Air knife structure for film leeward cooling

Abstract

The utility model discloses an air knife structure for film leeward cooling. The air knife structure comprises a first static pressure cavity, a second static pressure cavity, a third static pressure cavity and a fourth static pressure cavity, air enters the air knife from two sides and enters the first static pressure cavity for first-time air uniformizing treatment, and an outlet of the first static pressure cavity is provided with a waved plate for second-time air uniformizing treatment. The airflow enters the second static pressure cavity after passing through the waved plate to be subjected to third-time air uniformizing treatment; the airflow enters a third static pressure cavity through a waved plate, and fourth-time air uniformizing treatment is carried out; the air flow enters a fourth static pressure cavity through an air uniformizing pore plate to be subjected to fifth-time air uniformizing treatment; air flow reaches the position of the air nozzle through the large-gap rectangular channel, large-air-volume uniform air flow is formed, the consistency of the air knife is guaranteed, and the air volume requirement for cooling the back face of a casting piece produced at a high speed is met.

Description

Technical Field

[0001] This utility model relates to the field of air knife technology, and more specifically, to an air knife structure for leeward cooling of thin films. Background Technology

[0002] In the high-speed production of thin films, the back-wind cooling system is a crucial and essential process. After the wafer is extruded from the die onto the casting roller, the front side of the wafer is cooled against the roller, but the back side is only in contact with air. Due to the large thickness of the wafer, the casting roller cannot cool both sides of the wafer evenly at the same time, so an air knife is needed for cooling on the back side. Because the wafer is very sensitive to temperature during the cooling process, uneven cooling rates will cause quality defects in the microstructure of the wafer, so the uniformity of airflow from the air knife is of high importance. Existing technology mainly adjusts the uniformity of airflow by setting up an internal static pressure chamber and using an adjustable sealing plate to adjust the size of the air knife nozzle. However, the existing air knife structure design is unreasonable and the number of static pressure chambers is small, resulting in poor airflow uniformity. It is impossible to guarantee the consistency of the adjusted air knife and cannot meet the airflow requirements for cooling the back side of the wafer in high-speed production.

[0003] Therefore, how to provide a wind knife structure with uniform air output has become a technical problem that urgently needs to be solved in this field. Utility Model Content

[0004] The purpose of this invention is to provide an air knife structure that provides uniform airflow.

[0005] This utility model provides an air knife structure for thin-film backwind cooling, comprising:

[0006] A first static pressure chamber and a second static pressure chamber are arranged adjacent to each other in a first direction. A first baffle plate is provided between the first static pressure chamber and the second static pressure chamber to separate them. A first vent hole is opened on the first baffle plate to connect the first static pressure chamber and the second static pressure chamber. An air inlet is opened on the first static pressure chamber.

[0007] The third static pressure chamber is located inside the second static pressure chamber, and the air inlet of the third static pressure chamber faces the first baffle plate.

[0008] An air distribution component is disposed between the first wind baffle and the air inlet of the third static pressure chamber and maintains a certain distance from both in the first direction. The air distribution component includes a first mating surface facing the first vent and a second mating surface facing the air inlet of the third static pressure chamber. Windproof protrusions are provided on the first mating surface and the second mating surface.

[0009] The fourth static pressure chamber is located inside the second static pressure chamber and is interconnected with the third static pressure chamber. A second baffle is provided at the connection between the third static pressure chamber and the fourth static pressure chamber. Multiple second vent holes are evenly provided on the second baffle.

[0010] The nozzle is connected to the air outlet of the fourth static pressure chamber via an air outlet duct.

[0011] Optionally, the first vent is a rectangular slit formed on the first wind deflector.

[0012] Optionally, the air distribution component includes a corrugated plate, with corrugated protrusions on opposite sides of the corrugated plate.

[0013] Optionally, the second static pressure chamber includes a first extension section and a second extension section arranged sequentially along the first direction, wherein the inner diameter of the second extension section gradually decreases along the first direction.

[0014] Optionally, the second baffle is embedded in the middle of the extension of the fourth static pressure chamber to separate the third static pressure chamber on the side of the fourth static pressure chamber near the air distribution member.

[0015] Optionally, the inner diameter of the fourth static pressure chamber gradually decreases along the first direction.

[0016] Optionally, the line containing the first direction is perpendicular to the first mating surface, and the second mating surface is parallel to the first mating surface.

[0017] Optionally, the air inlets are located on both sides of the first static pressure chamber, and the air inlet direction is perpendicular to the first direction.

[0018] Based on the technical content disclosed in this utility model, the following beneficial effects are achieved:

[0019] The air knife structure for thin-film backwind cooling provided by this utility model includes a first static pressure chamber, a second static pressure chamber, a third static pressure chamber, and a fourth static pressure chamber connected in sequence. Air enters the first static pressure chamber through an air inlet and undergoes pressure equalization. Then, it exits the first static pressure chamber through a first vent and is intercepted by a first mating surface. The first mating surface guides the airflow to the second static pressure chamber. The wind-blocking protrusions on the first mating surface further evenly distribute the airflow. The evenly distributed airflow flows into the third static pressure chamber along the wind-blocking protrusions on the surface of the second mating surface. During this process, the airflow is further evenly distributed. The airflow entering the third static pressure chamber is again evenly compressed as it passes through the second vent into the fourth static pressure chamber. At this point, a stable and uniform airflow reaches the large-gap air nozzle through a relatively long air outlet channel, resulting in uniform and consistent airflow.

[0020] Other features and advantages of the present invention will become clear from the following detailed description of exemplary embodiments of the present invention with reference to the accompanying drawings. Attached Figure Description

[0021] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments of the present invention and, together with their description, serve to explain the principles of the present invention.

[0022] Figure 1This is a structural diagram of the air knife structure for leeward cooling of a thin film according to the present invention.

[0023] Figure 2 This is a cross-sectional view of the wave plate of this utility model;

[0024] Figure 3 This is a schematic diagram of the slotted plate of this utility model;

[0025] Figure 4 This is a schematic diagram of the perforated plate of this utility model.

[0026] Explanation of reference numerals in the attached diagram: 1. Air inlet; 2. First static pressure chamber; 3. Slit plate; 4. Corrugated plate; 5. Third static pressure chamber; 6. Perforated plate; 7. Fourth static pressure chamber; 8. Second static pressure chamber; 9. Air outlet duct; 10. Large gap nozzle. Detailed Implementation

[0027] Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that, unless otherwise specifically stated, the relative arrangement, numerical expressions, and values ​​of the components and steps set forth in these embodiments do not limit the scope of the present invention.

[0028] The following description of at least one exemplary embodiment is merely illustrative and is in no way intended to limit the invention or its application or use.

[0029] Techniques, methods, and equipment known to those skilled in the art may not be discussed in detail, but where appropriate, they should be considered part of the specification.

[0030] In all the examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values.

[0031] It should be noted that similar labels and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be discussed further in subsequent figures.

[0032] See Figure 1 and Figure 3This utility model discloses an air knife structure for leeward cooling of a thin film, comprising: an air knife body, inside which a first static pressure chamber 2 and a second static pressure chamber 8 are arranged adjacently in a first direction; air inlets 1 are provided on both sides of the first static pressure chamber 2, preferably with the air inlet direction of the air inlets 1 perpendicular to the first direction; a first baffle plate is provided between the first static pressure chamber 2 and the second static pressure chamber 8 to separate them, the first baffle plate being a slit plate 3 with a rectangular slit in the middle, the rectangular slit connecting the first static pressure chamber 2 and the second static pressure chamber 8, allowing the airflow after equalization in the first static pressure chamber 2 to pass through and enter the second static pressure chamber 8; the rectangular slit is the first vent of this utility model. The direction in which the airflow after equalization in the first static pressure chamber 2 enters the second static pressure chamber 8 through the rectangular slit is the first direction.

[0033] Combined Figure 2 The third static pressure chamber 5 is located inside the second static pressure chamber 8, and the air inlet 1 of the third static pressure chamber 5 faces the first wind deflector. The air distribution component is a corrugated plate 4, which has wavy protrusions on both sides. The corrugated plate 4 is located between the slit plate 3 and the air inlet 1 of the third static pressure chamber 5 and maintains a certain distance from both in the first direction. The corrugated plate 4 includes a first mating surface facing the first vent and a second mating surface facing the air inlet of the third static pressure chamber 5. The first and second mating surfaces are provided with wavy protrusions that serve as wind deflectors. The straight line of the first direction is perpendicular to the first mating surface, and the second mating surface is parallel to the first mating surface.

[0034] Combined Figure 4 The fourth static pressure chamber 7 is located inside the second static pressure chamber 8 and is interconnected with the third static pressure chamber 5. A perforated plate 6, which serves as a second wind baffle, is provided at the connection between the third static pressure chamber 5 and the fourth static pressure chamber 7. Multiple second vent holes are evenly provided on the perforated plate 6.

[0035] The nozzle is a large-gap nozzle 10, and the large-gap nozzle 10 is connected to the air outlet of the fourth static pressure chamber 7 through the air outlet channel 9.

[0036] Furthermore, the second static pressure chamber 8 includes a first extension section and a second extension section arranged sequentially along the first direction, the inner diameter of the second extension section gradually decreasing along the first direction. The inner diameter of the fourth static pressure chamber 7 gradually decreases along the first direction.

[0037] In some embodiments, the perforated plate 6 is embedded in the middle of the extension of the fourth static pressure chamber 7 near the corrugated plate 4, so as to separate the third static pressure chamber 5 in the fourth static pressure chamber 7 near the corrugated plate 4.

[0038] Working principle: The purified and cooled high-pressure airflow enters the first static pressure chamber 2 inside the air knife through the air inlets 1 on both sides of the air knife. After pressure equalization in the first static pressure chamber 2, it reaches the slit plate 3. The slit plate 3 has a rectangular slit in the middle to allow the equalized airflow to pass through. The airflow passes through the slit plate 3 and enters the front of the corrugated plate 4 for interval distribution. The air outlet direction of the corrugated plate 4 is perpendicular to the air outlet direction of the slit plate 3, which can further evenly distribute the airflow. Then the airflow enters the second static pressure chamber 8 for pressure equalization. The equalized airflow passes through the corrugated plate 4 again and is distributed intervally through the back of the corrugated plate 4. Then it enters the third static pressure chamber 5 for pressure equalization. A perforated plate 6 is installed at the rear of the third static pressure chamber 5. The perforated plate 6 is arranged with a large number of small holes, which can further evenly distribute the airflow. After passing through the perforated plate 6, the airflow enters the fourth static pressure chamber 7 for final pressure equalization. Finally, the airflow reaches the large gap nozzle 10 through a relatively long air outlet channel 9. It can be seen that the air knife of this utility model has a two-sided air inlet structure, a slit structure, a corrugated plate structure, and a uniform air distribution plate structure, all of which can perform uniform air distribution. The multiple static pressure chambers set inside the air knife can perform static pressure on the airflow step by step to ensure the uniformity of the airflow inside the air knife.

[0039] In summary, the air knife structure for breech cooling of a thin film provided by this utility model adopts a two-sided air intake, entering the first static pressure chamber for the first air distribution treatment. The outlet of the first static pressure chamber is equipped with a corrugated plate for the second air distribution treatment. After passing through the corrugated plate, the airflow enters the second static pressure chamber for the third air distribution treatment. The airflow then passes through the corrugated plate again to enter the third static pressure chamber for the fourth air distribution treatment. The airflow passes through the air distribution perforated plate to enter the fourth static pressure chamber for the fifth air distribution treatment. The airflow passes through a large-gap rectangular channel and reaches the air nozzle position, forming a large-volume uniform airflow.

[0040] Although specific embodiments of the present invention have been described in detail by way of examples, those skilled in the art should understand that the above examples are for illustrative purposes only and are not intended to limit the scope of the present invention. Those skilled in the art should understand that modifications can be made to the above embodiments without departing from the scope and spirit of the present invention. The scope of the present invention is defined by the appended claims.

Claims

1. A wind knife structure for thin-film leeward cooling, characterized in that, include: A first static pressure chamber and a second static pressure chamber are arranged adjacent to each other in a first direction. A first baffle plate is provided between the first static pressure chamber and the second static pressure chamber to separate them. A first vent hole is opened on the first baffle plate to connect the first static pressure chamber and the second static pressure chamber. An air inlet is opened on the first static pressure chamber. The third static pressure chamber is disposed inside the second static pressure chamber, and the air inlet of the third static pressure chamber faces the first baffle plate; An air distribution component is disposed between the first wind baffle and the air inlet of the third static pressure chamber and maintains a certain distance from both in the first direction. The air distribution component includes a first mating surface facing the first vent and a second mating surface facing the air inlet of the third static pressure chamber. Windproof protrusions are provided on the first mating surface and the second mating surface. The fourth static pressure chamber is located inside the second static pressure chamber and is interconnected with the third static pressure chamber. A second baffle is provided at the connection between the third static pressure chamber and the fourth static pressure chamber. A plurality of second vent holes are evenly provided on the second baffle. The air nozzle is connected to the air outlet of the fourth static pressure chamber via an air outlet channel.

2. The air knife structure for thin-film backflow cooling according to claim 1, characterized in that: The first vent is a rectangular slit formed on the first wind deflector.

3. The air knife structure for thin film backflow cooling according to claim 1 or 2, characterized in that: The air distribution component includes a wave plate, and wave-shaped protrusions are respectively provided on opposite sides of the wave plate.

4. The air knife structure for thin film backflow cooling according to claim 1 or 2, characterized in that: The second static pressure chamber includes a first extension section and a second extension section arranged sequentially along a first direction, wherein the inner diameter of the second extension section gradually decreases along the first direction.

5. The air knife structure for thin film backflow cooling according to claim 1 or 2, characterized in that: The second baffle is embedded in the middle of the extension of the fourth static pressure chamber to separate the third static pressure chamber in the fourth static pressure chamber near the side of the air distribution member.

6. The air knife structure for thin film backflow cooling according to claim 1 or 2, characterized in that: The inner diameter of the fourth static pressure chamber gradually decreases along the first direction.

7. The air knife structure for thin film backflow cooling according to claim 1 or 2, characterized in that: The straight line containing the first direction is perpendicular to the first mating surface, and the second mating surface is parallel to the first mating surface.

8. The air knife structure for thin film backflow cooling according to claim 1 or 2, characterized in that: The air inlets are located on both sides of the first static pressure chamber, and the air intake direction of the air inlets is perpendicular to the first direction.

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