technical solution:

[0005] A CNC rod-removing machine for polycrystalline silicon ingots and quartz round weights includes an integrally formed "U"-shaped base. A pair of heightening beam seats are fixed to the upper end of the base. A longitudinally movable crossbeam is slidably connected to the pair of heightening beam seats. A transversely movable base is slidably connected to the crossbeam. A liftable box is sleeved inside the movable base. A geared motor is fixed inside the box. The output shaft of the geared motor is detachably and fixedly connected to a rod-removing blade.

[0006] During the stripping process, polycrystalline silicon ingots or quartz balls are placed on the base. The longitudinal movement of the crossbeam, the lateral movement of the movable base, and the lifting of the housing drive the geared motor and stripping blade to perform longitudinal, lateral, and vertical movements. The geared motor rotates the stripping blade, which cuts the polycrystalline silicon ingot or quartz ball. Raising the beam base increases the vertical travel of the stripping blade, allowing for stripping of larger sized quartz balls. The vertical placement of the polycrystalline silicon ingot or quartz ball is simple and convenient, further improving stripping efficiency. The high torque of the geared motor also enhances cutting efficiency.

[0007] This invention is further configured such that the base, the heightened beam seat, and the crossbeam are formed with a plurality of weight-reducing slots. By setting the weight-reducing slots, the entire rod-removing machine can be designed to be lightweight, and its aesthetics can also be improved to a certain extent.

[0008] The present invention is further configured such that: at each of the two ends of the crossbeam located on the heightened beam seat, a liner plate is fixed, a longitudinal slider and a first servo motor are fixed on the liner plate, and the longitudinal slider is slidably connected to the longitudinal guide rail;

[0009] The first servo motor is connected to a first gear, which meshes with a first rack that is parallel to the longitudinal guide rail. The first rack and the longitudinal guide rail are fixed on the heightened beam support. The first servo motor is electrically connected to the controller.

[0010] The first servo motor drives the first gear to rotate. Since the first rack is fixed, it reacts with the first gear to move. The first gear drives the liner to move through the first servo motor. The liner drives the crossbeam to move longitudinally on the longitudinal guide rail. The amplitude of the longitudinal movement can be precisely controlled through the first servo motor.

[0011] The present invention is further configured such that: a vertically penetrating sliding groove is formed in the middle of the crossbeam, and the movable base is placed in the sliding groove;

[0012] A pair of support plates are fixed to the upper end of the movable base. A horizontal slider is fixed to the support plate. The horizontal slider is slidably connected to the horizontal guide rail. The horizontal guide rail is fixed to the crossbeam.

[0013] A second servo motor is fixed on one of the support plates. The second servo motor is connected to a second gear. The second gear meshes with a second rack that is parallel to the transverse guide rail. The second rack is fixed on the crossbeam. The second servo motor is electrically connected to the controller.

[0014] Through the above technical solution, the second servo motor drives the second gear to rotate. Since the second rack is stationary and reacts to the movement of the second gear, the second gear drives the second servo motor to move. The second servo motor drives the moving base to move laterally in the sliding groove through the support plate. The movement range of the moving base can be precisely controlled through the second servo motor.

[0015] The present invention is further configured such that: a vertically penetrating rectangular hole is formed inside the movable base, and the box body is rectangular and inserted into the rectangular hole;

[0016] Vertical guide rails are fixed on the four side walls of the box, and vertical sliders are slidably connected to the vertical guide rails. The vertical sliders are fixed on the inner wall of the rectangular hole.

[0017] A third servo motor is fixed to the upper end of the housing. The third servo motor is connected to a vertical screw. The bottom of the vertical screw is rotatably connected to a screw support, which is fixed to the lower end of the housing. A nut is screwed into the middle of the vertical screw and fixed to the inner wall of a rectangular hole. The third servo motor is electrically connected to the controller.

[0018] Through the above technical solution, the third servo motor drives the vertical screw to rotate. Since the nut is stationary, the vertical screw moves up or down through the action of the nut. The vertical screw, through the third servo motor and the screw support, drives the housing to move up or down. The housing drives the reduction motor to move, and the reduction motor drives the bar-removing blade to move, thereby performing bar-removing and cutting operations. The third servo motor can precisely control the range of vertical movement of the housing.

[0019] The present invention is further configured such that: the base is formed with a working platform, and the working platform is formed with multiple wedge-shaped grooves, the working platform is used to place workpieces or fixtures, and the wedge-shaped grooves can facilitate the fixing of fixtures.

[0020] The outstanding effect of this utility model is:

[0021] Compared with existing technologies, vertically fixing raw materials such as polycrystalline silicon ingots and quartz round weights facilitates the loading and unloading of raw materials and the fixing work, while providing effective support, improving the clamping stability of raw materials, and facilitating the rod removal work; in addition, the vertical setting can effectively increase the stroke range of the rod removal knife, enabling rod removal work on heavier and larger raw materials, making it more practical.

[0022] The cutting torque of the bar-removing tool can be increased by using a geared motor, which can further improve the bar-removing efficiency. Attached Figure Description

[0023] Figure 1 This is a front view of the present invention;

[0024] Figure 2 This is the right view of the present invention;

[0025] Figure 3 This is a cross-sectional view of the present invention;

[0026] Figure 4 for Figure 1 A magnified view of a specific area (A);

[0027] Figure 5 for Figure 3 A magnified view of a portion of B.

[0028] Reference numerals: 10, base; 100, weight-reducing slot; 101, working platform; 102, wedge-shaped groove;

[0029] 20. Raised beam support; 21. Guide section; 22. Limiting section; 23. Adjusting section; 24. First oblong hole; 25. First screw;

[0030] 30. Crossbeam; 301. Sliding groove; 31. Liner plate; 32. Longitudinal slider; 33. First servo motor; 34. Longitudinal guide rail; 35. First gear; 36. First rack;

[0031] 40. Movable base; 401. Rectangular hole; 41. Support plate; 42. Horizontal slider; 43. Horizontal guide rail; 44. Second servo motor; 45. Second gear; 46. Second rack;

[0032] 50. Housing; 51. Vertical guide rail; 52. Vertical slider; 53. Third servo motor; 54. Vertical screw; 55. Screw support; 56. Nut;

[0033] 60. A scooping knife;

[0034] 70. Gear motor. Detailed Implementation

[0035] The specific embodiments of this utility model will be described in further detail below with reference to the accompanying drawings and examples. The following examples are used to illustrate this utility model, but are not intended to limit its scope.

[0036] The following is for reference Figures 1 to 5 The embodiments of this utility model are described below:

[0037] A CNC rod-removing machine specifically for polycrystalline silicon ingots and quartz round weights, such as Figure 1As shown, it includes an integrally formed "U"-shaped base 10. A pair of heightening beam seats 20 are fixed to the upper end of the base 10. A longitudinally movable crossbeam 30 is slidably connected to the pair of heightening beam seats 20. A laterally movable movable base 40 is slidably connected to the crossbeam 30. A liftable box 50 is sleeved inside the movable base 40. A reduction motor 70 is fixed inside the box 50. A bar-removing knife 60 is detachably and fixedly connected to the output shaft of the reduction motor 70.

[0038] During the stripping process, polycrystalline silicon ingots or quartz balls are placed on the base. The longitudinal movement of the crossbeam, the lateral movement of the movable base, and the lifting of the housing drive the geared motor and stripping blade to perform longitudinal, lateral, and vertical movements. The geared motor rotates the stripping blade, which cuts the polycrystalline silicon ingot or quartz ball. Raising the beam base increases the vertical travel of the stripping blade, allowing for stripping of larger sized quartz balls. The vertical placement of the polycrystalline silicon ingot or quartz ball is simple and convenient, further improving stripping efficiency. The high torque of the geared motor also enhances cutting efficiency.

[0039] like Figure 2 As shown, the base 10, the heightened beam seat 20, and the crossbeam 30 of this embodiment are formed with a plurality of weight-reducing slots 100. By setting the weight-reducing slots, the entire bar-removing machine can be designed to be lightweight, and its aesthetics can also be improved to a certain extent.

[0040] like Figure 4 As shown, in this embodiment, the crossbeam 30 is fixed with a liner 31 at each of the two ends of the heightened beam seat 20. The liner 31 is fixed with a longitudinal slider 32 and a first servo motor 33. The longitudinal slider 32 is slidably connected to the longitudinal guide rail 34.

[0041] The first servo motor 33 is connected to a first gear 35, the first gear 35 meshes with a first rack 36 which is arranged parallel to the longitudinal guide rail 34, and the first rack 36 and the longitudinal guide rail 34 are fixed on the heightened beam seat 20; the first servo motor 33 is electrically connected to the controller.

[0042] The first servo motor drives the first gear to rotate. Since the first rack is fixed, it reacts with the first gear to move. The first gear drives the liner to move through the first servo motor. The liner drives the crossbeam to move longitudinally on the longitudinal guide rail. The amplitude of the longitudinal movement can be precisely controlled through the first servo motor.

[0043] like Figure 5 As shown, the middle part of the crossbeam 30 in this embodiment is formed with a vertically penetrating sliding groove 301, and the movable base 40 is placed in the sliding groove 301.

[0044] A pair of support plates 41 are fixed to the upper end of the movable base 40. A horizontal slider 42 is fixed on the support plate 41. The horizontal slider is slidably connected to the horizontal guide rail 43. The horizontal guide rail 43 is fixed to the crossbeam 30.

[0045] A second servo motor 44 is fixed on one of the support plates 41. The second servo motor 44 is connected to a second gear 45. The second gear 45 meshes with a second rack 46 that is parallel to the transverse guide rail 43. The second rack 46 is fixed on the crossbeam 30. The second servo motor 44 is electrically connected to the controller.

[0046] The second servo motor drives the second gear to rotate. Since the second rack is stationary and reacts to the movement of the second gear, the second gear drives the second servo motor to move. The second servo motor drives the moving base to move laterally in the sliding groove through the support plate. The movement range of the moving base can be precisely controlled by the second servo motor.

[0047] like Figure 5 As shown, the movable base 40 of this embodiment has a vertically penetrating rectangular hole 401 formed inside, and the box 50 is rectangular and inserted into the rectangular hole 401.

[0048] Vertical guide rails 51 are fixed on the four side walls of the box 50, and vertical sliders 52 are slidably connected to the vertical guide rails 51. The vertical sliders 52 are fixed on the inner wall of the rectangular hole 401.

[0049] A third servo motor 53 is fixed to the upper end of the housing 50. The third servo motor 53 is connected to a vertical screw 54. The bottom of the vertical screw 54 is rotatably connected to a screw support 55. The screw support 55 is fixed to the lower end of the housing 50. A nut 56 is screwed into the middle of the vertical screw 54. The nut 56 is fixed to the inner wall of the rectangular hole 401. The third servo motor 53 is electrically connected to the controller.

[0050] The third servo motor drives the vertical screw to rotate. Since the nut is stationary, the vertical screw moves up or down through the action of the nut. The vertical screw, through the third servo motor and the screw support, drives the housing to move up or down. The housing drives the geared motor to move, and the geared motor drives the bar-removing blade to move, thereby performing bar-removing and cutting operations. The third servo motor can precisely control the range of vertical movement of the housing.

[0051] like Figure 1 As shown, the base 10 of this embodiment is formed with a working platform 101, and a plurality of wedge-shaped grooves 102 are formed on the working platform 101. The working platform is used to place workpieces or fixtures, and the wedge-shaped grooves can facilitate the fixing of fixtures.

[0052] The above description is only a preferred embodiment of the present utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of the present utility model. These improvements and modifications assumed above should also be considered within the protection scope of the present utility model.

Claims

1. A CNC rod-removing machine specifically for polycrystalline silicon ingots and quartz round weights, characterized in that: It includes an integrally formed base (10) in a "U" shape. At the upper end of the base (10), a pair of heightening beam seats (20) are fixed. A longitudinally movable cross beam (30) is slidably connected to the pair of heightening beam seats (20). A movable base (40) that can move horizontally is slidably connected to the cross beam (30). A liftable box body (50) is sleeved inside the movable base (40). A reduction motor (70) is fixed inside the box body (50). The output shaft of the reduction motor (70) is detachably and fixedly connected to a picking rod cutter (60).

2. The CNC rod-removing machine for polycrystalline silicon ingots and quartz round weights according to claim 1, characterized in that: A number of weight reduction slot holes (100) are formed on the base (10), the heightening beam seats (20) and the cross beam (30).

3. The CNC rod-removing machine for polycrystalline silicon ingots and quartz round weights according to claim 1, characterized in that: At both ends of the cross beam (30) located on the heightening beam seats (20), a lining plate (31) is fixed respectively. A longitudinal slider (32) and a first servo motor (33) are fixed on the lining plate (31). The longitudinal slider (32) is slidably connected to a longitudinal guide rail (34). The first servo motor (33) is connected to a first gear (35). The first gear (35) meshes with a first rack (36) arranged parallel to the longitudinal guide rail (34). The first rack (36) and the longitudinal guide rail (34) are fixed on the heightening beam seats (20).

4. The CNC rod-removing machine for polycrystalline silicon ingots and quartz round weights according to claim 1, characterized in that: A vertically penetrating sliding groove (301) is formed in the middle of the cross beam (30). The movable base ( ​ ​ 5. A CNC rod-removing machine for polycrystalline silicon ingots and quartz round weights according to claim 1, characterized in that: ​ ​ ​ 6. A CNC rod-removing machine for polycrystalline silicon ingots and quartz round weights according to claim 1, characterized in that: ​

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