Temperature control system
By using a variable frequency compressor and a circulating pump in the temperature control system, combined with an expansion tank design, the problem of untimely adjustment of circulating fluid temperature caused by load temperature fluctuations was solved, achieving efficient temperature control and reduced energy consumption, and improving chip production efficiency.
Patent Information
- Application Number
- CN202423305310.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-30
- Publication Date
- 2026-01-27
- Estimated Expiration
- 2034-12-30
AI Technical Summary
Existing temperature control systems cannot adjust the circulating fluid temperature in a timely manner when faced with large fluctuations in load temperature, which affects chip production efficiency.
By employing a variable frequency compressor and a variable frequency circulating pump, combined with a refrigeration system and a circulation system, the temperature of the circulating liquid can be adjusted in real time by controlling the speed of the variable frequency compressor and the flow rate of the circulating pump. An expansion tank is used instead of a water tank to reduce system energy consumption.
It can adjust the circulating fluid temperature in a timely manner when the load temperature changes, thereby improving production efficiency, reducing system energy consumption, and ensuring the accuracy and response speed of temperature control.
Smart Images
Figure CN223840669U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of semiconductor temperature control technology, and more specifically, to a temperature control system. Background Technology
[0002] In the chip manufacturing process, a circulating fluid with a stable temperature needs to be provided to the load end for cooling. At the same time, the temperature requirements of the circulating fluid required in the chip processing process are different depending on the process.
[0003] However, the chip load varies greatly in the manufacturing process. Existing temperature control systems cannot react in time when faced with large fluctuations in load temperature, and cannot adjust the output circulating fluid temperature in time, which affects chip production efficiency. Utility Model Content
[0004] The purpose of this invention is to provide a temperature control system that can adjust the circulating fluid temperature in a timely manner when the load temperature changes, thereby improving production efficiency.
[0005] The embodiments of this utility model can be implemented as follows:
[0006] This utility model provides a temperature control system, including:
[0007] A refrigeration system, comprising a compressor, a first side of a first heat exchanger, a liquid receiver, a first expansion valve, and a first side of a second heat exchanger connected in series to form a main circuit;
[0008] A circulation system comprising a second side of a second heat exchanger, an expansion tank, and a circulation pump connected in series to form a loop, wherein a pipeline between the outlet of the circulation pump and the second side of the second heat exchanger flows through a load;
[0009] The compressor is a variable frequency compressor, and the circulating pump is a variable frequency circulating pump.
[0010] The beneficial effects of the temperature control system provided in this embodiment of the present invention include:
[0011] The temperature control system of this invention includes a refrigeration system and a circulation system. The refrigeration system includes a compressor, a first side of a first heat exchanger, a liquid receiver, a first expansion valve, and a first side of a second heat exchanger, all connected in series to form a main loop. The circulation system includes a second side of a second heat exchanger, an expansion tank, and a circulation pump, all connected in series to form a loop. A pipeline between the outlet of the circulation pump and the second side of the second heat exchanger flows through the load. The compressor is a variable frequency compressor. The circulation pump is a variable frequency circulation pump. Refrigerant flows through the refrigeration system. Circulating liquid flows through the circulation system. The mass flow rate of the refrigerant is controlled by controlling the speed of the variable frequency compressor, thereby adjusting the amount of cooling transferred to the circulating liquid. The mass flow rate of the circulating liquid is controlled in real time by the variable frequency circulation pump, enabling timely response to changes in load equipment and reducing system energy consumption. By replacing the water tank in the circulation system with an expansion tank, the overall capacity is reduced, energy consumption is decreased, and the system can react quickly. The temperature control system of this invention can adjust the circulating liquid temperature in a timely manner when the load temperature changes, improving production efficiency. Attached Figure Description
[0012] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.
[0013] Figure 1 This is a schematic diagram of the temperature control system provided in this embodiment;
[0014] Figure 2 This is a schematic diagram of the refrigeration system provided in this embodiment;
[0015] Figure 3 This is a schematic diagram of the circulatory system provided in this embodiment.
[0016] Icons: 100-Temperature control system; 10-Refrigeration system; 11-Compressor; 111-Third temperature sensor; 112-Fourth temperature sensor; 113-First pressure sensor; 114-Second pressure sensor; 12-First heat exchanger; 13-Liquid receiver; 131-Fifth temperature sensor; 14-First expansion valve; 15-Second heat exchanger; 16-Hot bypass line; 161-Second expansion valve; 17-Cold bypass line; 171-Third expansion valve; 172-Third heat exchanger; 20-Circulation system; 21-Expansion tank; 211-Second temperature sensor; 22-Circulation pump; 23-Heater; 231-First temperature sensor; 24-Load; 30-Cooling water system. Detailed Implementation
[0017] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.
[0018] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.
[0019] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.
[0020] In the description of this utility model, it should be noted that if terms such as "upper," "lower," "inner," or "outer" are used to indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the utility model product is usually placed during use, they are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.
[0021] Furthermore, the terms "first" and "second" are used only to distinguish descriptions and should not be interpreted as indicating or implying relative importance.
[0022] It should be noted that, where there is no conflict, the features in the embodiments of this utility model can be combined with each other.
[0023] Please refer to Figures 1-3 The temperature control system 100 provided by this utility model includes a refrigeration system 10 and a circulation system 20.
[0024] The refrigeration system 10 includes a compressor 11, a first side of a first heat exchanger 12, a liquid receiver 13, a first expansion valve 14, and a first side of a second heat exchanger 15, connected in series to form a main circuit. Specifically, the outlet of the compressor 11 is connected to the inlet of the first side of the first heat exchanger 12. The outlet of the first side of the first heat exchanger 12 is connected to the inlet of the liquid receiver 13. The outlet of the liquid receiver 13 is connected to the inlet of the first expansion valve 14. The outlet of the first expansion valve 14 is connected to the inlet of the first side of the second heat exchanger 15. The outlet of the first side of the second heat exchanger 15 is connected to the inlet of the compressor 11. It is understood that refrigerant flows through the refrigeration system 10. After being pressurized by the compressor 11, the refrigerant forms a high-temperature, high-pressure gas that enters the first heat exchanger 12 and condenses into liquid refrigerant, which is stored in the liquid receiver 13. The liquid then flows out of the liquid receiver 13, passes through the first expansion valve 14 for throttling and pressure reduction, and enters the second heat exchanger 15 to evaporate and heat up, forming refrigerant vapor. The vaporized refrigerant returns to compressor 11, completing the main refrigerant cycle.
[0025] By setting up a refrigeration system 10, both refrigeration and heating participate in temperature control simultaneously, which can improve the accuracy of temperature control and increase the response speed. In this embodiment, by setting a first expansion valve 14 on the main line of the refrigeration system 10, the opening degree of the first expansion valve 14 can be easily adjusted, thereby controlling the temperature of the refrigeration system 10 and achieving temperature control of the entire temperature control system 100 to meet the target temperature required by the load 24.
[0026] Specifically, the first heat exchanger 12 is a condenser, and the second heat exchanger 15 is an evaporator. It is important to note that the first heat exchanger 12 being a condenser means that the refrigerant in the refrigeration system 10 undergoes a phase change after flowing through the first heat exchanger 12, condensing from a gas into a liquid. The second heat exchanger 15 being an evaporator means that the refrigerant undergoes a phase change after flowing through the second heat exchanger 15, evaporating from a liquid into a gas.
[0027] Optionally, in this embodiment, both the first heat exchanger 12 and the second heat exchanger 15 are plate heat exchangers. In other embodiments, the first heat exchanger 12 and the second heat exchanger 15 can be replaced with other types of heat exchangers, such as tubular heat exchangers, depending on actual usage requirements and cost considerations. As long as the heat exchange effect can be achieved, this utility model does not limit the specific type of the first heat exchanger 12 and the second heat exchanger 15.
[0028] The circulation system 20 includes a second heat exchanger 15 (second side), an expansion tank 21, and a circulation pump 22 connected in series to form a loop. A pipe connecting the outlet of the circulation pump 22 to the inlet of the second side of the second heat exchanger 15 flows through a load 24. Specifically, the outlet of the second side of the second heat exchanger 15 is connected to the inlet of the expansion tank 21. The outlet of the expansion tank 21 is connected to the inlet of the circulation pump 22. The outlet of the circulation pump 22 is connected to the inlet of the load 24. The outlet of the load 24 is connected to the inlet of the second side of the second heat exchanger 15. It is understood that a circulating liquid flows through the circulation system 20. The circulating liquid cools down after exchanging heat with the refrigerant in the second heat exchanger 15. The low-temperature circulating liquid flows out of the second heat exchanger 15 and enters the expansion tank 21 for buffering and pressure reduction. Then, the circulating liquid enters the circulation pump 22 from the expansion tank 21 for pressurization. After passing through the circulation pump 22, the circulating liquid flows through the load 24, controlling the temperature of the load 24 and lowering its temperature. The heated circulating liquid then flows back to the second heat exchanger 15 from the load 24. In the second heat exchanger 15, the circulating liquid exchanges heat with the refrigerant again, lowering its temperature and thus achieving the circulation of the circulating liquid. By setting up the circulation system 20, the target temperature required by the load 24 can be controlled and maintained.
[0029] Furthermore, in this embodiment, compressor 11 is a variable frequency compressor 11. Circulation pump 22 is a variable frequency circulation pump 22. It can be understood that the mass flow rate of the refrigerant is controlled by controlling the rotational speed of the variable frequency compressor 11, thereby adjusting the cooling capacity transferred from the refrigerant to the circulating liquid. By controlling the mass flow rate of the circulating refrigerant in real time through the variable frequency circulation pump 22, a timely response can be achieved when the load 24 equipment changes, realizing precise temperature control while reducing system energy consumption.
[0030] In this embodiment, the water tank of the circulation system 20 is replaced with an expansion tank 21, and the liquid filling volume is about 1 / 3 of that of the water tank, which reduces the overall capacity, reduces energy consumption, and enables a rapid response.
[0031] In this embodiment, the refrigeration system 10 further includes a heat bypass pipe 16. One end of the heat bypass pipe 16 is connected to the outlet of the compressor 11. The other end of the heat bypass pipe 16 is connected to the first inlet of the second heat exchanger 15. A second expansion valve 161 is provided on the heat bypass pipe 16. Specifically, the outlet of the compressor 11 is connected to the inlet of the second expansion valve 161. The outlet of the second expansion valve 161 is connected to the first inlet of the second heat exchanger 15. In this embodiment, after the refrigerant is pressurized by the compressor 11, part of the high-temperature and high-pressure refrigerant gas flows to the second expansion valve 161 and then to the second heat exchanger 15, while the other part flows to the first heat exchanger 12, condenses into liquid, and then flows into the liquid receiver 13. The refrigerant gas passing through the heat bypass pipe 16 is depressurized by the second expansion valve 161 and serves as a virtual heat load. It mixes with the refrigerant liquid passing through the first expansion valve 14 and enters the second heat exchanger 15 before returning to the compressor 11. By setting the second expansion valve 161 and adjusting the opening of the second expansion valve 161, the flow rate of refrigerant entering the heat bypass pipeline 16 from the outlet of the compressor 11 is controlled, thereby controlling the temperature of the refrigeration system 10.
[0032] Furthermore, the refrigeration system 10 also includes a cold bypass line 17. One end of the cold bypass line 17 is connected to the outlet of the liquid receiver 13. The other end of the cold bypass line 17 is connected to the inlet of the compressor 11. A third expansion valve 171 is provided on the cold bypass line 17. Specifically, the outlet of the liquid receiver 13 is connected to the inlet of the third expansion valve 171. The outlet of the third expansion valve 171 is connected to the inlet of the compressor 11. It can be understood that part of the liquid refrigerant in the liquid receiver 13 enters the second heat exchanger 15 for evaporation after passing through the first expansion valve 14, and the other part is throttled and depressurized by the third expansion valve 171 and then merges with the return gas of the second heat exchanger 15 back to the compressor 11. By setting a third expansion valve 171 and adjusting the opening of the third expansion valve 171, the flow rate of refrigerant entering the cold bypass pipeline 17 from the receiver 13 is controlled, the temperature of the refrigerant returning to the compressor 11 is adjusted, the compressor 11 is prevented from overheating, the working efficiency of the compressor 11 is improved, and the stability of the refrigeration system 10 is guaranteed.
[0033] Furthermore, a third heat exchanger 172 is also installed on the cold bypass line 17. Specifically, the outlet of the liquid receiver 13 is connected to the inlet of the third expansion valve 171. The outlet of the third expansion valve 171 is connected to the first inlet of the third heat exchanger 172. The first outlet of the third heat exchanger 172 is connected to the inlet of the compressor 11. It can be understood that part of the liquid refrigerant in the liquid receiver 13 enters the second heat exchanger 15 for evaporation after passing through the first expansion valve 14, and the other part enters the third heat exchanger 172 after passing through the third expansion valve 171 to exchange heat with other equipment, and then merges with the return gas of the second heat exchanger 15 and returns to the compressor 11. In this embodiment, by installing a third heat exchanger 172 on the cold bypass line 17, the cooling capacity of this part of the refrigerant is transferred to other auxiliary equipment, thereby improving the cooling capacity utilization rate of the refrigeration system 10.
[0034] Please refer to Figure 1 and Figure 3 A heater 23 is also provided between the circulating pump 22 and the load 24. A first temperature sensor 231 is also provided between the heater 23 and the load 24. Specifically, the second side of the second heat exchanger 15, the expansion tank 21, the circulating pump 22, the heater 23, and the load 24 are connected in series to form a loop. The first temperature sensor 231 is used to detect the temperature of the circulating liquid entering the load 24, which is the output temperature of the entire circulating system 20. The heater 23 is used to adjust the heating amount of the circulating liquid in real time according to the deviation between the real-time temperature detected by the first temperature sensor 231 and the preset temperature. When the real-time temperature detected by the first temperature sensor 231 is lower than the preset temperature, the heater 23 heats the circulating liquid so that the temperature of the circulating liquid flowing through the load 24 approaches the preset temperature.
[0035] Furthermore, a second temperature sensor 211 is installed between the expansion tank 21 and the circulating pump 22. It is understood that the second temperature sensor 211 is used to detect the outlet circulating liquid temperature of the expansion tank 21. The refrigeration system 10 is used to adjust the heat exchange efficiency between the refrigerant and the circulating liquid based on the real-time temperature detected by the second temperature sensor 211. Specifically, the mass flow rates of the refrigerant and the circulating liquid can be adjusted by regulating the frequencies of the compressor 11 and the circulating pump 22, thereby regulating the heat exchange efficiency between the refrigerant and the circulating liquid, and ultimately achieving a change in the temperature of the circulating liquid.
[0036] Please refer to Figure 1 and Figure 2A third temperature sensor 111 and a first pressure sensor 113 are installed at the inlet of the compressor 11. Specifically, in this embodiment, the third temperature sensor 111 and the first pressure sensor 113 are sequentially installed on the pipeline between the first outlet of the second heat exchanger 15 and the inlet of the compressor 11. The third temperature sensor 111 is used to detect the temperature of the refrigerant flowing into the compressor 11, i.e., the suction temperature of the compressor 11. The first pressure sensor 113 is used to detect the pressure of the refrigerant flowing into the compressor 11, i.e., the suction pressure of the compressor 11. As long as the temperature and pressure of the refrigerant at the inlet of the compressor 11 can be detected, this utility model does not limit the installation order of the third temperature sensor 111 and the first pressure sensor 113.
[0037] A fourth temperature sensor 112 and a second pressure sensor 114 are installed at the outlet of compressor 11. Specifically, in this embodiment, the fourth temperature sensor 112 and the second pressure sensor 114 are sequentially installed on the pipeline between the outlet of compressor 11 and the first inlet of the first heat exchanger 12. The fourth temperature sensor 112 is used to detect the temperature of the refrigerant flowing out of compressor 11, i.e., the discharge temperature of compressor 11. The second pressure sensor 114 is used to detect the pressure of the refrigerant flowing out of compressor 11, i.e., the discharge pressure of compressor 11. As long as the temperature and pressure of the refrigerant at the outlet of compressor 11 can be detected, this utility model does not limit the installation order of the fourth temperature sensor 112 and the second pressure sensor 114.
[0038] By setting the first pressure sensor 113 and the second pressure sensor 114, the temperature value corresponding to the saturation state can be obtained under the pressure according to the physical properties of the refrigerant. The temperature value corresponding to the saturation state is compared with the measured values of the third temperature sensor 111 and the fourth temperature sensor 112, thereby ensuring that the compressor 11 can work normally and ensuring the accuracy of temperature control.
[0039] It is understandable that the refrigeration system 10 can be adjusted according to the suction temperature, suction pressure, discharge temperature and discharge pressure of the compressor 11, so that the operating conditions of the refrigeration system 10 remain stable during the adjustment process, which is beneficial to improving the accuracy of temperature regulation.
[0040] Furthermore, a fifth temperature sensor 131 is provided at the outlet of the liquid receiver 13. Specifically, in this embodiment, the fifth temperature sensor 131 is located between the liquid receiver 13 and the first expansion valve 14. The fifth temperature sensor 131 is used to detect the temperature of the refrigerant after condensation. The mass flow rate of the refrigerant is adjusted according to the temperature of the refrigerant after condensation, thereby adjusting the amount of cooling transferred to the circulating liquid.
[0041] The temperature control system 100 also includes a cooling water system 30. The cooling water system 30 is connected to the second side of the first heat exchanger 12. It is understood that in this embodiment, the refrigerant is condensed using cooling water, removing the heat dissipated during refrigerant condensation. Specifically, in this embodiment, the cooling water for the cooling water system 30 can be sourced from plant water.
[0042] The working principle and process of the temperature control system 100 provided in this embodiment of the utility model are as follows:
[0043] The refrigerant cycle includes a main cycle, a hot bypass branch, and a cold bypass branch. Main cycle: The high-pressure exhaust from compressor 11 enters the first heat exchanger 12, condenses into liquid, and is stored in the receiver 13. The stored refrigerant then enters the first expansion valve 14 for throttling and pressure reduction, and then enters the second heat exchanger 15 for evaporation and cooling, becoming refrigerant vapor, before returning to compressor 11. Hot bypass branch: The high-pressure exhaust from compressor 11, after being depressurized by the second expansion valve 161, acts as a virtual heat load, mixes with the refrigerant liquid after throttling by the first expansion valve 14, enters the second heat exchanger 15 for heat exchange, and then returns to compressor 11. Cold bypass branch: The circulating liquid, after being depressurized by the third expansion valve 171 from the outlet of receiver 13, enters the third heat exchanger 172, merges with the return gas from the second heat exchanger 15, and returns to compressor 11.
[0044] Circulating fluid circulation: After the circulating fluid returns from the load 24 to the second heat exchanger 15 and is cooled to the target temperature, it enters the expansion tank 21, and after being pressurized by the circulating pump 22, it enters the heater 23 and is heated to the target temperature before reaching the load 24 end.
[0045] The beneficial effects of the temperature control system 100 provided in this embodiment of the present invention include:
[0046] The temperature control system 100 of this utility model includes a refrigeration system 10 and a circulation system 20. The refrigeration system 10 includes a compressor 11, a first side of a first heat exchanger 12, a liquid receiver 13, a first expansion valve 14, and a first side of a second heat exchanger 15, all connected in series to form a main circuit. The circulation system 20 includes a second side of a second heat exchanger 15, an expansion tank 21, and a circulation pump 22, all connected in series to form a circuit. A pipe connecting the outlet of the circulation pump 22 to the second side of the second heat exchanger 15 flows through a load 24. The compressor 11 is a variable frequency compressor 11. The circulation pump 22 is a variable frequency circulation pump 22. Refrigerant flows through the refrigeration system 10. Circulating liquid flows through the circulation system 20. The mass flow rate of the refrigerant is controlled by adjusting the rotational speed of the variable frequency compressor 11, thereby regulating the amount of cooling transferred to the circulating liquid. The mass flow rate of the circulating liquid is controlled in real time by the variable frequency circulation pump 22, enabling timely response to changes in the load 24 and reducing system energy consumption. By replacing the water tank of the circulation system 20 with an expansion tank 21, the overall capacity is reduced, energy consumption is decreased, and the system can respond quickly. The temperature control system 100 of this invention can adjust the circulating fluid temperature in a timely manner when the load 24 temperature changes, thereby improving production efficiency.
[0047] The above description is only a specific embodiment of this utility model, but the protection scope of this utility model is not limited thereto. Any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this utility model should be included within the protection scope of this utility model.
Claims
1. A temperature control system (100), characterized in that, include: The refrigeration system (10) includes a compressor (11), a first side of a first heat exchanger (12), a liquid receiver (13), a first expansion valve (14), and a first side of a second heat exchanger (15) connected in series to form a main circuit. The circulation system (20) includes a second side of a second heat exchanger (15) connected in series to form a loop, an expansion tank (21) and a circulation pump (22), and a pipeline between the outlet of the circulation pump (22) and the second side of the second heat exchanger (15) flows through a load (24). The compressor (11) is a variable frequency compressor (11), and the circulating pump (22) is a variable frequency circulating pump (22).
2. The temperature control system (100) according to claim 1, characterized in that, The refrigeration system (10) also includes a heat bypass pipe (16), one end of which is connected to the outlet of the compressor (11), and the other end of which is connected to the first inlet of the second heat exchanger (15). A second expansion valve (161) is provided on the heat bypass pipe (16).
3. The temperature control system (100) according to claim 1, characterized in that, The refrigeration system (10) also includes a cold bypass pipe (17), one end of which is connected to the outlet of the liquid receiver (13), and the other end of which is connected to the inlet of the compressor (11). A third expansion valve (171) is provided on the cold bypass pipe (17).
4. The temperature control system (100) according to claim 3, characterized in that, A third heat exchanger (172) is also provided on the cold bypass pipeline (17); the outlet of the liquid reservoir (13) is connected to the inlet of the third expansion valve (171), the outlet of the third expansion valve (171) is connected to the first side inlet of the third heat exchanger (172), and the first side outlet of the third heat exchanger (172) is connected to the inlet of the compressor (11).
5. The temperature control system (100) according to claim 1, characterized in that, A heater (23) is also provided between the circulating pump (22) and the load (24), and a first temperature sensor (231) is provided between the heater (23) and the load (24).
6. The temperature control system (100) according to claim 1, characterized in that, A second temperature sensor (211) is provided between the expansion tank (21) and the circulation pump (22).
7. The temperature control system (100) according to claim 1, characterized in that, The compressor (11) is equipped with a third temperature sensor (111) and a first pressure sensor (113) at its inlet.
8. The temperature control system (100) according to claim 1, characterized in that, The compressor (11) is equipped with a fourth temperature sensor (112) and a second pressure sensor (114) at its outlet.
9. The temperature control system (100) according to claim 1, characterized in that, A fifth temperature sensor (131) is provided at the outlet of the liquid reservoir (13).
10. The temperature control system (100) according to claim 1, characterized in that, The temperature control system (100) also includes a cooling water system (30), which is connected to the second side of the first heat exchanger (12).