Positioning-adjustable micro-nano optical gluing suction cup

Abstract

The utility model discloses a positioning-adjustable micro-nano optical gluing suction cup, which belongs to the technical field of micro-nano optical processing and comprises a suction cup main body, a positioning groove is formed in the top of the suction cup main body, a vacuum adsorption groove is formed in the center of the top of the suction cup main body, and a locking assembly is inserted into the suction cup main body through the positioning groove. A substrate is attached to the top of the suction cup body. According to the positioning-adjustable micro-nano optical gluing suction cup, a substrate can be limited in the center of the top of the suction cup body by adjusting the position of the locking assembly in the positioning groove, the vacuum adsorption groove is formed in the top of the suction cup body to be attached to the substrate, and the substrate can be adsorbed and fixed through the vacuum adsorption groove; according to the suction cup, the base plate is fixed to the center of the top of the suction cup body, so that the base plates of different sizes can be limited and fixed through adjustment of the locking assembly, the stability of the base plates can be improved through the vacuum adsorption groove and the locking assembly, and the gluing uniformity and stability can be improved.

Description

Technical Field

[0001] This utility model belongs to the field of micro-nano optical processing technology, specifically, it relates to a micro-nano optical adhesive-coated suction cup with adjustable positioning. Background Technology

[0002] In the field of micro-nano optical processing, photoresist coating is an essential step, which places higher demands on the uniformity of the photoresist and the coating yield.

[0003] Currently, spin coating has the advantages of simplest equipment, convenient operation, and small amount of photoresist used. However, for heavier substrates, rectangular substrates, irregular substrates, etc., the substrate is often prone to deviating from the center and rotating in an elliptical trajectory during the coating process, resulting in poor uniformity and stability of the substrate coating.

[0004] To address the aforementioned issues, this application proposes a micro / nano optical adhesive-coated chuck with adjustable positioning. Utility Model Content

[0005] To address the problems in related technologies, this utility model proposes a micro / nano optical adhesive-coated suction cup with adjustable positioning to overcome the aforementioned technical problems existing in the prior art.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] An adjustable micro / nano optical adhesive-coating suction cup includes a suction cup body. A positioning groove is formed on the top of the suction cup body, and a vacuum adsorption groove is formed at the center of the top of the suction cup body. A locking assembly is inserted into the positioning groove of the suction cup body. A substrate is attached to the top of the suction cup body. The locking assembly includes a positioning post inserted inside the positioning groove. A fixing block is fixedly connected to the top of the positioning post. A shrinkage groove is formed on the side of the fixing block closest to the substrate. A first spring is fixedly connected to the fixing block through the shrinkage groove. A positioning plate is fixedly connected to the end of the first spring away from the fixing block.

[0008] Preferably, a telescopic column is fixedly connected to the side of the positioning plate near the fixing block, and a telescopic groove is provided inside the fixing block.

[0009] Preferably, an adjusting column is fixedly connected to the bottom of the positioning column, and an adjusting groove is provided on the side of the adjusting column away from the positioning column.

[0010] Preferably, a mounting frame is fixedly connected to the bottom of the suction cup body, a limiting groove is provided at the bottom of the mounting frame, a second spring is fixedly connected to the bottom of the adjusting column, and a limiting plate is fixedly connected to the end of the second spring away from the adjusting column.

[0011] Preferably, a limit ring is fixedly connected to the end of the telescopic column away from the positioning plate.

[0012] Preferably, the bottom of the suction cup body is fixedly connected to a mounting base, and the suction cup body is made of aluminum alloy.

[0013] In summary, the technical effects and advantages of this utility model are as follows: This adjustable micro-nano optical coating suction cup, by adjusting the position of the locking component inside the positioning groove, allows the substrate to be limited to the top center of the suction cup body. A vacuum adsorption groove is provided on the top of the suction cup body to adhere to the substrate, allowing the substrate to be adsorbed and fixed at the top center of the suction cup body. Thus, by adjusting the locking component, substrates of different sizes can be limited and fixed. Furthermore, the vacuum adsorption groove and locking component improve the stability of the substrate, thereby enhancing the uniformity and stability of the coating. Attached Figure Description

[0014] Figure 1 This is a three-dimensional structural diagram of the present invention;

[0015] Figure 2 This is a schematic diagram of the vacuum adsorption tank and related structures of this utility model;

[0016] Figure 3 This is a schematic diagram of the limiting plate and related structures of this utility model;

[0017] Figure 4 This is a schematic diagram of the telescopic column and its related structures of this utility model.

[0018] In the diagram: 1. Suction cup body; 2. Positioning groove; 3. Vacuum adsorption groove; 4. Locking assembly; 401. Positioning post; 402. Fixing block; 403. Shrinkage groove; 404. First spring; 405. Positioning plate; 406. Telescopic post; 407. Limiting ring; 408. Telescopic groove; 409. Adjusting post; 410. Adjusting groove; 411. Second spring; 412. Limiting plate; 413. Mounting frame; 414. Limiting groove; 5. Base plate; 6. Mounting seat. Detailed Implementation

[0019] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0020] Reference Figure 1-4A micro / nano optical adhesive-coating suction cup with adjustable positioning includes a suction cup body 1. A positioning groove 2 is formed on the top of the suction cup body 1, and a vacuum adsorption groove 3 is formed at the center of the top of the suction cup body 1. A locking assembly 4 is inserted into the suction cup body 1 through the positioning groove 2. A substrate 5 is attached to the top of the suction cup body 1. The locking assembly 4 includes a positioning post 401 inserted inside the positioning groove 2. A fixing block 402 is fixedly connected to the top of the positioning post 401. A shrinkage groove 403 is formed on the side of the fixing block 402 near the substrate 5. A first spring 404 is fixedly connected to the fixing block 402 through the shrinkage groove 403. The first spring 404 is located away from the substrate 5. One end of the fixed block 402 is fixedly connected to the positioning plate 405. By adjusting the position of the positioning post 401 inside the positioning groove 2, the fixed block 402, the first spring 404 and the positioning plate 405 set on the top of the positioning post 401 limit and fix the substrate 5 from four directions, preventing the substrate 5 from shifting during the rotation coating. The vacuum adsorption groove 3 set at the bottom of the suction cup body 1 can adsorb the substrate 5, fixing the substrate 5 to the top of the suction cup body 1, thereby effectively preventing the substrate 5 from falling off during the rotation coating, thus improving the uniformity of the adhesive coating and increasing the success rate of the adhesive coating.

[0021] Reference Figure 4 A telescopic column 406 is fixedly connected to the side of the positioning plate 405 near the fixing block 402. The fixing block 402 has a telescopic groove 408 inside. By telescopically moving the telescopic column 406 inside the telescopic groove 408, the telescopic column 406 can limit the positioning plate 405 and prevent the positioning plate 405 from shifting when it squeezes and limits the substrate 5, so that the positioning plate 405 has a better limiting effect on the substrate 5.

[0022] Reference Figure 3-4 An adjusting column 409 is fixedly connected to the bottom of the positioning column 401. An adjusting groove 410 is provided on the side of the adjusting column 409 away from the positioning column 401. The adjusting column 409 installed at the bottom of the positioning column 401 limits the position inside the positioning groove 2. The adjusting groove 410 on the outer wall of the adjusting column 409 is adapted to the inside of the positioning groove 2, so that the adjusting column 409 can slide inside the positioning groove 2 through the adjusting groove 410. By pulling the positioning column 401, the positioning column 401 is disengaged from the position of the positioning groove 2, and the adjusting column 409 adjusts the position of the locking component 4 through the adjusting groove 410, thereby better limiting the position of the substrate 5.

[0023] Reference Figure 3A mounting frame 413 is fixedly connected to the bottom of the suction cup body 1. A limiting groove 414 is opened at the bottom of the mounting frame 413. A second spring 411 is fixedly connected to the bottom of the adjusting column 409. A limiting plate 412 is fixedly connected to the end of the second spring 411 away from the adjusting column 409. The limiting plate 412 is limited by the limiting groove 414 opened inside the mounting frame 413 at the bottom of the suction cup body 1. The adjusting column 409 and the second spring 411 are connected and fixed by the second spring 411, so that the second spring 411 can pull the adjusting column 409, so that the positioning column 401 can be fixed inside the positioning groove 2. This can prevent the positioning column 401 from loosening and affecting the fixing effect on the substrate 5.

[0024] Reference Figure 4 A limiting ring 407 is fixedly connected to the end of the telescopic column 406 away from the positioning plate 405. The limiting ring 407 installed at the end of the telescopic column 406 away from the positioning plate 405 is adapted to the inner side wall of the telescopic groove 408, so that the limiting ring 407 can limit the telescopic column 406, thereby keeping the positioning plate 405 stable. By limiting the limiting plate 412 inside the limiting groove 414, the limiting plate 412 can move inside the limiting groove 414, thereby limiting the positioning column 401 and preventing the positioning column 401 from leaving the inside of the positioning groove 2.

[0025] Reference Figure 1-2 The bottom of the suction cup body 1 is fixedly connected to the mounting base 6. The suction cup body 1 is made of aluminum alloy. The mounting base 6 at the bottom of the suction cup body 1 can be used to install the driving device, so that the driving device can drive the suction cup body 1 to rotate, thereby rotating and coating the substrate 5 on the top of the suction cup body 1, making the coating of the substrate 5 more uniform. The suction cup body 1 made of aluminum alloy can improve the service life of the device.

[0026] Working principle: By pulling the positioning column 401, the positioning column 401 drives the adjusting column 409 to move upward, causing the adjusting groove 410 to move inside the positioning groove 2. This allows the position of the positioning column 401 inside the positioning groove 2 to be adjusted. After adjustment, the second spring 411 drives the positioning column 401 into the positioning groove 2 for limiting. By placing the substrate 5 on the top of the suction cup body 1, the positioning plates 405 installed on the top of the positioning columns 401 around the perimeter clamp and limit the substrate 5. The vacuum adsorption groove 3 on the top of the suction cup body 1 adsorbs and fixes the substrate 5, allowing the substrate 5 to rotate and be coated with the suction cup body 1, which helps to improve the uniformity and stability of the coating.

[0027] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A micro / nano optical coating chuck with adjustable positioning, comprising a chuck body (1), characterized in that, The suction cup body (1) has a positioning groove (2) on its top and a vacuum adsorption groove (3) at the center of its top. The suction cup body (1) has a locking assembly (4) inserted through the positioning groove (2). The suction cup body (1) has a substrate (5) attached to its top. The locking assembly (4) includes a positioning post (401) inserted inside the positioning groove (2). The top of the positioning post (401) is fixedly connected to a fixing block (402). The fixing block (402) has a shrinkage groove (403) on the side near the substrate (5). The fixing block (402) is fixedly connected to a first spring (404) through the shrinkage groove (403). The end of the first spring (404) away from the fixing block (402) is fixedly connected to a positioning plate (405).

2. The micro / nano optical coating chuck with adjustable positioning according to claim 1, characterized in that, The positioning plate (405) is fixedly connected to a telescopic column (406) on the side near the fixing block (402), and the fixing block (402) has a telescopic groove (408) inside.

3. The micro / nano optical adhesive-coated chuck with adjustable positioning according to claim 1, characterized in that, An adjusting column (409) is fixedly connected to the bottom of the positioning column (401), and an adjusting groove (410) is provided on the side of the adjusting column (409) away from the positioning column (401).

4. The micro / nano optical coating chuck with adjustable positioning according to claim 3, characterized in that, The bottom of the suction cup body (1) is fixedly connected to an installation frame (413), and a limit groove (414) is opened at the bottom of the installation frame (413). The bottom of the adjustment column (409) is fixedly connected to a second spring (411), and a limit plate (412) is fixedly connected to one end of the second spring (411) away from the adjustment column (409).

5. The micro / nano optical adhesive-coated chuck with adjustable positioning according to claim 2, characterized in that, The end of the telescopic column (406) away from the positioning plate (405) is fixedly connected to a limit ring (407).

6. The micro / nano optical coating chuck with adjustable positioning according to claim 1, characterized in that, The bottom of the suction cup body (1) is fixedly connected to a mounting base (6), and the suction cup body (1) is made of aluminum alloy.

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