Wafer box

By setting positioning posts and limiting protrusions on the cover of the wafer cassette, combined with the design of cover limiting ribs and buckle limiting ribs, the problem of buckle damage is solved, the buckle is stably supported, the service life is extended and the risk of wafer damage is reduced.

CN223836171UActive Publication Date: 2026-01-27SEMIGLORY SEMICON MATERIAL (JIASHAN) CO LTD
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Patent Information

Application Number
CN202520589960.X
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-03-31
Publication Date
2026-01-27
Estimated Expiration
2035-03-31

AI Technical Summary

Technical Problem

The clips of existing wafer cases are easily damaged during use, especially when the cover is closed, they can easily press against the edge of the lower cover, leading to a risk of breakage, increasing the possibility of damaging the wafer and creating a safety hazard.

Method used

A wafer box was designed. By setting a positioning post and a limiting protrusion on the first cover, the limiting protrusion abuts against the inner wall of the buckle when the buckle hangs down naturally, causing the buckle to tilt outward. Combined with the design of the cover limiting bone and the buckle limiting bone, the support structure of the buckle is enhanced, and the buckle is prevented from directly pressing against the edge of the lower cover.

Benefits of technology

This effectively prevents the clips from being damaged during the closing process, extends the lifespan of the clips, reduces the risk of wafer damage, and improves safety during transportation.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses a wafer box which comprises a first cover body and a second cover body, the first cover body and the second cover body are buckled and then connected through a buckle, and the first cover body comprises two positioning columns and a limiting convex part. Wherein the two alignment columns are oppositely arranged on the first cover body, the center axes of the alignment columns are located on the same straight line, gaps are formed between the two alignment columns and the side wall of the first cover body, and the two alignment columns are rotationally connected with one end of the buckle; at least one limiting convex part is arranged on the side, close to the side wall of the first cover body, of the corresponding positioning column, and the limiting convex part is used for abutting against the inner wall of the buckle when the buckle naturally hangs down, so that the buckle inclines towards the outer side of the first cover body; the second cover body further comprises a cover body buckling position, and the cover body buckling position is arranged on the side wall of the second cover body and used for being buckled with the buckle buckling position of the buckle. According to the utility model, the problem that the buckle is easy to abut against the edge of the lower cover when the first cover body and the second cover body are buckled can be avoided, and the problem that the buckle of the existing wafer box is easy to damage when in use is solved.
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Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, specifically to a wafer cassette. Background Technology

[0002] A wafer case is a critical container structure used for storing and transporting wafers, typically consisting of a top cover, a bottom cover, and latches. When the top and bottom covers are fastened together, the latches provide a secure connection, ensuring the safety of the wafers during transport. In existing technologies, the latches and the top cover are usually integrated and fastened using a folding mechanism.

[0003] In practical use, the wafer cassette containing the frame and wafer is quite heavy, which subjects the clips to significant mechanical stress during transportation and handling. Especially when the cover is closed, the clips, drooping naturally, can easily press against the edge of the lower cover, increasing the risk of breakage. This not only shortens the lifespan of the clips but also increases the likelihood of damaging the wafers during transportation or use, creating a significant safety hazard.

[0004] Therefore, a new technological solution is needed. Utility Model Content

[0005] In view of this, the present invention provides a wafer cassette to at least solve the problem that existing wafer cassette clips are easily damaged during use.

[0006] The present invention provides the following technical solutions:

[0007] This embodiment of the invention provides a wafer cassette, including a first cover and a second cover, which are connected by snap-fit ​​mechanisms after being fastened together.

[0008] The first cover includes:

[0009] Two positioning posts are disposed opposite to each other on the first cover, with their central axes on the same straight line, and both positioning posts are spaced apart from the side wall of the first cover. The two positioning posts are rotatably connected to one end of the buckle.

[0010] At least one limiting protrusion is provided on the side of the corresponding positioning post near the side wall of the first cover. The limiting protrusion is used to abut against the inner wall of the buckle when the buckle hangs down naturally, so that the buckle tilts to the outside of the first cover.

[0011] The second cover also includes:

[0012] The cover fastener is located on the side wall of the second cover and is used to engage with the buckle fastener.

[0013] Furthermore, the second cover also includes:

[0014] Two cover limiting bones are provided on both sides of the cover buckle, and both cover limiting bones are perpendicular to the cover buckle. The two cover limiting bones are used to support and stabilize the cover buckle.

[0015] Furthermore, the two sides of the cap-shaped limiting bone are configured as outwardly inclined bevels or arc-shaped edges; and / or

[0016] The side of the cover limiting bone away from the second cover and the side of the cover fastener away from the second cover are located on the same plane.

[0017] Furthermore, the first cover also includes:

[0018] The mounting groove is located on the side of the first cover, and the two positioning posts and the two limiting protrusions are located on the opposite sidewalls of the mounting groove.

[0019] Furthermore, the end edge of the limiting protrusion is configured as arc-shaped or spherical.

[0020] Furthermore, the buckle includes:

[0021] The buckle body has a concave structure, and the inner wall of the buckle body is provided with buckle positions;

[0022] Two elastic arms are provided at one end of the buckle body, and each elastic arm is provided with a positioning hole that cooperates with the positioning post and a limiting hole that cooperates with the limiting protrusion.

[0023] Furthermore, the buckle also includes:

[0024] The buckle limiting bone is disposed on the inner wall of the buckle body and located on both sides of the buckle buckle position, and is used to abut against the cover limiting bone on the second cover.

[0025] Furthermore, the buckle also includes:

[0026] A buckle reinforcing bone is disposed inside the buckle body, and its two ends are connected to the two side walls of the buckle body to enhance the strength of the buckle body.

[0027] Furthermore, the buckle also includes:

[0028] A finger position opening is provided at the other end of the buckle body to facilitate flipping the buckle body.

[0029] Furthermore, the buckle also includes:

[0030] An anti-slip part is provided on the outer wall of the buckle body.

[0031] Compared with the prior art, the beneficial effects that can be achieved by at least one of the above-mentioned technical solutions adopted in the embodiments of this utility model include at least the following:

[0032] This utility model discloses a wafer box in which a first cover and a second cover are fastened together by a snap fastener. A limiting protrusion is then used to limit the snap fastener, so that when the snap fastener hangs down naturally, it tilts to the outside of the first cover. This avoids the problem that the snap fastener easily presses against the edge of the lower cover when the first cover and the second cover are fastened together, and at least solves the problem that the existing wafer box snap fasteners are easily damaged during use.

[0033] Furthermore, both the limiting protrusion and the clamping post can provide support for the latch, thereby avoiding the problem that the clamping post may break under the pressure of the wafer when a single clamping post supports the latch. Attached Figure Description

[0034] To more clearly illustrate the technical solutions of the embodiments of this application, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0035] Figure 1 This is a schematic diagram of the structure of a wafer cassette according to an embodiment of the present invention;

[0036] Figure 2 This is a schematic diagram of a wafer cassette during the closing process according to an embodiment of the present invention;

[0037] Figure 3 This is a partial structural diagram of a wafer cassette during the closing process, according to an embodiment of the present utility model.

[0038] Figure 4 This is a cross-sectional view of a wafer cassette according to an embodiment of the present invention;

[0039] Figure 5 This is a schematic diagram of the structure of the first cover in a wafer cassette according to an embodiment of the present invention;

[0040] Figure 6 This is a partial enlarged view of the first cover in a wafer cassette according to an embodiment of the present invention;

[0041] Figure 7 This is a schematic diagram of the structure of the second cover in a wafer cassette according to an embodiment of the present invention;

[0042] Figure 8This is a partially enlarged view of the second cover in a wafer cassette according to an embodiment of the present invention;

[0043] Figure 9 This is a front view of a snap-fit ​​mechanism in a wafer cassette according to an embodiment of the present invention.

[0044] Figure 10 This is a reverse structural diagram of a snap-fit ​​device in a wafer cassette according to an embodiment of the present invention.

[0045] The working principle of this utility model is as follows:

[0046] 10. First cover; 11. Positioning post; 12. Limiting protrusion; 13. Mounting groove;

[0047] 20. Second cover; 21. Cover snap-fit; 22. Cover limiting bone;

[0048] 30. Buckle; 31. Buckle body; 32. Buckle buckle position; 33. Elastic arm; 34. Adjustment hole; 35. Limiting hole; 36. Buckle limiting bone; 37. Buckle reinforcing bone; 38. Finger position opening; 39. Anti-slip part. Detailed Implementation

[0049] The embodiments of this application will now be described in detail with reference to the accompanying drawings.

[0050] The following specific examples illustrate the implementation of this application. Those skilled in the art can easily understand other advantages and effects of this application from the content disclosed in this specification. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. This application can also be implemented or applied through other different specific embodiments, and the details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this application. It should be noted that, in the absence of conflict, the following embodiments and features in the embodiments can be combined with each other. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0051] It should be noted that various aspects of embodiments within the scope of the appended claims are described below. It will be apparent that the aspects described herein can be embodied in a wide variety of forms, and any particular structure and / or function described herein is merely illustrative. Based on this application, those skilled in the art will understand that one aspect described herein can be implemented independently of any other aspect, and two or more of these aspects can be combined in various ways. For example, any number and aspects set forth herein can be used to implement the device and / or practice the method. Additionally, this device and / or method can be implemented using structures and / or functionalities other than one or more of the aspects set forth herein.

[0052] It should also be noted that the illustrations provided in the following embodiments are only schematic representations of the basic concept of this application. The drawings only show the components related to this application and are not drawn according to the actual number, shape and size of the components in the actual implementation. In the actual implementation, the form, quantity and proportion of each component can be arbitrarily changed, and the layout of the components may also be more complex.

[0053] Additionally, specific details are provided in the following description to facilitate a thorough understanding of the examples. However, those skilled in the art will understand that practice can be carried out without these specific details.

[0054] The technical solutions provided by the various embodiments of this application are described below with reference to the accompanying drawings.

[0055] like Figures 1-2 As shown, the present invention provides a wafer box, including a first cover 10 and a second cover 20, which are connected by a snap fastener 30 after being fastened together.

[0056] The first cover 10 can be an upper cover, and the second cover 20 can be a lower cover. When the first cover 10 and the second cover 20 are fastened together, an internal space is formed to accommodate the wafer or frame.

[0057] The first cover 10 has an opening on the side facing the second cover 20, and the second cover 20 has an opening on the side facing the first cover 10, to accommodate the wafer or the frame.

[0058] like Figures 3-10As shown, the first cover 10 includes two positioning posts 11 and at least one limiting protrusion 12. The two positioning posts 11 are disposed opposite to each other on the first cover 10, with their central axes on the same straight line, and the two positioning posts 11 are spaced from the side wall of the first cover 10. The two positioning posts 11 are rotatably connected to one end of the buckle 30. The at least one limiting protrusion 12 is disposed on the side of the corresponding positioning post 11 near the side wall of the first cover 10. The limiting protrusion 12 is used to abut against the inner wall of the buckle 30 when the buckle 30 hangs down naturally, so that the buckle 30 tilts to the outside of the first cover 10.

[0059] like Figures 7-8 As shown, the second cover 20 also includes a cover fastener 21, which is disposed on the side wall of the second cover 20 and is used to engage with the fastener 32 of the buckle 30.

[0060] The buckle 30 can rotate / flip around the two positioning posts 11 to engage with the cover buckle 21 on the second cover 20.

[0061] The end edge of the limiting protrusion 12 is set to be arc-shaped or spherical.

[0062] For example, the limiting protrusion 12 has a hemispherical structure.

[0063] In this case, after the buckle 30 engages with the first cover 10 and the second cover 20, and after the buckle 30 engages with the cover buckle position 21 of the second cover 20, the limiting protrusion 12 can enter the corresponding hole on the buckle 30 to support the buckle 30. This allows the buckle 30 to be supported by both the adjusting post 11 and the limiting protrusion 12, thus preventing the adjusting post 11 from being damaged by prolonged stress.

[0064] Specifically, when the buckle 30 is rotatably mounted on the first cover 10 via the positioning post 11, the buckle 30 can rotate around the positioning post 11, and when it rotates to hang down naturally, the buckle 30 can be abutted by the limiting protrusion 12, so that the buckle 30 is kept in an inclined state towards the outside of the first cover 10, so as to avoid the buckle 30 abutting against the edge of the second cover 20 when the first cover 10 and the second cover 20 are fastened, which would cause the buckle 30 to be damaged.

[0065] Furthermore, the second cover 20 also includes two cover limiting bones 22, which are disposed on both sides of the cover buckle 21 and are perpendicular to the cover buckle 21. The two cover limiting bones 22 are used to support and stabilize the cover buckle 21.

[0066] Among them, the two cover limiting bones 22 are used to support the cover buckle 21, to enhance the strength of the cover buckle 21, and to prevent the cover buckle 21 from tilting or being damaged during use.

[0067] Among them, the two cover limiting bones 22 and cover buckle 21 are generally in the shape of an I-shape.

[0068] Furthermore, the two sides of the cap body limiting bone 22 are set as outwardly inclined oblique or arc-shaped sides to increase the stability of the cap body limiting bone 22 and prevent the cap body limiting bone 22 from tilting or breaking after the cap body buckle 21 is stretched.

[0069] Furthermore, the side of the cover limiting bone 22 away from the second cover 20 and the side of the cover fastener 21 away from the second cover 20 are located on the same plane.

[0070] like Figures 5-6 As shown, the first cover 10 also includes a mounting groove 13. The mounting groove 13 is opened on the side of the first cover 10, and the two positioning posts 11 and the two limiting protrusions 12 are located on the opposite side walls of the mounting groove 13, so as to avoid the two positioning posts 11 and the two limiting protrusions 12 protruding from the first cover 10, and also to avoid the connecting part of the buckle 30 being located outside the first cover 10 and the second cover 20, which would cause the buckle 30 and the cover buckle 21 to be too long.

[0071] Furthermore, the buckle 30 includes a buckle body 31 and two elastic arms 33. The buckle body 31 has a concave structure, and a buckle fastening position 32 is provided on the inner wall of the buckle body 31. The two elastic arms 33 are disposed at one end of the buckle body 31, and each elastic arm 33 has a positioning hole 34 that cooperates with the positioning post 11 and a limiting hole 35 that cooperates with the limiting protrusion 12.

[0072] The buckle body 31 is a cavity structure with an opening, and the interior of the buckle body 31 is used to set the buckle fastening position 32.

[0073] Specifically, the buckle body 31 has two openings on one side, which are used to separate the two side walls of the buckle body 31 from the central panel of the buckle body 31. At this time, the two side walls of the buckle body 31 are used as two elastic arms 33.

[0074] like Figures 9-10 As shown, the buckle 30 also includes a buckle limiting bone 36, which is disposed on the inner wall of the buckle body 31 and located on both sides of the buckle buckle position 32, for abutting against the cover limiting bone 22 on the second cover 20.

[0075] The buckle limiting bone 36 is used to abut against the cover limiting bone 22 of the second cover 20 after the buckle 30 is fastened through the buckle and the second cover 20, so as to support the buckle buckle 32 and the cover buckle 21 and prevent the buckle buckle 32 from being relatively displaced relative to the cover buckle 21 due to the gap between the buckle buckle 32 and the cover buckle 21.

[0076] Furthermore, the buckle 30 also includes a buckle reinforcing bone 37, which is disposed inside the buckle body 31 and its two ends are connected to the two side walls of the buckle body 31 to increase the strength of the buckle body 30 and prevent the two side walls of the buckle body 31 from deforming.

[0077] Furthermore, the buckle 30 also includes a finger position port 38, which is located at the other end of the buckle body 31 to facilitate flipping the buckle body 31.

[0078] The finger slot 38 is designed to facilitate the use of fingers by staff to open the buckle 30.

[0079] Furthermore, the buckle 30 also includes an anti-slip part 39, which is disposed on the outer wall of the buckle body 31 and serves to prevent slippage when the worker opens the buckle 30.

[0080] In this invention, when the first cover 10 and the second cover 20 are closed, the limiting protrusion 12 can restrict the buckle 30 from naturally drooping, so that the buckle 30 is kept tilted (e.g., the buckle 30 is extended outward by more than 110°) to facilitate closing and to prevent the buckle 30 from being damaged during the closing process.

[0081] In this specification, the same or similar parts between the various embodiments can be referred to mutually. Each embodiment focuses on describing the differences from other embodiments. In particular, for the product embodiments described later, since they correspond to the methods, the descriptions are relatively simple, and the relevant parts can be referred to the descriptions in the system embodiments.

[0082] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A wafer cassette, comprising a first cover and a second cover, wherein the first cover and the second cover are fastened together by snap-fit ​​connections, characterized in that, The first cover includes: Two positioning posts are disposed opposite to each other on the first cover, with their central axes on the same straight line, and both positioning posts are spaced apart from the side wall of the first cover. The two positioning posts are rotatably connected to one end of the buckle. At least one limiting protrusion is provided on the side of the corresponding positioning post near the side wall of the first cover. The limiting protrusion is used to abut against the inner wall of the buckle when the buckle hangs down naturally, so that the buckle tilts to the outside of the first cover. The second cover also includes: The cover fastener is located on the side wall of the second cover and is used to engage with the buckle fastener.

2. The wafer cassette according to claim 1, characterized in that, The second cover also includes: Two cover limiting bones are provided on both sides of the cover buckle, and both cover limiting bones are perpendicular to the cover buckle. The two cover limiting bones are used to support and stabilize the cover buckle.

3. The wafer cassette according to claim 2, characterized in that, The two sides of the cap-shaped limiting bone are configured as outwardly inclined bevels or arc-shaped edges; and / or The side of the cover limiting bone away from the second cover and the side of the cover fastener away from the second cover are located on the same plane.

4. The wafer cassette according to claim 1, characterized in that, The first cover also includes: The mounting groove is located on the side of the first cover, and the two positioning posts and the two limiting protrusions are located on the opposite sidewalls of the mounting groove.

5. The wafer cassette according to claim 1, characterized in that, The end edge of the limiting protrusion is set to be arc-shaped or spherical.

6. The wafer cassette according to any one of claims 1 to 5, characterized in that, The buckle includes: The buckle body has a concave structure, and the inner wall of the buckle body is provided with buckle positions; Two elastic arms are provided at one end of the buckle body, and each elastic arm is provided with a positioning hole that cooperates with the positioning post and a limiting hole that cooperates with the limiting protrusion.

7. The wafer cassette according to claim 6, characterized in that, The buckle also includes: The buckle limiting bone is disposed on the inner wall of the buckle body and located on both sides of the buckle buckle position, and is used to abut against the cover limiting bone on the second cover.

8. The wafer cassette according to claim 6, characterized in that, The buckle also includes: A buckle reinforcing bone is disposed inside the buckle body, and its two ends are connected to the two side walls of the buckle body to enhance the strength of the buckle body.

9. The wafer cassette according to claim 6, characterized in that, The buckle also includes: A finger position opening is provided at the other end of the buckle body to facilitate flipping the buckle body.

10. The wafer cassette according to claim 6, characterized in that, The buckle also includes: An anti-slip part is provided on the outer wall of the buckle body.