Test seat

Abstract

The present disclosure relates to a test socket, and more particularly, to a test socket for electrically connecting a device to be tested having a plurality of terminals to a test board of a test device. The test seat comprises a shell which is installed above the test board and is internally provided with a connecting piece used for testing; a cover coupled to the housing so as to be movable in a vertical direction; a latch device operably connected to the housing and the cover and moving with movement of the cover between a pressing position in which the device to be tested is pressed against the connector for testing and a release position in which the device to be tested can be released from the connector for testing; and a heating device mounted on the latch device and configured to raise a temperature of the device to be tested at the pressed position by contacting the device to be tested. Therefore, the temperature of the to-be-tested device can be rapidly raised by the test seat.

Description

Technical Field

[0001] This disclosure relates to a test socket for electrically connecting a test device to a device under test. Background Technology

[0002] In semiconductor device testing processes, test sockets are used to electrically connect semiconductor devices to test equipment. The test socket is mounted on the test equipment and houses the semiconductor device under test. The test socket contacts both the semiconductor device and the test equipment. The test socket transmits test signals from the test equipment to the semiconductor device and transmits response signals from the semiconductor device to the test equipment.

[0003] Burn-in testing, used for semiconductor device testing, tests the functionality of semiconductor wafers and detects abnormal operation at high temperatures. During burn-in testing, semiconductor devices operate under high temperature and high electric field conditions. Therefore, defective semiconductor devices may not withstand the harsh conditions during burn-in testing, potentially leading to defects. High-quality semiconductor devices that pass burn-in testing are guaranteed to have a long lifespan.

[0004] In existing aging test fixtures, a device (e.g., a separate high-temperature chamber) is provided for applying high temperatures, and heat generated from the device is transferred to the side of the test fixture via convection, thereby performing an aging test on the device under test. However, the method of using hot air as described above not only has the problem of taking a long time to form a test environment that reaches the desired temperature, but also has the problem of increased manufacturing costs and equipment size due to the need to prepare a separate high-temperature chamber. Utility Model Content

[0005] Technical objectives of the utility model

[0006] The technical objective of the embodiments of this disclosure is to provide a test fixture that can rapidly raise the temperature of the device under test.

[0007] means to achieve technical goals

[0008] To achieve the above objectives, a test holder according to the present disclosure is provided for electrically connecting a device under test (DUT) having multiple terminals to a test board of a test apparatus. The test holder includes: a housing mounted above the test board and having a connector for testing arranged in the housing; a cover coupled to the housing in a vertically movable manner; a latching device operably connected to the housing and the cover and movable between a pressed position and a released position as the cover moves, wherein in the pressed position the DUT is pressed against the connector for testing, and in the released position the DUT is released from the connector for testing; and a heating device mounted on the latching device and configured to raise the temperature of the DUT.

[0009] In the test fixture, the heating device can be mounted on the upper or lower surface of the latching device.

[0010] In the test fixture, the latching device may include: a latch, one end of which is rotatably connected to a cover; a pair of linkage arms connected in a linkage manner to the housing and the latch; and a pressing plate connected to the other end of the latch and in a pressed position making surface contact with the upper surface of the device under test.

[0011] The heating device can be arranged on the pressing plate in the surface direction.

[0012] In the test fixture, the heating device may include: a heating sheet, which is attached to a pressing plate and has a conductive pattern arranged on the heating sheet in a surface shape; a non-heating part, which is connected to the conductive pattern and fixedly mounted on one side of the pressing plate; and an electrical connection part, which is connected to the conductive pattern of the heating sheet and extends through the non-heating part.

[0013] In the test fixture, the non-heated part can be arranged between a pair of connecting arms.

[0014] In the test socket, the power connection may include any of the following: power connection lines, wiring, and flexible printed circuit board (FPCB).

[0015] In the test socket, a through hole may be formed in the latch to penetrate one surface and another surface of the latch, and the electrical connection portion may extend and pass through the through hole.

[0016] In the test socket, a side through hole may be formed in the side wall of the housing, and the electrical connection part may pass through the through hole and through the space between the latch and the housing and be exposed to the outside through the side through hole.

[0017] To achieve the above objectives, a test holder according to the present disclosure is provided for electrically connecting a device under test having multiple terminals to a test equipment. The test holder includes: a housing mounted above the test plate and having a connector for testing arranged in the housing; a cover coupled to the housing in a vertically movable manner; a latching device operably connected to the housing and the cover and securing the device under test such that it can be released from the connector for testing as the cover moves; and a heating device including: a heating sheet mounted on the latching device and raising the temperature of the device under test; and an electrical connection electrically connected to the heating sheet, wherein the electrical connection passes through the housing to the outside without interfering with the linkage operation between the cover and the latching device.

[0018] In the test socket, the electrical connection can be exposed to the outside through the latching device, the space in the housing, and the side perforation formed in the side wall of the housing.

[0019] To achieve the above objectives, a test holder according to the present disclosure is provided for electrically connecting a device under test (DUT) having multiple terminals to a test equipment. The test holder includes: a housing mounted above the test equipment and having a connector for testing arranged within the housing; a cover coupled to the housing in a vertically movable manner; a latching device operably connected to the housing and the cover, and moving between a pressed position and a released position as the cover moves, wherein in the pressed position the DUT is pressed against the connector for testing, and in the released position the DUT is released from the connector for testing; a heating device mounted on the latching device and configured to raise the temperature of the DUT; and a probe that applies electricity to the heating device, the probe being arranged in the housing and electrically connected to the heating device in the pressed position.

[0020] In the test fixture, the probe can be positioned in a perforation formed in the housing in the vertical direction.

[0021] In the test fixture, the heating device can be mounted on the upper or lower surface of the latching device.

[0022] In the test fixture, the latching device may include: a latch, one end of which is rotatably connected to a cover; a pair of linkage arms connected in a linkage manner to the housing and the latch; and a pressing plate connected to the other end of the latch and in a pressing position making surface contact with the upper surface of the device under test, and a heating device may be arranged on the pressing plate in the surface direction.

[0023] In the test fixture, the heating device may include: a heating sheet, which is attached to a pressing plate and has a conductive pattern arranged in a surface shape on the heating sheet; and a connecting terminal, which is connected to the conductive pattern on the heating sheet and can be electrically connected to a probe.

[0024] In the test socket, the connection terminals can be arranged adjacent to the heating sheet.

[0025] In the test socket, the probe can electrically connect the connection terminals of the heating device to the power supply of the test board.

[0026] In the test socket, the probe can electrically connect the heating device to the power supply in the pressed position and disconnect the electrical connection in the released position.

[0027] Effects of the utility model

[0028] The advantage of this disclosure is that by arranging a heating device on the latching device that presses the device under test and heating the device under test, the test holder itself can raise the temperature of the device under test, thereby rapidly increasing the temperature.

[0029] The advantage of this disclosure is that it can raise the temperature of the device under test without the need for a separate heating chamber, thereby simplifying the structure and reducing costs. Attached Figure Description

[0030] Figure 1 This is a perspective view of a test stand according to an embodiment of the present disclosure.

[0031] Figure 2 yes Figure 1 The test socket shown is a front view.

[0032] Figure 3 yes Figure 1 The side view of the test stand shown.

[0033] Figure 4 yes Figure 1 The test stand is shown in plan view.

[0034] Figure 5 yes Figure 1 The rear view of the test fixture shown.

[0035] Figure 6 Show Figure 1 The heating device of the test stand shown.

[0036] Figure 7 Show Figure 1 The latching device of the test seat shown.

[0037] Figure 8 and Figure 9 Show Figure 1 The test stand is shown in its operating state.

[0038] Figure 10 and Figure 11 This is a perspective view of a test stand according to another embodiment of the present disclosure.

[0039] Figure 12 and Figure 13 This is a perspective view of a test stand according to another embodiment of the present disclosure.

[0040] Figure 14 It is along Figure 12 The cross-sectional view of the test fixture taken by line XIV-XIV is shown. Detailed Implementation

[0041] The embodiments provided in this disclosure are intended to illustrate the scope of the technical ideas of this disclosure. The scope of this disclosure is not limited to the embodiments provided below or the detailed description of the embodiments.

[0042] Unless otherwise defined, all terms used herein (including technical or scientific terms) have the same meaning as commonly understood by one of ordinary skill in the art to which this disclosure is applicable. Terms defined in common dictionaries are interpreted as having a meaning that matches the meaning in the context of the relevant art, and should not be interpreted as ideal or overly formal unless explicitly defined otherwise.

[0043] It should be recognized that, unless mentioned in phrases or sentences containing the terms “comprising,” “including,” and “having,” these terms as used herein are specifically intended to be interpreted as open-ended technical terms that may include another embodiment.

[0044] Unless they have a clearly distinct meaning in the context, expressions used for the singular also cover expressions for the plural, and this applies in the same way to any singular expression stated in the claims.

[0045] In this specification, terms such as “first” and “second” are used only to distinguish multiple components, but the order or importance of the components is not limited by these terms.

[0046] In this specification, when a component is "connected" or "connected" to another component, the component is in direct contact with or directly connected to the other component, or is in contact with or connected to the other component through at least one of the other components.

[0047] In this specification, the direction indicator "Up" is based on the direction in which the test mount is positioned relative to the test plate, and the direction indicator "Down" means the opposite direction to "Up". In this specification, the direction indicator "Vertical" includes both the upward and downward directions, but it should be understood that this does not represent a specific direction between the upward and downward directions.

[0048] The embodiments are described with reference to the examples shown in the accompanying drawings. In the drawings, the same or similar components are assigned the same reference numerals. Furthermore, in the description of the embodiments, repeated descriptions of the same or similar components may be omitted. However, the omission of a description of a component does not mean that such a component is not included in any embodiment.

[0049] The examples shown in the following embodiments and accompanying drawings relate to a test socket for making an electrical connection between a test device and a device under test (DUT). The test socket of the embodiments can be used to make an electrical connection between the test device and the DUT during testing. As an example, the test socket of the embodiments can be used for aging tests of the DUT during the post-processing stage of the manufacturing process of the DUT. According to the aging test, thermal stress at a high temperature of approximately 80°C to 125°C is applied to the DUT. During the aging test, since the DUT operates under conditions of high temperature and high electric field, DUTs that cannot withstand the test conditions of the aging test will develop defects. Therefore, aging tests can be used to detect DUTs that may have initial defects. Examples of tests applied to the test socket of the embodiments are not limited to the aging tests described above.

[0050] According to an embodiment, a test socket is arranged between a test apparatus and a device under test (DUT). For testing the DUT, the test socket contacts each of the test apparatus and the DUT to electrically connect them. The test socket accommodates the DUT and positions it within the test apparatus. The test apparatus performs the test on the DUT via the test socket.

[0051] The device under test (DUT) may be a semiconductor package, but this disclosure is not limited thereto. A semiconductor package is obtained by encapsulating a semiconductor integrated circuit (IC) wafer, multiple lead frames, and multiple terminals into a cuboid shape using a resin material. The semiconductor IC wafer may be a memory IC wafer or a non-memory IC wafer. Pins, solder balls, etc., may be used as terminals. The DUT includes multiple hemispherical terminals on its underside.

[0052] The testing equipment can be configured to perform aging tests on the device under test. The testing equipment has a test plate on which test sockets are mounted. The test plate can output electrical test signals and may include multiple terminals capable of receiving response signals. The terminals of the device under test are electrically connected to the corresponding terminals of the test plate via the test sockets. In other words, when the test sockets electrically connect the terminals of the device under test to the corresponding terminals of the test plate in the vertical direction VD, electrical test signals and response signals are transmitted between the terminals of the device under test and the terminals of the test plate.

[0053] Reference Figures 1 to 7 The examples shown illustrate embodiments of the test socket. Figure 1 This is a perspective view of the test stand according to the embodiment, and Figures 2 to 5 These are the front view, side view, plan view, and rear view of the test stand. Figure 6 It is a three-dimensional view of the heating device used in the test fixture, and Figure 7 The latching device in which a heating element is installed is shown.

[0054] The test fixture 10 of this embodiment includes a housing 20, a cover 30, a latching device 40, a heating device 50, and a connector 60 for testing. The test fixture 10 of this embodiment is an assembly of the above-mentioned components and can be detachably mounted on the test plate of the testing equipment.

[0055] The housing 20 is mounted on the test plate and a connector 60 for testing is arranged in the housing 20.

[0056] The housing 20 may be configured to house the connector 60 and latching device 40 used for testing. The housing 20 serves as a structure for supporting the cover 30 and latching device 40. The housing 20 has a rectangular frame shape. The lower surface of the housing 20 may be in surface contact with the upper surface of the test plate.

[0057] The housing 20 includes a mating protrusion 21 that projects downward from the lower surface of the housing 20 at each corner. When the mating protrusion 21 is inserted into a mating hole (not shown) on the test plate, the test seat 10 can be positioned on the test plate.

[0058] A guide recess 22 is formed in the side surface of the housing 20 in a first horizontal direction. The guide recess 22 extends in the vertical direction, and the sliding arm 32 of the cover 30 is inserted into the guide recess 22. Specifically, the guide recesses 22 are arranged in pairs to face each other in the first horizontal direction orthogonal to the second horizontal direction. The guide recesses 22 in each side surface are recessed into the interior of the housing 20, and two guide recesses are arranged separately from each other along the second horizontal direction. When the sliding arm 32 is guided along the guide recess 22, the cover 30 can move in the vertical direction.

[0059] Within the housing 20, a pair of latch receiving portions 23 are provided on a side surface located in a second horizontal direction orthogonal to the first horizontal direction. The latch receiving portions 23 are formed as holes penetrating the housing 20 in the vertical direction VD. A pair of latching operating arms 33 of the cover 30 are accommodated in the latch receiving portions 23, and a portion of the latching device 40 is also accommodated in the latch receiving portions 23.

[0060] In the housing 20, a side perforation 24 is formed at the center of the side surface in the second horizontal direction, passing through the inner and outer surfaces of the housing 20, and the power connection portion 53 extends to the outside through the side perforation 24.

[0061] A spring hole 25 is formed at each corner in the upper surface of the housing 20. A compression spring 34 for applying an elastic bias to the cover 30 in the upward direction is inserted into the spring hole 25, and the spring hole 25 is formed at the four corner positions.

[0062] The cover 30 is coupled to the housing 20 so as to be movable in the vertical direction. Specifically, the cover 30 is coupled to the housing 20 so as to be movable in the vertical direction VD and to operate the latching device 40. The cover 30 has a rectangular frame shape similar to that of the housing 20. The cover 30 has the same external dimensions as the housing 20. Therefore, neither the side surface of the cover 30 nor the side surface of the housing 20 protrudes relative to the other.

[0063] The cover 30 includes a device passage portion 31. The device passage portion 31 is formed as an opening extending in the vertical direction VD. The device to be tested 70 can be received on or removed from the connector 60 for testing through the device passage portion 31.

[0064] The cover 30 includes sliding arms 32 projecting downward from each of the opposing lower edges of the cover 30 in a first horizontal direction HD1. The sliding arms 32 are formed to fill a guide recess 22 in the housing 20, and slide along the guide recess 22 in a vertical direction VD. Specifically, the cover 30 is movable relative to the housing 20 in a vertical direction through the sliding coupling between the sliding arms 32 and the guide recess 22.

[0065] The cover 30 includes latching arms 33 projecting downward from each of their opposing lower edges in a second horizontal direction HD2. Each of the latching arms 33 is inserted into a latch receiving portion 23 of the housing 20 and moves vertically within the latch receiving portion 23 according to the vertical movement of the cover 30. A shaft hole is formed by penetrating each of the latching arms 33 in the first horizontal direction. A portion of the latching device 40 engages with the shaft hole.

[0066] The latching device 40 is operably connected to the housing 20 and the cover 30 as the cover 30 moves, and is movable between a pressed position and a released position, in which the device under test 70 is pressed against the connector 60 used for testing, and in the released position, the device under test 70 can be released from the connector 60 used for testing.

[0067] The latching device 40, which operably connects the housing 20 and the cover 30, cooperates with the operation of the housing 20 and the cover 30, and performs the operation of releasably fixing the connector 60 used for testing.

[0068] The latching device 40 is configured to press the device under test 70 toward the connector 60 for testing as the cover 30 moves upward, and to release the pressure on the device under test 70 as the cover 30 moves downward.

[0069] In one embodiment, the test stand 10 includes two latching devices as latching devices 40, and these latching devices 40 are arranged symmetrically. The latching device 40 includes a latch 41, a linkage arm 42, a pressing plate 43, a first linkage shaft 44, a second linkage shaft 45, a third linkage shaft 46, and a fourth linkage shaft 47.

[0070] The latch 41 contacts the device under test 70 to press or release the pressure on the device under test 70 toward the connector 60 used for testing. The latch 41 includes an operating part 411 to which a rotational force is applied and a pressing part 412 to which a pressing force is applied with the rotational force. The operating part 411 is located above the latch receiving part 23 of the housing 20. The operating part 411 is pivotally connected to each of the latch operating arms 33 of the cover 30 via a third link shaft 46. A through hole 41a is formed in the operating part 411, penetrating one surface and the other surface of the operating part 411 in a vertical direction, and the electrical connection part 53 passes through the through hole 41a.

[0071] The pressing part 412 is bent relative to the operating part 411. The pressing part 412 is connected to the pressing plate 43 at its free end via the fourth link shaft 47. A protruding piece is formed at the free end of the pressing part 412 for pressing and supporting the pressing plate 43 in the pressing position.

[0072] Link arm 42 connects latch 41 to housing 20. The upper end of link arm 42 is rotatably connected to latch 41 via second link shaft 45, and the lower end of link arm 42 is rotatably connected to housing 20 via first link shaft 44. First link shaft 44 and second link shaft 45 pass through link arm 42 and latch 41 respectively in a first horizontal direction HD1.

[0073] Therefore, the operating portion 411 of the latch 41 is located within the latch receiving portion 23 by being supported on the second link shaft 45 and the link arm 42. Furthermore, the third link shaft 46 is coupled in the first horizontal direction HD1 to a hole formed in each of the latch operating arms 33 of the cover 30. Thus, the operating portion 411 of the latch 41 is located within the latch receiving portion 23 by being connected to each of the latch operating arms 33 of the cover 30 via the third link shaft 46.

[0074] The pressing plate 43 is connected to the pressing portion 412 of the latch 41 via the fourth link shaft 47. The pressing plate 43 has a cuboid shape and includes an inwardly recessed coupling recess formed in its upper portion so that the front end of the pressing portion 412 of the latch 41 is received in the coupling recess. The lower surface of the pressing plate 43 has an approximately flat planar shape and presses the device under test 70 at a fixed position so that the device under test 70 can make close contact with the connector 60 used for testing.

[0075] The housing 20 is fixed. The first linkage shaft 44 coupled to the housing 20 does not move in the vertical direction and supports the operating part 411 of the latch 41. Therefore, the latch 41 can be rotated via the first linkage shaft 44. The cover 30 is coupled to the housing 20 in a manner movable in the vertical direction VD, and the operating part 411 of the latch 41 is connected to the cover 30 via the third linkage shaft 46. The third linkage shaft 46 is the point at which the cover 30 applies a rotational force to the latch 41. When the cover 30 moves upward, the third linkage shaft 46 moves upward, and the operating part 411 of the latch 41 rotates upward about the second linkage shaft 45. After the above rotation, the pressing part 412 of the latch 41 rotates downward toward the center of the housing 20 and can press the device under test 70 against the connector 60 for testing using the pressing plate 43.

[0076] When the cover 30 moves downward, the third linkage shaft 46 moves downward. Therefore, the operating portion 411 of the latch 41 rotates downward about the second linkage shaft 45 toward the outside of the housing 20. After this rotation, the pressing portion 412 of the latch 41 rotates upward toward the outside of the housing 20 to release the pressure on the device 70 to be tested. Thus, according to the embodiment, when the cover 30 moves upward, the latch 41 of the latching device 40 can press the device 70 to be tested against the connector 60 used for testing, and when the cover 30 moves downward, the latch 41 can release the pressure on the device 70 to be tested.

[0077] The heating device 50 is mounted on the latching device 40 to contact the device under test 70 in the pressed position and to raise the temperature of the device under test 70.

[0078] The heating device 50, which is installed on the lower surface of the pressing plate 43 of the latching device 40, can contact the upper surface of the device under test 70 when the pressing plate 43 presses the device under test 70, and raise the temperature of the device under test 70.

[0079] The heating device 50 includes a heating sheet 51, a non-heating part 52, and an electrical connection part 53.

[0080] The heating sheet 51 is where a conductive pattern is formed on one surface of a support sheet made of thermoplastic resin.

[0081] Polyimide-based resins, vinyl-based resins, acrylic-based resins, polyolefin-based resins, thermoplastic polyester-based resins, polyvinyl chloride, polycarbonate, acrylonitrile-butadiene-styrene (ABS) resins, and similar resins can be used, or materials containing two or more of the above materials can be used as the thermoplastic resin sheet forming the support sheet. Specifically, polyimide-based resins with mechanical strength, chemical resistance, weather resistance, heat resistance, insulation, and low permittivity can be used. Double-sided adhesive used to attach the support sheet to the pressing plate 43 is attached to one surface of the support sheet.

[0082] Conductive patterns can be formed by printing with conductive ink (e.g., paste) or by etching metal foil (e.g., copper foil). When forming conductive patterns, forming conductive lines with a circular cross-section of a specific diameter using a specific pattern can facilitate the use of a continuous line shape to form the heater section, lead section, and connection terminal section.

[0083] When a conductive pattern is formed in a conductive wire, the conductive wire may include at least a metal wire, and more specifically, the metal wire is covered with a self-bonding insulating layer. For example, metal wires including copper, iron, gold, copper-nickel, nickel-chromium, iron-nickel-chromium, and similar metals may be used, or other conductive materials may be used as the metal wire. In terms of resistivity, durability, and cost, copper or copper alloys containing zinc, lead, tin, silver, aluminum, nickel, beryllium, zirconium, and similar metals may be used alone or in combination as the metal wire.

[0084] The non-heating part 52 is arranged in a pair of linkage arms 42 and fixedly disposed on one side of the pressing plate 43. The non-heating part 52 is finished with Kapton tape and the electrical connection part 53 connected to the conductive pattern is housed in the non-heating part 52.

[0085] One end of the power connection portion 53 is electrically connected to a conductive pattern and passes through the through hole 41a of the latch 41 and the side through hole 24 of the housing 20 to be exposed to the outside by being supported by the non-heating portion 52 and connected to a specific power source. The power connection portion 53 may include a power connection wire.

[0086] In order not to prevent the operation of the linkage between the latching device 40 and the cover 30 during operation and not to interfere with the operation of the linkage, the power connection part 53 passes through the through hole 41a of the latch 41, the space between the latch 41 and the housing 20, and the side through hole 24 of the housing 20 and is exposed to the outside.

[0087] The connector 60 for testing is housed in the housing 20 and has a lower end that contacts the test plate of the test equipment 80 and an upper end that contacts the terminal 71 of the device under test 70, and includes a plurality of elastic conductive parts 61 and a plurality of insulating parts 62.

[0088] The connector 60 used for testing may primarily comprise an elastic polymer material, and may be elastic in both the vertical direction VD and the horizontal direction HD. When an external force is applied downward in the vertical direction VD to the connector 60 used for testing, the connector 60 used for testing can elastically deform in both the downward and horizontal directions HD. When the latching device 40 presses the device under test 70 toward the connector 60 used for testing, an external force is generated. Due to the external force, the terminals 71 of the device under test 70 and the connector 60 used for testing can come into contact with each other in the vertical direction VD. When the external force is removed, the connector 60 used for testing can return to its original shape.

[0089] The connector 60 for testing includes a resilient conductive portion 61, which contacts the terminal 71 of the device under test 70 in the vertical direction VD relative to the test plate for electrical connection. The resilient conductive portion 61 contacts the terminal 71 of the device under test 70 at its upper end and contacts the pad of the test plate at its lower end. Therefore, the resilient conductive portion 61 provides vertical conductivity between the pad and the terminal 71. Thus, test signals from the test equipment can be transmitted from the test plate to the device under test 70 via the resilient conductive portion 61, and response signals from the device under test 70 can be transmitted from the terminal 71 to the test plate via the resilient conductive portion 61.

[0090] In an embodiment, the connector 60 for testing includes an insulating portion 62 that separates and insulates the elastic conductive portions 61 from each other in the horizontal direction HD. The insulating portion 62 may form a rectangular elastic region for the connector 60 for testing. Each elastic conductive portion 61 is equally or unevenly separated and insulated by the insulating portion 62 in the horizontal direction HD. The insulating portions 62 are formed as an elastomer, and the elastic conductive portions 61 are engaged in the insulating portion 62 in the thickness direction (vertical direction VD). The insulating portion 62, formed as an elastomer, maintains the elastic conductive portions 61 in their original shape. The insulating portion 62 comprises an elastic polymer material and is elastic in both the vertical direction VD and the horizontal direction HD.

[0091] In detail, the insulating portion 62 may comprise a cured polysiloxane rubber material. For example, liquid polysiloxane rubber is injected into a forming mold for forming the connector 60 for testing and then cured, thus forming the insulating portion 62. Addition-type liquid polysiloxane rubber, condensation-type liquid polysiloxane rubber, liquid polysiloxane rubber containing vinyl or hydroxyl groups, and similar materials can be used as the liquid polysiloxane rubber for forming the insulating portion 62. As a detailed example, the liquid polysiloxane rubber material may include dimethyl polysiloxane rubber, methyl vinyl polysiloxane rubber, methyl phenyl vinyl polysiloxane rubber, and similar materials. Furthermore, as the polysiloxane rubber material for the insulating portion 62, a polysiloxane rubber material with excellent heat resistance can be used in the test holder 10 of the embodiment applied to aging tests.

[0092] The elastic conductive portion 61 includes a plurality of conductive metal particles that are in conductive contact with each other in the vertical direction VD. The conductive metal particles can be formed by coating the surface of a core particle with a highly conductive metal. The core particle may include a metallic material (e.g., iron, nickel, cobalt, and similar metals) or an elastic resin material. Gold, silver, rhodium, platinum, chromium, and similar metals can be used as the highly conductive metal coated on the surface of the core particle. The conductive metal particles that are in contact and conductive in the vertical direction form the conductive path of the elastic conductive portion 61. As an example, the conductive metal particles can be maintained in the shape of the elastic conductive portion 61 by using an elastic polymer material for forming the insulating portion 62.

[0093] Although the conductive rubber sheet is used as an example of the connector 60 for testing in the above embodiments, this disclosure is not limited to this, and structures capable of elastic and flexible conductive connections (e.g., spring pins) may be employed.

[0094] The test fixture 10 of this disclosure shall be operated as follows.

[0095] After the device under test 70, which requires electrical testing, is placed inside, the latching device 40 is moved to the release position by pressing down on the cover 30. Then, the device under test 70 is moved into the interior of the housing 20 so that it is positioned on the upper surface of the connector 60 for testing. When the device under test 70 is placed on the connector 60 for testing, the pressure on the cover 30 is released, and thus the cover 30 moves upward. During this process, the latching device 40 moves to the pressed position. When the latching device 40 is in the pressed position, the lower surface of the pressing plate 43 presses against the upper surface of the device under test 70. Simultaneously, the heating device 50, which is attached to the lower surface of the pressing plate 43, contacts the upper surface of the device under test 70. The heating device 50 can be preheated or heated after contact with the device under test 70, and the temperature of the device under test 70 can rise rapidly due to the heating of the heating device 50.

[0096] After heating the device under test 70 to a high temperature of approximately 80°C to 125°C, a specific electrical signal is applied to the test equipment 80 to perform an aging test.

[0097] The test stand 10 disclosed herein does not require a separate high-temperature chamber to simplify its structure, and the test device 70 can be rapidly heated when its temperature is increased by directly applying high-temperature heating to it.

[0098] In the above embodiments, the heating device 50 is mounted on the lower surface of the latching device 40 so that the heating device 50, which directly contacts the upper surface of the device under test 70, heats the device under test 70. However, this disclosure is not limited to this. In detail, the heating device 50 is mounted on the upper surface of the latching device 40 and can transfer heat to the device under test 70 without directly contacting it. Furthermore, the heating device 50 is not limited to being mounted on the pressing plate 43, and can be mounted at various positions on the latching device 40 to heat the device under test 70.

[0099] Furthermore, although the power connection portion 53 is a power connection line in the above embodiments, this disclosure is not limited to this, and wiring can be used, and as... Figure 10 and Figure 11 The diagram shows the use of flexible printed circuit boards (FPCBs).

[0100] When FPCB53a is used as the power connection part 53, one end of FPCB53a is connected to the connector 81 of the test board 80, and the other end of FPCB53a is connected to the heating device 50. When connected to the heating device 50, FPCB53a passes through the through hole of the latch 41 and protrudes to the outside of the housing 20, and has an end that is detachably coupled to the connector 81 of the test board 80.

[0101] When using FPCB53a as the power connection part 53, FPCB53a is advantageous in terms of durability compared to ordinary wiring. When using wiring as the power connection part 53, the wiring is advantageous in terms of design due to its thinness, but there is a possibility of breakage during latching operation due to uneven bending. Since the FPCB, which is configured to bend in a direction perpendicular to the surface direction, has a constant bending direction, the possibility of breakage is low.

[0102] However, the FPCB53a has limitations in its use because the through-hole for penetrating the latch is larger than the wiring size, and the connectors for connecting to the test board are wider. Therefore, designers should use electrical connections appropriately suited to the operating conditions.

[0103] Figures 12 to 14A test fixture according to another embodiment of the present disclosure is shown. In the above embodiment, instead of using a power connection wire, a probe is used as a method for supplying power to the heating device 50'. For reference, since the cover, latching device, etc., are the same as those in the above embodiment, only the differences will be described.

[0104] In another embodiment of the test fixture according to this disclosure, a probe 26' electrically connected to a heating device 50' and used to supply power to the heating device 50' in a pressed position is provided in the housing 20'. The probe 26' is mounted vertically in a through-hole formed in the housing 20', and the upper end of the probe 26' protrudes from the housing 20'. The upper part of the upwardly protruding probe 26' can contact the connection terminal 54' of the heating device 50'.

[0105] The probe 26' has a cylindrical body in which a spring is provided and a needle member is mounted on the upper end of the spring. At least a portion of the needle member is inserted into the cylinder, and another portion of the needle member protrudes to the outside of the cylinder, with the lower portion of the needle member supported by the spring. When the contact terminal of the heating device 50' is contacted, the needle member protruding from the probe 26' toward the housing 20' is inserted into the interior of the cylinder by the spring force, thereby achieving a flexible connection.

[0106] The lower part of the probe 26' is electrically connected to the power supply section of the test board 80'.

[0107] The heating device 50' includes a heating sheet 51' and a connecting terminal 54'. In this state, the heating sheet 51' is arranged on one side of the rear surface of the pressing plate 43', and the conductive pattern is arranged in a surface shape. However, the position of the heating sheet 51' is not limited to this, and it can be located on the upper surface of the pressing plate 43' or at other positions of the latching device 40'.

[0108] A connecting terminal 54' is disposed on the edge of the other side of the rear surface of the pressing plate 43' and can be positioned corresponding to the probe 26' to contact the probe 26' in the pressing position. The connecting terminal 54' is connected to the conductive pattern of the heating sheet 51' and contains a conductive metal material. When the pressing plate 43' is inserted into the housing 20' in the pressing position, the pressing plate 43' contacts the probe 26', and when power is applied through the probe 26', the power is transferred to the conductive pattern to heat the pressing plate 43'.

[0109] According to another embodiment of this disclosure, the test fixture operates as follows. When the device to be tested is placed on the connector for testing, the pressure on the cover 30' is removed, and thus the cover 30' rises. During this process, the latching device 40' moves to the pressing position. When the latching device 40' is in the pressing position, the lower surface of the pressing plate 43' presses down on the device to be tested. Simultaneously, the connecting terminal 54' contacts the probe 26', and during this process, electricity is applied through the probe 26', and the electricity is transferred to the heating sheet 51' via the connecting terminal 54'. Therefore, heat is generated in the heating sheet 51', allowing the device to be tested to be heated quickly.

[0110] Subsequently, when the cover is pressed after the electrical test is completed, the latching device moves to the released position. During this process, the pressing plate 43' rotates upward to the outside of the housing. Simultaneously, the contact terminal releases from contact with the probe 26', thus stopping the heating operation of the heating sheet 51'.

[0111] The above techniques, which use probes instead of wiring, can avoid problems such as wiring disconnection during frequent testing, thus enabling stable operation.

[0112] Although this disclosure has been specifically shown and described with reference to preferred embodiments using specific terminology, the embodiments and terminology should be considered descriptive in nature and not for limiting purposes. Therefore, those skilled in the art will understand that various changes in form and detail may be made herein without departing from the spirit and scope of this disclosure as defined by the following claims.

Claims

1. A test socket for electrically connecting a device under test having multiple terminals to a test board of a test apparatus, the test socket comprising: A housing is mounted above the test plate and has connecting parts for testing arranged within the housing; The cover is coupled to the housing in a vertically movable manner; A latching device is operably connected to the housing and the cover, and moves between a pressed position and a released position as the cover moves. In the pressed position, the device under test is pressed against the connector for testing, and in the released position, the device under test can be released from the connector for testing. The latching device includes a latch, a pair of linkage arms, and a pressing plate. One end of the latch is rotatably connected to the cover, the linkage arms are connected to the housing and the latch in a linkage manner, and the pressing plate is connected to the other end of the latch and makes surface contact with the upper surface of the device under test in the pressed position. as well as A heating device is mounted on the latching device and configured to raise the temperature of the device under test, and the heating device is arranged on the pressing plate in the surface direction.

2. The test fixture according to claim 1, wherein the heating device is mounted on the upper or lower surface of the latching device.

3. The test fixture according to claim 1, wherein the heating device comprises: A heating sheet is attached to the pressing plate and has a conductive pattern arranged on the heating sheet in a surface shape. The non-heating part is connected to the conductive pattern and fixedly disposed on one side of the pressing plate; as well as An electrical connection portion is connected to the conductive pattern of the heating sheet and extends through the non-heating portion.

4. The test fixture according to claim 3, wherein the non-heated portion is arranged between the pair of connecting arms.

5. The test socket according to claim 3, wherein the power connection includes any one of a power connection line, wiring, and a flexible printed circuit board (FPCB).

6. The test socket according to claim 3, wherein a through hole is formed in the latch to penetrate one surface and another surface of the latch, and the electrical connection extends through the through hole.

7. The test fixture according to claim 6, wherein a side through hole is formed in the side wall of the housing, and the electrical connection passes through the through hole and through the space between the latch and the housing and is exposed to the outside via the side through hole.

8. A test socket for electrically connecting a device under test having multiple terminals to a test board of a test apparatus, the test socket comprising: A housing is mounted above the test plate and has connecting parts for testing arranged within the housing; The cover is coupled to the housing in a vertically movable manner; A latching device, operably connected to the housing and the cover, secures the device under test such that it can be released from the connector used for testing as the cover moves; as well as The heating device includes: a heating sheet mounted on the latching device and raising the temperature of the device under test; And an electrical connection part, electrically connected to the heating sheet, The electrical connection passes through the housing to the outside without interfering with the linkage operation between the cover and the latching device.

9. The test socket of claim 8, wherein the electrical connection extends through the latching device, the space in the housing, and a side perforation formed in the side wall of the housing to expose to the outside.

10. A test socket for electrically connecting a device under test having multiple terminals to a test board of a test apparatus, the test socket comprising: A housing is mounted above the test plate and has connecting parts for testing arranged within the housing; The cover is coupled to the housing in a vertically movable manner; A latching device is operably connected to the housing and the cover, and moves between a pressed position and a released position as the cover moves. In the pressed position, the device under test is pressed against the connector for testing, and in the released position, the device under test can be released from the connector for testing. The latching device includes a latch, a pair of linkage arms, and a pressing plate. One end of the latch is rotatably connected to the cover, the linkage arms are connected to the housing and the latch in a linkage manner, and the pressing plate is connected to the other end of the latch and makes surface contact with the upper surface of the device under test in the pressed position. A heating device is mounted on the latching device and configured to raise the temperature of the device under test, and the heating device is arranged on the pressing plate in the surface direction; as well as A probe applies power to the heating device, the probe being disposed in the housing and electrically connected to the heating device at the pressing position.

11. The test fixture of claim 10, wherein the probe is disposed in a perforation formed in the housing in the vertical direction.

12. The test fixture according to claim 10, wherein the heating device is mounted on the upper or lower surface of the latching device.

13. The test fixture according to claim 10, wherein the heating device comprises: A heating sheet is attached to the pressing plate and has a conductive pattern arranged on the heating sheet in a surface shape. as well as The connection terminal is connected to the conductive pattern of the heating sheet and can be electrically connected to the probe.

14. The test fixture of claim 13, wherein the connection terminals are arranged adjacent to the heating sheet.

15. The test fixture according to claim 13, wherein the probe electrically connects the connection terminal of the heating device to the power supply of the test board.

16. The test stand according to claim 10, wherein the probe electrically connects the heating device to the power supply in the pressed position and disconnects the electrical connection in the released position.

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