Ion sputtering instrument with adjustable rotary sample holder

Abstract

The utility model relates to the technical field of ion sputtering instruments, and discloses an ion sputtering instrument with an adjustable rotary sample holder, which comprises an ion sputtering instrument main body, the top of the ion sputtering instrument main body is fixedly connected with a fixed base, and the top of the fixed base is fixedly connected with a protective cover. A connecting pipe is installed at the left end of the ion sputtering instrument body, a fixing plate is arranged at the upper end of the fixing base, a sputtering nozzle is fixedly connected to the bottom of the fixing plate, a rotating assembly is arranged in the protection cover, a fixing assembly is arranged at the upper end of the rotating assembly, and the rotating assembly comprises a motor. The transmission rod is driven by the motor to rotate, so that the sample holder rotates, different positions of a sample are sputtered, the electric push rod is started, the output end of the electric push rod pushes the second connecting plate to move, the sample holder is inclined, the sample is sputtered at different angles, and the sputtering effect of the sample is improved.

Description

Technical Field

[0001] This utility model relates to the field of ion sputtering technology, and in particular to an ion sputtering instrument with an adjustable rotating sample holder. Background Technology

[0002] An ion sputtering system is a device used for surface treatment and thin film preparation. Its working principle is based on ion sputtering technology. In a high vacuum environment, electrons collide with argon atoms under the influence of an electric field, generating Ar ions and new electrons. The Ar ions are accelerated under the influence of the electric field to bombard the target material, causing atoms or molecules on the target surface to detach and form sputtered particles.

[0003] While existing ion sputtering instruments have rotating sample holders, when sputtering samples with uneven surfaces, the unevenness of the sample surface can obstruct the sputtering of recessed areas, making it difficult to fully cover the recessed areas and thus affecting the sputtering effect. Therefore, we propose an ion sputtering instrument with an adjustable rotating sample holder. Utility Model Content

[0004] To solve the above-mentioned technical problems, this utility model provides an ion sputtering instrument with an adjustable rotating sample holder.

[0005] This utility model is achieved using the following technical solution: an ion sputtering instrument with an adjustable rotating sample holder, comprising an ion sputtering instrument body, a fixed base fixedly connected to the top of the ion sputtering instrument body, a protective cover fixedly connected to the top of the fixed base, a connecting pipe installed at the left end of the ion sputtering instrument body, a fixed plate provided at the upper end of the fixed base, a sputtering nozzle fixedly connected to the bottom of the fixed plate, a rotating component provided inside the protective cover, and a fixed component provided at the upper end of the rotating component;

[0006] The rotating assembly includes a motor, the output end of which is fixedly connected to a transmission rod, the top of which is fixedly connected to a first connecting plate, the top of which is hinged to a sample holder, the surface of which is fixedly connected to an extension plate, the top of which is fixedly connected to an electric push rod, the output end of which is fixedly connected to a second connecting plate, and the upper surface of which is provided with an installation groove.

[0007] The above technical solution uses a motor to drive a transmission rod to rotate, causing the sample holder to rotate and sputtering the sample at different positions. Activating the electric push rod causes the output end of the electric push rod to move the second connecting plate, tilting the sample holder and sputtering the sample at different angles, thereby improving the sputtering effect.

[0008] As a further improvement to the above solution, the bottom of the motor is fixedly connected to the top of the fixed base, and the top of the second connecting plate is hinged to the bottom of the sample holder.

[0009] With the above technical solution, the second connecting plate is hinged to the bottom of the sample holder, allowing the sample holder to tilt around the hinge point.

[0010] As a further improvement to the above solution, the fixing component includes a fixing rod, the surface of which is fitted with a spring, a clamping plate is slidably connected to the surface of the fixing rod, and a protective pad is fixedly connected to one end of the clamping plate.

[0011] The above technical solution involves pushing two clamping plates to both sides, placing the sample on the sample holder, and then using the elastic return of the spring to push the clamping plates along the fixed rod. The two clamping plates hold and fix the sample, preventing it from falling during rotation. The protective pads contact both ends of the sample to avoid damaging the sample surface.

[0012] As a further improvement to the above solution, both ends of the fixing rod are fixedly connected to the inner wall of the mounting groove, and the right end of the spring is fixedly connected to the inner wall of the mounting groove.

[0013] The above technical solution uses a fixing rod to limit the clamping plate, allowing the clamping plate to slide along the fixing rod and ensuring stability during use.

[0014] As a further improvement to the above solution, the left end of the spring is fixedly connected to the right end of the clamping plate.

[0015] As a further improvement to the above solution, two of each of the fixing rod, spring, clamping plate, and protective pad are provided.

[0016] As a further improvement to the above solution, the end of the connecting tube away from the main body of the ion sputtering instrument is connected to the sputtering nozzle.

[0017] Using the above technical solution, the main body of the ion sputtering instrument is started, and the sputtering nozzle is connected to the main body of the ion sputtering instrument through a connecting pipe. Under the action of the main body of the ion sputtering instrument, the sputtering nozzle generates metal ions. These metal ions are accelerated under the action of an electric field and bombard the sample surface to form a uniform metal film.

[0018] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0019] This invention improves the sputtering effect by incorporating a rotating assembly, specifically a motor that drives a transmission rod to rotate, thereby rotating the sample holder and sputtering the sample at different locations. An electric push rod is activated, and its output pushes a second connecting plate to tilt the sample holder, allowing for sputtering at different angles.

[0020] This invention features a fixing assembly. Specifically, two clamping plates are pushed to the sides, and the sample is placed on the sample holder. The springs then release the sample, causing the clamping plates to move along the fixing rod. The two clamping plates hold and fix the sample, preventing it from falling during rotation. Protective pads contact both ends of the sample to avoid damaging its surface. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0022] Figure 2 This is a cross-sectional structural diagram of the present invention;

[0023] Figure 3 This utility model Figure 2 Enlarged structural diagram of section A in the middle;

[0024] Figure 4 This is a schematic diagram of the main structure of the ion sputtering instrument of this utility model;

[0025] Figure 5 This is a schematic diagram of the rotating component structure of this utility model;

[0026] Figure 6 This is a schematic diagram of the sample holder structure of this utility model.

[0027] Explanation of key symbols:

[0028] 1. Ion sputtering instrument body; 2. Fixed base; 3. Protective cover; 4. Connecting pipe; 5. Fixing plate; 6. Sputtering nozzle; 7. Rotating assembly; 701. Motor; 702. Transmission rod; 703. First connecting plate; 704. Sample holder; 705. Extension plate; 706. Electric push rod; 707. Second connecting plate; 708. Mounting slot; 8. Fixing assembly; 801. Fixing rod; 802. Spring; 803. Clamping plate; 804. Protective pad. Detailed Implementation

[0029] The present invention will be further described below with reference to the accompanying drawings and specific embodiments. It should be noted that, without conflict, the various embodiments or technical features described below can be arbitrarily combined to form new embodiments.

[0030] Example:

[0031] Please combine Figure 1-6 An ion sputtering instrument with an adjustable rotating sample holder according to this embodiment includes an ion sputtering instrument body 1, a fixed base 2 fixedly connected to the top of the ion sputtering instrument body 1, a protective cover 3 fixedly connected to the top of the fixed base 2, a connecting pipe 4 installed at the left end of the ion sputtering instrument body 1, a fixed plate 5 provided at the upper end of the fixed base 2, a sputtering nozzle 6 fixedly connected to the bottom of the fixed plate 5, a rotating component 7 provided inside the protective cover 3, and a fixed component 8 provided at the upper end of the rotating component 7.

[0032] The rotating assembly 7 includes a motor 701. A transmission rod 702 is fixedly connected to the output end of the motor 701. A first connecting plate 703 is fixedly connected to the top of the transmission rod 702. A sample holder 704 is hinged to the top of the first connecting plate 703. An extension plate 705 is fixedly connected to the surface of the transmission rod 702. An electric push rod 706 is fixedly connected to the top of the extension plate 705. A second connecting plate 707 is fixedly connected to the output end of the electric push rod 706. A mounting groove 708 is provided on the upper surface of the sample holder 704. When the ion sputtering instrument body 1 is started, the sputtering nozzle 6 is connected via a connecting... Connector 4 is connected to the main body 1 of the ion sputtering instrument. Sputtering nozzle 6 generates metal ions under the action of the main body 1 of the ion sputtering instrument. The metal ions are accelerated under the action of the electric field and bombard the sample surface. Then, motor 701 is started, which drives transmission rod 702 to rotate, causing sample holder 704 to rotate and sputter at different positions of the sample. Electric push rod 706 is started, and the output end of electric push rod 706 pushes the second connecting plate 707 to move, causing the sample holder 704 to tilt at different angles and sputter the sample at different angles, thereby improving the sputtering effect of the sample.

[0033] The bottom of the motor 701 is fixedly connected to the top of the fixed base 2, and the top of the second connecting plate 707 is hinged to the bottom of the sample holder 704.

[0034] The fixing assembly 8 includes a fixing rod 801, a spring 802 sleeved on the surface of the fixing rod 801, and a clamping plate 803 slidably connected to the surface of the fixing rod 801. A protective pad 804 is fixedly connected to one end of the clamping plate 803. The two clamping plates 803 are pushed to both sides, and then the sample is placed on the sample holder 704. The spring 802 elastically returns to its original position, pushing the clamping plate 803 to move along the fixing rod 801. The two clamping plates 803 clamp and fix the sample, preventing the sample from falling during rotation. The protective pad 804 contacts both ends of the sample to avoid damage to the sample surface.

[0035] Both ends of the fixing rod 801 are fixedly connected to the inner wall of the mounting groove 708, and the right end of the spring 802 is fixedly connected to the inner wall of the mounting groove 708.

[0036] The left end of the spring 802 is fixedly connected to the right end of the clamping plate 803.

[0037] 6. Two of each of the following components are provided: fixing rod 801, spring 802, clamping plate 803, and protective pad 804.

[0038] The end of the connecting tube 4 that is away from the main body 1 of the ion sputtering instrument is connected to the sputtering nozzle 6.

[0039] The implementation principle of an ion sputtering instrument with an adjustable rotating sample holder in this embodiment is as follows: During use, the two clamping plates 803 are pushed to the sides, and then the sample is placed on the sample holder 704. The spring 802 elastically resets, pushing the clamping plates 803 to move along the fixed rod 801. The two clamping plates 803 clamp and fix the sample, preventing it from falling during rotation. Protective pads 804 contact both ends of the sample to avoid damage to the sample surface. Then, the ion sputtering instrument body 1 is started, and the sputtering nozzle 6 is connected via a connecting pipe... 4. Connected to the main body 1 of the ion sputtering instrument, the sputtering nozzle 6 generates metal ions under the action of the main body 1 of the ion sputtering instrument. The metal ions are accelerated under the action of the electric field and bombard the sample surface. Then, the motor 701 is started, and the motor 701 drives the transmission rod 702 to rotate, so that the sample holder 704 rotates and sputters at different positions of the sample. The electric push rod 706 is started, and the output end of the electric push rod 706 pushes the second connecting plate 707 to move, so that the sample holder 704 tilts at different angles and sputters the sample at different angles, thereby improving the sputtering effect of the sample.

[0040] The above embodiments are merely preferred embodiments of this utility model and should not be construed as limiting the scope of protection of this utility model. Any non-substantial changes and substitutions made by those skilled in the art based on this utility model shall fall within the scope of protection claimed by this utility model.

Claims

1. An ion sputtering instrument with an adjustable rotating sample holder, characterized in that, The device includes an ion sputtering instrument body (1), a fixed base (2) is fixedly connected to the top of the ion sputtering instrument body (1), a protective cover (3) is fixedly connected to the top of the fixed base (2), a connecting pipe (4) is installed at the left end of the ion sputtering instrument body (1), a fixed plate (5) is provided at the upper end of the fixed base (2), a sputtering nozzle (6) is fixedly connected to the bottom of the fixed plate (5), a rotating component (7) is provided inside the protective cover (3), and a fixed component (8) is provided at the upper end of the rotating component (7). The rotating assembly (7) includes a motor (701), the output end of which is fixedly connected to a transmission rod (702), the top of which is fixedly connected to a first connecting plate (703), the top of which is hinged to a sample holder (704), the surface of which is fixedly connected to an extension plate (705), the top of which is fixedly connected to an electric push rod (706), the output end of which is fixedly connected to a second connecting plate (707), and the upper surface of which is provided with an installation groove (708).

2. An ion sputtering apparatus with an adjustable rotating sample holder as described in claim 1, characterized in that: The bottom of the motor (701) is fixedly connected to the top of the fixed base (2), and the top of the second connecting plate (707) is hinged to the bottom of the sample holder (704).

3. An ion sputtering apparatus with an adjustable rotating sample holder as described in claim 1, characterized in that: The fixing component (8) includes a fixing rod (801), a spring (802) is sleeved on the surface of the fixing rod (801), a clamping plate (803) is slidably connected to the surface of the fixing rod (801), and a protective pad (804) is fixedly connected to one end of the clamping plate (803).

4. An ion sputtering apparatus with an adjustable rotating sample holder as described in claim 3, characterized in that: The two ends of the fixing rod (801) are fixedly connected to the inner wall of the mounting groove (708), and the right end of the spring (802) is fixedly connected to the inner wall of the mounting groove (708).

5. An ion sputtering apparatus with an adjustable rotating sample holder as described in claim 3, characterized in that: The left end of the spring (802) is fixedly connected to the right end of the clamping plate (803).

6. An ion sputtering apparatus with an adjustable rotating sample holder as described in claim 3, characterized in that: The number of the fixed rod (801), spring (802), clamping plate (803) and protective pad (804) are all provided in two.

7. An ion sputtering apparatus with an adjustable rotating sample holder as described in claim 1, characterized in that: The end of the connecting pipe (4) away from the ion sputtering instrument body (1) is connected to the sputtering nozzle (6).

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