System for monitoring temperature uniformity of heater in real time

Abstract

The utility model provides a system for monitoring the temperature uniformity of a heater in real time. The structure principle is simple, the multiple temperature sensors are designed, one temperature sensor is arranged at the circle center of the circular heater, a rectangular coordinate system is arranged with the circle center as the original point, and the multiple temperature sensors are arranged on the positive half axis of the X axis, the negative half axis of the X axis, the positive half axis of the Y axis and the negative half axis of the Y axis correspondingly; and the plurality of temperature sensors are respectively arranged in the first quadrant, the second quadrant, the third quadrant and the fourth quadrant. The temperature of point locations measured by the temperature sensor in real time is transmitted through the signal transmission device, and the maximum temperature value, the minimum temperature value, the average temperature value and the temperature uniformity can be directly displayed on the display after the temperature data of each point is processed. The temperature of each point position on the surface of the heater, the maximum temperature value, the minimum temperature value, the average temperature value and the temperature uniformity can be monitored on the display in real time.

Description

Technical Field

[0001] This application relates to the field of heating device technology, and specifically to a system for real-time monitoring of heater temperature uniformity. Background Technology

[0002] Temperature uniformity is a crucial parameter for chemical vapor deposition (CVD) chambers. It affects the film thickness uniformity of the produced wafers, and abnormalities can lead to surface discoloration. However, existing CVD chambers lack real-time monitoring of heater surface temperature uniformity; they only monitor the temperature at a single point on the heater. This limited number of monitoring points fails to fully reflect the critical parameter of heater temperature uniformity. Calibrating heater surface temperature uniformity requires opening the chamber and placing a temperature-sensing silicon wafer. This process disrupts production and fails to provide accurate real-time temperature data. Utility Model Content

[0003] Therefore, in order to overcome the shortcomings of the prior art, this application designs a system for real-time monitoring of heater temperature uniformity to solve the problem of not being able to monitor heater temperature uniformity in real time.

[0004] To achieve the above objectives, this application provides the following technical solution: a system for real-time monitoring of heater temperature uniformity, used to monitor in real-time whether the temperature at various points on the surface of the heater in a chemical vapor deposition chamber is uniform, characterized in that it includes:

[0005] A temperature sensor is used to monitor the temperature at its location in real time. Multiple temperature sensors are present, with one sensor positioned at the center of the circular heater. A Cartesian coordinate system is established with the center as the origin, and several temperature sensors are respectively positioned on the positive and negative X-axis, the positive and negative Y-axis. Several temperature sensors are also positioned within the first, second, third, and fourth quadrants.

[0006] A signal transmission device is used to transmit the real-time temperature measurement of the location by the temperature sensor.

[0007] The display is used to receive and display the temperature of the points measured by the temperature sensor, and after processing, display the maximum temperature, minimum temperature, average temperature, and temperature uniformity.

[0008] Specifically, four of the temperature sensors, which are respectively set on the positive half-axis of the X-axis, the negative half-axis of the X-axis, the positive half-axis of the Y-axis, and the negative half-axis of the Y-axis, are all located at a distance of 1 / 2 of the radius of the circular heater from the center of the circle.

[0009] Specifically, the temperature sensors respectively located in the first quadrant, the second quadrant, the third quadrant, and the fourth quadrant are diagonally connected, with the two diagonals perpendicular to each other.

[0010] Specifically, the distance between four of the several temperature sensors respectively set in the first quadrant, second quadrant, third quadrant, and fourth quadrant and the center of the circle is 3 / 4 of the radius of the circular heater.

[0011] Specifically, the temperature sensor is embedded 2 mm into the inner surface of the circular heater, accounting for 4% of the surface thickness of the circular heater.

[0012] Compared with existing technologies, the advantages of this application are as follows: This application designs multiple temperature sensors. One temperature sensor is located at the center of the circular heater. A rectangular coordinate system is established with the center as the origin. Several temperature sensors are respectively located on the positive and negative half-axis of the X-axis, the positive and negative half-axis of the Y-axis, and in the first, second, third, and fourth quadrants. The temperature measured in real time by the temperature sensors is transmitted through a signal transmission device. The temperature of each point on the heater surface can be monitored in real time on the display. After processing, the temperature data of each point can be directly displayed on the display as the maximum, minimum, and average temperature values. It can also monitor the important parameter of temperature uniformity of the heater in real time. By monitoring the temperature uniformity in real time, discoloration of the product surface caused by poor temperature uniformity can be avoided, as can abnormalities in film thickness uniformity caused by poor temperature uniformity. Attached Figure Description

[0013] To more clearly illustrate the technical solutions of the embodiments of this application, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0014] Figure 1 This is a simplified diagram of a system for real-time monitoring of heater temperature uniformity in an embodiment of this application. Detailed Implementation

[0015] The embodiments of this application will now be described in detail with reference to the accompanying drawings.

[0016] The following specific examples illustrate the implementation of this application. Those skilled in the art can easily understand other advantages and effects of this application from the content disclosed in this specification. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. This application can also be implemented or applied through other different specific embodiments, and the details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this application. It should be noted that, in the absence of conflict, the following embodiments and features in the embodiments can be combined with each other. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0017] It should be noted that the following description covers various aspects of embodiments within the scope of protection of this application. It will be apparent that the aspects described herein can be embodied in a wide variety of forms, and any particular structure and / or function described herein is merely illustrative. Based on this application, those skilled in the art will understand that one aspect described herein can be implemented independently of any other aspect, and two or more of these aspects can be combined in various ways. For example, any number and aspects set forth herein can be used to implement the device and / or practice the method. Additionally, this device and / or method can be implemented using structures and / or functionalities other than one or more of the aspects set forth herein.

[0018] It should also be noted that the illustrations provided in the following embodiments are only schematic representations of the basic concept of this application. The drawings only show the components related to this application and are not drawn according to the actual number, shape and size of the components in the actual implementation. In the actual implementation, the form, quantity and proportion of each component can be arbitrarily changed, and the layout of the components may also be more complex.

[0019] Furthermore, specific details are provided in the following description to facilitate a thorough understanding of the examples. However, those skilled in the art will understand that the described aspects can be practiced without these specific details.

[0020] This application provides a system for real-time monitoring of heater temperature uniformity, such as... Figure 1 It includes: a chemical vapor deposition chamber 10, a circular heater 20, a temperature sensor 30, a signal transmission device 40, and a display 50;

[0021] A circular heater 20 is disposed within the chemical vapor deposition chamber 10. Nine temperature sensors 30 are disposed on the inner surface of the circular heater 20, specifically at points 1, 2, 3, 4, 5, 6, 7, 8, and 9. The distribution of points 1-9 is such that one point is located at the center of the circular heater. A Cartesian coordinate system is established with the center of the circular heater as the origin. Four points are located on the X-axis (half-axis), X-axis (negative half-axis), Y-axis (positive half-axis), and Y-axis (negative half-axis), respectively. The other four points are located in the first, second, third, and fourth quadrants, respectively. The number of temperature sensors can be expanded to 49 based on this distribution pattern.

[0022] Signal transmission device 40 connects circular heater 20 and display 50.

[0023] The display 50 displays a graphic corresponding to the appearance of the circular heater 20, as well as data display boxes corresponding to points 1 to 9 of the circular heater 20. These data display boxes can display the real-time temperatures measured by the temperature sensor 30 at points 1 to 9. The display 50 also displays information display boxes for maximum temperature 101, minimum temperature 102, average temperature 103, and temperature uniformity 104. The backend analyzes and calculates the real-time temperatures measured at points 1 to 9, and then displays the information for maximum temperature 101, minimum temperature 102, average temperature 103, and temperature uniformity 104 in these display boxes.

[0024] In one embodiment, temperature sensors are respectively set on the positive half-axis of the X-axis, the negative half-axis of the X-axis, the positive half-axis of the Y-axis, and the negative half-axis of the Y-axis. The distance between four of the several temperature sensors and the center of the circle is 1 / 2 of the radius of the circular heater. That is, the four temperature sensors are evenly set on the circumference of a concentric circle with a radius of 1 / 2 of the radius of the circular heater.

[0025] In one embodiment, temperature sensors located in the first, second, third, and fourth quadrants are diagonally connected, with the two diagonals perpendicular to each other.

[0026] In one embodiment, temperature sensors are respectively arranged in the first quadrant, the second quadrant, the third quadrant, and the fourth quadrant. The distance between four of the four temperature sensors and the center of the circle is three-quarters of the radius of the circular heater.

[0027] This application designs multiple temperature sensors. One temperature sensor is located at the center of the circular heater. A rectangular coordinate system is established with the center as the origin. Several temperature sensors are respectively located on the positive and negative X-axis, the positive and negative Y-axis, and in the first, second, third, and fourth quadrants. The temperature measured in real time by the temperature sensors is transmitted through a signal transmission device. The temperature of each point on the heater surface can be monitored in real time on the display. After processing, the temperature data of each point can be directly displayed on the display as the maximum, minimum, and average temperature values. It can also monitor the important parameter of temperature uniformity of the heater in real time. By monitoring the temperature uniformity in real time, it is possible to avoid discoloration of the product surface caused by poor temperature uniformity, and also to avoid abnormal film thickness uniformity caused by poor temperature uniformity.

[0028] like Figure 1 As shown, the circular heater 20 is used to rapidly heat the chemical vapor deposition chamber 10 to the required temperature in a short time and maintain a stable temperature throughout the reaction process. Nine temperature sensors 30 are installed on the circular heater 20, with each sensor located at the center of the heater. A rectangular coordinate system is established with the center of the heater 20 as the origin. Four temperature sensors are positioned on the positive and negative X-axis, the positive and negative Y-axis, respectively, with each sensor's distance from the center being half the radius of the heater. The last four temperature sensors are positioned in the first, second, third, and fourth quadrants, respectively, and are diagonally connected with perpendicular diagonals. The distance between these four sensors and the center is three-quarters of the heater's radius. The nine temperature sensors 30 measure the temperature values ​​at nine different points on the circular heater 20. The signal transmission device 40 connects the circular heater 20 and the display 50, transmitting the temperature values ​​measured by the nine temperature sensors 30 at nine points on the circular heater 20 to the display 50. The display 50 displays the corresponding graphs and points, directly showing the temperature values ​​at the nine points. The display 50 also displays information boxes for the maximum temperature (101), minimum temperature (102), average temperature (103), and temperature uniformity (104). The backend analyzes and calculates the real-time temperatures measured at points 1-9, then displays the real-time status of these parameters.

[0029] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this application should be included within the scope of protection of this application.

Claims

1. A system for real-time monitoring of heater temperature uniformity, used to monitor in real-time whether the temperature at various points on the surface of the heater in a chemical vapor deposition chamber is uniform, characterized in that, include: A circular heater, disposed in the chemical vapor deposition chamber, is used to heat the chemical vapor deposition chamber to the required temperature and maintain a stable temperature throughout the reaction process; A temperature sensor is used to monitor the temperature at its location in real time. Multiple temperature sensors are present, with one sensor positioned at the center of the circular heater. A Cartesian coordinate system is established with the center as the origin, and several temperature sensors are respectively positioned on the positive and negative X-axis, the positive and negative Y-axis. Several temperature sensors are also positioned within the first, second, third, and fourth quadrants. A signal transmission device is used to transmit the real-time temperature measurement of the location by the temperature sensor. The display is used to receive and display the temperature of the points measured by the temperature sensor, and after processing, display the maximum temperature, minimum temperature, average temperature, and temperature uniformity. Four of the temperature sensors, which are respectively set on the positive half-axis of the X-axis, the negative half-axis of the X-axis, the positive half-axis of the Y-axis, and the negative half-axis of the Y-axis, are all located at a distance of 1 / 2 of the radius of the circular heater from the center of the circle. The distance between four of the several temperature sensors respectively set in the first quadrant, second quadrant, third quadrant, and fourth quadrant and the center of the circle is 3 / 4 of the radius of the circular heater. The temperature sensor is embedded 2 mm into the inner surface of the circular heater, accounting for 4% of the surface thickness of the circular heater.

2. The system according to claim 1, characterized in that, The temperature sensors, which are respectively located in the first quadrant, the second quadrant, the third quadrant, and the fourth quadrant, are diagonally connected, with the two diagonals perpendicular to each other.

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