Quickly assembled and disassembled air floating main shaft

Abstract

The air floating main shaft comprises a shell and a quick disassembly and assembly connector, the quick disassembly and assembly connector compresses a first sealing ring and a second sealing ring at the connecting position between a connector and a pipeline through a lead screw structure, the first sealing ring is provided with a sealing clamping object, and the second sealing ring is provided with a sealing clamping object. The second sealing ring is provided with a sealing clamping groove matched with a sealing clamping object in shape. According to the utility model, the connector of the shell of the air floating main shaft is connected with the external pipeline through the quick disassembly and assembly joint, so that the pipeline is convenient to disassemble and assemble on the basis of ensuring the sealing performance and the reliability, and the speed of quickly disassembling and assembling the pipeline is increased.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor wafer equipment technology, and in particular relates to an air-bearing spindle for quick assembly and disassembly of wafers for thinning. Background Technology

[0002] In the wafer thinning process, air-bearing spindles are typically used for wafer thinning. Air-bearing spindles generally use air bearings as the spindle bearings. Air bearings (also known as air-bearing bearings) are sliding bearings that use a gas (usually air, but other gases can also be used) as a lubricant. Air has lower viscosity than oil, is more resistant to high temperatures, and is non-polluting, making it suitable for use in high-speed machinery, instruments, and radioactive devices; however, its load capacity is lower than that of oil. Air bearings are divided into three main categories: air hydrostatic bearings, air hydrodynamic bearings, and extrusion film bearings.

[0003] To ensure the intake pressure and sealing of the air bearings, welding is typically used to connect the air bearing's inlet and outlet ports to the pipe ends. However, welding the air bearings makes pipe replacement inconvenient. Furthermore, conventional single-threaded connections for ordinary pipes are insufficient to guarantee airtightness and reliability, making them unsuitable for high-pressure air bearings. The same applies to water-cooled piping used for motor cooling.

[0004] Therefore, finding a type of air-bearing spindle that can ensure the reliability and sealing of the air bearing while shortening the construction period for each pipeline replacement is a technical problem that urgently needs to be solved. Utility Model Content

[0005] To address the aforementioned issues, this invention provides a quick-assembly and disassembly air-bearing spindle that ensures both sealing and ease of interface assembly and disassembly, while also shortening the construction period for each pipe replacement.

[0006] To achieve the above objectives, this utility model provides the following technical solution:

[0007] A quick-assembly and disassembly air-bearing spindle includes:

[0008] The outer casing is equipped with a water passage and an air passage, and the water passage and air passage are equipped with interfaces, the interfaces including a water inlet, a water outlet, an air inlet, and an air outlet. The water passage is provided with a water inlet and a water outlet, and the air passage is provided with an air inlet and an air outlet.

[0009] The quick-release connector has one end positioned at the air inlet, air outlet, water inlet, and water outlet, and the other end positioned at the port of the corresponding pipe, which includes an air inlet pipe, an air outlet pipe, a water inlet pipe, and a water outlet pipe. The quick-release connector uses a screw structure to press the first and second sealing rings at the connection between the interface and the pipe. The first sealing ring has a sealing snap-fit, and the second sealing ring has a sealing snap-fit ​​groove that matches the shape of the sealing snap-fit.

[0010] According to one embodiment of the present invention, the quick-release connector includes a pipe connector, an interface connector, a first clamp, a lock nut, a first sealing ring, a second sealing ring, a sealing snap-fit, and a sealing snap-fit ​​groove; the interface connector is disposed on an interface, the outer circumferential surface of the interface connector is threadedly connected to the inner circumferential surface of one side of the first clamp, the inside of the first clamp is limited and snapped with the lock nut, the inner circumferential surface of the lock nut is threadedly connected to the outer circumferential surface of the interface connector, the other inner circumferential surface of the first clamp is threadedly connected to the outer circumferential surface of the pipe connector, and the pipe connector is disposed on a pipe;

[0011] The end of the interface connector is sealed against the first sealing ring, the first sealing ring is fixed with a sealing snap-fit, the sealing snap-fit ​​is sealed against the sealing snap-fit ​​groove, the sealing snap-fit ​​groove is opened on the second sealing ring, and the second sealing ring is sealed against the end of the pipe connector.

[0012] According to one embodiment of the present invention, the sealing snap-fit ​​is a plurality of O-rings with diameters ranging from small to large, opened along the circumferential direction of the first sealing ring, and the sealing snap-fit ​​groove is an annular groove that matches the shape of the sealing snap-fit.

[0013] According to one embodiment of the present invention, the sealing snap-fit ​​object is a sealing ball, and multiple sealing balls are arranged around the first sealing ring along the circumferential direction of the first sealing ring, and multiple sealing balls are configured to form multiple rings with diameters ranging from small to large; the sealing snap-fit ​​groove is a groove with an arc cross section that is interference-fitted with the sealing ball, and each sealing ball is provided with a corresponding groove.

[0014] According to one embodiment of the present invention, the first clamp includes a first retaining ring and a first sleeve. The inner circumferential surface of the first retaining ring is threadedly connected to the outer circumferential surface of the interface connector. One end of the outer circumferential surface of the first retaining ring is fixed to the inner circumferential surface of the first sleeve. The other end of the inner circumferential surface of the first sleeve is threadedly connected to the outer circumferential surface of the pipe connector. The surface of the lock nut is engaged with the surface of the first retaining ring for limiting and locking.

[0015] According to one embodiment of the present invention, the surface of the O-ring is decorated with a wavy pattern.

[0016] According to one embodiment of the present invention, the threads at both ends of the first clamp are in opposite directions.

[0017] According to one embodiment of the present invention, the end of the interface connector is fixedly connected to the first sealing ring, or overlapped with it, or integrally formed.

[0018] According to one embodiment of the present invention, the second sealing ring is fixedly connected to the end of the pipe joint, or overlapped with it, or integrally formed.

[0019] According to one embodiment of the present invention, the interface connector is manufactured or welded to the interface as an integral part.

[0020] The beneficial effects of this utility model are:

[0021] The quick-release air-bearing spindle provided by this utility model can connect the outer shell interface of the air-bearing spindle and the external pipeline through a quick-release connector. This facilitates pipeline assembly and disassembly while ensuring sealing and reliability, thus increasing the speed of pipeline assembly and disassembly. Compared with traditional welded joints, the quick-release connector of this utility model uses a male-female type first and second sealing ring pressed between the pipeline and the interface, thereby ensuring sealing and reliability, and achieving convenient and rapid assembly and disassembly. Attached Figure Description

[0022] Figure 1 This is a front sectional view of the quick-release air-float spindle before sealing according to this utility model;

[0023] Figure 2 This is a front sectional view of the quick-release and detachable air-bearing spindle seal of this utility model.

[0024] Figure 3 for Figure 1 A magnified view of a portion of the image;

[0025] Figure 4 for Figure 2 A magnified view of a portion of the image. Detailed Implementation

[0026] The present invention will be further described in detail below with reference to the accompanying drawings. It should be understood that the following embodiments are merely illustrative and explanatory of the present invention and should not be construed as limiting the scope of protection of the present invention. All technologies implemented based on the above description of the present invention are covered within the scope of protection intended by the present invention.

[0027] Comprehensive reference Figure 1-4As shown, the quick-release air-float spindle includes: a housing 100 and a quick-release connector 200. The housing 100 is equipped with a water channel 110 and an air channel 120. The water channel 110 and the air channel 120 are equipped with an interface 130. The interface 130 includes a water inlet 111, a water outlet 112, an air inlet 121, and an air outlet 122. The water channel 110 is provided with a water inlet 111 and a water outlet 112, and the air channel 120 is provided with an air inlet 121 and an air outlet 122.

[0028] One end of the quick-release connector 200 is configured at the air inlet 121, air outlet 122, water inlet 111, and water outlet 112, and the other end is configured at the corresponding port of the pipe 300. The pipe 300 includes an air inlet pipe 321, an air outlet pipe 322, a water inlet pipe 311, and a water outlet pipe 312. The quick-release connector 200 uses a screw structure to press the first sealing ring 205 and the second sealing ring 206 at the connection between the interface 130 and the pipe 300. The first sealing ring 205 has a sealing snap-fit ​​207, and the second sealing ring 206 has a sealing snap-fit ​​groove 208 that matches the shape of the sealing snap-fit ​​207.

[0029] This invention uses the aforementioned quick-release connector 200 to connect the interface 130 of the air-bearing spindle housing 100 to the external pipe 300, thereby facilitating the assembly and disassembly of the pipe 300 while ensuring sealing and reliability, and increasing the speed of quick assembly and disassembly of the pipe 300. Compared with traditional welded joints, the quick-release connector 200 of this invention uses a male and female first sealing ring 205 and a second sealing ring 206 pressed between the pipe 300 and the interface 130, thereby ensuring sealing and reliability, and achieving convenient and quick assembly and disassembly.

[0030] Furthermore, both the water passage 110 and the air passage 120 adopt the aforementioned quick-release connector 200, which ensures that both the water passage 110 and the air passage 120 have good sealing performance and quick disassembly / reassembly capabilities.

[0031] As a gas or liquid, it first needs to pass between the compressed first sealing ring 205 and the second sealing ring 206, which is the first seal. It also needs to pass through the sealing snap 207. The sealing snap 207 or the first sealing ring 205 and the second sealing ring 206 acting on the sealing snap 207 serve as the second seal, thereby ensuring sealing performance and quick disassembly and assembly characteristics.

[0032] See Figure 1-3In one embodiment, the quick-release connector 200 includes a pipe connector 201, an interface connector 202, a first clamp 203, a lock nut 204, a first sealing ring 205, a second sealing ring 206, a sealing snap-fit ​​207, and a sealing snap-fit ​​groove 208. The interface connector 202 is disposed on the interface 130. The outer circumferential surface of the interface connector 202 is threadedly connected to the inner circumferential surface of one side of the first clamp 203. The inside of the first clamp 203 is limited and snapped into place by the lock nut 204. The inner circumferential surface of the lock nut 204 is threadedly connected to the outer circumferential surface of the interface connector 202. The inner circumferential surface of the other side of the first clamp 203 is threadedly connected to the outer circumferential surface of the pipe connector 201. The pipe connector 201 is disposed on the pipe 300. The end of the interface connector 202 is sealed against the first sealing ring 205. The first sealing ring 205 is fixed with a sealing snap-fit ​​207. The sealing snap-fit ​​207 is sealed against the sealing snap-fit ​​groove 208. The sealing snap-fit ​​groove 208 is opened on the second sealing ring 206. The second sealing ring 206 is sealed against the end of the pipe connector 201.

[0033] This utility model connects the pipe joint 201 and the interface joint 202 respectively through the threads at both ends of the first clamp 203, which can serve as a third seal, that is, the last seal; and the lock nut 204 ensures that the first clamp 203 can achieve self-locking by limiting the engagement at any position, thereby ensuring that the pipe joint 201 and the interface joint 202 can smoothly compress the first sealing ring 205 and the second sealing ring 206.

[0034] Preferably, the sealing snap-fit ​​207 is interference-fitted with the sealing snap-fit ​​groove 208.

[0035] like Figure 3 and Figure 4 As shown, the sealing snap-fit ​​207 can be a plurality of O-rings with diameters ranging from small to large, which are opened along the circumferential direction of the first sealing ring 205, and the sealing snap-fit ​​groove 208 is an annular groove that matches the shape of the sealing snap-fit ​​207.

[0036] Among them, the interference fit O-ring can deform to a certain extent after being squeezed by the sealing groove 208, thereby better ensuring the sealing performance of the first sealing ring 205 and the second sealing ring 206 after being squeezed. In addition, multiple O-rings can ensure the sealing performance in multiple ways.

[0037] The groove of the sealing snap-fit ​​groove 208 has a circular arc cross section, and the groove is interference-fitted with the sealing snap-fit ​​object 207.

[0038] See Figure 3 and Figure 4The sealing snap-fit ​​element 207 is a sealing ball, and multiple sealing balls are arranged around the first sealing ring 205 along the circumference of the first sealing ring 205, forming multiple rings with diameters ranging from small to large. The sealing snap-fit ​​groove 208 has an arc-shaped groove in its cross-section that is interference-fitted with the sealing ball, and each sealing ball has a corresponding groove.

[0039] Through the interference fit between the sealing balls and the grooves, the first sealing ring 205 formed by each sealing ball can be better compressed and stretched. This allows the first sealing ring 205 to form a better sealing ring at the position where multiple sealing balls form a ring, improving the sealing performance after compression with the second sealing ring 206. Furthermore, multiple rings with progressively larger diameters allow the first sealing ring 205 to form multiple self-forming multi-ring seals.

[0040] See Figure 3 and Figure 4 In some embodiments, the first clamp 203 includes a first retaining ring 210 and a first sleeve 211. The inner circumferential surface of the first retaining ring 210 is threadedly connected to the outer circumferential surface of the interface connector 202. One end of the outer circumferential surface of the first retaining ring 210 is fixed to the inner circumferential surface of the first sleeve 211, and the other end of the inner circumferential surface of the first sleeve 211 is threadedly connected to the outer circumferential surface of the pipe connector 201. The surface of the lock nut 204 is engaged with the surface of the first retaining ring 210 for limiting and locking. The above structure of the first clamp 203 can better cooperate with the lock nut 204 and the pipe connector 201.

[0041] Preferably, see Figure 3 and Figure 4 The surface of the O-ring has a wavy pattern. The wavy pattern on the O-ring is more conducive to increasing the sealing performance.

[0042] Specifically, the thread directions at both ends of the first clamp 203 can be the same or different. When the thread directions at both ends of the first clamp 203 are opposite, it can be ensured that, under the action of the lock nut 204, when the pipe joint 201 is finally screwed in, the first sealing ring 205 and the second sealing ring 206 will be more tightly engaged as the tightening degree increases.

[0043] Preferably, the end of the interface connector 202 is fixedly connected to, overlapped with, or integrally formed with the first sealing ring 205.

[0044] Preferably, the second sealing ring 206 is fixedly connected to the end of the pipe joint 201, or overlapped with it, or integrally formed. The interface joint 202 and the interface 130 can be manufactured as a single unit or welded together.

[0045] The embodiments described above are merely preferred embodiments of the present utility model and are not intended to limit the scope of the present utility model. Various modifications and improvements made to the technical solutions of the present utility model by those skilled in the art without departing from the spirit of the present utility model should fall within the protection scope defined by the claims of the present utility model.

Claims

1. A quick-assembly and disassembly air-bearing spindle, characterized in that, include: The outer casing (100) is configured with a water passage (110) and an air passage (120). The water passage (110) and the air passage (120) are configured with interfaces (130). The interfaces (130) include a water inlet (111), a water outlet (112), an air inlet (121), and an air outlet (122). The water passage (110) is provided with a water inlet (111) and a water outlet (112). The air passage (120) is provided with an air inlet (121) and an air outlet (122). A quick-release connector (200) has one end disposed at the air inlet (121), air outlet (122), water inlet (111), and water outlet (112), and the other end disposed at the port of the corresponding pipe (300). The pipe (300) includes an air inlet pipe (321), an air outlet pipe (322), a water inlet pipe (311), and a water outlet pipe (312). The quick-release connector (200) uses a screw structure to press the first sealing ring (205) and the second sealing ring (206) at the connection between the interface (130) and the pipe (300). The first sealing ring (205) is provided with a sealing snap-fit ​​(207), and the second sealing ring (206) is provided with a sealing snap-fit ​​groove (208) that matches the shape of the sealing snap-fit ​​(207).

2. The quick-assembly and disassembly air-bearing spindle according to claim 1, characterized in that, The quick-release connector (200) includes a pipe connector (201), an interface connector (202), a first clamp (203), a lock nut (204), a first sealing ring (205), a second sealing ring (206), a sealing snap-fit ​​(207), and a sealing snap-fit ​​groove (208). The interface connector (202) is disposed on the interface (130). The outer circumferential surface of the interface connector (202) is threadedly connected to the inner circumferential surface of one side of the first clamp (203). The interior of the first clamp (203) is limited and snapped into place by the lock nut (204). The inner circumferential surface of the lock nut (204) is connected to the inner circumferential surface of the interface connector (202). The outer circumferential surface is threaded, and the inner circumferential surface of the other side of the first clamp (203) is threaded to the outer circumferential surface of the pipe joint (201). The pipe joint (201) is disposed on the pipe (300). The end of the interface joint (202) is sealed against the first sealing ring (205). The first sealing ring (205) is fixed with a sealing snap-fit ​​(207). The sealing snap-fit ​​(207) is sealed against the sealing snap-fit ​​groove (208). The sealing snap-fit ​​groove (208) is opened on the second sealing ring (206). The second sealing ring (206) is sealed against the end of the pipe joint (201).

3. The quick-assembly and disassembly air-bearing spindle according to claim 2, characterized in that, The sealing snap-fit ​​(207) consists of multiple O-rings with diameters ranging from small to large, which are opened along the circumference of the first sealing ring (205). The sealing snap-fit ​​groove (208) is an annular groove that matches the shape of the sealing snap-fit ​​(207).

4. The quick-assembly and disassembly air-bearing spindle according to claim 2, characterized in that, The sealing snap-fit ​​(207) is a sealing ball, and multiple sealing balls are arranged around the first sealing ring (205) along the circumferential direction of the first sealing ring (205). In addition, multiple sealing balls are arranged to form multiple rings with diameters ranging from small to large. The sealing snap-fit ​​groove (208) is a groove with an arc cross section that is interference fit with the sealing ball. Each sealing ball is provided with a corresponding groove.

5. The quick-assembly and disassembly air-bearing spindle according to claim 2, characterized in that, The first clamp (203) includes a first retaining ring (210) and a first sleeve (211). The inner circumferential surface of the first retaining ring (210) is threadedly connected to the outer circumferential surface of the interface connector (202). One end of the outer circumferential surface of the first retaining ring (210) is fixed to the inner circumferential surface of the first sleeve (211). The other end of the inner circumferential surface of the first sleeve (211) is threadedly connected to the outer circumferential surface of the pipe connector (201). The surface of the lock nut (204) is limited and engaged with the surface of the first retaining ring (210).

6. The quick-assembly and disassembly air-bearing spindle according to claim 3, characterized in that, The surface of the O-ring has a wavy pattern.

7. The quick-assembly and disassembly air-bearing spindle according to claim 2, characterized in that, The threads at both ends of the first clamp (203) are in opposite directions.

8. The quick-assembly and disassembly air-bearing spindle according to claim 2, characterized in that, The end of the interface connector (202) is fixedly connected to the first sealing ring (205), or overlapped with it, or integrally formed.

9. The quick-assembly and disassembly air-bearing spindle according to claim 2, characterized in that, The second sealing ring (206) is fixedly connected to the end of the pipe joint (201), or overlapped with it, or integrally formed.

10. The quick-assembly and disassembly air-bearing spindle according to claim 2, characterized in that, The interface connector (202) is integrally manufactured or welded to the interface (130).

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