Compact diaphragm valve

Abstract

The utility model provides a compact diaphragm valve, which belongs to the technical field of valves and particularly comprises a valve body, an inlet channel and an outlet channel are arranged in the valve body, a valve seat is arranged at the joint of the inlet channel and the outlet channel, and a containing cavity is arranged above the valve seat. The diaphragm is arranged in the accommodating cavity and is matched with the valve seat to open and close the diaphragm valve; the valve cover is arranged in the containing cavity and located above the diaphragm, and a through hole is formed in the middle of the valve cover and used for enhancing the sealing performance of the edge position of the diaphragm. A through hole is formed in the middle of the valve cover nut, and the containing cavity is matched with the valve body to press the diaphragm and the valve cover; the top column is in contact with the diaphragm; the locking rod sleeves the outer side of the top column and is provided with a lower end which is in contact with the inner wall of the through hole of the valve cover; the spring is arranged on the outer side of the locking rod in a sleeving mode and used for compressing the locking rod, the jacking column and the valve seat, and soft sealing of the diaphragm and the valve seat is achieved. By means of the processing scheme, the qualification leakage rate is guaranteed, and the qualified flow coefficient Cv value is also guaranteed.

Description

Technical Field

[0001] This utility model relates to the field of valve technology, specifically to a compact diaphragm valve. Background Technology

[0002] The semiconductor industry places stringent requirements on the sealing performance of flow control components. This is especially true for compact diaphragm valves, where the leakage rate between the diaphragm and the valve seat must be <1×10⁻⁶. -10 Pa·m 3 The valve requires a diaphragm-seat switching frequency (i.e., valve life) of over several million cycles. Existing diaphragm valve seat sealing structures, due to their sealing parameters not fully meeting the requirements, suffer from issues such as insufficient diaphragm compression, minute gaps between the diaphragm and the bottom of the valve body, and slight fluid leakage to the outlet, resulting in substandard internal leakage. Therefore, the development of a new sealing structure is urgently needed; otherwise, it will significantly impact process flow control in integrated circuit manufacturing, thereby affecting the production process and reducing production efficiency. Utility Model Content

[0003] Therefore, in order to overcome the shortcomings of the prior art, this utility model provides a compact diaphragm valve that guarantees both a qualified leakage rate and a qualified flow coefficient Cv value.

[0004] To achieve the above objectives, this utility model provides a compact diaphragm valve, comprising: a valve body having an inlet channel and an outlet channel internally, a valve seat being provided at the junction of the inlet channel and the outlet channel, and a receiving cavity being provided above the valve seat; a diaphragm being inserted into the receiving cavity and cooperating with the valve seat to form the diaphragm valve's opening and closing functions; a valve cover being inserted into the receiving cavity, located above the diaphragm, and having a through hole in the center to enhance the sealing performance of the diaphragm's edge; a valve cover nut having a through hole in the center, which, through the receiving cavity, cooperates with the valve body to press the diaphragm and the valve cover together; a top post passing through the through hole and the through hole in sequence, and contacting the diaphragm; a locking rod being sleeved on the outside of the top post and having a lower end that contacts the inner wall of the through hole of the valve cover; and a spring being sleeved on the outside of the locking rod to compress the locking rod, the top post, and the valve seat, thereby achieving a soft seal between the diaphragm and the valve seat.

[0005] In one embodiment, a valve cover gasket is further included, disposed between the diaphragm and the valve cover, the valve cover gasket serving to reinforce the cushioning between the diaphragm and the valve cover.

[0006] In one embodiment, the surface of the diaphragm is smooth, and the surface roughness of the inner surface is ≤0.1.

[0007] In one embodiment, the end of the top post that contacts the diaphragm is spherical, and the surface roughness of the spherical surface is ≤0.8.

[0008] In one embodiment, the valve cover nut and the inner wall of the receiving cavity of the valve body are threaded together.

[0009] In one embodiment, the valve seat is an annular valve seat, and the valve body is provided with an annular mounting groove. When the valve seat is embedded in the annular mounting groove, the valve seat protrudes above the annular mounting groove and contacts the diaphragm.

[0010] In one embodiment, the valve seat is made of PCTFE material.

[0011] In one embodiment, the lower surface of the valve seat is a plane, and the upper surface of the valve seat is an arc surface or a trapezoidal surface.

[0012] Compared with existing technologies, the advantages of this invention are as follows: When the valve is tightened, the valve cover nut presses against the valve cover, diaphragm, and valve body sealing surfaces. Through the hard seal between the diaphragm and valve body, external leakage of the medium is prevented, achieving a compact diaphragm valve external seal, which is more in line with ergonomic sealing principles and improves the valve's sealing level. When the valve is opened, the spring compresses the locking rod, top column, and diaphragm, finally pressing them against the valve seat sealing surface. Through the soft seal between the diaphragm and valve seat, internal leakage of the medium is prevented. This ensures both a qualified leakage rate and a qualified flow coefficient Cv value; simultaneously, it effectively guarantees the number of valve opening and closing cycles (i.e., valve life). Attached Figure Description

[0013] To more clearly illustrate the technical solutions of the embodiments of this application, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0014] Figure 1 This is a schematic cross-sectional view of the compact diaphragm valve in an embodiment of this utility model when the valve is closed;

[0015] Figure 2 This is a schematic diagram of the valve seat in an embodiment of this utility model;

[0016] Figure 3 This is a cross-sectional schematic diagram of the valve seat in an embodiment of this utility model;

[0017] Figure 4 This is a global schematic cross-sectional view of the compact diaphragm valve in an embodiment of this utility model when the valve is closed;

[0018] Figure 5 This is a schematic cross-sectional view of the locking rod body in an embodiment of this utility model;

[0019] Figure 6 This is a schematic diagram of the locking rod body in an embodiment of this utility model. Detailed Implementation

[0020] The embodiments of this application will now be described in detail with reference to the accompanying drawings.

[0021] The following specific examples illustrate the implementation of this application. Those skilled in the art can easily understand other advantages and effects of this application from the content disclosed in this specification. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. This application can also be implemented or applied through other different specific embodiments, and the details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this application. It should be noted that, in the absence of conflict, the following embodiments and features in the embodiments can be combined with each other. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0022] It should be noted that the following description covers various aspects of embodiments within the scope of protection of this utility model. It will be apparent that the aspects described herein can be embodied in a wide variety of forms, and any particular structure and / or function described herein is merely illustrative. Based on this application, those skilled in the art will understand that one aspect described herein can be implemented independently of any other aspect, and two or more of these aspects can be combined in various ways. For example, any number and aspects set forth herein can be used to implement the device and / or practice the method. Additionally, this device and / or method can be implemented using structures and / or functionalities other than one or more of the aspects set forth herein.

[0023] It should also be noted that the illustrations provided in the following embodiments are only schematic representations of the basic concept of this application. The drawings only show the components related to this application and are not drawn according to the actual number, shape and size of the components in the actual implementation. In the actual implementation, the form, quantity and proportion of each component can be arbitrarily changed, and the layout of the components may also be more complex.

[0024] Furthermore, specific details are provided in the following description to facilitate a thorough understanding of the examples. However, those skilled in the art will understand that the described aspects can be practiced without these specific details.

[0025] like Figure 1 As shown, this application provides a compact diaphragm valve, including a valve body 1, a valve seat 2, a diaphragm 3, a top post 4, a valve cover 5, a valve cover nut 6, a spring 7, and a locking rod 8.

[0026] The valve body 1 has an inlet channel and an outlet channel for fluid, and a valve seat 2 is provided at the junction of the inlet channel and the outlet channel. The valve body 1 has an annular mounting groove at the valve seat 2. The valve body 1 has a receiving cavity above the valve seat 2. When the valve seat 2 is embedded in the annular mounting groove of the valve body 1, the height of the valve seat 2 exceeds the annular mounting groove of the valve body 1. In one embodiment, the lower side borders of the inlet channel and the outlet channel are duckbill-shaped to increase the effective width of the channel and effectively ensure the flow rate.

[0027] like Figure 2 As shown, valve seat 2 is annular. Valve seat 2 is an elastic element. The material of valve seat 2 is PCTFE. PCTFE is polyvinyl chloride. The thickness of valve seat 2 is not less than the depth of the bottom platform (annular mounting groove) of valve body 1, so as to facilitate the diaphragm 3 to press the valve seat 2 tightly and reduce internal leakage.

[0028] like Figure 3 As shown, the lower surface of the valve seat 2 is a plane. The upper surface of the valve seat 2 can be an arc surface or approximately a trapezoidal surface. Preferably, the valve seat 2 and the valve body 1 have an interference fit in the annular mounting groove.

[0029] The diaphragm 3 is inserted into the receiving cavity and cooperates with the valve seat 2 to form the opening and closing of the diaphragm valve. The surface of the diaphragm is smooth and free of scratches or other defects.

[0030] The valve cover 5 is inserted into the channel and positioned above the diaphragm 3. A through hole is provided in the center of the valve cover 5, and the outer thread of the valve cover 5 is threadedly connected to the inner side of the valve body 1. The valve cover 5 can be annular; alternatively, one end near the diaphragm can be annular, with a tube wall extending from this annular shape to fit the channel for accurate installation. In one embodiment, the outer thread of the valve cover 5 has a trapezoidal cross-section, which strengthens the thread structure's stress resistance and anti-reverse performance.

[0031] The valve cover nut 6 has a through hole in the middle, which, through a channel, engages with the valve body 1 to press the diaphragm 3 and the valve cover 5 together. The valve cover nut 6 and the valve body 1 can be connected by threads or by snap-fit.

[0032] The top post 4 passes through the through hole and the through hole in sequence, and comes into contact with the diaphragm 3. The top post 4 is equipped with an upper valve stem shaft and a lower valve stem shaft, as shown below. Figure 4 As shown, the upper valve stem shaft of the top column 4 passes through the spring 7 from the upper side of the locking rod 8 and exits through the valve cover through hole at the top of the valve cover nut 6. The lower valve stem shaft contacts the diaphragm 3. The upper valve stem shaft is connected to the handwheel 10.

[0033] The locking rod 8 is sleeved on the outside of the top post 4 and has a lower end that contacts the inner wall of the through hole in the valve cover. The lower end of the locking rod 8 is located near the diaphragm 3. Figure 5 As shown, the locking rod 8 is divided into an upper end and a lower end. The upper end of the locking rod 8 has an annular through hole for accommodating the upper half of the top post 4.

[0034] The upper surface of the lower end of the locking rod 8 is a flat surface for housing the spring 7. The lower surface of the lower end has a circular through hole in the center to accommodate the lower half of the top post 4. The lower surface of the lower end also has an annular ring, which further cooperates with the lower half of the top post 4 for better clamping effect.

[0035] Spring 7 is sleeved on the outside of locking rod 8 to compress locking rod, top column, and valve seat, thereby achieving a soft seal between diaphragm and valve seat.

[0036] Working principle:

[0037] The valve cover nut 6 is screwed into the valve body 1, which in turn presses the valve cover 5 and the diaphragm 3 in sequence, and finally presses it onto the sealing surface of the valve body 1. Through the hard seal of the diaphragm 3 and the valve body 1, the medium is prevented from leaking out, thus achieving the external seal of the compact diaphragm valve.

[0038] Spring 7 sequentially compresses locking rod 8, top column 4, and diaphragm 3, finally pressing it onto the sealing surface of valve seat 2. Through the soft seal between diaphragm 3 and valve seat 2, internal leakage of the medium is prevented, thus achieving internal sealing of the compact diaphragm valve.

[0039] The aforementioned device, when the valve is tightened, presses the valve cover nut against the valve cover, diaphragm, and valve body sealing surfaces. Through a hard seal between the diaphragm and valve body, it prevents external leakage of the medium, achieving a compact diaphragm valve external seal that better conforms to ergonomic sealing principles and improves the valve's sealing rating. When the valve is opened, the spring compresses the locking rod, top column, and diaphragm, finally pressing them against the valve seat sealing surface. Through a soft seal between the diaphragm and valve seat, it prevents internal leakage of the medium. This ensures a satisfactory leakage rate, a satisfactory flow coefficient (Cv) value, and effectively guarantees the number of valve opening and closing cycles (i.e., valve life).

[0040] In one embodiment, a valve cover gasket 9 is further included, disposed between the diaphragm and the valve cover. The valve cover gasket 9 is used to enhance the cushioning between the diaphragm and the valve cover. The valve cover gasket 9 can enhance the sealing performance when the valve is opened and closed, and the valve cover gasket 9 can also fill in part of the recessed surface generated when the diaphragm valve diaphragm 3 is pulled into the channel, reducing the resistance to medium flow.

[0041] In one embodiment, the surface of the diaphragm 3 is smooth, and the surface roughness Ra of the inner surface is ≤0.1.

[0042] In one embodiment, the end of the top post 4 that contacts the diaphragm 3 is spherical, and the surface roughness Ra of the spherical surface is ≤0.8.

[0043] In one embodiment, the valve cover nut 5 and the side wall of the valve body 1 receiving cavity are threaded together.

[0044] Example 1

[0045] A compact diaphragm valve includes a valve body 1, a valve seat 2, a diaphragm 3, a top post 4, a valve cover 5, a valve cover nut 6, a spring 7, a locking rod 8, and a valve cover gasket 9.

[0046] The valve body 1 has an inlet channel and an outlet channel inside, and a valve seat 2 is provided at the junction of the inlet channel and the outlet channel. The valve body 1 has a channel above the valve seat 2, and the valve seat 2 is embedded in the valve body 1.

[0047] The diaphragm 3 is inserted into the channel and cooperates with the valve seat 2 to form the diaphragm valve for opening and closing. The surface of the diaphragm is smooth and free of scratches or other defects. The Ra of the diaphragm 3 is 0.1, and the thickness of the diaphragm 3 is 0.10 mm.

[0048] The valve cover 5 is inserted into the channel and positioned above the diaphragm 3. A through hole is provided in the center to enhance the sealing performance at the edge of the diaphragm. The end of the valve cover 5 near the diaphragm is annular, and a tube wall that fits the channel extends from this annular shape for accurate installation.

[0049] The valve cover nut 6 has a through hole in the middle, which cooperates with the valve body 1 to press the diaphragm 3 and valve cover 5 through the channel. The valve cover nut 6 and the valve body 1 are connected by threads.

[0050] The top post 4 passes through the through hole and the through hole in sequence, and comes into contact with the diaphragm 3. The end of the top post 4 that contacts the diaphragm 4 is spherical, and its roughness Ra≤0.8.

[0051] The locking rod 8 is sleeved on the outside of the top post 4 and has a lower end that contacts the inner wall of the through hole of the valve cover.

[0052] Spring 7 is sleeved on the outside of locking rod 8 to compress locking rod, top post, and valve seat, achieving a soft seal between diaphragm and valve seat. Preferably, the elastic coefficient of spring 7 is controlled at 68.5±1N / mm.

[0053] Working principle:

[0054] The valve cover nut 6 is screwed into the valve body 1, and the valve cover 5, valve cover gasket 9, and diaphragm 3 are pressed in sequence, and finally pressed onto the sealing surface of the valve body 1. Through the hard seal of the diaphragm 3 and the valve body 1, the medium is prevented from leaking out, and the external seal of the compact diaphragm valve is achieved.

[0055] Spring 7 sequentially compresses locking rod 8, top column 4, and diaphragm 3, finally pressing it onto the sealing surface of valve seat 2. Through the soft seal between diaphragm 3 and valve seat 2, internal leakage of the medium is prevented, thus achieving internal sealing of the compact diaphragm valve.

[0056] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this application should be included within the scope of protection of this application.

Claims

1. A compact diaphragm valve, characterized in that, include: The valve body has an inlet channel and an outlet channel inside, a valve seat is provided at the junction of the inlet channel and the outlet channel, and a receiving cavity is provided above the valve seat; A diaphragm is inserted into the receiving cavity and cooperates with the valve seat to form the opening and closing of the diaphragm valve; The valve cover is inserted into the receiving cavity and located above the diaphragm. It has a through hole in the middle to enhance the sealing performance of the edge of the diaphragm. The valve cover nut has a through hole in the middle, which cooperates with the valve body through the receiving cavity to press the diaphragm and the valve cover together; The top post passes through the through hole and the through hole in sequence, and comes into contact with the diaphragm. A locking rod is sleeved on the outside of the top post and has a lower end that contacts the inner wall of the through hole of the valve cover; A spring, sleeved on the outside of the locking rod, is used to compress the locking rod, the top post, and the valve seat to achieve a soft seal between the diaphragm and the valve seat.

2. The compact diaphragm valve according to claim 1, characterized in that, It also includes a valve cover gasket disposed between the diaphragm and the valve cover, the valve cover gasket being used to reinforce the buffer between the diaphragm and the valve cover.

3. The compact diaphragm valve according to claim 1, characterized in that, The surface of the diaphragm is smooth, and the surface roughness of the inner surface is ≤0.

1.

4. The compact diaphragm valve according to claim 1, characterized in that, The end of the top post that contacts the diaphragm is spherical, and the surface roughness of the spherical surface is ≤0.

8.

5. The compact diaphragm valve according to claim 1, characterized in that, The valve cover nut and the inner wall of the receiving cavity of the valve body are threaded together.

6. The compact diaphragm valve according to claim 1, characterized in that, The valve seat is an annular valve seat, and the valve body is provided with an annular mounting groove. When the valve seat is embedded in the annular mounting groove, the valve seat protrudes above the annular mounting groove and contacts the diaphragm.

7. The compact diaphragm valve according to claim 1, characterized in that, The valve seat is made of PCTFE material.

8. The compact diaphragm valve according to claim 1, characterized in that, The lower surface of the valve seat is a plane, and the upper surface of the valve seat is an arc surface or a trapezoidal surface.

9. The compact diaphragm valve according to claim 1, characterized in that, The locking lever is divided into an upper end and a lower end. The upper end has an annular through hole for accommodating the upper half of the top column. The upper surface of the lower end is a plane for placing the spring. The lower surface of the lower end has a circular through hole in the middle for accommodating the lower half of the top column. The lower surface of the lower end is also provided with an annular ring for further cooperation with the lower half of the top column.

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